Coating, composed of an optically effective layer system, for
substrates, whereby the layer system has a high anti-reflective effect,
and method for manufacturing the coating
    1.
    发明授权
    Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for manufacturing the coating 失效
    由光学有效层系统组成的用于基板的涂层,由此层系统具有高的抗反射效果,以及制造涂层的方法

    公开(公告)号:US5170291A

    公开(公告)日:1992-12-08

    申请号:US717027

    申请日:1991-06-18

    IPC分类号: C03C17/34 G02B1/11

    摘要: A coating for applying to a front side of a substrate, which side is facing an observer, comprises a four-layer system which is optically effective and has a high anti-reflective effect. A first layer of this system is applied onto the front side of the substrate and is, preferably, a highly-refracting TiO.sub.2 layer, the second layer is applied to the first layer and is a low-refracting Al.sub.2 O.sub.3 layer, a third layer of the system is applied to the second layer and is, preferably, a high-refracting TiO.sub.2, while the fourth layer applied to the third layer is, preferably, a low-refracting SiO.sub.2 layer. The layers can be formed by either a pyrolytic method, a plasma-supported chemical vapor deposition method, a sputtering method or a chemical vapor deposition method. Preferably, they are formed by a DC-reactive sputtering method with a magnetron.

    摘要翻译: 用于施加到基板的前侧的涂层,该涂层面向观察者,包括光学有效并具有高抗反射效果的四层体系。 该系统的第一层被施加到基板的正面,并且优选地是高折射率的TiO 2层,第二层施加到第一层,并且是低折射Al 2 O 3层,第三层是 系统被施加到第二层,并且优选地是高折射TiO 2,而施加到第三层的第四层优选地是低折射SiO 2层。 这些层可以通过热解法,等离子体支持的化学气相沉积法,溅射法或化学气相沉积法形成。 优选地,它们由具有磁控管的DC反应溅射法形成。

    Process and apparatus for reactive coating of a substrate
    2.
    发明授权
    Process and apparatus for reactive coating of a substrate 失效
    用于基材的反应性涂布的方法和装置

    公开(公告)号:US5427665A

    公开(公告)日:1995-06-27

    申请号:US728562

    申请日:1991-07-11

    IPC分类号: C23C14/00 C23C14/34 H01J37/34

    摘要: An apparatus for the reactive coating of a substrate 1, with silicon dioxide (SiO.sub.2) for example, comprises a power source 10, 37 connected to an electrode 5 which is disposed in an evacuable coating chamber 15, 15a and interacts with a target 3 which is sputtered and the sputtered particles of which are deposited on the substrate 1, wherein argon and oxygen, for example, are supplied to the coating chamber 15, 15a. The target to be sputtered is composed of several parts, for example. A center part 3a of the target 3 opposite the substrate 1 is made of silicon (Si) and the part 3b surrounding this center portion is made of zinc (Sn), for example. Provision is made for a diaphragm 24 between the substrate 1 on the one hand, and the target 3, on the other hand. The shape of the magnetic field of the electrode 5 during the sputtering generates a sputtering of the more reactive target material 3a in the oxidic mode and of the less reactive target material 3b in the metallic mode.

    摘要翻译: 用于二氧化硅(SiO 2)的基体1的反应性涂覆的装置包括连接到电极5的电源10,37,电极5设置在可抽出的涂覆室15,15a中并与靶3相互作用 被溅射并且其溅射的颗粒沉积在基底1上,其中例如氩和氧被提供给涂覆室15,15a。 例如,溅射的目标由几个部分组成。 靶3的与基板1相对的中心部3a由硅(Si)构成,围绕该中心部的部分3b例如由锌(Sn)构成。 另一方面,为了在一方面在基板1和目标3之间设置隔膜24。 在溅射期间电极5的磁场的形状在金属模式中产生更具反应性的目标材料3a在氧化模式中的溅射和较少反应性的目标材料3b的溅射。

    Coating, composed of an optically effective layer system, for
substrates, whereby the layer system has a high anti-reflective effect,
and method for the manufacturing of the coating
    3.
    发明授权
    Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for the manufacturing of the coating 失效
    涂层,组合有光学有效层系统,用于基板,由于层系具有高抗反射效应,以及制造涂层的方法

    公开(公告)号:US5216542A

    公开(公告)日:1993-06-01

    申请号:US599988

    申请日:1990-10-19

    IPC分类号: C03C17/34 G02B1/10

    摘要: A coating, composed of an optically effective layer system for substrates, whereby the layer system has a high antireflective effect. On a front side of the substrate, facing the observer, in sequence from the front side to the observer, a first layer is arranged on the substrate, functioning as dielectric and comprising metal oxide. Thereupon follows a second layer comprising nitride, preferably TiN.sub.x (x is equal to or greater than 1, preferably x=1.05). A third layer follows functioning as dielectric and comprising metal oxide. Thereupon a fourth layer follows comprising nitride, preferably TiN.sub.x (x is equal to or greater than 1, preferably x=1.05). A fifth layer follows functioning as dielectric comprising metal oxide. On a backside of the substrate a TiN.sub.x -layer (x.gtoreq.1, preferably x=1.05) is arranged. The adequate selection of certain materials for the individual layers, of certain layer thicknesses and of a certain sequence of the individual layers results in a surprisingly good antireflective coating, contrast increase and antistatic effect. These good optical features of the layer system are reached with a small number of layers and with thin layer thicknesses. This, in turn, leads to an extremely cost saving manufacturing of the coating.

