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公开(公告)号：US5600297A
公开(公告)日：1997-02-04
申请号：US517156
申请日：1995-08-21
申请人： Jacobus J. M. Ruigrok , Martinus A. M. Gijs , Jacques C. S. Kools , Reinder Coehoorn , Wiepke Folkerts
发明人： Jacobus J. M. Ruigrok , Martinus A. M. Gijs , Jacques C. S. Kools , Reinder Coehoorn , Wiepke Folkerts
CPC分类号： B82Y25/00 , G01P3/488 , G01R33/093 , G11B5/3903 , H01F10/3268 , G11B5/3925 , G11B5/465
摘要： A device for detecting a magnetic field, which device comprises a magneto-resistive multilayer structure comprising a first magnetic layer (1) which is separated from a second magnetic layer by an interposed non-magnetic layer, the multilayer structure having a first in-plane reference axis (R.sub.1) coinciding with the direction in which magnetic flux is offered to the multilayer structure during operation, and a second in-plane reference axis (R.sub.2) which is perpendicular to the first reference axis (R.sub.1), whereby the magnetic easy axis (E.sub.1) of the first magnetic layer (1) is canted through an acute in-plane angle .alpha. with respect to the second reference axis (R.sub.2), and the magnetic easy axis (E.sub.2) of the second magnetic layer is canted in the opposite sense through an acute in-plane angle .beta. with respect to the second reference axis (R.sub.2). Such a device lends itself to application in a magnetic head, for sensitive retrieval of magnetically-encoded data from a carrier in the form of a tape, disc or card.
摘要翻译： 一种用于检测磁场的装置，该装置包括磁阻多层结构，该磁阻多层结构包括通过插入的非磁性层与第二磁性层分离的第一磁性层（1），所述多层结构具有第一平面 参考轴（R1）与在操作期间向多层结构提供磁通的方向一致，以及垂直于第一参考轴线（R1）的第二面内参考轴线（R2），由此磁性容易轴 第一磁性层（1）的第一磁性层（E1）通过相对于第二参考轴线（R2）的锐角的平面角α倾斜，并且第二磁性层的易磁化轴（E2）倾斜于相反的 通过相对于第二参考轴线（R2）的锐角平面角β来感测。 这种设备本身适用于磁头，用于以磁带，光盘或卡片形式从载体敏感地检索磁编码数据。
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公开(公告)号：US5481808A
公开(公告)日：1996-01-09
申请号：US422664
申请日：1995-04-10
摘要： A device for determining the orientation of a vehicle includes a magnetic field sensor (3) which is arranged in the vicinity of a ferromagnetic outer wall of the body of the vehicle and which is rigidly connected to the wall. External magnetic fields could unpredictably magnetize the wall portion (1) of the body, in the vicinity of which the magnetic field sensor (3) is provided, so that the measurements would become inaccurate. In order to achieve a substantial reduction of these adverse effects of external magnetic fields, the relevant wall portion is magnetically stabilized, preferably by including it in a magnetic circuit which also includes at least a magnet (11; 23, 27). The magnetic circuit preferably comprises also a yoke (23, 25) which has an approximately U-shaped cross-section and which is made of a soft magnetic material, the free ends of limbs (25) of the yoke facing the relevant wall portion (1) and the yoke being at least partly enclosed by an electric coil (27) in order to form an electromagnet.
摘要翻译： 一种用于确定车辆定向的装置，包括一个磁场传感器（3），该磁场传感器设置在车身的铁磁外壁附近，并刚性地连接到车壁上。 外部磁场可以不可预测地磁化身体的壁部分（1），在其附近提供磁场传感器（3），使得测量将变得不准确。 为了实现外部磁场的这些不利影响的实质性减少，相关的壁部分被磁稳定，优选地将其包括在还包括至少一个磁体（11; 23,27）的磁路中。 磁路还优选还包括具有大致U形横截面且由软磁材料制成的磁轭（23,25），磁轭的四肢（25）的自由端面向相关的壁部分（ 1），并且轭被至少部分地由电线圈（27）包围以形成电磁体。
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公开(公告)号：US6075361A
公开(公告)日：2000-06-13
申请号：US977983
申请日：1997-11-25
CPC分类号： G11C11/16 , B82Y25/00 , G01R33/093 , G11B5/397
摘要： The device comprises a Wheatstone bridge with at least four magnetoresistive elements (1a, 1b, 1c, 1d) on a substrate (15), each magnetoresistive element comprising at least one sensitive portion (13) comprising successively a first ferromagnetic layer (19) having a magnetic easy axis (27) extending in a first direction, a non-magnetic layer (21) and a second ferromagnetic layer (23) having a magnetic easy axis (29) extending in a second direction that is different from the first direction. The sensitive portions (13) have mutually parallel sensitive directions that are parallel to a third direction (X). Each magnetoresistive element (1a, 1b, 1c, 1d) is associated with a current conductor (35a, 35b, 35c, 35d) provided in the immediate vicinity of that magnetoresistive element. The first direction (27) is canted through an acute angle with respect to the third direction (X), and the second direction (29) is canted in the opposite sense through an acute angle with respect to the third direction. Each one of the current conductors (35a, 35b, 35c, 35d) extends over at least a portion of its length in a fourth direction (Y) perpendicular to the third direction (X).
