利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

16 条记录 (耗时 0.027 秒)

    Process and system for determining acceptibility of a fluid dispense
    1.
    发明授权
    Process and system for determining acceptibility of a fluid dispense 失效
    确定流体分配的可接受性的过程和系统

    公开(公告)号：US06617079B1

    公开(公告)日：2003-09-09

    申请号：US09597331

    申请日：2000-06-19

    申请人： John E. Pillion ,  Robert McLoughlin ,  Jieh-Hwa Shyu

    发明人： John E. Pillion ,  Robert McLoughlin ,  Jieh-Hwa Shyu

    IPC分类号： G03F716

    CPC分类号： G03F7/162 ,  B05B12/082 ,  B05C11/1007

    摘要： A process and system are provide for determining the acceptability of a fluid dispense such as a discrete volume of fluid used to coat a substrate. The fluid dispense is exposed to an energy source and the energy transmitted by the fluid dispense is detected to determine the shape of the fluid dispense. The fluid dispense shape and the timing of the beginning and end of the dispense are compared to previously generated standard dispense profiles and used to determine the acceptability of the shape and/or timing of the fluid dispense. The output from the sensor is used to control further processing of the substrate.

    摘要翻译： 提供了一种方法和系统，用于确定流体分配的可接受性，例如用于涂覆基底的离散体积的流体。 流体分配暴露于能量源，并且检测通过流体分配传输的能量以确定流体分配的形状。 将流体分配形状和分配开始和结束的时间与先前生成的标准分配曲线进行比较，并用于确定流体分配的形状和/或定时的可接受性。 来自传感器的输出用于控制基板的进一步处理。

    Apparatus for conditioning the temperature of a fluid
    3.
    发明申请
    Apparatus for conditioning the temperature of a fluid 审中-公开
    用于调节流体温度的装置

    公开(公告)号：US20070289732A1

    公开(公告)日：2007-12-20

    申请号：US11820043

    申请日：2007-06-18

    申请人： John Pillion ,  Jieh-Hwa Shyu ,  Alicia LaForge ,  Robert McLoughlin

    发明人： John Pillion ,  Jieh-Hwa Shyu ,  Alicia LaForge ,  Robert McLoughlin

    IPC分类号： G05D23/00

    CPC分类号： F28D7/024 ,  F28D2021/0077 ,  F28F21/062 ,  F28F27/00 ,  G05D23/1931 ,  G05D23/22 ,  G05D23/24

    摘要： This invention relates to an apparatus for conditioning the temperature of a fluid by utilizing a thermoplastic heat exchange apparatus comprised of a plurality of hollow tubes. The apparatus controls the temperature of a process fluid inside the heat exchanger by adjustment of a control valve that regulates the flow of an exchange fluid. The apparatus can be used to maintain the temperature of chemical baths and also to prepare discreet dispensed volumes of temperature controlled liquid.

    摘要翻译： 本发明涉及一种利用由多个中空管构成的热塑性热交换装置来调节流体温度的装置。 该装置通过调节调节交换流体流动的控制阀来控制热交换器内的工艺流体的温度。 该装置可用于维持化学浴的温度，并且还可以制备分散体积的温度控制液体。

    System and method for flow monitoring and control
    4.
    发明申请
    System and method for flow monitoring and control 有权

    公开(公告)号：US20060052904A1

    公开(公告)日：2006-03-09

    申请号：US11229912

    申请日：2005-09-19

    申请人： Craig Brodeur ,  Marc Laverdiere ,  Robert McLoughlin ,  J. Niermeyer ,  Jieh-Hwa Shyu

    发明人： Craig Brodeur ,  Marc Laverdiere ,  Robert McLoughlin ,  J. Niermeyer ,  Jieh-Hwa Shyu

    IPC分类号： G05D7/00

    CPC分类号： G01F1/363 ,  G05D7/0635 ,  Y10T137/7761

    摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.

    System for Controlling Fluid Flow
    6.
    发明申请
    System for Controlling Fluid Flow 有权
    控制流体流动系统

    公开(公告)号：US20080071425A1

    公开(公告)日：2008-03-20

    申请号：US11937931

    申请日：2007-11-09

    申请人： Marc Laverdiere ,  Robert McLoughlin

    发明人： Marc Laverdiere ,  Robert McLoughlin

    IPC分类号： G05D7/06

    CPC分类号： G05D7/0635 ,  H01L21/6715 ,  Y10T137/0989

    摘要： Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.

