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公开(公告)号：US06533832B2
公开(公告)日：2003-03-18
申请号：US09105060
申请日：1998-06-26
IPC分类号： C09G104
CPC分类号： C09K3/1463 , C09G1/02 , H01L21/3212
摘要： An aqueous chemical mechanical polishing slurry useful for polishing the polysilicon layer of a semiconductor wafer comprising an aqueous solution of at least one abrasive, and at least one alcoholamine. The slurry preferably has a pH of from about 9.0 to about 10.5 and it includes an optional buffering agent.
摘要翻译： 一种用于抛光半导体晶片的多晶硅层的水性化学机械抛光浆料，其包含至少一种研磨剂的水溶液和至少一种醇胺。 浆料优选具有约9.0至约10.5的pH，并且其包含任选的缓冲剂。
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2.发明授权公开(公告)号：US07617733B2
公开(公告)日：2009-11-17
申请号：US11779677
申请日：2007-07-18
IPC分类号： G01N29/00
CPC分类号： G01N29/262 , G01N29/041 , G01N2291/0423 , G01N2291/265 , G01N2291/2696
摘要： An automated scanning system and method, utilizing specialized dual phased array ultrasonic transducers for producing and detecting Rayleigh waves in ceramic bearing balls are provided for nondestructive, non-contact inspection of ceramic bearing balls. The phased array ultrasonic transducer utilizes a complex curvature configuration that enables the dual phased array ultrasonic transducers to focus ultrasonic energy onto the ball to optimally generate and receive Rayleigh wave signals in the spherical objects.
摘要翻译： 提供陶瓷轴承球的非破坏性，非接触式检测的自动扫描系统和方法，利用专用的双相相位阵列超声波换能器来生产和检测陶瓷轴承滚珠中的瑞利波。 相控阵超声波换能器利用复杂的曲率配置，使得双相相位阵列超声波换能器将超声能量聚焦到球上，以最佳地生成和接收球形物体中的瑞利波信号。
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公开(公告)号：US07198549B2
公开(公告)日：2007-04-03
申请号：US10869605
申请日：2004-06-16
IPC分类号： B24B1/00
摘要： A chemical-mechanical polishing pad, and method of polishing a substrate using a polishing pad, comprising (a) a resilient subpad, and (b) a polymeric polishing film substantially coextensive with the resilient subpad, wherein the polymeric polishing film comprises (i) a polishing surface that is substantially free of bound abrasive particles, and (ii) a back surface releasably associated with the resilient subpad.
摘要翻译： 一种化学机械抛光垫，以及使用抛光垫抛光衬底的方法，包括：（a）弹性子垫，和（b）与所述弹性子垫基本共同延伸的聚合物抛光膜，其中所述聚合物抛光膜包括（i） 基本上没有结合的磨料颗粒的抛光表面，和（ii）可释放地与弹性子垫相关联的背面。
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公开(公告)号：US06929983B2
公开(公告)日：2005-08-16
申请号：US10675417
申请日：2003-09-30
IPC分类号： H01L29/739 , H01L29/88 , H01L45/00 , H01L21/335 , H01L21/8232
CPC分类号： H01L29/88 , H01L29/7391 , H01L29/7606 , H01L45/00
摘要： A current-controlling device comprising a first conductor, a second conductor, and a tunneling barrier comprising a first insulating layer between the first conductor and the second conductor. The tunneling barrier electrically isolates the first conductor from the second conductor. At least one mobile charge is positionable within the tunneling barrier. The device also includes a gate, wherein a voltage applied to the gate with respect to the substrate (or with respect to a second gate formed on or in the substrate) modulates or moves the mobile charge to a position between the first conductor and the second conductor within the tunneling barrier, thus deforming the shape of the energy barrier between the first conductor and the second conductor. The deformation can cause a current to flow between the conductors when a voltage is present between them due to quantum mechanical tunneling.
摘要翻译： 一种电流控制装置，包括第一导体，第二导体和隧道势垒，其包括在第一导体和第二导体之间的第一绝缘层。 隧道势垒将第一导体与第二导体电隔离。 至少一个移动电荷可定位在隧道屏障内。 该器件还包括栅极，其中相对于衬底（或相对于形成在衬底上或衬底中的第二栅极）施加到栅极的电压将移动电荷调制或移动到第一导体和第二导体之间的位置 导体，从而使第一导体和第二导体之间的能量势垒的形状变形。 由于量子力学隧穿，当它们之间存在电压时，变形可导致导体之间的电流流动。
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5.发明申请公开(公告)号：US20090019937A1
公开(公告)日：2009-01-22
申请号：US11779677
申请日：2007-07-18
IPC分类号： G01N29/00
CPC分类号： G01N29/262 , G01N29/041 , G01N2291/0423 , G01N2291/265 , G01N2291/2696
摘要： An automated scanning system and method, utilizing specialized dual phased array ultrasonic transducers for producing and detecting Rayleigh waves in ceramic bearing balls are provided for nondestructive, non-contact inspection of ceramic bearing balls. The phased array ultrasonic transducer utilizes a complex curvature configuration that enables the dual phased array ultrasonic transducers to focus ultrasonic energy onto the ball to optimally generate and receive Rayleigh wave signals in the spherical objects.
摘要翻译： 提供陶瓷轴承球的非破坏性，非接触式检测的自动扫描系统和方法，利用专用的双相相位阵列超声波换能器来生产和检测陶瓷轴承滚珠中的瑞利波。 相控阵超声波换能器利用复杂的曲率配置，使得双相相位阵列超声波换能器将超声能量聚焦到球上，以最佳地生成和接收球形物体中的瑞利波信号。
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公开(公告)号：US07091604B2
公开(公告)日：2006-08-15
申请号：US10861007
申请日：2004-06-04
IPC分类号： H01L23/34
CPC分类号： H01L23/473 , H01L21/4882 , H01L21/76898 , H01L25/0657 , H01L25/50 , H01L2225/06513 , H01L2225/06524 , H01L2225/06541 , H01L2225/06582 , H01L2225/06589 , H01L2225/06593 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： A three-dimensional integrated circuit that provides reduced interconnect signal delay over known 2-dimensional systems. The three-dimensional integrated circuit also allows improved circuit cooling. The three-dimensional integrated circuit includes two or more electrically connected integrated circuits, separated by a cooling channel.
摘要翻译： 一种三维集成电路，可在已知的二维系统上提供缩短的互连信号延迟。 三维集成电路还可以改善电路冷却。 三维集成电路包括由冷却通道隔开的两个或更多个电连接的集成电路。
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