Novel photoresist monomers and polymers
    1.
    发明申请
    Novel photoresist monomers and polymers 审中-公开
    新型光致抗蚀剂单体和聚合物

    公开(公告)号:US20060008731A1

    公开(公告)日:2006-01-12

    申请号:US10888746

    申请日:2004-07-09

    IPC分类号: G03C1/492

    摘要: Monomers and polymers useful for forming photoresists. More particularly, photoresists, as well as monomers and polymers for photoresists useful in micro-lithography, specifically monomers bearing acid-labile groups of reduced optical density. The resulting photoresists exhibit improved transparency to 157 nm light. The photoresist compositions are composed of a mixture of at least one water insoluble, acid decomposable polymer which is prepared from at least one monomer having a monomeric unit structure which comprises: where Hal=F, Cl or Br and X=H or F; and which is substantially transparent to ultraviolet radiation at a wavelength of about 157 nm, and at least one photoacid generator capable of generating an acid upon exposure to sufficient activating energy at a wavelength of about 157 nm.

    摘要翻译: 用于形成光致抗蚀剂的单体和聚合物。 更具体地,光致抗蚀剂以及用于微光刻的光致抗蚀剂的单体和聚合物,特别是带有降低光密度的酸不稳定基团的单体。 所得到的光致抗蚀剂显示出对157nm光的改善的透明度。 光致抗蚀剂组合物由至少一种不溶于水的可酸分解聚合物的混合物组成,该聚合物由至少一种具有单体单元结构的单体制备,其中Hal = F,Cl或Br,X = H或F; 并且其对于约157nm的波长的紫外线辐射是基本上透明的,以及至少一种能够在暴露于约157nm的波长的足够活化能时产生酸的光酸产生剂。

    Method of synthesizing fluorinated diene alcohols
    2.
    发明申请
    Method of synthesizing fluorinated diene alcohols 审中-公开
    合成氟化二烯醇的方法

    公开(公告)号:US20070161827A1

    公开(公告)日:2007-07-12

    申请号:US11328048

    申请日:2006-01-09

    IPC分类号: C07C33/42

    CPC分类号: C07C33/423 C07C29/40

    摘要: Disclosed are fluorinated diene alcohols perferably having a fluorine content of at least about 45 weight percent and having a plurality of moieties of the formula CFx and a plurality of moieties of the formula CHx, where each x is independently 1, 2 or 3 and where each CFx moiety is not directly bonded to another CFx moiety. Methods of synthesizing fluorinated diene alcohol compounds are also disclosed comprising reacting at least one C2-C3 alkene halide with at least one reactant of the formula (II): where Z is OH, OR6, OC(O)R7, or a halogen, R6 is a C1-C6 branched or straight chain alkyl, and R7 is a C1-C6 branched or straight chain alkyl or fluoroalkyl,

    摘要翻译: 公开的氟化二烯醇优选具有至少约45重量%的氟含量并且具有多个式CF x X的部分和多个式CH x x的部分, 其中每个x独立地为1,2或3,并且其中每个CF x X部分不直接键合到另一个CF x X部分。 还公开了合成氟化二烯醇化合物的方法,包括使至少一种C 2 -C 3 -C 3烯烃卤化物与至少一种式(II)的反应物反应:其中Z 是OH,OR 6,OC(O)R 7或卤素,R 6是C 1 H 12 C 6 -C 6支链或直链烷基,R 7是C 1 -C 6 -C 6支链或直链烷基, 直链烷基或氟烷基,

    Method for producing fluorinated organic compounds
    4.
    发明申请
    Method for producing fluorinated organic compounds 有权
    氟化有机化合物的制备方法

    公开(公告)号:US20070129580A1

    公开(公告)日:2007-06-07

    申请号:US11592442

    申请日:2006-11-03

    IPC分类号: C07C17/25 C07C21/18

    CPC分类号: C07C17/25 C07C21/18

    摘要: Disclosed is a method for producing fluorinated organic compounds, including hydrofluoropropenes, which preferably comprises converting at least one compound of formula (I): CF3CFnCHmXa-m  (I)to at least one compound of formula (II) CF3CZCHZ  (II).where each X is independently Cl, I or Br; each Z is independently H or F; n is 1 or 2; m is 1, 2 or 3, provided that when n is 1, m is 1 or 2; a is 2 or 3, and a-m≧0. Certain embodiments include the step of reacting fluorinated C2 olefin, such as tetrafluoroethylene, with a Cl addition agent under conditions effective to produce a compound of formula (I).

    摘要翻译: 公开了一种包括氢氟丙烯的氟化有机化合物的制备方法,其优选包括转化至少一种式(I)的化合物:<?in-line-formula description =“In-line formula”end =“lead”→> CF (I)<?in-line-formula description =“In-line-formula description =”In-line-formula description =“In- 至少一种式(II)的化合物<?in-line-formula description =“In-line Formulas”end =“lead”?> CF 3 > CZCHZ(II)。<?in-line-formula description =“In-line Formulas”end =“tail”?>其中每个X独立为Cl,I或Br; 每个Z独立地为H或F; n为1或2; m为1,2或3,条件是当n为1时,m为1或2; a为2或3,a-m> = 0。 某些实施方案包括在有效产生式(I)化合物的条件下,将氟化C 2烯烃如四氟乙烯与Cl加成剂反应的步骤。

    Method of dechlorinating organic compounds comprising vicinal chlorides
    9.
    发明授权
    Method of dechlorinating organic compounds comprising vicinal chlorides 失效
    包含邻氯的有机化合物的脱氯方法

    公开(公告)号:US07473810B1

    公开(公告)日:2009-01-06

    申请号:US11871348

    申请日:2007-10-12

    IPC分类号: C07C19/08 C07C17/25 C07C17/10

    摘要: Provided is a method for selectively preparing 2-chloropentafluoropropene comprising catalytic dechlorination of 1,2,2-trichloro-1,1,3,3,3-pentafluoropropane in the presence of hydrogen and a noble metal catalyst. Also provided is method for dechlorinating a vicinal chloride substituted organic compound using a palladium/barium sulfate catalyst.

    摘要翻译: 提供了选择性制备2-氯五氟丙烯的方法,其包括在氢气和贵金属催化剂的存在下催化脱氯1,2,2-三氯-1,1,3,3,3-五氟丙烷的方法。 还提供了使用钯/硫酸钡催化剂对邻氯取代的有机化合物进行脱氯的方法。