摘要翻译： 该装置包括在基板（15）上具有至少四个磁阻元件（1a，1b，1c，1d）的惠斯通电桥，每个磁阻元件包括至少一个敏感部分（13），其连续地包括第一铁磁层（19） 沿第一方向延伸的易磁化轴（27），具有沿与第一方向不同的第二方向延伸的易磁化轴（29）的非磁性层（21）和第二铁磁层（23）。 敏感部分（13）具有平行于第三方向（X）的相互平行的敏感方向。 每个磁阻元件（1a，1b，1c，1d）与设置在该磁阻元件紧邻处的电流导体（35a，35b，35c，35d）相关联。 第一方向（27）相对于第三方向（X）倾斜成锐角，并且第二方向（29）以相对于第三方向的锐角以相反的方向倾斜。 电流导体（35a，35b，35c，35d）中的每一个在垂直于第三方向（X）的第四方向（Y）上在其长度的至少一部分上延伸。
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公开(公告)号：US06271998B1
公开(公告)日：2001-08-07
申请号：US09379958
申请日：1999-08-24
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3903 , G11B5/3961 , G11B2005/3996
摘要： A thin film shielded magnetic read head device comprises an end face extending in a first direction, in which a magnetic information carrier is movable with respect to the magnetic head device, and in a second direction, perpendicular to said first direction. The magnetic head device further comprises shield forming flux guiding elements for magnetic cooperation with the information carrier, which elements extend in the second direction and in a third direction, perpendicular to the first and the second direction. A number of magnetoresistive elements each having a spin tunnel junction structure is provided, which number of magnetoresistive elements corresponds to with the number of magnetic channels of the magnetic head device. One of said shields forms a common contact lead for the current through said magnetoresistive elements. Thin film magnetic read head device is applied in a system for reading information from a magnetic information carrier.
摘要翻译： 薄膜屏蔽磁读头装置包括沿着第一方向延伸的端面，其中磁信息载体相对于磁头装置可移动，并且在垂直于所述第一方向的第二方向上延伸。 磁头装置还包括用于与信息载体磁协作的屏蔽形成磁通引导元件，这些元件在垂直于第一和第二方向的第二方向和第三方向上延伸。 提供了多个具有自旋隧道结结构的磁阻元件，其数量的磁阻元件对应于磁头器件的磁通道的数量。 所述屏蔽之一形成用于通过所述磁阻元件的电流的公共接触引线。 薄膜磁读头装置用于从磁信息载体读取信息的系统。
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5.发明授权Spin valve with thermally stable pinned layer structure having ruthenium oxide specular reflecting layer 失效具有热稳定钉扎层结构的旋转阀具有氧化钌镜面反射层公开(公告)号：US06934131B2
公开(公告)日：2005-08-23
申请号：US10341281
申请日：2003-01-13
申请人： Ming Mao , Adrian J. Devasahayam , Jacques C. S. Kools , Chih-Ling Lee , Chih-Ching Hu , Patricia L. Cox
发明人： Ming Mao , Adrian J. Devasahayam , Jacques C. S. Kools , Chih-Ling Lee , Chih-Ching Hu , Patricia L. Cox
IPC分类号： G11B5/39
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3906 , G11B2005/3996 , Y10T29/49044
摘要： A thermally stable spin valve sensor having an increased GMR ratio by virtue of an AP pinned layer structure in which the first and second pinned layers are separated by an AP coupling layer having a nano-oxide layer formed as an oxidized surface portion of the AP coupling layer. The nano-oxide layer provides an increase in the specular scattering, and in turn, an increase in the GMR ratio.
