公开(公告)号：US06574174B1

公开(公告)日：2003-06-03

申请号：US09549075

申请日：2000-04-15

申请人： James R. Amble ,  Lambrerrtus Hesselink ,  Tokyuki Honda ,  Mark E. McDonald ,  Michael V. Morelli ,  Andrew J. Daiber ,  Herman A. Ferrier ,  Sanjoy Ghose ,  Thomas A. Kridl ,  Matthew Lipson ,  Shunichi Nishimura ,  Sergei Sochava ,  LeRoy A. Volz

发明人： James R. Amble ,  Lambrerrtus Hesselink ,  Tokyuki Honda ,  Mark E. McDonald ,  Michael V. Morelli ,  Andrew J. Daiber ,  Herman A. Ferrier ,  Sanjoy Ghose ,  Thomas A. Kridl ,  Matthew Lipson ,  Shunichi Nishimura ,  Sergei Sochava ,  LeRoy A. Volz

IPC分类号： G11B700

CPC分类号： G11B7/0065 ,  G11B7/007 ,  G11B7/0938 ,  G11B7/24 ,  G11B7/2433 ,  G11B7/245 ,  G11B7/246 ,  G11B7/2472 ,  G11B7/252 ,  G11B7/2595 ,  G11B2007/0013

摘要： An optical information storage system using optical storage media including multiple data layers or stacks wherein each of the multiple data stacks has a storage density comparable to a conventional single layer optical disk. The optical data storage system comprises an optical medium having a single dedicated servo layer and multiple data stacks which each contain an embedded servo format, a servo laser beam positioned to maintain a first focus point on the dedicated servo reference layer, a read-write laser beam positioned to maintain a second focus point on one of the data stacks, a first, dedicated servo system which provides focus and tracking error correction according to error signals generated from the dedicated servo layer, and a second, embedded servo system which provides focus and tracking error correction according to error signals generated from the data stacks. The dedicated servo layer, in different embodiments of the invention, may be positioned either below or above the data stacks in the optical medium, or interposed between data stacks. The data stacks may comprise discrete physical data layers or “virtual” data layers defined by a format hologram. The servo and read-write lasers may differ in wavelength and/or polarization.

摘要翻译： 一种使用包括多个数据层或堆叠的光学存储介质的光学信息存储系统，其中多个数据堆栈中的每一个具有与常规单层光盘相当的存储密度。 光学数据存储系统包括具有单个专用伺服层的光学介质和各自包含嵌入式伺服格式的多个数据堆栈，定位成将第一焦点保持在专用伺服参考层上的伺服激光束，读写激光器 光束定位成在数据堆叠之一上保持第二焦点，第一专用伺服系统，其根据从专用伺服层产生的误差信号提供聚焦和跟踪误差校正;以及第二嵌入式伺服系统，其提供焦点和 根据从数据堆产生的误差信号进行跟踪误差校正。 在本发明的不同实施例中的专用伺服层可以位于光学介质中的数据堆的下方或上方，或者位于数据堆之间。 数据堆可以包括由格式全息图定义的离散物理数据层或“虚拟”数据层。 伺服和读写激光器的波长和/或极化可能不同。

公开(公告)号：US06512606B1

公开(公告)日：2003-01-28

申请号：US09364324

申请日：1999-07-29

申请人： Matthew Lipson ,  Sergei Sochava ,  Lambertus Hesselink ,  Brian H. Cumpston ,  Robert R. MeLeod ,  Charles D. Claude

发明人： Matthew Lipson ,  Sergei Sochava ,  Lambertus Hesselink ,  Brian H. Cumpston ,  Robert R. MeLeod ,  Charles D. Claude

IPC分类号： G03H118

CPC分类号： B82Y10/00 ,  C01P2004/64 ,  C09C1/56 ,  G03F7/001 ,  G03H2001/0264 ,  G03H2001/303 ,  G11B7/00455 ,  G11B7/0052 ,  G11B7/0065 ,  G11B7/24 ,  G11B7/26

摘要： An optical data storage system and method comprising a photopolymer medium having generally a polymerizable monomer, an active binder, a first, hologram recording polymerization initiator, and a second, data writing polymerization initiator. The monomer is preferably a cationic ring-opening monomer. The hologram recording polymerization initiator preferably comprises a sensitizer and photoacid generator which initiate a first polymerization in the medium which defines a format hologram. The format hologram recording is carried out via interference of a signal and reference beam, with the sensitizer being specific for the wavelength(s) of the signal and reference beams. The hologram recording polymerization is only partial and does not consume all of the monomer present in the photopolymer medium. A second stage, a data writing polymerization initiator, specific to a data writing beam, locally advances polymerization at selected data storage locations to alter the previously recorded format hologram, resulting in optical data storage as localized alterations in the format hologram.

