Solvents for amorphous fluoropolymers
    1.
    发明授权
    Solvents for amorphous fluoropolymers 有权
    无定形含氟聚合物溶剂

    公开(公告)号:US06248823B1

    公开(公告)日:2001-06-19

    申请号:US09338149

    申请日:1999-06-23

    IPC分类号: C08L2712

    摘要: Disclosed is a liquid/gelatinous composition of matter comprising: (a) a solvent or a mixture of solvents selected from the group consisting of: (i) a CnF2n+2−xHx compound, wherein n is an integer from 6 to 15 and x is an integer from 1 to 3; and (ii) a Cn′F2n′−x′Hx′ compound, wherein n′ is an integer from 7 to 15 and x′ is an integer from 1 to 3; and (b) one or more amorphous fluoropolymers selected from the group consisting of: (i) poly(HFP/TFE); (ii) iodine ended poly(TFE/PMVE); (iii) poly(TFE/PMVE/PEVE); (iv) poly(TFE/PDD); (v) poly(TFE/perfluorovinylether); (vi) poly(CF2═CF(CF2)2OCF═CF2/TFE); and wherein the amorphous fluoropolymer has no detectable Tm (

    摘要翻译: 公开了一种液体/凝胶状物质组合物,其包含:(a)选自以下的溶剂或溶剂混合物:(i)C n F 2n + 2-x H x化合物,其中n为6至15的整数,x 是1到3的整数; 和(ii)Cn'F2n'-x'Hx'化合物,其中n'为7至15的整数,x'为1至3的整数; 和(b)一种或多种选自以下的无定形含氟聚合物:(i)聚(HFP / TFE);(ii)碘末端聚(TFE / PMVE);(iii)聚(TFE / PMVE / PEVE); (IV)聚(TFE / PDD);(v)聚(TFE /全氟乙烯基醚);(vi)聚(CF 2 = CF(CF 2)2 OCF = CF 2 / TFE); 并且其中所述无定形含氟聚合物通过差示扫描量热法不具有可检测的Tm(<1J / g),并且其中所述无定形含氟聚合物占组合物的0.05至30重量%,并且其中存在的至少5%的无定形含氟聚合物在溶液中 溶剂或溶剂混合物。

    USE OF PERFLUOROALKANES IN VACUUM ULTRAVIOLET APPLICATIONS
    6.
    发明申请
    USE OF PERFLUOROALKANES IN VACUUM ULTRAVIOLET APPLICATIONS 审中-公开
    在真空紫外线应用中使用全氟烷烃

    公开(公告)号:US20090079953A1

    公开(公告)日:2009-03-26

    申请号:US12117256

    申请日:2008-05-08

    IPC分类号: G03B27/72

    摘要: This invention concerns liquid perfluoro-n-alkanes for use in applications demanding high transparency at UV wavelengths ranging from about 150 to 165 nm, especially 157 nm. Uses include optical couplants, optical cements, optical elements, optical inspection media for photolithography at 157 nm exposure wavelength.

    摘要翻译: 本发明涉及用于在约150至165nm,特别是157nm的UV波长下要求高透明度的应用中的液体全氟正烷烃。 用途包括光学耦合剂,光学水泥,光学元件,用于157nm曝光波长的光刻的光学检查介质。