摘要翻译： 一种热稳定的自旋阀传感器，其具有通过AP钉扎层结构增加的GMR比，其中第一和第二被钉扎层由具有形成为AP耦合器的氧化表面部分的纳米氧化物层的AP耦合层分开 层。 纳米氧化物层提供了镜面散射的增加，并且进而增加了GMR比。
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公开(公告)号：US06800565B2
公开(公告)日：2004-10-05
申请号：US10341282
申请日：2003-01-13
申请人： Chih-Ching Hu , Adrian J. Devasahayam , Patricia L. Cox , Chih-Ling Lee , Ming Mao , Jacques C. S. Kools
发明人： Chih-Ching Hu , Adrian J. Devasahayam , Patricia L. Cox , Chih-Ling Lee , Ming Mao , Jacques C. S. Kools
IPC分类号： H01L2131
CPC分类号： C23C14/5833 , C23C8/02 , C23C26/00 , C23C28/00 , G11B5/84
摘要： A method of forming a thin-film magnetic element, such as a TMR element or a spin valve element, on a substrate wherein at least a surface portion of a nonmagnetic metal layer is oxidized by cluster ion beam (CIB) oxidation. Specifically, the method comprises depositing a first magnetic layer on a substrate, then depositing a nonmagnetic metal layer on the first magnetic layer. At least a top surface of the nonmagnetic layer is oxidized by CIB oxidation. In one embodiment, only a top surface portion is oxidized such that a nano-oxide layer (NOL) is formed on a nonmagnetic conductive layer. In another embodiment, the nonmagnetic metal layer is oxidized throughout it's thickness such that the layer is converted to a nonmagnetic insulating film. After oxidation, a second magnetic layer is deposited on the oxidized layer. Oxidizing by cluster ion beam oxidation advantageously comprises mixing a pressurized inert carrier gas with oxygen gas to form a gas mixture and passing the gas mixture into a low pressure vacuum to produce a supersonic gas jet, whereby expansion occurs in the jet to cause formation of clusters of inert gas and oxygen atoms and molecules. The clusters are then ionized and focused into a cluster ion beam and accelerated toward the top surface of the nonmagnetic metal layer to bombard the top surface and react the ionized oxygen atoms and molecules with at least the top surface of the nonmagnetic metal layer.
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7.发明授权公开(公告)号：US07071118B2
公开(公告)日：2006-07-04
申请号：US10706637
申请日：2003-11-12
IPC分类号： H01L21/31
CPC分类号： C23C16/45544 , C23C16/45565 , C23C16/45591
摘要： A method and apparatus for fabricating a conformal thin film on a substrate are disclosed. The method includes introducing a gas from a gas inlet into an expansion volume associated with an atomic layer deposition (ALD) system. The gas is flowed through a diffuser plate adjacent to the expansion volume and a reaction chamber. The diffuser plate includes a protrusion located opposite the gas inlet and the protrusion reduces turbulence in the expansion volume.
摘要翻译： 公开了一种用于在基板上制造保形薄膜的方法和装置。 该方法包括将气体从气体入口引入与原子层沉积（ALD）系统相关联的膨胀体积中。 气体通过与膨胀容积相邻的扩散板和反应室流动。 扩散板包括与气体入口相对的突出部，并且突起减少了膨胀体积中的湍流。
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8.发明授权Magnetic field sensor having nickel oxide and cobalt containing ferromagnetic layers 失效具有氧化镍和含铁磁性层的钴的磁场传感器公开(公告)号：US06275033B1
公开(公告)日：2001-08-14
申请号：US09013543
申请日：1998-01-26
申请人： Jacques C. S. Kools
发明人： Jacques C. S. Kools
IPC分类号： G01R3302
CPC分类号： B82Y25/00 , G01R33/093 , Y10T428/1121
摘要： A magnetic field sensor comprising a layered structure (3) E/Fo/S/F, in which: E is an exchange-biasing layer, comprising nickel oxide; Fo is a ferromagnetic layer with a fixed magnetization, comprising cobalt; S is a spacer layer; Ff is a ferromagnetic layer with a free magnetization, whereby the material of the layer Ff has a magnetostriction constant of at most 1.5×10−6 and a crystal anisotropy of at most 1.3 J/m3. Such a structure (3) demonstrates a relatively high magneto-resistance ratio (of the order of 15%), and yet a relatively low coercivity (of the order of 0.2 kA/m). Examples of suitable materials for use in the layer Ff include Ni66Fe16Co18 and Ni72Fe21Co7.
摘要翻译： 一种磁场传感器，包括层状结构（3）E / Fo / S / F，其中：E是交换偏压层，包括氧化镍; Fo是具有固定磁化强度的铁磁层，包括钴; S是 间隔层; Ff是具有自由磁化的铁磁层，由此层Ff的材料具有至多1.5×10 -6的磁致伸缩常数和至多1.3J / m 3的晶体各向异性。 这种结构（3）表现出相当高的磁阻比（约为15％），然而矫顽力相对较低（约为0.2kA / m）。 用于层Ff的合适材料的实例包括Ni66Fe16Co18和Ni72Fe21Co7。
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