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1.发明授权
公开(公告)号：US5567650A
公开(公告)日：1996-10-22
申请号：US356421
申请日：1994-12-15
IPC分类号： H01L21/768 , H01L21/28
CPC分类号： H01L21/76877 , Y10S438/978
摘要： A process for contouring a via formed in a dielectrics whereby a layer of a refractory metal is formed on the dielectric and in the via. The refractory metal layer is removed until a surface of the refractory metal within the via is below the upper surface of the dielectric. An etching process removes a portion of the dielectric and a tapered shape is formed at the intersection of the via and the upper surface of the dielectric. A second layer of metal is formed over the dielectric, with the second layer of metal extending into the vias and contacting the refractory metal with the tapered shape providing improved step coverage of the second layer of metal at the via.
摘要翻译： 用于对形成在电介质中的通孔进行轮廓化的方法，由此在电介质和通孔中形成难熔金属层。 去除耐火金属层，直到通孔内的难熔金属的表面低于电介质的上表面。 蚀刻工艺去除电介质的一部分，并且在通孔和电介质的上表面的相交处形成锥形形状。 第二层金属形成在电介质上，第二层金属延伸到通孔中，并使难熔金属与锥形形状接触，从而提供在通孔处的第二金属层的改进的台阶覆盖。
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公开(公告)号：US07767968B2
公开(公告)日：2010-08-03
申请号：US11901508
申请日：2007-09-18
申请人： Daniel W. Youngner , Lisa M. Lust , Robert W. Boyd
发明人： Daniel W. Youngner , Lisa M. Lust , Robert W. Boyd
IPC分类号： G01J5/02
CPC分类号： G01V8/005 , G01S13/867 , G01S13/887
摘要： A method and system for detecting concealed weapons and explosives by imaging THz scenes using conventional optics and detectors is provided. Photon fields with two different wavelengths can be sent through a chopper and towards a wavelength-selective mirror. A light beam with a wavelength in the visible or IR range is sent toward a visible photon array detector. Similarly, light beams with wavelengths in the THz range can be sent towards a target, which are reflected and/or absorbed by objects in the target. The reflected or transmitted light continues on through an optional filter to remove background light, then into a non-imaging detector. The visible photon array detector can be coupled with the non-imaging detector, which will register an image of the scene that is illuminated by the THz photons.
摘要翻译： 提供了一种通过使用常规光学和检测器对太赫兹场景进行成像检测隐藏的武器和爆炸物的方法和系统。 具有两种不同波长的光子场可以通过斩波器和波长选择性反射镜发射。 将具有可见光或IR范围波长的光束发送到可见光子阵列检测器。 类似地，具有THz范围波长的光束可以被发送到目标，由靶中的物体反射和/或吸收。 反射或透射的光继续通过可选的滤光器以去除背景光，然后进入非成像检测器。 可见光子阵列检测器可以与非成像检测器耦合，该非成像检测器将对由THz光子照射的场景的图像进行寄存。
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公开(公告)号：US20100033256A1
公开(公告)日：2010-02-11
申请号：US12484899
申请日：2009-06-15
CPC分类号： G04F5/14
摘要： An atomic clock having a physics package that includes a vacuum chamber cavity that holds atoms of Rb-87 under high vacuum conditions, an optical bench having a single laser light source, a local oscillator, a plurality of magnetic field coils, an antenna, at least one photo-detector and integrated control electronics. The single laser light source has a fold-retro-reflected design to create three retro-reflected optical beams that cross at 90° angles relative to one another in the vacuum chamber cavity. This design allows the single laser light source to make the required six trapping beams needed to trap and cool the atoms of Rb-87. The foregoing design makes possible atomic clocks having reduced size and power consumption and capable of maintaining an ultra-high vacuum without active pumping.
摘要翻译： 具有物理封装的原子钟包括在高真空条件下保存Rb-87原子的真空室腔，具有单个激光光源，本地振荡器，多个磁场线圈，天线的光学台 至少一个光电检测器和集成控制电子元件。 单个激光光源具有折射反射设计，以在真空室腔中产生相对于彼此以90度角交叉的三个反射光束。 该设计允许单个激光光源产生所需的六个俘获光束，以捕获和冷却Rb-87的原子。 上述设计使得可能的原子钟具有减小的尺寸和功率消耗，并且能够在没有主动泵送的情况下保持超高真空。
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公开(公告)号：US20090206678A1
公开(公告)日：2009-08-20
申请号：US12033942
申请日：2008-02-20
申请人： Lisa M. Lust , Daniel W. Youngner
发明人： Lisa M. Lust , Daniel W. Youngner
CPC分类号： H01G5/40 , Y10T307/786
摘要： A start-up circuit having a micro crush capacitor that is operatable with a small pressure. The crush capacitor may be connected to a silicon controlled rectifier or similar device. Applying the pressure to the crush capacitor may turn on the SCR which may in turn activate a sensor. The circuit may be fabricated on a flexible substrate which together may be regarded as a flexible circuit. The flexible circuit may be held down on a back plate with a form plate clamping the circuit at its perimeter edge. The flexible circuit may be held firm with the plates for component insertion and/or circuit testing.
