Nanosensor and method of manufacturing same
    1.
    发明授权
    Nanosensor and method of manufacturing same 有权
    纳米传感器及其制造方法

    公开(公告)号:US09465007B2

    公开(公告)日:2016-10-11

    申请号:US14224770

    申请日:2014-03-25

    IPC分类号: G01N27/447 G01N33/487

    CPC分类号: G01N27/44791 G01N33/48721

    摘要: A nanosensor may include a substrate that has a hole formed therein, a first insulating layer that is disposed on the substrate and has a nanopore formed therein, first and second electrodes that are disposed on the first insulating layer and are spaced apart from each other, first and second electrode pads that are disposed on the first and second electrodes, respectively, and a protective layer disposed on the first and second electrode pads. A method of manufacturing a nanosensor may include forming a first insulating layer, graphene, and a metal layer on a substrate, patterning the metal layer and the graphene, forming a protective layer on a portion of the graphene and the metal layer, exposing a portion of the graphene by removing a portion of the protective layer, forming a hole in the substrate, and forming a nanopore in the first insulating layer and the graphene to be connected to the hole.

    摘要翻译: 纳米传感器可以包括其中形成有孔的基板,设置在基板上并且在其中形成有纳米孔的第一绝缘层,设置在第一绝缘层上并彼此间隔开的第一和第二电极, 分别设置在第一和第二电极上的第一和第二电极焊盘以及设置在第一和第二电极焊盘上的保护层。 制造纳米传感器的方法可以包括在基板上形成第一绝缘层,石墨烯和金属层,图案化金属层和石墨烯,在石墨烯和金属层的一部分上形成保护层,将部分 通过去除保护层的一部分,在衬底中形成孔,并在第一绝缘层中形成纳米孔和与孔连接的石墨烯。

    NANOSENSOR AND METHOD OF MANUFACTURING SAME
    3.
    发明申请
    NANOSENSOR AND METHOD OF MANUFACTURING SAME 有权
    纳米传感器及其制造方法

    公开(公告)号:US20140202866A1

    公开(公告)日:2014-07-24

    申请号:US14224770

    申请日:2014-03-25

    IPC分类号: G01N27/447

    CPC分类号: G01N27/44791 G01N33/48721

    摘要: A nanosensor may include a substrate that has a hole formed therein, a first insulating layer that is disposed on the substrate and has a nanopore formed therein, first and second electrodes that are disposed on the first insulating layer and are spaced apart from each other, first and second electrode pads that are disposed on the first and second electrodes, respectively, and a protective layer disposed on the first and second electrode pads. A method of manufacturing a nanosensor may include forming a first insulating layer, graphene, and a metal layer on a substrate, patterning the metal layer and the graphene, forming a protective layer on a portion of the graphene and the metal layer, exposing a portion of the graphene by removing a portion of the protective layer, forming a hole in the substrate, and forming a nanopore in the first insulating layer and the graphene to be connected to the hole.

    摘要翻译: 纳米传感器可以包括其中形成有孔的基板,设置在基板上并且在其中形成有纳米孔的第一绝缘层,设置在第一绝缘层上并彼此间隔开的第一和第二电极, 分别设置在第一和第二电极上的第一和第二电极焊盘以及设置在第一和第二电极焊盘上的保护层。 制造纳米传感器的方法可以包括在基板上形成第一绝缘层,石墨烯和金属层,图案化金属层和石墨烯,在石墨烯和金属层的一部分上形成保护层,将部分 通过去除保护层的一部分,在衬底中形成孔,并在第一绝缘层中形成纳米孔和与孔连接的石墨烯。

    Biomolecule detection apparatus including plurality of electrodes
    4.
    发明授权
    Biomolecule detection apparatus including plurality of electrodes 有权
    包括多个电极的生物分子检测装置

    公开(公告)号:US09382575B2

    公开(公告)日:2016-07-05

    申请号:US13614881

    申请日:2012-09-13

    IPC分类号: C12Q1/68 G01N33/487

    摘要: A biomolecule detection apparatus comprising a nanopore device having a front surface and rear surface and including a nanopore having a nano-sized diameter; a reservoir disposed adjacent to a rear surface of the nanopore device; and a power supply unit comprising a first electrode disposed in a front of the nanopore device; a second electrode disposed inside the reservoir; and a third electrode disposed adjacent the nanopore and between the first electrode and the second electrode; as well as a method of using the biomolecule detection apparatus to detect a biomolecule in a sample.

    摘要翻译: 一种生物分子检测装置,包括具有前表面和后表面的纳米孔装置,并且包括具有纳米尺寸直径的纳米孔; 设置在所述纳米孔装置的后表面附近的储存器; 以及电源单元,包括设置在所述纳米孔装置的前面的第一电极; 设置在所述储存器内的第二电极; 以及与所述纳米孔相邻并且位于所述第一电极和所述第二电极之间的第三电极; 以及使用生物分子检测装置检测样品中的生物分子的方法。