Fabrication of layer-by-layer photonic crystals using two polymer microtransfer molding
    1.
    发明申请
    Fabrication of layer-by-layer photonic crystals using two polymer microtransfer molding 失效
    使用两个聚合物微转移模塑制造逐层光子晶体

    公开(公告)号:US20070289119A1

    公开(公告)日:2007-12-20

    申请号:US11455486

    申请日:2006-06-19

    摘要: A method of manufacturing photonic band gap structures operable in the optical spectrum has been presented. The method comprises the steps of filling a plurality of grooves of an elastomeric mold with a UV curable first polymer, each groove in parallel with each other and partially curing the first polymer. A second polymer is coated on the first polymer. A substrate or a multi-layer polymer structure is placed on the filled mold and the resulting structure is exposed to UV light (i.e., is UV cured). The mold is peeled away from the first and second polymers such that a layer of polymer rods is formed on the substrate/multi-layer polymer structure. The process is repeated until a desired number of layers have been formed. The multi-layer structure can be used to create ceramic and metallic photonic band gaps by infiltration, electro-deposition, and/or metal coating.

    摘要翻译: 已经提出了在光谱中可操作的制造光子带隙结构的方法。 该方法包括以下步骤:用UV可固化的第一聚合物填充弹性体模具的多个凹槽,每个凹槽彼此平行并部分固化第一聚合物。 将第二聚合物涂覆在第一聚合物上。 将基底或多层聚合物结构放置在填充的模具上,并将所得结构暴露于UV光(即,UV固化)。 将模具从第一和第二聚合物剥离,使得在基底/多层聚合物结构上形成聚合物棒层。 重复该过程,直到形成所需数量的层。 多层结构可用于通过渗透,电沉积和/或金属涂层来产生陶瓷和金属光子带隙。

    Fabrication of layer-by-layer photonic crystals using two polymer microtransfer molding
    2.
    发明授权
    Fabrication of layer-by-layer photonic crystals using two polymer microtransfer molding 失效
    使用两个聚合物微转移模塑制造逐层光子晶体

    公开(公告)号:US07625515B2

    公开(公告)日:2009-12-01

    申请号:US11455486

    申请日:2006-06-19

    IPC分类号: H01L21/00

    摘要: A method of manufacturing photonic band gap structures operable in the optical spectrum has been presented. The method comprises the steps of filling a plurality of grooves of an elastomeric mold with a UV curable first polymer, each groove in parallel with each other and partially curing the first polymer. A second polymer is coated on the first polymer. A substrate or a multi-layer polymer structure is placed on the filled mold and the resulting structure is exposed to UV light (i.e., is UV cured). The mold is peeled away from the first and second polymers such that a layer of polymer rods is formed on the substrate/multi-layer polymer structure. The process is repeated until a desired number of layers have been formed. The multi-layer structure can be used to create ceramic and metallic photonic band gaps by infiltration, electro-deposition, and/or metal coating.

    摘要翻译: 已经提出了在光谱中可操作的制造光子带隙结构的方法。 该方法包括以下步骤:用UV可固化的第一聚合物填充弹性体模具的多个凹槽,每个凹槽彼此平行并部分固化第一聚合物。 将第二聚合物涂覆在第一聚合物上。 将基底或多层聚合物结构放置在填充的模具上,并将所得结构暴露于UV光(即,UV固化)。 将模具从第一和第二聚合物剥离,使得在基底/多层聚合物结构上形成聚合物棒层。 重复该过程,直到形成所需数量的层。 多层结构可用于通过渗透,电沉积和/或金属涂层来产生陶瓷和金属光子带隙。

    Fabrication of photonic band gap materials using microtransfer molded templates
    3.
    发明授权
    Fabrication of photonic band gap materials using microtransfer molded templates 失效
    使用微转移模塑模板制造光子带隙材料

    公开(公告)号:US06555406B1

    公开(公告)日:2003-04-29

    申请号:US10081729

    申请日:2002-02-22

    IPC分类号: H01L2100

    CPC分类号: B82Y20/00 G02B6/1225 G02B6/13

    摘要: A method of manufacturing photonic band gap structures operable in the optical spectrum has been presented. The method comprises the steps of creating a patterned template for an elastomeric mold, fabricating an elastomeric mold from poly-dimethylsiloxane (PDMS) or other suitable polymer, filling the elastomeric mold with a second polymer such as epoxy or other suitable polymer, stamping the second polymer by making contact with a substrate or multilayer structure, removing the elastomeric mold, infiltrating the multilayer structure with ceramic or metal, and heating the multilayer structure to remove the second polymer to form a photonic band gap structure.

    摘要翻译: 已经提出了在光谱中可操作的制造光子带隙结构的方法。 该方法包括以下步骤:创建用于弹性体模具的图案化模板,由聚二甲基硅氧烷(PDMS)或其它合适的聚合物制造弹性体模具,用第二聚合物如环氧树脂或其它合适的聚合物填充弹性体模具, 聚合物通过与基底或多层结构接触,去除弹性体模具,用陶瓷或金属渗透多层结构,并加热多层结构以除去第二聚合物以形成光子带隙结构。

    Manufacturing Method of Photonic Crystal
    4.
    发明申请
    Manufacturing Method of Photonic Crystal 审中-公开
    光子晶体的制造方法

    公开(公告)号:US20130115434A1

    公开(公告)日:2013-05-09

    申请号:US13727304

    申请日:2012-12-26

    IPC分类号: B05D5/06

    摘要: A manufacturing method of a photonic crystal is provided. In the method, a high-refractive-index material is conformally deposited on an exposed portion of a periodic template composed of a low-refractive-index material by an atomic layer deposition process so that a difference in refractive indices or dielectric constants between the template and adjacent air becomes greater, which makes it possible to form a three-dimensional photonic crystal having a superior photonic bandgap. Herein, the three-dimensional structure may be prepared by a layer-by-layer method.

    摘要翻译: 提供了一种光子晶体的制造方法。 在该方法中,通过原子层沉积工艺将高折射率材料共形沉积在由低折射率材料构成的周期性模板的暴露部分上,使得模板之间的折射率或介电常数之差 并且相邻的空气变得更大,这使得可以形成具有优异的光子带隙的三维光子晶体。 这里,三维结构可以通过层叠法制备。

    Fabrication of photonic band gap materials
    5.
    发明授权
    Fabrication of photonic band gap materials 失效
    光子带隙材料的制造

    公开(公告)号:US06339030B1

    公开(公告)日:2002-01-15

    申请号:US09477191

    申请日:2000-01-05

    IPC分类号: H01L2131

    摘要: A method for forming a periodic dielectric structure exhibiting photonic band gap effects includes forming a slurry of a nano-crystalline ceramic dielectric or semiconductor material and monodisperse polymer microspheres, depositing a film of the slurry on a substrate, drying the film, and calcining the film to remove the polymer microspheres therefrom. The film may be cold-pressed after drying and prior to calcining. The ceramic dielectric or semiconductor material may be titania, and the polymer microspheres may be polystyrene microspheres.

    摘要翻译: 形成表现出光子带隙效应的周期性电介质结构的方法包括形成纳米晶体陶瓷电介质或半导体材料和单分散聚合物微球的浆料,将浆料膜沉积在基底上,干燥膜并煅烧该膜 从其中除去聚合物微球。 干燥后,煅烧前可以将薄膜冷压。 陶瓷电介质或半导体材料可以是二氧化钛,聚合物微球可以是聚苯乙烯微球。