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公开(公告)号：US07249628B2
公开(公告)日：2007-07-31
申请号：US10489288
申请日：2002-09-26
CPC分类号： F28F21/067 , F28D7/08 , F28D7/082 , F28D2021/0077 , F28F21/062 , F28F27/00 , G05D23/1393 , G05D23/1912 , Y10T29/4935
摘要： This invention relates to an apparatus for conditioning the temperature of a fluid by utilizing a thermoplastic heat exchanger (50) comprised of a plurality of hollow tubes. The apparatus controls the temperature of a process fluid inside the heat exchanger (50) via a controller (46) by adjustment of a control valve (64) that regulates the flow of an exchange fluid. The apparatus can be used to maintain the temperature of a chemical bath (12) and also to prepare discreet dispensed volumes of temperature controlled liquid.
摘要翻译： 本发明涉及利用由多个中空管组成的热塑性热交换器（50）来调节流体温度的装置。 该装置通过控制调节交换流体流动的控制阀（64），经由控制器（46）来控制热交换器（50）内的过程流体的温度。 该装置可以用于维持化学浴（12）的温度，并且还可以制备分散体积的温度受控液体。
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公开(公告)号：US06617079B1
公开(公告)日：2003-09-09
申请号：US09597331
申请日：2000-06-19
IPC分类号： G03F716
CPC分类号： G03F7/162 , B05B12/082 , B05C11/1007
摘要： A process and system are provide for determining the acceptability of a fluid dispense such as a discrete volume of fluid used to coat a substrate. The fluid dispense is exposed to an energy source and the energy transmitted by the fluid dispense is detected to determine the shape of the fluid dispense. The fluid dispense shape and the timing of the beginning and end of the dispense are compared to previously generated standard dispense profiles and used to determine the acceptability of the shape and/or timing of the fluid dispense. The output from the sensor is used to control further processing of the substrate.
摘要翻译： 提供了一种方法和系统，用于确定流体分配的可接受性，例如用于涂覆基底的离散体积的流体。 流体分配暴露于能量源，并且检测通过流体分配传输的能量以确定流体分配的形状。 将流体分配形状和分配开始和结束的时间与先前生成的标准分配曲线进行比较，并用于确定流体分配的形状和/或定时的可接受性。 来自传感器的输出用于控制基板的进一步处理。
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公开(公告)号：US07316728B2
公开(公告)日：2008-01-08
申请号：US10559018
申请日：2003-05-27
申请人： Bipin Parekh , Saksatha Ly , Jieh-Hwa Shyu , John E. Pillion
发明人： Bipin Parekh , Saksatha Ly , Jieh-Hwa Shyu , John E. Pillion
CPC分类号： B01D61/24 , B01D15/00 , B01D53/22 , B01D61/28 , B01D63/02 , B01J19/2475 , B01J20/28014 , B01J20/28023 , C01D7/07
摘要： The present invention is directed to an apparatus for combining a component from a fluid composition with a reactive fluid. The apparatus includes a hollow fiber contactor (142) having a plurality of hollow fibers contained within a housing. A reactive fluid (224), which may be on the shell or lumen side of the hollow fiber membrane, is included in the apparatus and is used for combining with a component from a fluid composition which is on the opposite side of the membrane from the reactive liquid. The reactive liquid combines with one or more components from the fluid composition and can be used for purification of the fluid composition or for the preparation of chemical reagents.
摘要翻译： 本发明涉及一种用于将来自流体组合物的组分与反应性流体组合的装置。 该装置包括具有容纳在壳体内的多个中空纤维的中空纤维接触器（142）。 可以在中空纤维膜的壳体或内腔侧的反应性流体（224）被包括在该装置中，并且用于与来自膜的相反侧的流体组合物的组分与 反应液体。 反应性液体与来自流体组合物的一种或多种组分结合，并且可用于纯化流体组合物或用于制备化学试剂。
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公开(公告)号：US06942779B2
公开(公告)日：2005-09-13
申请号：US10137548
申请日：2002-05-02
CPC分类号： C25D21/18 , C25D21/22 , Y10S210/918
摘要： The present invention provides a system and method for selectively removing one or more organic and inorganic and also preferably one or more inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass. Residual organics, if desired and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resins or electrodialysis, while particulate and suspended colloidal particles are removed by filtration before the treated plating bath is recycled.
摘要翻译： 本发明提供一种用于从镀液中选择性地除去一种或多种有机和无机以及还优选一种或多种无机污染物的系统和方法。 更具体地说，本发明的方法涉及与化学氧化剂组合使用能量源，单独或与催化剂结合使氧化电镀槽中的有机污染物的水平达到使电镀浴能够在 适当的化学调整。 氧化处理方法可以是在单程中进行的连续方法或分批方法。 如果需要，残留的有机物和浴中的氯离子通过化学吸附或物理吸附处理从溶液中除去。 通过选择性离子交换树脂或电渗析从电镀浴中除去无机污染物，同时通过过滤除去颗粒和悬浮胶体颗粒，然后再处理处理后的镀液。
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公开(公告)号：US06596148B1
公开(公告)日：2003-07-22
申请号：US09651016
申请日：2000-08-30
IPC分类号： C25D2118
CPC分类号： C25D21/18 , C25D21/22 , Y02W10/37 , Y10S204/13
摘要： The present invention provides a system and method for selectively removing one or more organic and also preferably one or more inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass and the endpoint of the oxidative process detected by a sensor. Residual organics, if desired, and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resins or electrodialysis, while particulate and suspended colloidal particles are removed by filtration before the treated plating bath is recycled.
