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公开(公告)号：US20060245233A1
公开(公告)日：2006-11-02
申请号：US11119376
申请日：2005-04-29
申请人： Thomas Mikolajick , Josef Willer , Corvin Liaw
发明人： Thomas Mikolajick , Josef Willer , Corvin Liaw
IPC分类号： G11C17/00
CPC分类号： G11C16/0483 , G11C16/0475 , H01L27/115 , H01L27/11568
摘要： An array of charge-trapping multi-bit memory cells is arranged in a virtual-ground NAND architecture. The memory cells are erased by Fowler-Nordheim tunneling of electrons into the memory layers. The write operation is effected by hot hole injection. A write voltage is applied by a bitline to two NAND chains in series. The subsequent bitline on the side of the memory cell to be programmed is maintained on floating potential, whereas the bitline on the other side is set to an inhibit voltage, which is provided to inhibit a program disturb of an addressed memory cell which is not to be programmed. This virtual-ground NAND architecture of charge-trapping memory cells enables an increased storage density.
摘要翻译： 一个电荷捕获多位存储单元的阵列被布置在虚拟地NAND架构中。 存储器单元被Fowler-Nordheim擦除，将电子隧穿到存储器层中。 写入操作通过热空穴注入来实现。 写入电压通过位线施加到两个串联的NAND链。 要编程的存储器单元侧的后续位线保持浮置电位，而另一侧的位线被设置为禁止电压，该禁止电压被提供以阻止寻址的存储器单元的程序干扰 被编程。 电荷俘获存储器单元的虚拟NAND架构能够提高存储密度。
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2.发明申请Semiconductor memory having charge trapping memory cells and fabrication method thereof 有权具有电荷捕获存储单元的半导体存储器及其制造方法公开(公告)号：US20060192266A1
公开(公告)日：2006-08-31
申请号：US11067983
申请日：2005-02-28
IPC分类号： H01L29/00
CPC分类号： H01L27/11568 , H01L27/115 , H01L29/42336 , H01L29/7923
摘要： A semiconductor memory having charge trapping memory cells, where the direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.
摘要翻译： 一种具有电荷捕获存储单元的半导体存储器，其中存储晶体管的每个沟道区域的电流方向相对于相关字线横向延伸，位线被布置在字线的顶侧，并且以某种方式 存在与源极 - 漏极区电气绝缘的导电局部互连件，其在字线之间的间隔中以部分布置并以与后者的电绝缘方式并且连接到位线的方式布置，其中栅极电极 布置在至少部分地形成在存储器基板中的沟槽中。
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3.发明授权Semiconductor memory having charge trapping memory cells and fabrication method thereof 失效具有电荷捕获存储单元的半导体存储器及其制造方法公开(公告)号：US07662687B2
公开(公告)日：2010-02-16
申请号：US12110849
申请日：2008-04-28
IPC分类号： H01L21/336
CPC分类号： H01L27/11568 , H01L27/115 , H01L29/42336 , H01L29/7923
摘要： A semiconductor memory having charge trapping memory cells and fabrication method thereof. The direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.
摘要翻译： 一种具有电荷捕获存储单元的半导体存储器及其制造方法。 存储晶体管的每个通道区域的电流流动方向相对于相关字线横向延伸，位线布置在字线的顶侧，并以与之相隔离的方式布置，并且导电的局部 存在源极 - 漏极区域的互连，其在字线之间的间隔中以部分布置并且以与后者的电绝缘并且连接到位线的方式布置，其中栅极电极布置在至少部分地形成在存储器中的沟槽中 基质。
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4.发明申请Memory cell arrangements and methods of manufacturing memory cell arrangements 有权存储单元布置和制造存储单元布置的方法公开(公告)号：US20080073694A1
公开(公告)日：2008-03-27
申请号：US11526149
申请日：2006-09-22
申请人： Josef Willer , Thomas Mikolajick , Nicolas Nagel , Michael Specht
发明人： Josef Willer , Thomas Mikolajick , Nicolas Nagel , Michael Specht
IPC分类号： H01L29/788
CPC分类号： H01L27/105 , H01L27/11526 , H01L27/11529
摘要： A memory cell arrangement includes a first memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells, a second memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells. A dielectric material is between and above the first memory cell string and the second memory cell string. A source/drain line groove is defined in the dielectric material. The source/drain line groove extends from a source/drain region of one transistor of the first memory cell string to a source/drain region of the second memory cell string. Electrically conductive filling material is disposed in the source/drain line groove. Dielectric filling material is disposed in the source/drain line groove between the source/drain regions.
