公开(公告)号：US08238388B2

公开(公告)日：2012-08-07

申请号：US12442244

申请日：2007-09-20

申请人： John F. Donegan ,  Richard Phelan ,  Wei-Hua Guo ,  Qiao-Yin Lu ,  Brian Corbett ,  Paul Martin Lambkin ,  Brendan John Roycroft

发明人： John F. Donegan ,  Richard Phelan ,  Wei-Hua Guo ,  Qiao-Yin Lu ,  Brian Corbett ,  Paul Martin Lambkin ,  Brendan John Roycroft

IPC分类号： H01S3/098 ,  H01S3/10

CPC分类号： H01S5/1021 ,  H01S5/026 ,  H01S5/0265 ,  H01S5/06255 ,  H01S5/0654 ,  H01S5/1017 ,  H01S5/1039 ,  H01S5/1237 ,  H01S5/125

摘要： A tunable laser device (1) comprises integrally formed first and second ridge waveguides (5, 6). A longitudinally extending ridge (12) defines first and second light guiding regions (19, 20) of the first and second waveguides (5, 6) A plurality of first and second slots (27, 28) extending laterally in the ridge (12) adjacent the first and second waveguides (5, 6), produce first and second mirror loss spectra of the respective first and second waveguides (5, 6) with minimum peak values at respective first and second wavelength values. The spacing between the second slots (28) is different to that between the first slots (27) so that with one exception the minimum peak values of the first and second mirror loss spectrum occur at different wavelength values. The first and second waveguides (5, 6) are independently pumped with variable currents to selectively vary the common wavelength at which the minimum peak values of the first and second mirror loss spectra occur to produce Vernier tuning of the device.

摘要翻译： 可调谐激光装置（1）包括一体形成的第一和第二脊状波导（5,6）。 纵向延伸的脊（12）限定第一和第二波导（5,6）的第一和第二导光区域（19,20）。在脊部（12）中横向延伸的多个第一和第二狭槽（27,28） 邻近第一和第二波导（5,6），在相应的第一和第二波长值处产生具有最小峰值的相应的第一和第二波导（5,6）的第一和第二镜损耗谱。 第二时隙（28）之间的间隔与第一时隙（27）之间的间隔不同，因此除了第一和第二镜损耗光谱的最小峰值出现在不同的波长值之外。 第一和第二波导（5,6）独立地用可变电流泵送，以选择性地改变第一和第二镜损耗光谱的最小峰值出现以产生器件的游标调谐的共同波长。

公开(公告)号：US20100290495A1

公开(公告)日：2010-11-18

申请号：US12442337

申请日：2007-09-20

申请人： John F. Donegan ,  Wei-Hua Guo ,  Qiao-Yin Lu ,  Diarmuid Byrne ,  Brian Corbett ,  Paul Martin Lambkin ,  Brendan John Roycroft ,  Jan-Peter Engelstaedter ,  Frank Peters

发明人： John F. Donegan ,  Wei-Hua Guo ,  Qiao-Yin Lu ,  Diarmuid Byrne ,  Brian Corbett ,  Paul Martin Lambkin ,  Brendan John Roycroft ,  Jan-Peter Engelstaedter ,  Frank Peters

IPC分类号： H01S5/0625 ,  H01S5/026 ,  H01S5/10 ,  G02B6/26

CPC分类号： H01S5/1021 ,  H01S5/026 ,  H01S5/0265 ,  H01S5/06255 ,  H01S5/0654 ,  H01S5/1017 ,  H01S5/1039 ,  H01S5/1237 ,  H01S5/125

摘要： A laser device (1) comprises a ridge waveguide (2) comprising an upper cladding layer (5) and a lower cladding layer (6), between which is located an active layer (7). A ridge (8) formed in the upper cladding layer (5) defines the lateral width of a light guiding region (9) in the active layer (7). The ridge (8) is formed so that a portion (13) of the light guiding region (9) extends above the active layer (7) into the ridge (8). A plurality of lateral reflecting slots (15) extend laterally across the ridge (8) and extend into the ridge (8) to a depth sufficient to extend into the portion (13) of the light guiding region (9) which extends into the ridge (8) in order that the reflectivity of each lateral slot (15) is in the order of 2%. The combined reflectivity of the lateral slots (15) is such that the slots (15) intersect more than 20% of the total mode energy in the light guiding region (9), and this in combination with the gain of the active layer (7) is such as to facilitate lasing within the light guiding region (9) independently of the reflectivity of end facets (18,19) of the waveguide (2). Accordingly, the laser device (1) is particularly suitable for integrally forming with other optical components, for example, an optical modulator or an optical detector on a single semiconductor chip, whereby the laser device and the other optical components are formed in series on the same light guiding region (9).

