公开(公告)号：US20140014038A1

公开(公告)日：2014-01-16

申请号：US14007254

申请日：2012-03-16

申请人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

发明人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

IPC分类号： C23C16/513

CPC分类号： C23C16/513 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C14/562 ,  C23C14/568 ,  C23C16/4485 ,  C23C16/45548 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/3244 ,  H01J37/32706 ,  H01J37/32715 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32862

摘要： There is disclosed a plasma enhanced chemical vapor deposition apparatus including a chamber in which plasma reaction is performed to provide a functional film to an object received therein, a pallet mechanically and electrically connected with the object, a conveyer to convey the pallet to an inside from an outside of the chamber, and a power supplier to supply an electric power to the pallet, the power supplier comprising a moving contact distant from the pallet when the pallet is conveyed and contacting with the pallet when the pallet is stopped.

摘要翻译： 公开了一种等离子体增强化学气相沉积装置，其包括：腔室，其中执行等离子体反应以向其中容纳的物体提供功能膜，与物体机械和电连接的托盘，用于将托盘输送到内部的输送器 所述室的外部，以及向所述托盘供电的供电装置，所述供电装置包括当所述托盘被输送时远离所述托盘的移动触点，并且当所述托盘停止时与所述托盘接触。

公开(公告)号：US10081870B2

公开(公告)日：2018-09-25

申请号：US14007254

申请日：2012-03-16

申请人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

发明人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

IPC分类号： C23C16/513 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/32 ,  C23C14/24 ,  C23C16/448 ,  C23C16/455 ,  C23C14/56

CPC分类号： C23C16/513 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C14/562 ,  C23C14/568 ,  C23C16/4485 ,  C23C16/45548 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/3244 ,  H01J37/32706 ,  H01J37/32715 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32862

摘要： There is disclosed a plasma enhanced chemical vapor deposition apparatus including a chamber in which plasma reaction is performed to provide a functional film to an object received therein, a pallet mechanically and electrically connected with the object, a conveyer to convey the pallet to an inside from an outside of the chamber, and a power supplier to supply an electric power to the pallet, the power supplier comprising a moving contact distant from the pallet when the pallet is conveyed and contacting with the pallet when the pallet is stopped.