公开(公告)号：US07348241B2

公开(公告)日：2008-03-25

申请号：US11384727

申请日：2006-03-20

申请人： Joon-hyung Lee ,  Byung-sun Kim ,  Tae-jung Lee

发明人： Joon-hyung Lee ,  Byung-sun Kim ,  Tae-jung Lee

IPC分类号： H01L21/336

CPC分类号： H01L21/28273 ,  H01L29/42324 ,  H01L29/513 ,  H01L29/66825 ,  H01L29/7881

摘要： Provided are a cell structure of an EPROM device and a method for fabricating the same. The cell structure includes a gate stack, which includes a first floating gate, an insulating pattern including a nitride layer, and a control gate that are sequentially stacked on a semiconductor substrate, and includes a window for exposing the top surface or both sidewalls of the first floating gate on both sides of the control gate, so that charges of the first floating gate can be erased by ultraviolet rays. The cell structure further includes a floating gate transistor, which includes a gate insulating layer formed on the semiconductor substrate, a second floating gate that is formed on the gate insulating layer and is connected to the first floating gate in the gate stack, and a source/drain that is formed in the semiconductor substrate so as to be aligned to the second floating gate. In the cell structure, the window is formed on the top surface or both sidewalls of the first floating gate of the gate stack. Thus, ultraviolet rays can penetrate through the window and easily erase charges of the programmed cell.

摘要翻译： 提供EPROM器件的单元结构及其制造方法。 电池结构包括栅极堆叠，其包括第一浮置栅极，包括氮化物层的绝缘图案和顺序地堆叠在半导体衬底上的控制栅极，并且包括用于暴露所述顶部表面或两个侧壁的窗口 第一个浮动栅极位于控制栅极的两侧，使得第一个浮动栅极的电荷可以被紫外线消除。 电池结构还包括浮栅晶体管，其包括形成在半导体衬底上的栅极绝缘层，形成在栅极绝缘层上并连接到栅堆叠中的第一浮栅的第二浮栅，以及源极 /漏极，其形成在半导体衬底中以便与第二浮栅对准。 在电池结构中，窗口形成在栅堆叠的第一浮栅的顶表面或两个侧壁上。 因此，紫外线可以穿过窗口并容易地擦除编程单元的电荷。

公开(公告)号：US06885609B2

公开(公告)日：2005-04-26

申请号：US10724687

申请日：2003-12-02

申请人： Tae-jung Lee ,  Byung-sun Kim ,  Joon-hyung Lee

发明人： Tae-jung Lee ,  Byung-sun Kim ,  Joon-hyung Lee

IPC分类号： G11C11/41 ,  G11C8/16 ,  G11C11/40 ,  G11C11/412 ,  H01L21/8244 ,  H01L27/11 ,  G11C8/00 ,  G11C11/00

CPC分类号： G11C8/16

摘要： A layout of a memory cell of a dual-port semiconductor memory device provides for one memory cell that includes a total of eight transistors, including two NMOS scan transistors. Among the transistors, two PMOS transistors and six NMOS transistors are disposed in one N-well area and one contiguous P-well area of a semiconductor substrate, respectively. The N-well area is disposed at a corner of the memory cell for improving efficiency of the layout. Since one N-well area and one P-well area are formed in the semiconductor substrate, the size of an isolated area between the N-well area and the P-well area can be reduced, thus also reducing the size of a memory cell.