摘要翻译： 激光装置（1）包括脊形波导（2），其包括上包层（5）和下包层（6），其间位于有源层（7）之间。 形成在上包层（5）中的脊（8）限定有源层（7）中的导光区域（9）的横向宽度。 脊（8）形成为使得导光区域（9）的部分（13）在有源层（7）上方延伸到脊（8）中。 多个横向反射槽（15）横向延伸穿过脊部（8）并且延伸到脊部（8）中至足以延伸到延伸到脊部的导光区域（9）的部分（13）的深度 （8），以便每个横向槽（15）的反射率大约为2％。 横向狭槽（15）的组合反射率使得狭槽（15）在导光区域（9）中相交超过总模式能量的20％，并且与活性层（7）的增益相结合 ）能够独立于波导（2）的端面（18,19）的反射率来促进光导区域（9）内的激光。 因此，激光装置（1）特别适合于与单个半导体芯片上的其他光学部件（例如光调制器或光检测器）一体地形成，由此激光装置和其它光学部件在 相同的光导区域（9）。

公开(公告)号：US20100046562A1

公开(公告)日：2010-02-25

申请号：US12442244

申请日：2007-09-20

申请人： John F. Donegan ,  Richard Phelan ,  Wel-Hua Guo ,  Qiao-Yin Lu ,  Brian Corbett ,  Paul Martin Lambkin ,  Brendan John Roycroft

发明人： John F. Donegan ,  Richard Phelan ,  Wel-Hua Guo ,  Qiao-Yin Lu ,  Brian Corbett ,  Paul Martin Lambkin ,  Brendan John Roycroft

IPC分类号： H01S3/10

CPC分类号： H01S5/1021 ,  H01S5/026 ,  H01S5/0265 ,  H01S5/06255 ,  H01S5/0654 ,  H01S5/1017 ,  H01S5/1039 ,  H01S5/1237 ,  H01S5/125

摘要： A tunable laser device (1) comprises integrally formed first and second ridge waveguides (5, 6). A longitudinally extending ridge (12) defines first and second light guiding regions (19, 20) of the first and second waveguides (5, 6) which communicate with each other. A plurality of first slots (27) extending laterally in the ridge (12) adjacent the first waveguide (5), and a plurality of second slots (28) extending laterally in the ridge (12) adjacent the second waveguide (6) produce first and second mirror loss spectra of the respective first and second waveguides (5, 6) with minimum peak values at respective first and second wavelength values. The first slots are equi-spaced apart to produce the first mirror loss spectrum, and the second slots (28) are also equi-spaced apart, but the spacing between the second slots (28) is different to the spacing between the first slots (27) so that the minimum peak values of the second mirror loss spectrum occur at different wavelength values to the wavelength values at which the minimum peak values of the first mirror loss spectrum occur, with the exception of one minimum peak value of each of the first and second mirror loss spectra, which coincide at a common wavelength value. The tunable laser device (1) produces light of that common wavelength value. In order to vary the wavelength value at which the minimum peak value of each of the first and second mirror loss spectra occur, currents with which the first and second waveguides (5, 6) are pumped are independently varied for varying the wavelengths at which the minimum peak values of the respective first and second mirror loss spectra occur, thereby providing Vernier tuning of the tunable laser device for producing light of selectable wavelengths.

摘要翻译： 可调谐激光装置（1）包括一体形成的第一和第二脊状波导（5,6）。 纵向延伸的脊（12）限定彼此连通的第一和第二波导（5,6）的第一和第二导光区域（19,20）。 在邻近第一波导（5）的脊（12）中横向延伸的多个第一槽（27）以及邻近第二波导（6）在脊（12）中横向延伸的多个第二槽（28）产生第一 以及在相应的第一和第二波长值处具有最小峰值的相应的第一和第二波导（5,6）的第二镜损耗谱。 第一槽间隔开以产生第一反射镜损耗光谱，而第二槽（28）也是等间隔开的，但是第二槽（28）之间的间距与第一槽之间的间距不同 27），使得第二镜损耗光谱的最小峰值出现在与第一镜损耗光谱的最小峰值出现的波长值不同的波长值上，除了第一镜损耗光谱中的每一个的最小峰值 和第二镜损耗光谱，其在共同的波长值上重合。 可调激光器件（1）产生该共同波长值的光。 为了改变发生第一和第二镜损耗光谱中的每一个的最小峰值的波长值，泵浦第一和第二波导（5,6）的电流被独立地变化，以改变波长 发生相应的第一和第二反射镜损耗光谱的最小峰值，由此提供可调激光器件的游标调谐，用于产生可选波长的光。

公开(公告)号：US07399684B2

公开(公告)日：2008-07-15

申请号：US11030986

申请日：2005-01-10

申请人： Brendan John Roycroft ,  Pleun Pieter Maaskant

发明人： Brendan John Roycroft ,  Pleun Pieter Maaskant

IPC分类号： H01L21/20

CPC分类号： H01L21/32133 ,  H01L21/0237 ,  H01L21/02378 ,  H01L21/0242 ,  H01L21/02455 ,  H01L21/02458 ,  H01L21/0254 ,  H01L21/02658

摘要： An initial epitaxial layer of GaN is grown on a sapphire substrate. The epitaxial layer is then etched in a reactive ion etch (RIE) chamber. This etching acts preferentially at defects, causing them to become enlarged cavities. The cavities are too large in proportion to the crystal lattice to act as defects in the usual sense, and so a further GaN epitaxial layer fills into the cavities. Thus, propagation of defects is avoided.

摘要翻译： 在蓝宝石衬底上生长GaN的初始外延层。 然后在反应离子蚀刻（RIE）室中蚀刻外延层。 该蚀刻优先作用于缺陷，导致它们变大。 这些空腔与晶格的比例太大而成为通常意义上的缺陷，因此另外的GaN外延层填充到空腔中。 因此，避免了缺陷的传播。