RADIO FREQUENCY FILTER AND RADIO FREQUENCY DUPLEXER INCLUDING BULK ACOUSTIC WAVE RESONATORS
    1.
    发明申请
    RADIO FREQUENCY FILTER AND RADIO FREQUENCY DUPLEXER INCLUDING BULK ACOUSTIC WAVE RESONATORS 有权
    无线频率滤波器和无线电频率双工器,包括大容量波形谐振器

    公开(公告)号:US20120013419A1

    公开(公告)日:2012-01-19

    申请号:US13108822

    申请日:2011-05-16

    IPC分类号: H03H9/70 H03H9/54

    CPC分类号: H03H9/706 H03H9/542

    摘要: A Radio Frequency (RF) duplexer including Bulk Acoustic Wave Resonators (BAWRs) and an RF filter including BAWRs are provided. The RF duplexer may convert the received signal into a balance signal and output the balance signal via a dual-output port. The RF duplexer may also include a BAWR receiving filter unit including an input end to receive the balance signal from the dual-output port, and an output end used for dual output. The RF duplexer may also include a BAWR transmitting filter unit to transmit a transmitted signal to the antenna via a single-output port.

    摘要翻译: 提供了包括体声波谐振器(BAWR)的射频(RF)双工器和包括BAWR的RF滤波器。 RF双工器可以将接收的信号转换成平衡信号,并通过双输出端口输出平衡信号。 RF双工器还可以包括BAWR接收滤波器单元,其包括用于从双输出端口接收平衡信号的输入端和用于双输出的输出端。 RF双工器还可以包括经由单输出端口将发射信号发送到天线的BAWR发射滤波器单元。

    BULK ACOUSTIC WAVE RESONATOR STRUCTURE, A MANUFACTURING METHOD THEREOF, AND A DUPLEXER USING THE SAME
    4.
    发明申请
    BULK ACOUSTIC WAVE RESONATOR STRUCTURE, A MANUFACTURING METHOD THEREOF, AND A DUPLEXER USING THE SAME 有权
    大容量声波谐振器结构及其制造方法,以及使用其的双工器

    公开(公告)号:US20120049976A1

    公开(公告)日:2012-03-01

    申请号:US13088905

    申请日:2011-04-18

    IPC分类号: H03H9/70 H03H3/02 H01L41/047

    摘要: A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a predetermined area of a bottom surface of the first substrate. A first air cavity may be formed above the first substrate, and a first lamination resonating portion may be laminated above the first air cavity in sequence of a lower electrode, a piezoelectric layer, and an upper electrode. A second air cavity may be formed above the first substrate, and a second lamination resonating portion may be laminated above the second air cavity in sequence of the lower electrode, the piezoelectric layer, and the upper electrode. The first lamination resonating portion and the second lamination resonating portion may be connected via either the lower electrode or the upper electrode. A first electrode portion may include a third air cavity formed on a bottom surface of either the lower electrode or the upper electrode connecting between the first lamination resonating portion and the second lamination resonating portion.

    摘要翻译: 提供了一种体声波谐振器(BAWR),一种制造BAWR的方法,以及包括BAWR的双工器。 BAWR可以包括第一基板,其包括形成在第一基板的底表面的预定区域中的通孔。 可以在第一基板上形成第一空气腔,并且第一层叠谐振部分可以按照下电极,压电层和上电极的顺序层叠在第一空气腔的上方。 可以在第一基板的上方形成第二空气腔,并且第二层压谐振部分可以按照下电极,压电层和上电极的顺序层叠在第二空气腔的上方。 第一层叠谐振部分和第二层叠谐振部分可以通过下电极或上电极连接。 第一电极部分可以包括形成在第一层压谐振部分和第二层压谐振部分之间的下电极或上电极的底表面上的第三空腔。

    Bulk acoustic wave resonator structure, a manufacturing method thereof, and a duplexer using the same
    8.
    发明授权
    Bulk acoustic wave resonator structure, a manufacturing method thereof, and a duplexer using the same 有权
    体声波谐振器结构,其制造方法以及使用其的双工器

    公开(公告)号:US08648671B2

    公开(公告)日:2014-02-11

    申请号:US13088905

    申请日:2011-04-18

    IPC分类号: H03H9/70 H03H9/13 H03H9/54

    摘要: A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a predetermined area of a bottom surface of the first substrate. A first air cavity may be formed above the first substrate, and a first lamination resonating portion may be laminated above the first air cavity in sequence of a lower electrode, a piezoelectric layer, and an upper electrode. A second air cavity may be formed above the first substrate, and a second lamination resonating portion may be laminated above the second air cavity in sequence of the lower electrode, the piezoelectric layer, and the upper electrode. The first lamination resonating portion and the second lamination resonating portion may be connected via either the lower electrode or the upper electrode. A first electrode portion may include a third air cavity formed on a bottom surface of either the lower electrode or the upper electrode connecting between the first lamination resonating portion and the second lamination resonating portion.

    摘要翻译: 提供了一种体声波谐振器(BAWR),一种制造BAWR的方法,以及包括BAWR的双工器。 BAWR可以包括第一基板,其包括形成在第一基板的底表面的预定区域中的通孔。 可以在第一基板上形成第一空气腔,并且第一层叠谐振部分可以按照下电极,压电层和上电极的顺序层叠在第一空气腔的上方。 可以在第一基板的上方形成第二空气腔,并且第二层压谐振部分可以按照下电极,压电层和上电极的顺序层叠在第二空气腔的上方。 第一层叠谐振部分和第二层叠谐振部分可以通过下电极或上电极连接。 第一电极部分可以包括形成在第一层压谐振部分和第二层压谐振部分之间的下电极或上电极的底表面上的第三空腔。