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公开(公告)号：US09401293B2
公开(公告)日：2016-07-26
申请号：US13330881
申请日：2011-12-20
IPC分类号： B24B49/12 , B24B37/10 , B24B37/30 , B24B37/013 , H01L21/67 , H01L21/687 , B24B37/04 , B24B37/005
CPC分类号： B24B37/26 , B24B37/005 , B24B37/013 , B24B37/04 , B24B37/042 , B24B37/10 , B24B49/12 , H01L21/31053 , H01L21/67075 , H01L21/67092 , H01L21/67253 , H01L21/68721 , H01L22/26
摘要： A polishing apparatus for polishing a substrate includes a polishing table holding a polishing pad, a top ring configured to press the substrate against the polishing pad, and first and second optical heads each configured to apply the light to the substrate and to receive reflected light from the substrate. The polishing apparatus also includes spectroscopes each configured to measure at each wavelength an intensity of the reflected light received, and a processor configured to produce a spectrum indicating a relationship between intensity and wavelength of the reflected light. The first optical head is arranged so as to face a center of the substrate, and the second optical head is arranged so as to face a peripheral portion of the substrate.
摘要翻译： 用于抛光基板的抛光装置包括：保持抛光垫的抛光台，被配置为将基板压靠在抛光垫上的顶环;以及第一和第二光学头，每个被配置为将光施加到基板并且接收来自 底物。 抛光装置还包括分别被配置成在每个波长处测量接收到的反射光的强度，以及处理器，被配置为产生指示反射光的强度和波长之间的关系的光谱。 第一光学头被布置为面对基板的中心，并且第二光学头被布置成面对基板的周边部分。
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公开(公告)号：US20120164917A1
公开(公告)日：2012-06-28
申请号：US13330881
申请日：2011-12-20
IPC分类号： B24B49/00
CPC分类号： B24B37/26 , B24B37/005 , B24B37/013 , B24B37/04 , B24B37/042 , B24B37/10 , B24B49/12 , H01L21/31053 , H01L21/67075 , H01L21/67092 , H01L21/67253 , H01L21/68721 , H01L22/26
摘要： A polishing apparatus for polishing a substrate is provided. The polishing apparatus includes: a polishing table holding a polishing pad; a top ring configured to press the substrate against the polishing pad; first and second optical heads each configured to apply the light to the substrate and to receive reflected light from the substrate; spectroscopes each configured to measure at each wavelength an intensity of the reflected light received; and a processor configured to produce a spectrum indicating a relationship between intensity and wavelength of the reflected light. The first optical head is arranged so as to face a center of the substrate, and the second optical head is arranged so as to face a peripheral portion of the substrate.
摘要翻译： 提供了用于研磨衬底的抛光装置。 抛光装置包括：抛光台，其保持抛光垫; 顶环，构造成将衬底压靠在抛光垫上; 第一和第二光学头，每个被配置为将光施加到衬底并且接收来自衬底的反射光; 每个光谱分别被配置成在每个波长处测量接收到的反射光的强度; 以及处理器，被配置为产生指示反射光的强度和波长之间的关系的光谱。 第一光学头被布置为面对基板的中心，并且第二光学头被布置成面对基板的周边部分。
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3.发明申请Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method and apparatus for selecting wavelength of light for polishing endpoint detection, polishing endpoint detection method, polishing endpoint detection apparatus, and polishing monitoring method 有权用于选择用于抛光终点检测的光的波长的图的制作方法，用于选择用于抛光终点检测的光的波长的选择方法和装置，抛光终点检测方法，抛光终点检测装置和抛光监测方法公开(公告)号：US20100093260A1
公开(公告)日：2010-04-15
申请号：US12461533
申请日：2009-08-14
IPC分类号： B24B49/12
CPC分类号： B24B49/12 , B24B37/013
摘要： A method of producing a diagram for use in selecting wavelengths of light in optical polishing end point detection is provided. The method includes polishing a surface of a substrate having a film by a polishing pad; applying light to the surface of the substrate and receiving reflected light from the substrate during the polishing of the substrate; calculating relative reflectances of the reflected light at respective wavelengths; determining wavelengths of the reflected light which indicate a local maximum point and a local minimum point of the relative reflectances which vary with a polishing time; identifying a point of time when the wavelengths, indicating the local maximum point and the local minimum point, are determined; and plotting coordinates, specified by the wavelengths and the point of time corresponding to the wavelengths, onto a coordinate system having coordinate axes indicating wavelength of the light and polishing time.