摘要翻译： 一种光学数据存储系统和方法，其包括通常具有可聚合单体的光聚合物介质，活性粘合剂，第一全息记录聚合引发剂和第二数据书写聚合引发剂。 单体优选为阳离子开环单体。 全息记录聚合引发剂优选包括敏化剂和光致酸产生剂，其在介质中引发第一次聚合，其定义格式全息图。 格式全息图记录通过信号和参考光束的干涉进行，敏化剂特定于信号和参考光束的波长。 全息记录聚合仅仅是部分的，并且不消耗光聚合物介质中存在的所有单体。 第二阶段，特定于数据写入光束的数据写入聚合引发器在选定的数据存储位置局部地前进聚合以改变先前记录的格式全息图，导致光学数据存储为格式全息图中的局部改变。

公开(公告)号：US07423732B2

公开(公告)日：2008-09-09

申请号：US11194576

申请日：2005-08-02

申请人： Matthew Lipson ,  Azat M. Latypov

发明人： Matthew Lipson ,  Azat M. Latypov

IPC分类号： G03B27/58 ,  G03B27/42

CPC分类号： G03F7/70291 ,  G03F7/70283

摘要： A lithography system comprises an illumination system that supplies radiation and a projection system comprising an optical system and a patterning device located at a pupil plane. The patterning device patterns the radiation and the optical system projects the patterned radiation onto a target portion of a substrate. In one example, an additional patterning device is located at an object plane of the lithography system and patterns the radiation before the patterning device at the pupil plane.

摘要翻译： 光刻系统包括提供辐射的照明系统和包括位于光瞳面的光学系统和图案形成装置的投影系统。 图案形成装置对辐射进行图案化，光学系统将图案化的辐射投影到基板的目标部分上。 在一个示例中，附加图案形成装置位于光刻系统的物平面处，并且在图案形成装置之前在光瞳面上对辐射进行图案化。

公开(公告)号：US08027026B2

公开(公告)日：2011-09-27

申请号：US13016211

申请日：2011-01-28

申请人： Matthew Lipson ,  Marcel Mathijs Theodore Marie Dierichs ,  Sjoerd Nicolaas Lambertus Donders ,  Johannes Catharinus Hubertus Mulkens ,  Bob Streefkerk ,  Ronald Wilklow ,  Roel De Jonge

发明人： Matthew Lipson ,  Marcel Mathijs Theodore Marie Dierichs ,  Sjoerd Nicolaas Lambertus Donders ,  Johannes Catharinus Hubertus Mulkens ,  Bob Streefkerk ,  Ronald Wilklow ,  Roel De Jonge

IPC分类号： G03B27/54

CPC分类号： G03F7/70341

摘要： A method including mixing using a mixer a first component and a second component to form a liquid before supply to a space between the projection system and a substrate, measuring a property of the liquid using a measuring device and making the feedback available to a controller, based on the feedback, controlling with the controller a physical property of the liquid by controlling the amount of the first and/or second component used to form the liquid, supplying the liquid to the space between the projection system and the substrate, and projecting a patterned beam of radiation, using the projection system, through the liquid onto a target portion of the substrate.

摘要翻译： 一种方法，包括使用混合器混合第一组分和第二组分以在供应到投影系统和基底之间的空间之前形成液体，使用测量装置测量液体的性质并使反馈可用于控制器， 基于反馈，通过控制用于形成液体的第一和/或第二部件的量，通过控制器控制液体的物理性质，将液体供应到投影系统和基板之间的空间，并且将投影 使用投影系统的图案化的光束束通过液体到达基板的目标部分。

公开(公告)号：US07781029B2

公开(公告)日：2010-08-24

申请号：US11473068

申请日：2006-06-23

申请人： Matthew Lipson ,  Taras Shvets ,  Richard Bruls

发明人： Matthew Lipson ,  Taras Shvets ,  Richard Bruls

IPC分类号： B05D3/00

CPC分类号： G03F7/70341 ,  G02B1/105 ,  G02B1/14 ,  G02B5/003 ,  G02B7/025 ,  Y10T156/10

摘要： A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.

