公开(公告)号：US20140014038A1

公开(公告)日：2014-01-16

申请号：US14007254

申请日：2012-03-16

申请人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

发明人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

IPC分类号： C23C16/513

CPC分类号： C23C16/513 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C14/562 ,  C23C14/568 ,  C23C16/4485 ,  C23C16/45548 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/3244 ,  H01J37/32706 ,  H01J37/32715 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32862

摘要： There is disclosed a plasma enhanced chemical vapor deposition apparatus including a chamber in which plasma reaction is performed to provide a functional film to an object received therein, a pallet mechanically and electrically connected with the object, a conveyer to convey the pallet to an inside from an outside of the chamber, and a power supplier to supply an electric power to the pallet, the power supplier comprising a moving contact distant from the pallet when the pallet is conveyed and contacting with the pallet when the pallet is stopped.

摘要翻译： 公开了一种等离子体增强化学气相沉积装置，其包括：腔室，其中执行等离子体反应以向其中容纳的物体提供功能膜，与物体机械和电连接的托盘，用于将托盘输送到内部的输送器 所述室的外部，以及向所述托盘供电的供电装置，所述供电装置包括当所述托盘被输送时远离所述托盘的移动触点，并且当所述托盘停止时与所述托盘接触。

公开(公告)号：US09028925B2

公开(公告)日：2015-05-12

申请号：US13315495

申请日：2011-12-09

申请人： Jinhyouk Shin ,  MoonKap Lee ,  Junggeun Oh ,  Jeonggyu Kim

发明人： Jinhyouk Shin ,  MoonKap Lee ,  Junggeun Oh ,  Jeonggyu Kim

IPC分类号： C23C16/00 ,  C09C1/00 ,  H05H1/24 ,  C23C16/40

CPC分类号： C23C16/405 ,  C23C16/401 ,  C23C16/50 ,  F28F19/02 ,  F28F2245/02 ,  F28F2265/20

摘要： A product having a functional layer and a method for fabricating the same. A method for fabricating a product having a functional layer includes the step of conducting a plasma reaction with titanium and silicon precursor compounds to form a coating on a substrate, such as a heat exchanger surface.

摘要翻译： 具有功能层的产品及其制造方法。 制造具有功能层的产品的方法包括与钛和硅前体化合物进行等离子体反应以在诸如热交换器表面的基底上形成涂层的步骤。

公开(公告)号：US10081870B2

公开(公告)日：2018-09-25

申请号：US14007254

申请日：2012-03-16

申请人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

发明人： Jinhyouk Shin ,  Jeonggyu Kim ,  Kwangho Lee ,  Jangwoo Lee ,  Moonkap Lee ,  Junggeun Oh

IPC分类号： C23C16/513 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/32 ,  C23C14/24 ,  C23C16/448 ,  C23C16/455 ,  C23C14/56

CPC分类号： C23C16/513 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C14/562 ,  C23C14/568 ,  C23C16/4485 ,  C23C16/45548 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/3244 ,  H01J37/32706 ,  H01J37/32715 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32862

摘要： There is disclosed a plasma enhanced chemical vapor deposition apparatus including a chamber in which plasma reaction is performed to provide a functional film to an object received therein, a pallet mechanically and electrically connected with the object, a conveyer to convey the pallet to an inside from an outside of the chamber, and a power supplier to supply an electric power to the pallet, the power supplier comprising a moving contact distant from the pallet when the pallet is conveyed and contacting with the pallet when the pallet is stopped.

公开(公告)号：US20120145036A1

公开(公告)日：2012-06-14

申请号：US13315495

申请日：2011-12-09

申请人： Jinhyouk Shin ,  MoonKap Lee ,  Junggeun Oh ,  Jeonggyu Kim

发明人： Jinhyouk Shin ,  MoonKap Lee ,  Junggeun Oh ,  Jeonggyu Kim

IPC分类号： C09D1/00 ,  H05H1/24 ,  B05D1/00 ,  C09D7/12

CPC分类号： C23C16/405 ,  C23C16/401 ,  C23C16/50 ,  F28F19/02 ,  F28F2245/02 ,  F28F2265/20

摘要： A product having a functional layer and a method for fabricating the same. A method for fabricating a product having a functional layer includes the step of conducting a plasma reaction with titanium and silicon precursor compounds to form a coating on a substrate, such as a heat exchanger surface.

摘要翻译： 具有功能层的产品及其制造方法。 制造具有功能层的产品的方法包括与钛和硅前体化合物进行等离子体反应以在诸如热交换器表面的基底上形成涂层的步骤。