摘要翻译： 双端口半导体存储器件的存储单元的布局提供了一个存储单元，其包括总共八个晶体管，包括两个NMOS扫描晶体管。 在晶体管中，两个PMOS晶体管和六个NMOS晶体管分别设置在半导体衬底的一个N阱区域和一个邻接的P阱区域中。 N阱区域设置在存储单元的拐角处，以提高布局的效率。 由于在半导体衬底中形成一个N阱区和一个P阱区，所以可以减小N阱区和P阱区之间的隔离区的大小，从而也减小了存储单元的尺寸 。

公开(公告)号：US20060160293A1

公开(公告)日：2006-07-20

申请号：US11384727

申请日：2006-03-20

申请人： Joon-hyung Lee ,  Byung-sun Kim ,  Tae-jung Lee

发明人： Joon-hyung Lee ,  Byung-sun Kim ,  Tae-jung Lee

IPC分类号： H01L21/8238

CPC分类号： H01L21/28273 ,  H01L29/42324 ,  H01L29/513 ,  H01L29/66825 ,  H01L29/7881

摘要： Provided are a cell structure of an EPROM device and a method for fabricating the same. The cell structure includes a gate stack, which includes a first floating gate, an insulating pattern including a nitride layer, and a control gate that are sequentially stacked on a semiconductor substrate, and includes a window for exposing the top surface or both sidewalls of the first floating gate on both sides of the control gate, so that charges of the first floating gate can be erased by ultraviolet rays. The cell structure further includes a floating gate transistor, which includes a gate insulating layer formed on the semiconductor substrate, a second floating gate that is formed on the gate insulating layer and is connected to the first floating gate in the gate stack, and a source/drain that is formed in the semiconductor substrate so as to be aligned to the second floating gate. In the cell structure, the window is formed on the top surface or both sidewalls of the first floating gate of the gate stack. Thus, ultraviolet rays can penetrate through the window and easily erase charges of the programmed cell.

摘要翻译： 提供EPROM器件的单元结构及其制造方法。 电池结构包括栅极堆叠，其包括第一浮置栅极，包括氮化物层的绝缘图案和顺序地堆叠在半导体衬底上的控制栅极，并且包括用于暴露所述顶部表面或两个侧壁的窗口 第一个浮动栅极位于控制栅极的两侧，使得第一个浮动栅极的电荷可以被紫外线消除。 电池结构还包括浮栅晶体管，其包括形成在半导体衬底上的栅极绝缘层，形成在栅极绝缘层上并连接到栅堆叠中的第一浮栅的第二浮栅，以及源极 /漏极，其形成在半导体衬底中以便与第二浮栅对准。 在电池结构中，窗口形成在栅堆叠的第一浮栅的顶表面或两个侧壁上。 因此，紫外线可以穿过窗口并容易地擦除编程单元的电荷。

公开(公告)号：US07053443B2

公开(公告)日：2006-05-30

申请号：US10702350

申请日：2003-11-06

申请人： Joon-hyung Lee ,  Byung-sun Kim ,  Tae-jung Lee

发明人： Joon-hyung Lee ,  Byung-sun Kim ,  Tae-jung Lee

IPC分类号： H01L29/788

CPC分类号： H01L21/28273 ,  H01L29/42324 ,  H01L29/513 ,  H01L29/66825 ,  H01L29/7881

摘要： Provided are a cell structure of an EPROM device and a method for fabricating the same. The cell structure includes a gate stack, which includes a first floating gate, an insulating pattern including a nitride layer, and a control gate that are sequentially stacked on a semiconductor substrate, and includes a window for exposing the top surface or both sidewalls of the first floating gate on both sides of the control gate, so that charges of the first floating gate can be erased by ultraviolet rays. The cell structure further includes a floating gate transistor, which includes a gate insulating layer formed on the semiconductor substrate, a second floating gate that is formed on the gate insulating layer and is connected to the first floating gate in the gate stack, and a source/drain that is formed in the semiconductor substrate so as to be aligned to the second floating gate. In the cell structure, the window is formed on the top surface or both sidewalls of the first floating gate of the gate stack. Thus, ultraviolet rays can penetrate through the window and easily erase charges of the programmed cell.

