-
公开(公告)号：US07645627B2
公开(公告)日：2010-01-12
申请号：US12011063
申请日：2008-01-24
申请人： John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack L. Glenn , Seyed R. Zarabadi
发明人： John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack L. Glenn , Seyed R. Zarabadi
IPC分类号： H01L21/00
CPC分类号： B81C1/00246 , B81B3/001 , B81B2201/0242 , B81C2203/0735
摘要： A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
摘要翻译： 提供角速率传感器形式的运动传感器和制造传感器的方法，并且包括支撑衬底和由衬底支撑并具有柔性共振的硅感测环。 驱动电极在环上施加静电力，使环产生共振。 感测电极感测指示环的谐振的振动模式的电容的变化，以便感测运动。 多个硅支撑环将基板连接到环上。 支撑环以与硅的结晶取向基本上匹配的弹性模量（例如约22.5度和67.5度）的角度定位。
-
公开(公告)号：US20090191660A1
公开(公告)日：2009-07-30
申请号：US12011063
申请日：2008-01-24
申请人： John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack L. Glenn , Seyed R. Zarabadi
发明人： John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack L. Glenn , Seyed R. Zarabadi
IPC分类号： H01L21/00
CPC分类号： B81C1/00246 , B81B3/001 , B81B2201/0242 , B81C2203/0735
摘要： A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
摘要翻译： 提供角速率传感器形式的运动传感器和制造传感器的方法，并且包括支撑衬底和由衬底支撑并具有柔性共振的硅感测环。 驱动电极在环上施加静电力，使环产生共振。 感测电极感测指示环的谐振的振动模式的电容的变化，以便感测运动。 多个硅支撑环将基板连接到环上。 支撑环以与硅的结晶取向基本上匹配的弹性模量（例如约22.5度和67.5度）的角度定位。
-
公开(公告)号：US07908922B2
公开(公告)日：2011-03-22
申请号：US12011184
申请日：2008-01-24
申请人： Seyed R. Zarabadi , John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack D. Johnson
发明人： Seyed R. Zarabadi , John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack D. Johnson
IPC分类号： G01P9/04
CPC分类号： G01C19/5684
摘要： A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
摘要翻译： 提供角速率传感器形式的运动传感器和制造传感器的方法，并且包括支撑衬底和由衬底支撑并具有柔性共振的硅感测环。 驱动电极在环上施加静电力，使环产生共振。 感测电极感测指示环的谐振的振动模式的电容的变化，以便感测运动。 多个硅支撑环将基板连接到环上。 支撑环以与硅的结晶取向基本上匹配的弹性模量（例如约22.5度和67.5度）的角度定位。
-
公开(公告)号：US20090188318A1
公开(公告)日：2009-07-30
申请号：US12011184
申请日：2008-01-24
申请人： Seyed R. Zarabadi , John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack D. Johnson
发明人： Seyed R. Zarabadi , John C. Christenson , Dan W. Chilcott , Richard G. Forestal , Jack D. Johnson
IPC分类号： G01P3/44
CPC分类号： G01C19/5684
摘要： A motion sensor in the form of an angular rate sensor and a method of making a sensor are provided and includes a support substrate and a silicon sensing ring supported by the substrate and having a flexive resonance. Drive electrodes apply electrostatic force on the ring to cause the ring to resonate. Sensing electrodes sense a change in capacitance indicative of vibration modes of resonance of the ring so as to sense motion. A plurality of silicon support rings connect the substrate to the ring. The support rings are located at an angle to substantially match a modulus of elasticity of the silicon, such as about 22.5 degrees and 67.5 degrees, with respect to the crystalline orientation of the silicon.
摘要翻译： 提供角速率传感器形式的运动传感器和制造传感器的方法，并且包括支撑衬底和由衬底支撑并具有柔性共振的硅感测环。 驱动电极在环上施加静电力，使环产生共振。 感测电极感测指示环的谐振的振动模式的电容的变化，以便感测运动。 多个硅支撑环将基板连接到环上。 支撑环以与硅的结晶取向基本上匹配的弹性模量（例如约22.5度和67.5度）的角度定位。
-
公开(公告)号：US07250322B2
公开(公告)日：2007-07-31
申请号：US11081422
申请日：2005-03-16
IPC分类号： H01L21/00
CPC分类号： B81C1/00047 , B81B2201/0235 , B81B2203/033 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A linear accelerometer is provided having a support substrate, fixed electrodes having fixed capacitive plates, and a movable inertial mass having movable capacitive plates capacitively coupled to the fixed capacitive plates. Adjacent capacitive plates vary in height. The accelerometer further includes support tethers for supporting the inertial mass and allowing movement of the inertial mass upon experiencing a linear acceleration along a sensing axis. The accelerometer has inputs and an output for providing an output signal which varies as a function of the capacitive coupling and is indicative of both magnitude and direction of vertical acceleration along the sensing Z-axis. A microsensor fabrication process is also provided which employs a top side mask and etch module.