    摘要翻译： 本发明的实施例提供了控制流体分配的系统和方法，以确保在分配过程结束时清洁液体的分离并减少分配喷嘴中的流体结晶。 本发明的一个实施例可以包括一个控制器，该控制器可以产生一个流量控制信号，以使控制阀根据第一关闭速率参数的关闭速率参数关闭，并产生流量控制信号， 控制阀根据第二关闭速率参数关闭近距离的第二段。

    Liquid flow controller and precision dispense apparatus and system
    7.
    发明申请
    Liquid flow controller and precision dispense apparatus and system 失效
    液体流量控制器和精密分配装置及系统

    公开(公告)号：US20050173003A1

    公开(公告)日：2005-08-11

    申请号：US10520635

    申请日：2003-07-18

    申请人： Marc Laverdiere ,  Robert McLoughlin ,  George Gonnella ,  Iraj Gashgaee ,  Jennifer Marrs

    发明人： Marc Laverdiere ,  Robert McLoughlin ,  George Gonnella ,  Iraj Gashgaee ,  Jennifer Marrs

    IPC分类号： G05D7/06 ,  G05D16/20

    CPC分类号： G05D7/0617 ,  G05D16/2013 ,  Y10T137/0396 ,  Y10T137/7758 ,  Y10T137/776 ,  Y10T137/7761

    摘要： Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measuremenc device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.

    摘要翻译： 装置和控制系统，用于监测（优选数字地）和/或控制诸如比例流体控制阀的气动负载的压力，并使用来自响应于流量的流体测量装置的测量输入，所使用的液体测量输入 以控制气动负载的压力，使得可以增加或减少气动负载（以比例地打开或关闭气动阀），以将流体的流速改变到期望的速率。 也可以调节气动负载（按比例打开或关闭气动阀），以适应流体温度和粘度的变化。

    System and method for multiplexing setpoints
    8.
    发明申请
    System and method for multiplexing setpoints 失效
    用于复用设定值的系统和方法

    公开(公告)号：US20070217442A1

    公开(公告)日：2007-09-20

    申请号：US11365395

    申请日：2006-03-01

    申请人： Robert McLoughlin

    发明人： Robert McLoughlin

    IPC分类号： H04B7/212 ,  G05B11/01

    CPC分类号： B01F15/0416 ,  B01F2215/0096 ,  G05D11/16 ,  H01L21/67075 ,  Y10T137/0329

    摘要： Embodiments of the present invention provide a system and method of providing analog setpoints that eliminate, or at least substantially reduces, the shortcomings of prior art analog setpoint systems and methods. One embodiment of the present invention includes a method of multiplexing analog setpoints comprising transmitting the analog signal to a plurality of target devices, wherein the analog signal represents multiple setpoints, transmitting a first setpoint indicator separate from the analog signal to indicate to a first target device that a first setpoint for the first target device is being represented by the analog signal, saving a first setpoint value asserted by the analog signal at the first target device in response to the first setpoint indicator.

    摘要翻译： 本发明的实施例提供了提供模拟设定点的系统和方法，其消除或至少基本上减少了现有技术的模拟设定点系统和方法的缺点。 本发明的一个实施例包括多路复用模拟设定点的方法，包括将模拟信号发送到多个目标设备，其中模拟信号表示多个设定点，从模拟信号发送第一设定点指示符，以指示第一目标设备 第一目标设备的第一设定值由模拟信号表示，从而在第一目标设备响应于第一设定点指示器节省由模拟信号确定的第一设定点值。

    I/O systems, methods and devices for interfacing a pump controller
    9.
    发明申请
    I/O systems, methods and devices for interfacing a pump controller 有权
    I / O系统，用于连接泵控制器的方法和设备

    公开(公告)号：US20070127511A1

    公开(公告)日：2007-06-07

    申请号：US11602449

    申请日：2006-11-20

    申请人： James Cedrone ,  Robert McLoughlin ,  George Gonnella

    发明人： James Cedrone ,  Robert McLoughlin ,  George Gonnella

    IPC分类号： H04L12/28

    CPC分类号： G06F13/4027 ,  F04B49/065 ,  G05B19/042 ,  G05B2219/25204 ,  G06F13/4282 ,  H04L67/12 ,  Y02D10/14 ,  Y02D10/151

    摘要： Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump.

    摘要翻译： 本发明的实施例提供了用于将泵控制器与可能具有不同接口和/或信令格式的控制设备接口的I / O系统，方法和设备。 在一个实施例中，I / O接口模块包括处理器，存储器和用于与泵送控制器和控制设备通信的至少两个数据通信接口。 I / O接口模块可以从控制设备接收离散信号，相应地解释它们，并将数据包发送到泵控制器。 泵控制器读取数据包，并在泵处采取适当的措施。 I / O接口模块可以解释从泵控制器接收的数据包，并将相应的离散信号声明给控制设备。 I / O接口模块是可定制的，允许使用特定的多级泵实现各种接口和控制方案，而无需更换泵的硬件。