公开(公告)号：US08143690B2

公开(公告)日：2012-03-27

申请号：US12219336

申请日：2008-07-21

申请人： Myoung-kyu Park ,  Byung-sun Kim ,  Tae-jung Lee ,  Kee-in Bang

发明人： Myoung-kyu Park ,  Byung-sun Kim ,  Tae-jung Lee ,  Kee-in Bang

IPC分类号： H01L27/06

CPC分类号： H01L27/0814 ,  H01L27/0255

摘要： Semiconductor device having an on-chip type electrostatic discharge (ESD) protection circuit and a method of manufacturing the same are provided. The on-chip type ESD protection circuit may include a first junction diode having a first conductive type region contacting a second conductive type region in a semiconductor substrate, and a first schottky diode having a metallic material layer arranged on and contacting the first conductive type region of the semiconductor substrate.

摘要翻译： 提供具有片上型静电放电（ESD）保护电路的半导体器件及其制造方法。 片上型ESD保护电路可以包括具有与半导体衬底中的第二导电类型区域接触的第一导电类型区域的第一结二极管和具有布置在第一导电类型区域上并与第一导电类型区域接触的金属材料层的第一肖特基二极管 的半导体衬底。

公开(公告)号：US20090020844A1

公开(公告)日：2009-01-22

申请号：US12219336

申请日：2008-07-21

申请人： Myoung-kyu Park ,  Byung-sun Kim ,  Tae-jung Lee ,  Kee-in Bang

发明人： Myoung-kyu Park ,  Byung-sun Kim ,  Tae-jung Lee ,  Kee-in Bang

IPC分类号： H01L27/06

CPC分类号： H01L27/0814 ,  H01L27/0255

摘要： Semiconductor device having an on-chip type electrostatic discharge (ESD) protection circuit and a method of manufacturing the same are provided. The on-chip type ESD protection circuit may include a first junction diode having a first conductive type region contacting a second conductive type region in a semiconductor substrate, and a first schottky diode having a metallic material layer arranged on and contacting the first conductive type region of the semiconductor substrate.

摘要翻译： 提供具有片上型静电放电（ESD）保护电路的半导体器件及其制造方法。 片上型ESD保护电路可以包括具有与半导体衬底中的第二导电类型区域接触的第一导电类型区域的第一结二极管和具有布置在第一导电类型区域上并与第一导电类型区域接触的金属材料层的第一肖特基二极管 的半导体衬底。

公开(公告)号：US06995447B2

公开(公告)日：2006-02-07

申请号：US10810285

申请日：2004-03-26

申请人： Tae-jung Lee ,  Byung-sun Kim ,  Myoung-hwan Oh ,  Seung-han Yoo ,  Myung-sun Shin ,  Sang-wook Park

发明人： Tae-jung Lee ,  Byung-sun Kim ,  Myoung-hwan Oh ,  Seung-han Yoo ,  Myung-sun Shin ,  Sang-wook Park

IPC分类号： H10L29/00 ,  H10L27/01 ,  H10L29/76 ,  H10L29/40

CPC分类号： H01L29/66772 ,  H01L21/76264 ,  H01L21/76283 ,  H01L29/78615 ,  H01L29/78636

摘要： A silicon-on-insulator (SOI) device and a method for manufacturing the same includes a substrate, which includes a base layer, a buried oxide layer, and a semiconductor layer, and an isolation layer which is formed in a trench that defines an active region on the semiconductor layer. The trench comprises a first region having a depth smaller than the thickness of the semiconductor layer and a second region having a depth as much as the thickness of the semiconductor layer. The isolation layer includes an oxide layer and a nitride liner that are sequentially formed along the surface of the trench and a dielectric layer that fills the trench.