摘要翻译： 具有可以在较小压力下操作的微压电容器的启动电路。 粉碎电容器可以连接到可控硅整流器或类似器件。 将压力施加到粉碎电容器可能导致SCR，这可能会激活传感器。 电路可以制造在柔性基板上，这些可以被认为是柔性电路。 柔性电路可以在具有在其周边边缘处夹持电路的成形板的背板上保持下来。 柔性电路可以用板固定，用于部件插入和/或电路测试。
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公开(公告)号：US06894787B2
公开(公告)日：2005-05-17
申请号：US10036629
申请日：2001-12-21
申请人： Daniel W. Youngner , Son Thai Lu
发明人： Daniel W. Youngner , Son Thai Lu
CPC分类号： G01L9/002
摘要： A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.
摘要翻译： 在衬底上形成压力传感器，衬底的表面具有p-n结，壳体上具有在壳体内的光束在p-n结上。 光束和外壳以及p-n结表面形成光学法布里 - 珀罗腔。 光纤被定位在形成在p-n结下面的衬底下侧的孔中。 来自光纤的光对p-n结进行充电并将其驱动到振动模式。 压力变化改变了膜中的张力，随着压力的变化而改变频率，从而可以检测压力。
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公开(公告)号：US06378292B1
公开(公告)日：2002-04-30
申请号：US09709107
申请日：2000-11-10
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： F02K942
摘要： A microelectrical mechanical system (MEMS) microthruster array is disclosed. The MEMS microthruster array of the present invention can be used for maintaining inter satellite distance in small satellites. One microthruster array includes numerous microthruster propulsion cells, each having a vacuum enclosed explosive igniter disposed on one side by a breakable diaphragm and having a propellant-filled chamber on the opposite side of the diaphragm. Upon explosion of the explosive igniter, the first diaphragm breaks, which, together with the explosion of the explosive igniter, causes the propellant to expand rapidly, thereby providing exhaust gases which are ejected from an exterior face of the microthruster propulsion array, thereby providing a small unit of thrust.
摘要翻译： 公开了一种微电机械系统（MEMS）微推移器阵列。 本发明的MEMS微推移器阵列可用于维持小卫星中的卫星间距离。 一个微型推进器阵列包括许多微推进器推进室，每个微型推进器单元具有通过可破坏隔膜设置在一侧的真空封闭爆炸点火器，并且在隔膜的相对侧上具有推进剂填充室。 当爆炸性点火器爆炸时，第一隔膜破裂，随着爆炸点火器的爆炸，爆炸点火器的爆炸使得推进剂迅速膨胀，从而提供从微推进器推进阵列外表面喷出的废气， 小推力单位。
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公开(公告)号：US6031944A
公开(公告)日：2000-02-29
申请号：US999165
申请日：1997-12-30
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
CPC分类号： G01P15/097 , G01L1/103 , G01L1/186 , G01L9/0011 , G01L9/002
摘要： A very high temperature microbeam sensor of a resonant integrated microstructure having an electrostatic beam driver and an optical fiber pick-up for sensed light from the beam. The high temperature sensor has no components that are vulnerable to temperatures up to 600 degrees C. Associated components for detection, processing and driving are remote from the sensor environment. By using different materials in the beam assembly, such as tungsten for the beam, and sapphire for the substrate and the shell, the sensor can withstand temperatures up to 1000 degrees C. Also, optical fiber may be used for long distance connections between processing electronics and the driver in the sensing device, by locating a photo detector just outside the very or ultra high temperature sensing environment, and then using optical fiber for sending long distance signals from the processor to the driver photo detector, for eliminating electrical signal-to-noise problems.
