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公开(公告)号:US20230259032A1
公开(公告)日:2023-08-17
申请号:US18138873
申请日:2023-04-25
Applicant: JSR CORPORATION
Inventor: Miki TAMADA , Ryo KUMEGAWA , Hiroyuki KOMATSU , Motohiro SHIRATANI , Ken MARUYAMA , Sosuke OSAWA
IPC: G03F7/11 , C08F112/08 , C08F120/14 , C09D125/06 , C09D133/12
CPC classification number: G03F7/11 , C08F112/08 , C08F120/14 , C09D125/06 , C09D133/12 , C08F2810/40
Abstract: A composition includes: at least one polymer represented by formula (1), formula (2), or both; and a solvent. A1 and A2 are each independently a structural unit having 2 or more carbon atoms; a plurality of A's are the same or different and a plurality of A2s are the same or different; n1 and n2 are each independently an integer of 2 to 500; R1, R2, and R3 are each independently an organic group having 1 or more carbon atoms, or R1 and R2 taken together represent a ring together with X1, Y1, and P; R1 and R2 are the same or different; X1, Y1, and Y2 are each independently a single bond, —O—, or —NR4—; R4 is an organic group having 1 or more carbon atoms; and Z1 and Z2 are each independently hydrogen or an organic group having 1 to 15 carbon atoms.
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公开(公告)号:US20230027151A1
公开(公告)日:2023-01-26
申请号:US17847228
申请日:2022-06-23
Applicant: JSR CORPORATION
Inventor: Ryo KUMEGAWA , Sosuke Osawa , Miki Tamada , Ken Maruyama , Motohiro Shiratani
Abstract: A method for producing a film includes: coating a surface of a substrate with a composition containing a polymer having a structural unit represented by formula (1) and having a number average molecular weight of 13000 or more and a solvent, heating a coating film formed by the coating, and removing, with a rinsing liquid, a part of the coating film after the heating, wherein the rinsing liquid to be used contains a basic compound. In the formula (1), Y1 is a single bond, —CO—NR2—, a divalent aromatic ring group, a divalent group containing —O—, or a divalent group containing —CO—NR2—. A1 is a single bond, —O—, —S—, or —NR3—. R1 is a hydrogen atom, a monovalent hydrocarbon group, a monovalent halogenated hydrocarbon group, or a monovalent group having a heterocyclic structure.
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公开(公告)号:US20230203229A1
公开(公告)日:2023-06-29
申请号:US18108108
申请日:2023-02-10
Applicant: JSR CORPORATION
Inventor: Miki TAMADA , Ryo KUMEGAWA , Motohiro SHIRATANI , Hiroyuki KOMATSU , Ken MARUYAMA , Sosuke OSAWA
IPC: C08F297/02 , G03F7/00 , G03F7/075
CPC classification number: C08F297/026 , G03F7/0035 , G03F7/0757 , C08F2810/40
Abstract: A composition includes a polymer (1) having a partial structure represented by formula (1), and a solvent. X is a hydrogen atom, a halogen atom, a hydroxyl group, an alkyl group having 1 to 5 carbon atoms, a hydroxyalkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Y is a monovalent organic group having 1 to 12 carbon atoms and containing a hetero atom or a monovalent inorganic acid group. Z is a linking group represented by —O—, —S—, or —NR—, where R is an organic group having 1 to 20 carbon atoms. R1 and R2 are each independently a hydrogen atom, a halogen atom, or an organic group having 1 to 20 carbon atoms, or the like.
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公开(公告)号:US20210189553A1
公开(公告)日:2021-06-24
申请号:US17196006
申请日:2021-03-09
Applicant: JSR CORPORATION
Inventor: Hiroyuki KOMATSU , Miki TAMADA , Ryo KUMEGAWA , Tatsuya SAKAI
IPC: C23C16/06 , B05D1/00 , C23C16/455
Abstract: A method of producing a substrate includes: applying a composition on a metal basal plate to form a coating film; and forming a metal-containing layer on at least a part of the coating film. The composition contains a solvent, and a polymer having a first terminal structure and a second terminal structure in a single molecule. Each of the first terminal structure and the second terminal structure is at least one selected from the group consisting of a structure represented by formula (1) and a structure represented by formula (2). A1 and A2 each independently represent a monovalent group having a functional group capable of forming a chemical bond with a metal atom. L2 represents —S—, —NR—, or —NA22-, wherein A22 represents a monovalent group having a functional group capable of forming a chemical bond with a metal atom.
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