公开(公告)号：US06737706B2

公开(公告)日：2004-05-18

申请号：US10114215

申请日：2002-04-02

申请人： Tae-jung Lee ,  Byung-sun Kim ,  Myoung-hwan Oh ,  Seung-han Yoo ,  Myung-sun Shin ,  Sang-wook Park

发明人： Tae-jung Lee ,  Byung-sun Kim ,  Myoung-hwan Oh ,  Seung-han Yoo ,  Myung-sun Shin ,  Sang-wook Park

IPC分类号： H01L2701

CPC分类号： H01L29/66772 ,  H01L21/76264 ,  H01L21/76283 ,  H01L29/78615 ,  H01L29/78636

摘要： A silicon-on-insulator (SOI) device and a method for manufacturing the same includes a substrate, which includes a base layer, a buried oxide layer, and a semiconductor layer, and an isolation layer which is formed in a trench that defines an active region on the semiconductor layer. The trench comprises a first region having a depth smaller than the thickness of the semiconductor layer and a second region having a depth as much as the thickness of the semiconductor layer. The isolation layer includes an oxide layer and a nitride liner that are sequentially formed along the surface of the trench and a dielectric layer that fills the trench.

摘要翻译： 绝缘体上硅（SOI）器件及其制造方法包括：衬底，其包括基底层，掩埋氧化物层和半导体层;以及隔离层，其形成在沟槽中，所述沟槽限定 半导体层上的有源区。 沟槽包括深度小于半导体层的厚度的第一区域和具有与半导体层的厚度一样多的深度的第二区域。 隔离层包括沿着沟槽的表面依次形成的氧化物层和氮化物衬垫以及填充沟槽的电介质层。

公开(公告)号：US20120032269A1

公开(公告)日：2012-02-09

申请号：US13272675

申请日：2011-10-13

申请人： Dong-ryul Chang ,  Tae-jung Lee ,  Sung-hoan Kim ,  Soo-cheol Lee

发明人： Dong-ryul Chang ,  Tae-jung Lee ,  Sung-hoan Kim ,  Soo-cheol Lee

IPC分类号： H01L29/78

CPC分类号： H01L21/823871 ,  H01L21/823857 ,  H01L21/823878 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided are a semiconductor integrated device and a method for fabricating the same. The semiconductor integrated circuit includes a semiconductor substrate including a first dopant, a first conductive layer pattern formed on the semiconductor substrate, an interlayer dielectric layer formed on the first conductive layer pattern, a second conductive layer pattern formed on the interlayer dielectric layer, and a first vacuum ultraviolet (VUV) blocking layer which blocks a VUV ray radiated to the semiconductor substrate.

摘要翻译： 提供一种半导体集成器件及其制造方法。 半导体集成电路包括：半导体衬底，包括第一掺杂剂，形成在半导体衬底上的第一导电层图案，形成在第一导电层图案上的层间绝缘层，形成在层间绝缘层上的第二导电层图案;以及 第一真空紫外线（VUV）阻挡层，其阻挡辐射到半导体衬底的VUV射线。

公开(公告)号：US07593261B2

公开(公告)日：2009-09-22

申请号：US11643837

申请日：2006-12-22

申请人： Geun-sook Park ,  Sang-bae Yi ,  Soo-cheol Lee ,  Ho-ik Hwang ,  Tae-jung Lee

发明人： Geun-sook Park ,  Sang-bae Yi ,  Soo-cheol Lee ,  Ho-ik Hwang ,  Tae-jung Lee

IPC分类号： G11C11/03

CPC分类号： H01L27/11558 ,  H01L27/115 ,  H01L27/11521

摘要： An electrically erasable and programmable read-only memory (EEPROM) is provided. The EEPROM includes a semiconductor substrate including spaced apart first, second and third active regions, a common floating gate traversing over the first through third active regions, source/drain regions formed in the third active region on opposite sides of the floating gate, a first interconnect connected to the first active region, a second interconnect connected to the second active region, and a third interconnect connected to either one of the source/drain regions.

摘要翻译： 提供电可擦除和可编程只读存储器（EEPROM）。 EEPROM包括半导体衬底，其包括间隔开的第一，第二和第三有源区域，跨越第一至第三有源区域的公共浮动栅极，形成在浮置栅极的相对侧上的第三有源区域中的源极/漏极区域，第一 连接到第一有源区的互连，连接到第二有源区的第二互连以及连接到源/漏区中的任一个的第三互连。