MEMS based tunable antenna for wireless reception and transmission
    1.
    发明授权
    MEMS based tunable antenna for wireless reception and transmission 有权
    基于MEMS的可调谐天线,用于无线接收和传输

    公开(公告)号:US07167135B2

    公开(公告)日:2007-01-23

    申请号:US10877456

    申请日:2004-06-25

    IPC分类号: H01Q9/00

    摘要: An antenna for a wireless device may be kept dynamically tuned to a desired center frequency to compensate for detuning which may be caused by environmental influences. A sensor provides a feedback signal to a controller to select an appropriate capacitance value from a variable capacitor to tune the antenna for the wireless device. The variable capacitor may comprise a plurality of fixed capacitors and MEMS switches arranged in parallel or may comprise a variable MEMS capacitor having a fixed lower plate and a flexible upper plate.

    摘要翻译: 可以将用于无线设备的天线保持动态地调谐到期望的中心频率以补偿可能由环境影响引起的失谐。 传感器向控制器提供反馈信号以从可变电容器选择适当的电容值,以调谐无线设备的天线。 可变电容器可以包括并联布置的多个固定电容器和MEMS开关,或者可以包括具有固定下板和柔性上板的可变MEMS电容器。

    MEMS based tunable antena for wireless reception and transmission
    2.
    发明申请
    MEMS based tunable antena for wireless reception and transmission 有权
    用于无线接收和传输的基于MEMS的可调谐电话

    公开(公告)号:US20050057399A1

    公开(公告)日:2005-03-17

    申请号:US10877456

    申请日:2004-06-25

    IPC分类号: H01Q9/04 H01Q1/38 H01Q9/00

    摘要: An antenna for a wireless device may be kept dynamically tuned to a desired center frequency to compensate for detuning which may be caused by environmental influences. A sensor provides a feedback signal to a controller to select an appropriate capacitance value from a variable capacitor to tune the antenna for the wireless device. The variable capacitor may comprise a plurality of fixed capacitors and MEMS switches arranged in parallel or may comprise a variable MEMS capacitor having a fixed lower plate and a flexible upper plate.

    摘要翻译: 可以将用于无线设备的天线保持动态地调谐到期望的中心频率以补偿可能由环境影响引起的失谐。 传感器向控制器提供反馈信号以从可变电容器选择适当的电容值,以调谐无线设备的天线。 可变电容器可以包括并联布置的多个固定电容器和MEMS开关,或者可以包括具有固定下板和柔性上板的可变MEMS电容器。

    Semiconductor substrate with interconnections and embedded circuit elements
    4.
    发明申请
    Semiconductor substrate with interconnections and embedded circuit elements 有权
    具有互连和嵌入式电路元件的半导体衬底

    公开(公告)号:US20050218509A1

    公开(公告)日:2005-10-06

    申请号:US10816264

    申请日:2004-03-31

    IPC分类号: H01L21/48 H01L23/48 H01L25/16

    摘要: A semiconductor substrate integrated with interconnections and circuit components. A silicon backplane is processed with silicon processing to provide electrical connectivity for circuit elements. In one embodiment functional circuit elements, e.g., MEMS, switches, filters, are integrated on the silicon backplane. In one embodiment the function circuit elements are monolithically processed into the silicon backplane. In one embodiment the silicon backplane includes interconnections for integrated circuits on different substrates to be bonded to the silicon backplane.

    摘要翻译: 与互连和电路组件集成的半导体衬底。 用硅处理处理硅背板,为电路元件提供电连接。 在一个实施例中,诸如MEMS,开关,滤波器的功能电路元件集成在硅背板上。 在一个实施例中,功能电路元件被单片处理成硅背板。 在一个实施例中,硅背板包括用于不同衬底上的用于结合到硅背板的集成电路的互连。

    Ferroelectric layer with domains stabilized by strain
    7.
    发明授权
    Ferroelectric layer with domains stabilized by strain 有权
    具有由菌株稳定的结构域的铁电层

    公开(公告)号:US07867786B2

    公开(公告)日:2011-01-11

    申请号:US11958826

    申请日:2007-12-18

    IPC分类号: H01L21/00 H01L21/02

    摘要: The present invention describes a method including: providing a substrate; forming an underlying layer over the substrate; heating the substrate; forming a ferroelectric layer over the underlying layer, the ferroelectric layer having a thickness below a critical thickness, the underlying layer having a smaller lattice constant than the ferroelectric layer; cooling the substrate to room temperature; and inducing a compressive strain in the ferroelectric layer.