摘要翻译： 提供了一种线性加速度计，其具有支撑基板，具有固定电容板的固定电极和具有电容耦合到固定电容板的可移动电容板的可动惯性块。 相邻的电容板的高度不同。 加速度计进一步包括用于支撑惯性质量的支撑系绳，并允许惯性质量块沿着感测轴线经历线性加速度的运动。 加速度计具有输入和输出，用于提供作为电容耦合的函数而变化的输出信号，并且指示沿感测Z轴的垂直加速度的大小和方向。 还提供了采用顶侧掩模和蚀刻模块的微传感器制造工艺。
-
公开(公告)号：US07293460B2
公开(公告)日：2007-11-13
申请号：US11109347
申请日：2005-04-19
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/082
摘要： A three-axis accelerometer is provided for sensing acceleration in three orthogonal axes. The accelerometer includes a support substrate, fixed electrodes having fixed capacitive plates fixed to the support substrate, and a movable inertial mass having movable capacitive plates capacitively coupled to the fixed capacitive plates. The accelerometer includes banks of fixed and movable capacitive plates oriented to sense acceleration in orthogonal X- and Y-axes. Additionally, the accelerometer includes fixed and movable capacitive plates having a height variation between adjacent plates to sense acceleration in the vertical Z-axis. Input signals are applied to certain electrodes coupled to the fixed capacitive plates, and an output signal is generated on the inertial mass, which is indicative of acceleration in each of the sensing axes. The output signal may be further processed to generate individual acceleration outputs for each of the sensing axes.
摘要翻译： 提供三轴加速度计用于感测三个正交轴的加速度。 加速度计包括支撑基板，具有固定在支撑基板上的固定电容板的固定电极，以及具有与固定电容板电容耦合的可移动电容板的可动惯性块。 加速度计包括一组固定和可移动的电容板，定向为在正交X轴和Y轴上检测加速度。 此外，加速度计包括在相邻板之间具有高度变化的固定和可移动电容板，以感测垂直Z轴上的加速度。 输入信号被施加到耦合到固定电容板的某些电极，并且在惯性质量上产生输出信号，其表示每个感测轴中的加速度。 可以进一步处理输出信号以产生每个感测轴的各个加速度输出。
-
公开(公告)号：US06761070B2
公开(公告)日：2004-07-13
申请号：US10059010
申请日：2002-01-31
IPC分类号： G01P15125
CPC分类号： G01P15/125
摘要： A linear accelerometer is provided having a substrate, a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates, and an inertial mass substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. The inertial mass is linearly movable relative to the fixed electrode. A central member is fixed to the substrate. Support arms support the inertial mass relative to the fixed electrode and allow linear movement of the inertial mass upon experiencing a linear acceleration along a sensing axis, and prevent linear movement along a nonsensing axis. Inputs and output lines are electrically coupled to the fixed electrode and the inertial mass. An output signal is generated which varies as a function of the capacitive coupling and is indicative of linear acceleration along the sensing axis.
摘要翻译： 提供一种线性加速度计，其具有基板，固定电极，其被支撑在基板上并且包括第一多个固定电容板，以及基本上悬挂在空腔上并包括多个可移动电容板的惯性质量块，其布置成提供与 第一组多个固定电容板。 惯性质量相对于固定电极是线性移动的。 中心部件固定在基板上。 支撑臂相对于固定电极支撑惯性块，并且允许惯性质量沿着感测轴线呈线性加速度时的线性移动，并且防止沿着非感知轴的线性移动。 输入和输出线电耦合到固定电极和惯性质量。 产生输出信号，其根据电容耦合而变化，并且指示沿着感测轴的线性加速度。
-
公开(公告)号：US06718826B2
公开(公告)日：2004-04-13
申请号：US10085536
申请日：2002-02-28
IPC分类号： G01P1500
CPC分类号： G01P15/125 , G01C19/5712 , G01P15/0888
摘要： A balanced angular accelerometer is provided having a substrate, a fixed electrode with a plurality of fixed capacitive plates, and a rotational inertia mass with a central opening and substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. The accelerometer has a central member and an outer member fixed to the substrate. According to one embodiment, a plurality of inner support arms extend between the central member and the inertia mass and a plurality of outer support arms extend between the inertia mass and the outer member to support the mass over the cavity. According to another embodiment, one or more cut out apertures are formed in the inertia mass to compensate for a channel and signal line so as to balance the inertia mass about the center of the inertia mass.