摘要翻译： 提供了一种用于保护湿透镜元件免于液体劣化的方法。 所述方法包括将有机氧化金属化合物的薄涂层施加到湿透镜元件的侧部以留下光学惰性的光吸收金属氧化物膜。 将液体屏蔽涂层施加在金属氧化物涂层的顶部。 当湿透镜元件的侧部被浸入液体中时，两个涂层保护湿透镜元件免于液体劣化。 在一个实施例中，湿透镜元件是浸没光刻湿透镜元件，液体是浸没式光刻液。

公开(公告)号：US20080283804A1

公开(公告)日：2008-11-20

申请号：US11768898

申请日：2007-06-26

申请人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

发明人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

IPC分类号： G11B7/24

CPC分类号： F21V9/00 ,  B33Y70/00 ,  B82Y10/00 ,  C07C215/70 ,  C07C217/76 ,  C07C219/32 ,  C07C225/22 ,  C07C2603/18 ,  G11B7/245 ,  G11B7/247 ,  G11B7/25

摘要： Disclosed are highly efficient multiphoton absorbing compounds and methods of their use. The compounds generally include a bridge of pi-conjugated bonds connecting electron donating groups or electron accepting groups. The bridge may be substituted with a variety of substituents as well. Solubility, lipophilicity, absorption maxima and other characteristics of the compounds may be tailored by changing the electron donating groups or electron accepting groups, the substituents attached to or the length of the pi-conjugated bridge. Numerous photophysical and photochemical methods are enabled by converting these compounds to electronically excited states upon simultaneous absorption of at least two photons of radiation. The compounds have large two-photon or higher-order absorptivities such that upon absorption, one or more Lewis acidic species, Lewis basic species, radical species or ionic species are formed.

摘要翻译： 公开了高效多光子吸收化合物及其使用方法。 化合物通常包括连接供电子基团或电子接受基团的π-共轭键桥。 桥也可以被各种取代基取代。 化合物的溶解性，亲油性，吸收最大值和其它特征可以通过改变给电子基团或电子接受基团，连接在该取代基上的取代基或π-共轭桥的长度来调整。 通过在同时吸收至少两个光子的光子时将这些化合物转化为电子激发态，能够实现许多光物理和光化学方法。 该化合物具有大的双光子或更高级的吸光度，使得在吸收时，形成一种或多种路易斯酸性物质，路易斯碱性物质，自由基物质或离子物质。

公开(公告)号：US07235194B2

公开(公告)日：2007-06-26

申请号：US10442431

申请日：2003-05-20

申请人： Brian Cumpston ,  Matthew Lipson ,  Seth R Marder ,  Joseph W Perry

发明人： Brian Cumpston ,  Matthew Lipson ,  Seth R Marder ,  Joseph W Perry

IPC分类号： C07C211/00 ,  C09K11/07 ,  G02B5/20

CPC分类号： F21V9/00 ,  B33Y70/00 ,  B82Y10/00 ,  C07C215/70 ,  C07C217/76 ,  C07C219/32 ,  C07C225/22 ,  C07C2603/18 ,  G11B7/245 ,  G11B7/247 ,  G11B7/25

摘要： Disclosed are highly efficient multiphoton absorbing compounds and methods of their use. The compounds generally include a bridge of pi-conjugated bonds connecting electron donating groups or electron accepting groups. The bridge may be substituted with a variety of substituents as well. Solubility, lipophilicity, absorption maxima and other characteristics of the compounds may be tailored by changing the electron donating groups or electron accepting groups, the substituents attached to or the length of the pi-conjugated bridge. Numerous photophysical and photochemical methods are enabled by converting these compounds to electronically excited states upon simultaneous absorption of at least two photons of radiation. The compounds have large two-photon or higher-order absorptivities such that upon absorption, one or more Lewis acidic species, Lewis basic species, radical species or ionic species are formed.

摘要翻译： 公开了高效多光子吸收化合物及其使用方法。 化合物通常包括连接供电子基团或电子接受基团的π-共轭键桥。 桥也可以被各种取代基取代。 化合物的溶解性，亲油性，吸收最大值和其它特征可以通过改变给电子基团或电子接受基团，连接在该取代基上的取代基或π-共轭桥的长度来调整。 通过在同时吸收至少两个光子的光子时将这些化合物转化为电子激发态，能够实现许多光物理和光化学方法。 该化合物具有大的双光子或更高级的吸光度，使得在吸收时，形成一种或多种路易斯酸性物质，路易斯碱性物质，自由基物质或离子物质。