摘要翻译： 提供了一种制造用于选择光学抛光终点检测中的光的波长的图的方法。 该方法包括通过抛光垫抛光具有膜的基板的表面; 在基板的研磨过程中将光施加到基板的表面并接收来自基板的反射光; 计算各波长的反射光的相对反射率; 确定反射光的波长，其指示随抛光时间变化的相对反射率的局部最大点和局部最小点; 识别指示表示局部最大点和局部最小点的波长的时间点; 并且将由波长相对应的波长和时间点指定的坐标绘制到具有指示光的波长和抛光时间的坐标轴的坐标系上。
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公开(公告)号：US20080231376A1
公开(公告)日：2008-09-25
申请号：US11724015
申请日：2007-03-14
IPC分类号： H03L7/00
CPC分类号： H03L7/0995 , H03K3/0322 , H03L7/0998
摘要： A ring oscillation circuit composed of multiple op amps connected in series in a loop configuration is included to output a first output signal by adding multiple output signals of multiple op amps and to output a second output signal by adding all remaining output signals of multiple op amps.
摘要翻译： 包括以环路配置串联连接的多个运算放大器组成的环形振荡电路，通过添加多个运算放大器的多个输出信号来输出第一输出信号，并通过加上多个运算放大器的所有剩余输出信号来输出第二输出信号 。
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5.发明授权Communication terminal device, information providing device, and cellular telephone system 有权通信终端设备，信息提供设备和蜂窝电话系统公开(公告)号：US07392058B2
公开(公告)日：2008-06-24
申请号：US11118380
申请日：2005-05-02
申请人： Jun Hirota , Masaki Kinoshita
发明人： Jun Hirota , Masaki Kinoshita
IPC分类号： H04M1/00
CPC分类号： H04L65/604 , H04L29/06027 , H04L65/4092 , H04L65/608 , H04M1/0214 , H04M2250/16 , H04N21/2543 , H04N21/41407 , H04N21/4312 , H04N21/4314 , H04N21/4882 , H04N21/6581 , H04N21/8133
摘要： A communication terminal device includes a first display part configured to display streaming sub information, a second display part configured to display streaming main information related to the streaming sub information, a sub information reception unit configured to receive the streaming sub information sequentially transmitted from an information providing device and to display the received streaming sub information on the first display part, a request transmission unit configured to transmit to the information providing device an information request signal for requesting the streaming main information related to the streaming sub information displayed on the first display part, and a main information reception unit configured to receive the streaming main information and to display the streaming main information on the second display part.
摘要翻译： 一种通信终端装置，具备：第一显示部，被配置为显示流媒体子信息;第二显示部，被配置为显示与所述流媒体子信息相关的流媒体主信息;子信息接收部，被配置为接收从信息顺序发送的流式传输子信息 提供设备并在第一显示部分上显示所接收的流式传输子信息;请求传输单元，被配置为向信息提供设备发送信息请求信号，用于请求与第一显示部分上显示的流式传输子信息相关的传输主要信息 以及主信息接收单元，被配置为接收流式主信息并在第二显示部分上显示流主要信息。
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公开(公告)号：US20070076815A1
公开(公告)日：2007-04-05
申请号：US11528874
申请日：2006-09-28
IPC分类号： H04L25/49
CPC分类号： H03G3/3036
摘要： A front-end processing circuit applies predetermined processing to an input signal and outputs a processed signal. A frequency modulation circuit applies frequency modulation to the output signal of the front-end processing circuit and outputs a processed signal. The front-end processing circuit includes a variable amplifier and a level detector. The variable amplifier receives a feedback signal and amplifies a signal by an amplification factor corresponding to the feedback signal. The level detector outputs the feedback signal to the variable amplifier in accordance with a level of a signal obtainable in a circuit succeeding the variable amplifier. The front-end processing circuit maintains the signal supplied to the frequency modulation circuit at a constant level.
摘要翻译： 前端处理电路对输入信号进行预定处理并输出处理后的信号。 频率调制电路对前端处理电路的输出信号进行频率调制，并输出处理后的信号。 前端处理电路包括可变放大器和电平检测器。 可变放大器接收反馈信号并且通过与反馈信号对应的放大系数来放大信号。 电平检测器根据在可变放大器之后的电路中可获得的信号的电平将反馈信号输出到可变放大器。 前端处理电路将提供给频率调制电路的信号保持在恒定水平。
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公开(公告)号：US20070030439A1
公开(公告)日：2007-02-08
申请号：US11546985
申请日：2006-10-13
申请人： Masaki Kinoshita , Kenji Kawamata , Satoru Yamanaka , Hiroyuki Kurisu , Tatsuya Miyazaki , Yasushi Kawata
发明人： Masaki Kinoshita , Kenji Kawamata , Satoru Yamanaka , Hiroyuki Kurisu , Tatsuya Miyazaki , Yasushi Kawata
IPC分类号： G02F1/1333
CPC分类号： G02F1/133528 , G02F1/133305 , G02F1/13394 , G02F2001/13356 , H01L27/3244 , H01L51/524 , H01L51/5281 , H01L2251/5338 , H01L2251/558
摘要： A display apparatus with a plurality of display pixel sections includes glass substrate, which are formed to have a thickness that permits bending of the display apparatus, and polarizer plates, which are disposed on the glass substrates, respectively. The polarizer plates are thicker than the glass substrates.