    摘要翻译: 一种由用于基底的光学有效层系统组成的涂层,由此该层系统具有高的抗反射效果。 在基板的正面上,从观察者的正面向观察者方向依次排列有第一层,作为电介质并且包含金属氧化物而被布置在基板上。 因此,随后是包含氮化物的第二层,优选TiN x(x等于或大于1,优选x = 1.05)。 第三层的功能是电介质并包含金属氧化物。 因此,第四层包括氮化物,优选TiN x(x等于或大于1,优选x = 1.05)。 第五层的功能是包含金属氧化物的电介质。 在衬底的背面,布置TiNx层(x> / = 1,优选x = 1.05)。 对于各层,某些层厚度和各层的某个顺序的某些材料的适当选择导致出人意料的良好的抗反射涂层,对比度增加和抗静电效果。 层系统的这些良好的光学特征达到少量层和薄层厚度。 这又导致了涂层极其节省成本的制造。

    Method for the production of coated glass with a high transmissivity in
the visible spectral range and with a high reflectivity for thermal
radiation
    4.
    发明授权
    Method for the production of coated glass with a high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation 失效
    用于生产在可见光谱范围内具有高透射率并具有高反射率的热辐射的涂覆玻璃的方法

    公开(公告)号:US5201926A

    公开(公告)日:1993-04-13

    申请号:US230681

    申请日:1988-08-08

    IPC分类号: B60J1/00 C03C17/36

    摘要: Method for making glazing with a high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation as well as low surface resistance. On substrates of mineral glass a system of coatings is built up in the following order:Coating 1: oxide from the group, tin oxide, silicon dioxide, aluminum oxide, tantalum oxide, zirconium oxide, or mixtures thereof,Coating 2: alloy of 80 weight-percent of nickel and 20 weight-percent of chromium,Coating 3: silver or a silver alloy with at least 50 weight-percent silver content,Coating 4: alloy of 80 weight-percent of nickel and 20 weight-percent of chromium,Coating 5: oxide from the group tin oxide, silicon dioxide, aluminum oxide, tantalum oxide, zirconium oxide, or mixtures thereof.Thereafter the substrate with the entire packet of coatings is heated to the softening temperature of the glass and bent to the final shape.

    摘要翻译: 在可见光谱范围内具有高透射率并具有高反射率的热辐射以及低表面电阻的方法。 在矿物玻璃的基材上,按照以下顺序建立涂层体系:涂层1:氧化锡,二氧化硅,氧化铝,氧化钽,氧化锆或其混合物,涂层1:氧化物,涂层2:合金80 镍的重量百分比和20重量%的铬,涂层3:银或银合金具有至少50重量%的银含量,涂层4:80重量%的镍和20重量%的铬的合金, 涂层5:氧化锡,二氧化硅,氧化铝,氧化钽,氧化锆或其混合物的氧化物。 此后,将具有整个涂层的基底加热至玻璃的软化温度并弯曲成最终形状。

    Process for the production of curve glazing with a high transmittance in
the visible spectral range and a high reflectance for thermal radiation
    5.
    发明授权
    Process for the production of curve glazing with a high transmittance in the visible spectral range and a high reflectance for thermal radiation 失效
    用于生产在可见光谱范围内具有高透射率的曲线玻璃以及用于热辐射的高反射率的方法

    公开(公告)号:US4919778A

    公开(公告)日:1990-04-24

    申请号:US356668

    申请日:1989-05-19

    IPC分类号: C03C17/36 C03C27/12

    摘要: A system of layers is built up on substrates of mineral glass in the following order: first layer: an oxide from the group, stannic oxide, silicon dioxide, aluminum oxide, tantalum oxide, zirconium oxide, or their mixed oxides; second layer: a metal from the group, tantalum, tungsten, nickel, iron; third layer: silver or a silver alloy containing at least 50 weight-percent of silver; fourth layer: a metal from the group, tantalum, tungsten, nickel, iron or their alloys; fifth layer: an oxide from the group, stannic oxide, silicon dioxide, aluminum oxide, tantalum oxide, zirconium oxide or their mixed oxides. After that, the substrate with all the coating layers is heated to the softening temperature of the glass in an oxidizing atmosphere and bent to the final shape.