摘要翻译： 本发明提供一种用于从电镀液中选择性地除去一种或多种有机的，也优选一种或多种无机污染物的系统和方法。 更具体地说，本发明的方法涉及与化学氧化剂组合使用能量源，单独或与催化剂结合使氧化电镀槽中的有机污染物的水平达到使电镀浴能够在 适当的化学调整。 氧化处理方法可以是在单次通过中进行的连续方法或分批方法，并且由传感器检测氧化过程的终点。 通过化学吸附或物理吸附处理从溶液中除去残留的有机物，如果需要，以及浴中的氯离子。 通过选择性离子交换树脂或电渗析从电镀浴中除去无机污染物，同时通过过滤除去颗粒和悬浮胶体颗粒，然后再处理处理后的镀液。
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公开(公告)号：US06391209B1
公开(公告)日：2002-05-21
申请号：US09578388
申请日：2000-05-25
IPC分类号： C02F132
CPC分类号： C25D21/22 , C25D21/18 , Y02W10/37 , Y10S204/13
摘要： The present invention provides a system and method for selectively removing organic and inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass and the endpoint of the oxidative process detected by a sensor. Residual organics, and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resins or electrodialysis, while particulate and suspended colloidal particles are removed by filtration before the treated plating bath is recycled.
摘要翻译： 本发明提供一种选择性地从电镀液中除去有机和无机污染物的系统和方法。 更具体地说，本发明的方法涉及与化学氧化剂组合使用能量源，单独或与催化剂结合使氧化电镀槽中的有机污染物的水平达到使电镀浴能够在 适当的化学调整。 氧化处理方法可以是在单次通过中进行的连续方法或分批方法，并且由传感器检测氧化过程的终点。 通过化学吸附或物理吸附处理从溶液中除去浴中的残余有机物和氯离子。 通过选择性离子交换树脂或电渗析从电镀浴中除去无机污染物，同时通过过滤除去颗粒和悬浮胶体颗粒，然后再处理处理后的镀液。
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公开(公告)号：US20070289732A1
公开(公告)日：2007-12-20
申请号：US11820043
申请日：2007-06-18
申请人： John Pillion , Jieh-Hwa Shyu , Alicia LaForge , Robert McLoughlin
发明人： John Pillion , Jieh-Hwa Shyu , Alicia LaForge , Robert McLoughlin
IPC分类号： G05D23/00
CPC分类号： F28D7/024 , F28D2021/0077 , F28F21/062 , F28F27/00 , G05D23/1931 , G05D23/22 , G05D23/24
摘要： This invention relates to an apparatus for conditioning the temperature of a fluid by utilizing a thermoplastic heat exchange apparatus comprised of a plurality of hollow tubes. The apparatus controls the temperature of a process fluid inside the heat exchanger by adjustment of a control valve that regulates the flow of an exchange fluid. The apparatus can be used to maintain the temperature of chemical baths and also to prepare discreet dispensed volumes of temperature controlled liquid.
摘要翻译： 本发明涉及一种利用由多个中空管构成的热塑性热交换装置来调节流体温度的装置。 该装置通过调节调节交换流体流动的控制阀来控制热交换器内的工艺流体的温度。 该装置可用于维持化学浴的温度，并且还可以制备分散体积的温度控制液体。
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公开(公告)号：US20060052904A1
公开(公告)日：2006-03-09
申请号：US11229912
申请日：2005-09-19
IPC分类号： G05D7/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.
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公开(公告)号：US20050189018A1
公开(公告)日：2005-09-01
申请号：US11054467
申请日：2005-02-09
IPC分类号： G05D7/06
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/0379 , Y10T137/7761 , Y10T137/8326
摘要： One embodiment of the present invention can include a flow control device a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
摘要翻译： 本发明的一个实施例可以包括流量控制装置，流量控制装置，其包括入口，与入口流体连通的出口，压力传感器，其可以是或可以不是流体控制装置的唯一压力传感器， 以及耦合到所述压力传感器的控制器。 控制器可以被配置为基于在单个压力传感器处的测量压力产生阀控制信号。
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公开(公告)号：US07610117B2
公开(公告)日：2009-10-27
申请号：US11229912
申请日：2005-09-19
IPC分类号： G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.
摘要翻译： 本发明的一个实施例可以包括流量控制装置，其包括入口，出口，在入口和出口之间的压力损失元件，位于收缩部上游的压力传感器，其被配置成测量流过流动的流体的第一压力 控制装置，位于收缩部下游的压力传感器，被配置为测量流过所述流量控制装置的流体的第二压力; 以及耦合到第一压力传感器和第二压力传感器以产生阀驱动信号的控制器。 控制器可以在第一操作模式期间基于第一压力和第二压力之间的差值产生阀控制信号。 控制器还可以在第二操作模式期间基于特定压力传感器处的测量压力产生阀门控制信号。 操作模式可以自动切换。
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