摘要翻译： 具有静电束驱动器和用于来自光束的感测光的光纤拾取器的谐振集成微结构的非常高温的微束传感器。 高温传感器没有易受温度高达600摄氏度影响的组件。用于检测，处理和驱动的相关组件远离传感器环境。 通过在梁组件中使用不同的材料，例如用于梁的钨，以及用于衬底和壳的蓝宝石，传感器可以承受高达1000摄氏度的温度。此外，光纤可用于处理电子器件之间的长距离连接 以及感测装置中的驱动器，通过将光电检测器定位在非常或超高温感测环境之外，然后使用光纤将长距离信号从处理器发送到驱动器光电检测器，以消除电信号 - 噪音问题。
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公开(公告)号：US6025914A
公开(公告)日：2000-02-15
申请号：US992267
申请日：1997-12-17
申请人： Carol M. Ford , Daniel W. Youngner , J. David Zook
发明人： Carol M. Ford , Daniel W. Youngner , J. David Zook
CPC分类号： H01S3/083 , G01C19/661 , H01S3/038 , H01S3/0835
摘要： An apparatus and method for prevention of migration of mobile ions in a gyroscope. A dielectric barrier material layer is placed between a gyroscope body and one or more gyroscope components. The dielectric barrier material layer reduces the electric field formed in the gyroscope block, and thus reduces ion migration therein. The material may prevent mobile ions from reaching the cathode seal.
摘要翻译： 用于防止陀螺仪中的移动离子迁移的装置和方法。 电介质阻挡材料层放置在陀螺仪主体和一个或多个陀螺仪部件之间。 电介质阻挡材料层减小陀螺仪块中形成的电场，从而减少其中的离子迁移。 该材料可以防止移动离子到达阴极密封。
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9.发明授权Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells 有权制造技术，以提高阳极结合蒸气细胞的压力均匀性公开(公告)号：US09146540B2
公开(公告)日：2015-09-29
申请号：US13570363
申请日：2012-08-09
申请人： Daniel W. Youngner , Jeff A. Ridley , Son T. Lu
发明人： Daniel W. Youngner , Jeff A. Ridley , Son T. Lu
CPC分类号： G04F5/14 , Y10T428/24149
摘要： A method of fabricating vapor cells comprises forming a plurality of vapor cell dies in a first wafer having an interior surface region and a perimeter, and forming a plurality of interconnected vent channels in the first wafer. The vent channels provide at least one pathway for gas from each vapor cell die to travel outside of the perimeter of the first wafer. The method further comprises anodically bonding a second wafer to one side of the first wafer, and anodically bonding a third wafer to an opposing side of the first wafer. The vent channels allow gas toward the interior surface region of the first wafer to be in substantially continuous pressure-equilibrium with gas outside of the perimeter of the first wafer during the anodic bonding of the second and third wafers to the first wafer.
摘要翻译： 一种制造蒸汽池的方法包括在具有内表面区域和周边的第一晶片中形成多个蒸汽池模具，并在第一晶片中形成多个互连的排气通道。 通气通道为来自每个蒸汽池模具的气体提供至少一个通路，以便在第一晶片的周边外行进。 该方法还包括将第二晶片阳极结合到第一晶片的一侧，并将第三晶片阳极结合到第一晶片的相对侧。 在第二和第三晶片与第一晶片的阳极接合期间，排气通道允许气体朝向第一晶片的内表面区域与第一晶片的周边外的气体基本上连续的压力平衡。
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10.发明申请DESIGNS AND PROCESSES FOR THERMALLY STABILIZING A VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL) IN A CHIP-SCALE ATOMIC CLOCK 有权用于热稳定垂直孔表面激光（VCSEL）的芯片尺寸原子钟的设计和工艺公开(公告)号：US20110188524A1
公开(公告)日：2011-08-04
申请号：US12884489
申请日：2010-09-17
申请人： Daniel W. Youngner , Son T. Lu , Jeff A. Ridley , Linda J. Forner
发明人： Daniel W. Youngner , Son T. Lu , Jeff A. Ridley , Linda J. Forner
CPC分类号： H01S5/183 , G04F5/14 , H01S5/005 , H01S5/02 , H01S5/02208 , H01S5/02296 , H01S5/02453 , H01S5/02476
摘要： Designs and processes for thermally stabilizing a vertical cavity surface emitting laser (vcsel) in a chip-scale atomic clock are provided. In one embodiment, a Chip-Scale Atomic Clock includes: a vertical cavity surface emitting laser (vcsel); a heater block coupled to a base of the vcsel; a photo detector; a vapor cell, wherein the vapor cell includes a chamber that defines at least part of an optical path for laser light between the vcsel and the photo detector; and an iso-thermal cage surrounding the vcsel on all sides, the iso-thermal cage coupled to the heater block via a thermally conductive path.
摘要翻译： 提供了在芯片级原子钟中热稳定垂直腔表面发射激光器（vcsel）的设计和工艺。 在一个实施例中，芯片级原子钟包括：垂直腔表面发射激光器（vcsel）; 耦合到所述vcsel的基座的加热器块; 光电检测器 蒸汽池，其中所述蒸汽池包括限定用于所述vcsel和所述光电检测器之间的激光的光路的至少一部分的室; 以及围绕所有侧面上的vcsel的等温保持架，通过导热路径耦合到加热器块的等热笼。
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