    摘要翻译: 按照以下顺序在矿物玻璃的基板上建立层的系统:第一层:来自该组的氧化物,氧化锡,二氧化硅,氧化铝,氧化钽,氧化锆或其混合氧化物; 第二层:一组金属,钽,钨,镍,铁; 第三层:含有至少50重量%银的银或银合金; 第四层:一组金属,钽,钨,镍,铁或它们的合金; 第五层:来自该组的氧化物,氧化锡,二氧化硅,氧化铝,氧化钽,氧化锆或它们的混合氧化物。 之后,将具有所有涂层的基板在氧化气氛中加热至玻璃的软化温度并弯曲成最终形状。

    Cathode sputtering device
    7.
    发明授权
    Cathode sputtering device 失效
    阴极溅射装置

    公开(公告)号:US5071535A

    公开(公告)日:1991-12-10

    申请号:US567946

    申请日:1990-08-15

    IPC分类号: C23C14/34

    CPC分类号: C23C14/3407

    摘要: Cathode sputtering apparatus with a high sputtering rate, including a cathode having a cathode base 1 and a target 6 disposed parallel thereto and being provided with a channel 5 in the cathode base which is passed through by a cooling agent 12. With respect to the target 6, 10 to be cooled, this channel 5 is bounded by a thin wall 2 configured as a membrane. The wall 2 has large contact surfaces exhibiting a good heat transfer to the target surface. The contact surface between the target 6 and the wall 2 is coated with a material, e.g. a graphite layer, which has a low sputtering rate in order to delay a sputtering through as long as possible.

    摘要翻译: 具有高溅射速率的阴极溅射装置,包括具有阴极基体1和平行设置的靶6的阴极,并且在阴极基体中设置有通过冷却剂12通过的通道5.相对于靶 6,10被冷却,该通道5被配置为膜的薄壁2界定。 壁2具有表现出对目标表面的良好热传递的大的接触表面。 目标6和壁2之间的接触表面涂覆有材料,例如, 石墨层,其溅射速率低,以便尽可能地延长溅射。

    Magnetron cathode for a rotating target
    8.
    发明授权
    Magnetron cathode for a rotating target 失效
    用于旋转靶的磁控管阴极

    公开(公告)号:US5364518A

    公开(公告)日:1994-11-15

    申请号:US976960

    申请日:1992-11-13

    IPC分类号: C23C14/34 H01J37/34

    摘要: Magnets are arranged inside a rotating tubular target to form a racetrack-shaped plasma having two straight stretches parallel to the target axis and two end stretches connecting the straight stretches. In order to achieve uniform target erosion, the magnets are arranged so that the plasma is wider and therefore less intense over the end stretches than it is over the straight stretches.

    摘要翻译: 磁体布置在旋转的管状靶内,以形成具有平行于目标轴线的两个直线段和连接直线段的两个端部延伸部的跑道形等离子体。 为了实现均匀的目标侵蚀,磁体被布置成使得等离子体比在其直线延伸部分上更宽并且因此比端部延伸的强度更小。

    Process for coating substrates made of a transparent material, for
example floatglass
    9.
    发明授权
    Process for coating substrates made of a transparent material, for example floatglass 失效
    用于涂覆由透明材料制成的基材的方法,例如浮法玻璃

    公开(公告)号:US4990234A

    公开(公告)日:1991-02-05

    申请号:US377531

    申请日:1989-07-10

    IPC分类号: C03C17/245 C23C14/08

    摘要: Process for coating transparent substrates, for example float glass, with a transparent dielectric layer having a low refractive index (n 6.0A cm.sup.2 /W sec) by means of reactive direct current cathode sputtering. A vacuum chamber includes a cathode 5 which is provided on one of its surfaces with the material (target) to be sputtered and deposited on the substrate 3. The material to be sputtered (target) is a silicide, preferably nickel disilicide (NiSi.sub.2), and the layer deposited on the substrate is the corresponding oxide, for example NiSi-oxide. The reactive gas introduced into the vacuum chamber is oxygen and the process gas is a noble gas.

    摘要翻译: 通过反应性直流阴极溅射,以高层生长速率(> 6.0A cm 2 / W sec)以透明的介电层涂覆透明基板(例如浮法玻璃),具有低折射率(n <1.7)的方法。 真空室包括阴极5,阴极5在其一个表面上提供要溅射并沉积在衬底3上的材料(靶)。待溅射的材料(靶)是硅化物,优选二硅化镍(NiSi 2), 并且沉积在衬底上的层是相应的氧化物,例如NiSi氧化物。 引入真空室的反应气体是氧气,工艺气体是惰性气体。

    Multichamber coating apparatus
    10.
    发明授权
    Multichamber coating apparatus 失效
    多室涂装置

    公开(公告)号:US5382126A

    公开(公告)日:1995-01-17

    申请号:US39865

    申请日:1993-03-30

    CPC分类号: C23C14/568

    摘要: A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of movement of the transport car 5. The gate 7 is formed of an upper gate part 8 and a lower gate part 9 forming a slot 10 which is adaptable to the cross section of the car. A cover associated with the top gate part and parallel to the direction of movement has an area greater than the car in order to minimize gas transfer between chambers.

    摘要翻译: 在顶部打开并支撑在辊上的运输车将基材从第一涂料室移动到第二涂料室,该第二涂料室由与输送汽车5的运动方向横向延伸的闸门7分开。闸门7由上部 闸门部分8和下门部分9,形成适于轿厢横截面的槽10。 与顶部门部分相关联并且平行于运动方向的盖具有大于轿厢的面积,以便最小化室之间的气体传递。