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公开(公告)号：US20070186643A1
公开(公告)日：2007-08-16
申请号：US11352774
申请日：2006-02-10
申请人： Jamie Speldrich , Scott Beck , Richard Gehman , Martin Murray , Ulrich Bonne
发明人： Jamie Speldrich , Scott Beck , Richard Gehman , Martin Murray , Ulrich Bonne
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F15/006
摘要： A thermal liquid flow sensor and method of forming same. The sensor has a substrate and one or more sensing elements, disposed on the substrate, for sensing a property of a liquid. The liquid flow sensor, which can be for example a microsensor having a microbrick® structure, has a hydrophilic layer which is disposed on the substrate and covers the sensing element(s). The hydrophilic layer is preferably formed from a spin on glass material, such as for example a silicate or phosphosilicate. A silicon nitride layer can be disposed on the sensing element(s) and interpose the substrate and the hydrophilic layer. The silicon nitride layer can be oxidized, for example, by means of plasma oxidation or oxygen ion implantation so to form the hydrophilic layer thereon. A variety of other hydrophilic compounds can be utilized to form the hydrophilic layer such as, gold, palladium and diamond like carbon.
摘要翻译： 一种热液体流量传感器及其形成方法。 传感器具有衬底和设置在衬底上的一个或多个感测元件，用于感测液体的性质。 液体流量传感器（例如可以是具有微结构的微传感器）具有设置在基板上并覆盖感测元件的亲水层。 亲水层优选由旋涂在玻璃材料上形成，例如硅酸盐或磷硅酸盐。 氮化硅层可以设置在感测元件上并插入衬底和亲水层。 氮化硅层可以例如通过等离子体氧化或氧离子注入来氧化，从而在其上形成亲水层。 可以使用各种其它亲水性化合物来形成亲水层，例如金，钯和类似于金刚石的碳。
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公开(公告)号：US06681623B2
公开(公告)日：2004-01-27
申请号：US10011932
申请日：2001-10-30
申请人： Ulrich Bonne , Jamie Speldrich
发明人： Ulrich Bonne , Jamie Speldrich
IPC分类号： G01F168
CPC分类号： G01F1/6842 , G01F1/40 , G01F5/00 , G01F5/005 , G01F15/12
摘要： Methods and systems for preventing degradation of a sensor exposed to a harsh fluid, such as one that might corrode or be exposed to radioactive contaminants, live pathogens, freezing temperatures, overheating, particle deposition or condensable vapors is disclosed. An auxiliary purge stream of comparatively clean fluid or purge fluid is utilized, which flows past the sensor in opposition to the harsh fluid, thereby preventing the harsh fluid from contacting and degrading the sensor. The clean fluid itself may comprise a purge gas, such as clean, dry air, or a liquid that is compatible with the composition of the harsh fluid. The flow and pressure of the clean fluid can be adjusted utilizing one or more supply regulator valves.
摘要翻译： 公开了用于防止暴露于恶劣流体（例如可能腐蚀或暴露于放射性污染物，活体病原体，冷冻温度，过热，颗粒沉积或可冷凝蒸气）的传感器降解的方法和系统。 使用比较清洁的流体或净化流体的辅助净化流，其与传统的流体相反地流过恶劣的流体，从而防止恶劣的流体接触和降解传感器。 清洁流体本身可以包括吹扫气体，例如干净的干燥空气或与粗糙流体的组成相容的液体。 可以利用一个或多个供应调节阀来调节清洁流体的流量和压力。
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公开(公告)号：US08128873B2
公开(公告)日：2012-03-06
申请号：US11923325
申请日：2007-10-24
IPC分类号： G01N7/00
CPC分类号： G01N21/8483
摘要： A highly sensitive fluid composition analyzer where a fluid may be placed in contact with a very small area on a material sensitized to change color in the presence of a specific type of compound, to be impinged with light. The light reflected, transmitted and/or scattered by the material may serve as input for the analyzer electronics. The fluid may be pre-concentrated prior to being brought in contact with the material. The area on the material may be a spot having an outside dimension of less than one millimeter.
摘要翻译： 一种高灵敏度的流体组成分析器，其中流体可以放置在与特定类型的化合物存在下变色的材料上的非常小的区域接触以被光照射的物质上。 由材料反射，透射和/或散射的光可以用作分析仪电子器件的输入。 流体可以在与材料接触之前被预浓缩。 材料上的区域可以是外部尺寸小于1毫米的斑点。
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公开(公告)号：US20090111191A1
公开(公告)日：2009-04-30
申请号：US11923325
申请日：2007-10-24
CPC分类号： G01N21/8483
摘要： A highly sensitive fluid composition analyzer where a fluid may be placed in contact with a very small area on a material sensitized to change color in the presence of a specific type of compound, to be impinged with light. The light reflected, transmitted and/or scattered by the material may serve as input for the analyzer electronics. The fluid may be pre-concentrated prior to being brought in contact with the material. The area on the material may be a spot having an outside dimension of less than one millimeter.