    摘要翻译: 本发明描述了一种方法,包括:提供衬底; 在衬底上形成下层; 加热基板; 在所述下层上形成铁电层,所述铁电层的厚度低于临界厚度,所述下层具有比所述铁电层更小的晶格常数; 将基板冷却至室温; 并在铁电层中产生压应变。

    Data storage medium, data storage device containing same, and method of manufacturing data storage device containing same
    8.
    发明申请
    Data storage medium, data storage device containing same, and method of manufacturing data storage device containing same 有权
    数据存储介质,包含该数据存储介质的数据存储装置,以及包含该数据存储介质的数据存储装置的制造方法

    公开(公告)号:US20090323506A1

    公开(公告)日:2009-12-31

    申请号:US12215992

    申请日:2008-06-30

    IPC分类号: G11B9/00 G11B3/70

    CPC分类号: G11B9/02 G11B9/065

    摘要: A data storage medium includes a piezoelectric film (101) having a surface (111) including a halogen. In one embodiment, the halogen exists in an atomic concentration of at least approximately 10 percent. The result is a hydrophobic surface conducive to long-lasting scanning probe tips, low contamination, and stable surface charge. A data storage device incorporating the data storage medium includes an enclosure (205) containing the data storage medium and an adjacent scanning probe (230) wherein the enclosure has a relative humidity of at least approximately 40 percent and at least a portion of the scanning probe is coated with a layer of water.

    摘要翻译: 数据存储介质包括具有包括卤素的表面(111)的压电膜(101)。 在一个实施方案中,卤素以至少约10%的原子浓度存在。 其结果是疏水性表面有利于长时间的扫描探针尖端,低污染和稳定的表面电荷。 结合数据存储介质的数据存储设备包括容纳数据存储介质的外壳(205)和相邻的扫描探针(230),其中外壳具有至少大约40%的相对湿度和扫描探针的至少一部分 涂有一层水。

    Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA)
    9.
    发明授权
    Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA) 失效
    硅微加工超灵敏振动光谱传感器阵列(VSSA)

    公开(公告)号:US07559242B2

    公开(公告)日:2009-07-14

    申请号:US11097059

    申请日:2005-03-31

    IPC分类号: G01D21/00

    CPC分类号: G01H1/00

    摘要: An apparatus comprising a substrate and an array of vibration sensors formed on the substrate, the array comprising two or more vibration sensors, wherein each vibration sensor in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. A process comprising forming an array of vibration sensors on a substrate, the array comprising two or more vibration sensors, wherein each of the two or more vibration sensors in the array has a different noise floor and a different operational frequency range than any of the other vibration sensors in the array. Other embodiments are disclosed and claimed.

    摘要翻译: 一种包括衬底和形成在衬底上的振动传感器阵列的装置,该阵列包括两个或更多个振动传感器,其中阵列中的每个振动传感器具有与任何其它振动传感器不同的本底噪声和不同的工作频率范围 在阵列中。 一种方法,包括在衬底上形成振动传感器阵列,所述阵列包括两个或更多个振动传感器,其中所述阵列中的所述两个或更多个振动传感器中的每一个具有不同于其他噪声的基底和不同的工作频率范围 阵列中的振动传感器。 公开和要求保护其他实施例。

    Probe based patterning of microelectronic and micromechanical devices
    10.
    发明申请
    Probe based patterning of microelectronic and micromechanical devices 有权
    微电子和微机械器件的基于探针的图案化

    公开(公告)号:US20080074126A1

    公开(公告)日:2008-03-27

    申请号:US11528785

    申请日:2006-09-27

    申请人: Valluri Rao

    发明人: Valluri Rao

    IPC分类号: G01R31/02

    摘要: Patterning of microelectronic and micromechanical devices is described using probes. In one example, a plurality of probe tips are driven into a processing layer of a substrate. The probe tips are carried by movable sleds. The sleds are moved to write patterns into the processing layer using the probes, and the processing layer is processed to form features on the substrate.

    摘要翻译: 使用探针描述微电子和微机械器件的图案化。 在一个示例中,多个探针尖端被驱动到衬底的处理层中。 探头尖端由可动滑板承载。 使用探针将滑板移动到将图案写入处理层中,并且处理层被处理以在基板上形成特征。