摘要翻译： 提供一种平衡角加速度计，其具有衬底，具有多个固定电容板的固定电极和具有中心开口并基本上悬挂在空腔上的旋转惯性质量块，并且包括多个可移动电容板，其布置成提供电容耦合 与第一组多个固定电容板。 加速度计具有中心构件和固定到基底的外部构件。 根据一个实施例，多个内部支撑臂在中心构件和惯性质量块之间延伸，并且多个外部支撑臂在惯性块和外部构件之间延伸以将质量支撑在空腔上。 根据另一实施例，在惯性质量块中形成一个或多个切口孔，以补偿通道和信号线，以平衡围绕惯性质心的中心的惯性质量。
-
公开(公告)号：US06666092B2
公开(公告)日：2003-12-23
申请号：US10085933
申请日：2002-02-28
IPC分类号： G01P1500
CPC分类号： G01P15/0888 , G01P15/125
摘要： A balanced angular accelerometer is provided having a substrate, a fixed electrode with a plurality of fixed capacitive plates, and a rotational inertia mass with a central opening and substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. The accelerometer has a central member and an outer member fixed to the substrate. According to one embodiment, a plurality of inner support arms extend between the central member and the inertia mass and a plurality of outer support arms extend between the inertia mass and the outer member to support the mass over the cavity. According to another embodiment, one or more cut out apertures are formed in the inertia mass to compensate for a channel and signal line so as to balance the inertia mass about the center of the inertia mass.
摘要翻译： 提供一种平衡角加速度计，其具有衬底，具有多个固定电容板的固定电极和具有中心开口并基本上悬挂在空腔上的旋转惯性质量块，并且包括多个可移动电容板，其布置成提供电容耦合 与第一组多个固定电容板。 加速度计具有中心构件和固定到基底的外部构件。 根据一个实施例，多个内部支撑臂在中心构件和惯性质量块之间延伸，并且多个外部支撑臂在惯性块和外部构件之间延伸以将质量支撑在空腔上。 根据另一实施例，在惯性质量块中形成一个或多个切口孔，以补偿通道和信号线，以平衡围绕惯性质心的中心的惯性质量。
-
公开(公告)号：US06393914B1
公开(公告)日：2002-05-28
申请号：US09782708
申请日：2001-02-13
IPC分类号： G01P1500
CPC分类号： G01P15/0802 , G01C19/5712 , G01P15/0888
摘要： An angular accelerometer having a substrate, a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates, and a ring-shaped rotational inertia mass substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. A central member is fixedly attached to the substrate. A plurality of support arms extend between the central member and the ring-shaped mass for supporting the mass relative to the fixed electrode during rotational movement of the mass. The angular accelerometer also includes an input electrically coupled to the fixed electrode for receiving an input signal, and an output coupled to the mass for providing an output signal which varies as a function of the capacitive coupling and is indicative of angular acceleration.
摘要翻译： 一种角加速度计，其具有基板，固定电极，其被支撑在所述基板上并且包括第一多个固定电容板，以及环形旋转惯性质量块，其基本上悬挂在空腔上并且包括多个可移动电容板，所述可移动电容板布置成提供电容 与第一多个固定电容板耦合。 中心部件固定在基板上。 多个支撑臂在中心构件和环形块之间延伸，用于在质量块的旋转运动期间相对于固定电极支撑质量。 角加速度计还包括电耦合到固定电极以用于接收输入信号的输入，以及耦合到质量块的输出，用于提供作为电容耦合的函数而变化的输出信号并且指示角加速度。
-
-
-
-
-
-
-
-
-
搜索结果
35 条记录 (耗时 0.027 秒)