公开(公告)号：US06608228B1

公开(公告)日：2003-08-19

申请号：US09292652

申请日：1999-04-15

申请人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

发明人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

IPC分类号： C07C24406

CPC分类号： F21V9/00 ,  B33Y70/00 ,  B82Y10/00 ,  C07C215/70 ,  C07C217/76 ,  C07C219/32 ,  C07C225/22 ,  C07C2603/18 ,  G11B7/245 ,  G11B7/247 ,  G11B7/25

摘要： Disclosed are highly efficient multiphoton absorbing compounds and methods of their use. The compounds generally include a bridge of pi-conjugated bonds connecting electron donating groups or electron accepting groups. The bridge may be substituted with a variety of substituents as well. Solubility, lipophilicity, absorption maxima and other characteristics of the compounds may be tailored by changing the electron donating groups or electron accepting groups, the substituents attached to or the length of the pi-conjugated bridge. Numerous photophysical and photochemical methods are enabled by converting these compounds to electronically excited states upon simultaneous absorption of at least two photons of radiation. The compounds have large two-photon or higher-order absorptivities such that upon absorption, one or more Lewis acidic species, Lewis basic species, radical species or ionic species are formed.

摘要翻译： 公开了高效多光子吸收化合物及其使用方法。 化合物通常包括连接供电子基团或电子接受基团的π-共轭键桥。 桥也可以被各种取代基取代。 化合物的溶解性，亲油性，吸收最大值和其它特征可以通过改变给电子基团或电子接受基团，连接在该取代基上的取代基或π-共轭桥的长度来调整。 通过在同时吸收至少两个光子的光子时将这些化合物转化为电子激发态，能够实现许多光物理和光化学方法。 该化合物具有大的双光子或更高级的吸光度，使得在吸收时，形成一种或多种路易斯酸性物质，路易斯碱性物质，自由基物质或离子物质。

公开(公告)号：US09348236B2

公开(公告)日：2016-05-24

申请号：US13991089

申请日：2011-09-21

申请人： Peter Richard Helmus ,  Matthew Lipson ,  Ronald A. Wilklow ,  James Kennon ,  Kennard White ,  Wilbur Jordan Reichmann, II

发明人： Peter Richard Helmus ,  Matthew Lipson ,  Ronald A. Wilklow ,  James Kennon ,  Kennard White ,  Wilbur Jordan Reichmann, II

IPC分类号： H01L21/683 ,  H01T23/00 ,  G03F7/20 ,  H02N13/00

CPC分类号： G03F7/70708 ,  G03F7/70691 ,  H01L21/6833 ,  H02N13/00

摘要： An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.

摘要翻译： 用于光刻设备的静电夹具包括毛刺和由绝缘体和/或相邻毛边之间的介电材料包围的电极。 在一个实施例中，两层或更多层电介质材料设置在相邻的孔之间并且围绕设置在相邻的孔之间的电极。 静电夹可用于将物体夹持在光刻设备中的物体支撑件上。

公开(公告)号：US20140071420A1

公开(公告)日：2014-03-13

申请号：US13903885

申请日：2013-05-28

申请人： Erik Roelof Loopstra ,  Johannes Jacobus Matheus Baselmans ,  Marcel Mathijs Theodore Marie Dierichs ,  Johannes Christiaan Maria Jasper ,  Matthew Lipson ,  Hendricus Johannes Maria Meijer ,  Uwe Mickan ,  Johannes Catharinus Hubertus Mulkens ,  Tammo Uitterdijk

发明人： Erik Roelof Loopstra ,  Johannes Jacobus Matheus Baselmans ,  Marcel Mathijs Theodore Marie Dierichs ,  Johannes Christiaan Maria Jasper ,  Matthew Lipson ,  Hendricus Johannes Maria Meijer ,  Uwe Mickan ,  Johannes Catharinus Hubertus Mulkens ,  Tammo Uitterdijk

IPC分类号： G03F7/20

CPC分类号： G03F7/70866 ,  G03F7/7015 ,  G03F7/70341 ,  Y10S430/162

摘要： A lithographic projection apparatus is disclosed for use with an immersion liquid positioned between the projection system and a substrate. Several methods and mechanism are disclosed to protect components of the projection system, substrate table and a liquid confinement system. These include providing a protective coating on a final element of the projection system as well as providing one or more sacrificial bodies upstream of the components. A two component final optical element of CaF2 is also disclosed.

摘要翻译： 公开了一种与位于投影系统和基板之间的浸没液体一起使用的光刻投影装置。 公开了几种方法和机构来保护投影系统，衬底台和液体限制系统的组件。 这些包括在投影系统的最终元件上提供保护涂层，以及在部件上游提供一个或多个牺牲体。 还公开了CaF2的双组分最终光学元件。