Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors
    4.
    发明申请
    Volatile Imidazoles and Group 2 Imidazole Based Metal Precursors 有权
    挥发性咪唑和第2组咪唑类金属前体

    公开(公告)号:US20120035351A1

    公开(公告)日:2012-02-09

    申请号:US13016127

    申请日:2011-01-28

    CPC分类号: H01L21/28556 C07D233/54

    摘要: Sterically hindered imidazole ligands are described, along with their synthesis, which are capable of coordinating to Group 2 metals, such as: calcium, magnesium, strontium, in an eta-5 coordination mode which permits the formation of monomeric or dimeric volatile complexes.A compound comprising one or more polysubstituted imidazolate anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-imidazolate anion.Synthesis of the novel compounds and their use to form BST films is also contemplated

    摘要翻译: 描述了咪唑配位体以及它们的合成,它们能够以能够形成单体或二聚挥发性络合物的eta-5配位模式配合第2族金属,例如:钙,镁,锶。 包含与选自钡,锶,镁,镭或钙的金属或其混合物配位的一种或多种多取代咪唑酸盐阴离子的化合物。 或者,一个阴离子可以被第二个非咪唑酸阴离子取代。 还考虑了新型化合物的合成及其用于形成BST膜的用途

    Volatile imidazoles and group 2 imidazole based metal precursors
    5.
    发明授权
    Volatile imidazoles and group 2 imidazole based metal precursors 有权
    挥发性咪唑和2族咪唑基金属前体

    公开(公告)号:US08703103B2

    公开(公告)日:2014-04-22

    申请号:US13016127

    申请日:2011-01-28

    IPC分类号: A61B5/055

    CPC分类号: H01L21/28556 C07D233/54

    摘要: Sterically hindered imidazole ligands are described, along with their synthesis, which are capable of coordinating to Group 2 metals, such as: calcium, magnesium, strontium, in an eta-5 coordination mode which permits the formation of monomeric or dimeric volatile complexes.A compound comprising one or more polysubstituted imidazolate anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-imidazolate anion.Synthesis of the novel compounds and their use to form BST films is also contemplated.

    摘要翻译: 描述了咪唑配位体以及它们的合成,它们能够以能够形成单体或二聚挥发性络合物的eta-5配位模式配合第2族金属,例如:钙,镁,锶。 包含与选自钡,锶,镁,镭或钙的金属或其混合物配位的一种或多种多取代咪唑酸盐阴离子的化合物。 或者,一个阴离子可以被第二个非咪唑酸阴离子取代。 还考虑了新型化合物的合成及其用于形成BST膜的用途。