Abstract:
A dry etching method according to one embodiment of the present disclosure includes plasmatizing a dry etching agent and etching a silicon oxide or a silicon nitride with the plasmatized dry etching agent, wherein the dry etching agent comprises CF3I and a C2-C3 fluorine-containing linear nitrile compound, and wherein the concentration of the C2-C3 fluorine-containing linear nitrile compound relative to the CF3I is higher than or equal to 1 vol. ppm and lower than or equal to 1 vol %.
Abstract:
A metal cyclopentadienyl complex has the formula:
wherein m≥0; M is a Group I, II or III main group metal, alkali or transition metal; C5H4 represents a Cp ring where two hydrogens are substituted by M and R(F)m; R(F)m is connected to any one of the carbon atoms of the Cp and selected from a hydrocarbyl, fluorohydrocarbyl, silyl group [SiR′3], or amino group [—NR1R2]. The metal cyclopentadienyl complexes include Li(C5H4-2-C5H11) (CAS No: 2413046-23-6), K(C5H4-2-C5H11), Na(C5H4-2-C5H11), K(C5H4-1-F—C4H10), K(C5H4-1,1,1-3F—C4H6), Li(C5H4-2-C4H9), or In(C5H4-2-C5H11) (CAS No.: 2364634-67-1).
A mono-substituted cyclopentadiene has the formula:
wherein m≥0; C5H5 represents the Cp ring where one hydrogen is substituted R(F)m; R(F)m is connected to any one of the carbon atoms of the Cp and selected from a hydrocarbyl, fluorohydrocarbyl, silyl group [SiR′3], or amino group [—NR1R2]. The mono-substituted cyclopentadienes include C5H5-1-F—C4H10, C5H5-2-C5H11, C5H5-2-C4H9, or C5H5-1,1,1-3F—C4H6.
Abstract:
The invention relates to a process for the preparation of 5-bromo-1,3-dichloro-2-fluoro-benzene by diazotization and reduction of 6-bromo-2,4-dichloro-3-fluoro-aniline, which is obtained by bromination of 2,4-dichloro-3-fluoro-aniline, which is obtained by reduction of 1,3-dichloro-2-fluoro-4-nitro-benzene, and a process for preparing active compounds of formula V (Formula V) wherein the variables are defined in the specification by further transforming 5-bromo-1,3-dichloro-2-fluoro-benzene obtained from 2,4-dichloro-3-fluoro-aniline by the process according to the invention.
Abstract:
A process for producing a chlorinated alkane in which an alkene or an alkane feedstock is contacted with chlorine in a chlorination zone to produce a reaction mixture containing the chlorinated alkane, wherein the chlorine supplied into the chlorination zone has an oxygen content of less than about 2000 ppmv and wherein: the chlorination zone is closed to the atmosphere, and/or the chlorination zone is operated under atmospheric or superatmospheric pressure, and/or the chlorination zone is operated under an inert atmosphere, and/or the content of dissolved oxygen in the alkene or alkane feedstock is less than 2000 ppm.
Abstract:
A polymer compound is provided having a constitutional unit represented by the following formula (1): wherein: R1 and R2 represent an alkyl group, an aryl group, a mono-valent aromatic heterocyclic group, an alkoxy group or an aryloxy group, and Ar1 represents an arylene group or a di-valent condensed polycyclic aromatic heterocyclic group.
Abstract:
The present invention provides new stable crystalline N-iodoamides-1-iodo-3,5,5-trimethylhydantoin (1-ITMH) and 3-iodo-4,4-dimethyl-2-oxazolidinone (IDMO). The present invention further provides a process for the preparation of organic iodides using N-iodoamides of this invention and recovery of the amide co-products from waste water.
Abstract:
The present invention relates to a process for preparing N-(5-chloro-2-isopropylbenzyl)cyclopropanamine by hydrogenation of N-[(5-chloro-2-isopropylphenyl)methylene]cyclopropanamine over specific platinum catalysts.
Abstract:
The specification relates to compounds and process for the preparation of a compound of formula 7, where LG is a leaving group and hal is a halide and is Cl, Br or I. The compound of formula 7 can be useful in the preparation of natural products, such as halichondrin and its derivatives.
Abstract:
Processes for the production of chlorinated propenes are provided. The present processes make use of a feedstream comprising 1,2-dichloropropane, a by-product in the production of chlorohydrin, as a low cost starting material, alone or in combination with 1,2,3-trichloropropane. Selectivity of the process is enhanced over conventional processes employing successive chlorinations and/or dehydrochlorinations, by conducting at least one chlorination in the presence of an ionic chlorination catalyst. The present processes may also generate anhydrous HCl as a byproduct that can be removed from the process and used as a feedstock for other processes, providing further time and cost savings.
Abstract:
The present invention relates to methods, process, and integrated systems for economically producing (E)-1-chloro-3,3,3-trifluoropropene via vapor phase and/or liquid processes.