摘要翻译： 一种高灵敏度的流体组成分析器，其中流体可以放置在与特定类型的化合物存在下变色的材料上的非常小的区域接触以被光照射的物质上。 由材料反射，透射和/或散射的光可以用作分析仪电子器件的输入。 流体可以在与材料接触之前被预浓缩。 材料上的区域可以是外部尺寸小于1毫米的斑点。
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公开(公告)号：US20080010821A1
公开(公告)日：2008-01-17
申请号：US11781197
申请日：2007-07-20
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种流量传感器，其具有基底，该基底具有在感测元件上对准的感测元件和流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US20070235643A1
公开(公告)日：2007-10-11
申请号：US11394131
申请日：2006-03-30
申请人： Ulrich Bonne , Paul Bauhahn
发明人： Ulrich Bonne , Paul Bauhahn
IPC分类号： H01J49/00
CPC分类号： H01J49/12
摘要： A method and apparatus are provided for pumping a gas. The method includes the steps of ionizing the gas, separating the ionized gas into groups of positive and negative ions using positive and negative electric fields and separately pulling the groups of positive and negative ions along a channel using the negative and positive electric fields.
摘要翻译： 提供了一种用于泵送气体的方法和装置。 该方法包括使气体电离的步骤，使用正和负电场将电离气体分离成正离子和负离子，并且使用负电场和正电场分别沿着通道牵引正离子和负离子组。
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公开(公告)号：US07258003B2
公开(公告)日：2007-08-21
申请号：US10930546
申请日：2004-08-31
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种流量传感器，其具有基底，该基底具有在感测元件上对准的感测元件和流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US07222639B2
公开(公告)日：2007-05-29
申请号：US11025758
申请日：2004-12-29
申请人： Ulrich Bonne , Cleopatra Cabuz , Eugen I. Cabuz , Stephen J. Kemp , John T. Adams , Tzu-Yu Wang , Sybrandus B. V. Munsterhuis , Gerrit J. Baarda
发明人： Ulrich Bonne , Cleopatra Cabuz , Eugen I. Cabuz , Stephen J. Kemp , John T. Adams , Tzu-Yu Wang , Sybrandus B. V. Munsterhuis , Gerrit J. Baarda
IPC分类号： G05D16/06
CPC分类号： F16K31/402 , F16K31/02 , F16K31/385 , F23N1/005 , F23N2035/18 , F23N2035/20 , F23N2035/24 , Y10T137/7761 , Y10T137/87917
摘要： A gas valve body with a first flow chamber and, a second flow chamber including and a main valve positioned in line and between the first flow chamber and the second flow chamber. The main valve can be opened by creating a pressure differential across the main valve. An electrostatically controlled pilot valve is provided for controlling the pressure differential across the main valve for “on-ff” operation. The electrostatically controlled pilot valve may also be operated to “modulate” the pressure differential across the main valve along a range of pressure differential values.
摘要翻译： 一种具有第一流动室的气体阀体，以及包括第一流动室和第二流动室的第二流动室和第二流动室。 可以通过在主阀上形成压差来打开主阀。 提供静电控制的先导阀，用于控制主阀上的压差用于“on-ff”操作。 静电控制先导阀还可以被操作以沿着一定范围的压力差来“调制”主阀上的压力差。
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公开(公告)号：US20060289809A1
公开(公告)日：2006-12-28
申请号：US11328735
申请日：2006-01-10
IPC分类号： G01J3/10
CPC分类号： G01N27/622 , G01N27/624 , G01N30/6095 , G01N30/62 , G01N30/64 , G01N30/66 , G01N30/70 , G01N30/7206 , G01N30/78 , G01N2030/025 , G01N2030/642 , G01N2030/645
摘要： Embodiments of the present invention relate to detector structures for use in a micro gas analyzer, preferably in a differential setup. The detector structures may comprise one or more detector types, such as photo-ionization (PID), electron capture (ECD), ion mobility (IMS), differential mobility (DMS), ion-trap mass spectrometer (ITMS), in which all are provided with ions and electrons from one vacuum ultra violet (VUV) source. This source may also provide ions for ion-based gas pumps.
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公开(公告)号：US07127935B2
公开(公告)日：2006-10-31
申请号：US11053569
申请日：2005-02-07
申请人： Ulrich Bonne , Rajiv R. Singh , Syed M. Shahed , Richard A. Kirkpatrick, II , Aziz Rahman , Yue Liu
发明人： Ulrich Bonne , Rajiv R. Singh , Syed M. Shahed , Richard A. Kirkpatrick, II , Aziz Rahman , Yue Liu
CPC分类号： G01N27/4141
摘要： A sensor system for detecting the presence of at least one specific component in a fluid medium such as an exhaust gas. A sensor is mounted in a sensor body for detecting the presence of at least one specific component and providing a representative signal that is transmitted to a remote receiver for processing. A power source such as a thermopile provides power for the sensor and the transmitter. Preferred are sensors that detect a plurality of different components in the gas and provide a distinct signal for each component. A preferred transmitter is designed to transmit at a low duty cycle so as to conserve power. A preferred sensor is electronic, has the capability for self-diagnostics and self-calibration, and causes a change in current when exposed to the component, such as a functionalized field effect transistor.
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