摘要翻译： 具有多个显示像素部分的显示装置包括分别形成为具有允许显示装置弯曲的厚度的玻璃基板和设置在玻璃基板上的偏振片。 偏光板比玻璃基板厚。
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公开(公告)号：US08009835B2
公开(公告)日：2011-08-30
申请号：US11528874
申请日：2006-09-28
CPC分类号： H03G3/3036
摘要： A front-end processing circuit applies predetermined processing to an input signal and outputs a processed signal. A frequency modulation circuit applies frequency modulation to the output signal of the front-end processing circuit and outputs a processed signal. The front-end processing circuit includes a variable amplifier and a level detector. The variable amplifier receives a feedback signal and amplifies a signal by an amplification factor corresponding to the feedback signal. The level detector outputs the feedback signal to the variable amplifier in accordance with a level of a signal obtainable in a circuit succeeding the variable amplifier. The front-end processing circuit maintains the signal supplied to the frequency modulation circuit at a constant level.
摘要翻译： 前端处理电路对输入信号进行预定处理并输出处理后的信号。 频率调制电路对前端处理电路的输出信号进行频率调制，并输出处理后的信号。 前端处理电路包括可变放大器和电平检测器。 可变放大器接收反馈信号并且通过与反馈信号对应的放大系数来放大信号。 电平检测器根据在可变放大器之后的电路中可获得的信号的电平将反馈信号输出到可变放大器。 前端处理电路将提供给频率调制电路的信号保持在恒定水平。
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公开(公告)号：US07663587B2
公开(公告)日：2010-02-16
申请号：US11468659
申请日：2006-08-30
申请人： Yoshitaka Yamada , Ryoichi Watanabe , Masaki Kinoshita , Yoshihiro Watanabe , Sadayasu Fujibayashi , Norihiro Yoshida
发明人： Yoshitaka Yamada , Ryoichi Watanabe , Masaki Kinoshita , Yoshihiro Watanabe , Sadayasu Fujibayashi , Norihiro Yoshida
IPC分类号： G09G3/36
CPC分类号： G09G3/3648 , G02F1/1393 , G09G3/2007 , G09G2320/0271 , G09G2320/0285 , G09G2320/068 , G09G2330/021 , G09G2360/16
摘要： A liquid crystal display device has a gradation display function of at least an n-number of gray levels and has a viewing angle characteristic of Mi/Mj≦1.3 in a case where a display luminance range in a normal direction to a display surface in a gradation range of predetermined gray levels i to j is Li to Lj and a display luminance range in an oblique viewing-angle direction of 30° or more is Mi to Mj (where n, i and j are real numbers, and n≧i>j≧0). The liquid crystal display device has a display mode in which a display image is displayed with a display luminance range of the display image being limited to Li to Lj.
摘要翻译： 液晶显示装置具有至少n个灰度级的灰度显示功能，并且在与显示面的法线方向的显示亮度范围的情况下具有Mi / Mj <= 1.3的视角特性 预定灰度i至j的灰度范围为Li至Lj，并且在30度或更大的倾斜视角方向上的显示亮度范围为Mi至Mj（其中n，i和j为实数，n> = i> j> = 0）。 液晶显示装置具有显示模式，其中显示图像被显示，显示图像的显示亮度范围被限制为Li至Lj。
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公开(公告)号：US07463297B2
公开(公告)日：2008-12-09
申请号：US10998836
申请日：2004-11-30
申请人： Masahiro Yoshida , Takashi Nakamura , Hirotaka Hayashi , Norio Tada , Jun Hirota , Masaki Kinoshita
发明人： Masahiro Yoshida , Takashi Nakamura , Hirotaka Hayashi , Norio Tada , Jun Hirota , Masaki Kinoshita
IPC分类号： H04N5/335
CPC分类号： H01L27/146 , G09G3/3648
摘要： To enable acquisition of image data in multiple tone levels in a short capturing time, a liquid crystal display device 1 includes a photodiode having sensitivity R, a capacitor having capacitance C and configured to store a charge in response to an electric signal converted by the photodiode in a state where an initial voltage V is applied thereto, a SRAM configured to retain binary data which indicate as to whether or not an amount of charge stored in the capacitor is equal to or above a threshold voltage Vth, an image capturing control unit 5 configured to generate pixel data in multiple tone levels based on the binary data outputted from the SRAM of a plurality of adjacent pixels. Here, at least any one value of R, V, C, and Vth in each of the pixels is set to a different value from relevant values of other adjacent pixels.
摘要翻译： 为了在短的拍摄时间内以多个色调级别获取图像数据，液晶显示装置1包括具有灵敏度R的光电二极管，具有电容C的电容器，并且被配置为响应于由光电二极管转换的电信号而存储电荷 在施加初始电压V的状态下，配置为保持表示存储在电容器中的电荷量是否等于或高于阈值电压Vth的二进制数据的SRAM，图像捕获控制单元5 被配置为基于从多个相邻像素的SRAM输出的二进制数据生成多个音调电平的像素数据。 这里，每个像素中的R，V，C和Vth中的至少任何一个值被设置为与其它相邻像素的相关值不同的值。
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