摘要翻译： 存储单元布置包括具有多个串联的源极至漏极耦合的晶体管的第一存储单元串，其中至少一些是存储单元;第二存储单元串，具有多个串联的源至漏耦合的晶体管 晶体管，其中至少有一些是存储单元。 电介质材料在第一存储单元串和第二存储单元串之间和之上。 源极/漏极线沟槽限定在电介质材料中。 源极/漏极线槽从第一存储单元串的一个晶体管的源极/漏极区域延伸到第二存储单元串的源极/漏极区域。 导电填充材料设置在源极/漏极线槽中。 电介质填充材料设置在源极/漏极区域之间的源极/漏极线沟槽中。
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公开(公告)号：US20070082446A1
公开(公告)日：2007-04-12
申请号：US11246908
申请日：2005-10-07
IPC分类号： H01L21/336 , H01L21/76 , H01L21/302 , H01L21/461
CPC分类号： H01L27/115 , H01L21/76897 , H01L27/11568
摘要： A method is provided for fabricating stacked non-volatile memory cells. A semiconductor wafer is provided having a plurality of diffusion regions forming buried bit lines. A charge-trapping layer and a conductive layer are deposited on the surface of the semiconductor wafer. Using a mask layer on top of the conductive layer, contact holes are formed wherein an insulating layer is formed. An etch stop layer is deposited on the surface of the semiconductor wafer. Above the etch stop layer, a dielectric layer is deposited and is patterned so as to form contact holes. Subsequently, the contact holes are enlarged through the etch stop layer and the insulating layer to the buried bit lines.
摘要翻译： 提供了用于制造堆叠的非易失性存储单元的方法。 提供具有形成埋入位线的多个扩散区域的半导体晶片。 电荷捕获层和导电层沉积在半导体晶片的表面上。 在导电层的顶部使用掩模层，形成绝缘层的接触孔。 蚀刻停止层沉积在半导体晶片的表面上。 在蚀刻停止层上方，沉积介电层并图案化以形成接触孔。 随后，接触孔通过蚀刻停止层和绝缘层扩大到埋入位线。
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公开(公告)号：US07049651B2
公开(公告)日：2006-05-23
申请号：US10715142
申请日：2003-11-17
申请人： Thomas Mikolajick , Hans Reisinger , Josef Willer , Corvin Liaw
发明人： Thomas Mikolajick , Hans Reisinger , Josef Willer , Corvin Liaw
IPC分类号： H01L29/788
CPC分类号： H01L27/11568 , G11C16/0466 , G11C16/0491 , H01L21/28282 , H01L27/115 , H01L29/7923
摘要： The charge-trapping layer comprises two strips above the source and drain junctions. The thicknesses of the charge-trapping layer and the gate dielectric are chosen to facilitate Fowler-Nordheim-tunnelling of electrons into the strips during an erasure process. Programming is performed by injection of hot holes into the strips individually for two-bit storage.
摘要翻译： 电荷捕获层包括在源极和漏极结上方的两个条带。 选择电荷俘获层和栅极电介质的厚度，以便在擦除过程中促进Fowler-Nordheim隧穿隧道的电子。 通过将热孔单独注入热孔进行两位存储来执行编程。
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公开(公告)号：US07272040B2
公开(公告)日：2007-09-18
申请号：US11119376
申请日：2005-04-29
申请人： Thomas Mikolajick , Josef Willer , Corvin Liaw
发明人： Thomas Mikolajick , Josef Willer , Corvin Liaw
IPC分类号： G11C11/34
CPC分类号： G11C16/0483 , G11C16/0475 , H01L27/115 , H01L27/11568
摘要： An array of charge-trapping multi-bit memory cells is arranged in a virtual-ground NAND architecture. The memory cells are erased by Fowler-Nordheim tunneling of electrons into the memory layers. The write operation is effected by hot hole injection. A write voltage is applied by a bitline to two NAND chains in series. The subsequent bitline on the side of the memory cell to be programmed is maintained on floating potential, whereas the bitline on the other side is set to an inhibit voltage, which is provided to inhibit a program disturb of an addressed memory cell which is not to be programmed. This virtual-ground NAND architecture of charge-trapping memory cells enables an increased storage density.
摘要翻译： 一个电荷捕获多位存储单元的阵列被布置在虚拟地NAND架构中。 存储器单元被Fowler-Nordheim擦除，将电子隧穿到存储器层中。 写入操作通过热空穴注入来实现。 写入电压通过位线施加到两个串联的NAND链。 要编程的存储器单元侧的后续位线保持浮置电位，而另一侧的位线被设置为禁止电压，该禁止电压被提供以阻止寻址的存储器单元的程序干扰 被编程。 电荷俘获存储器单元的虚拟NAND架构能够提高存储密度。
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8.发明申请SEMICONDUCTOR MEMORY HAVING CHARGE TRAPPING MEMORY CELLS AND FABRICATION METHOD THEREOF 失效具有电荷捕获记忆体的半导体存储器及其制造方法公开(公告)号：US20090029512A1
公开(公告)日：2009-01-29
申请号：US12110849
申请日：2008-04-28
IPC分类号： H01L21/8247 , H01L21/336
CPC分类号： H01L27/11568 , H01L27/115 , H01L29/42336 , H01L29/7923
摘要： A semiconductor memory having charge trapping memory cells and fabrication method thereof. The direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.
摘要翻译： 一种具有电荷捕获存储单元的半导体存储器及其制造方法。 存储晶体管的每个通道区域的电流流动方向相对于相关字线横向延伸，位线布置在字线的顶侧，并以与之相隔离的方式布置，并且导电的局部 存在源极 - 漏极区域的互连，其在字线之间的间隔中以部分布置并且以与后者的电绝缘并且连接到位线的方式布置，其中栅极电极布置在至少部分地形成在存储器中的沟槽中 基质。
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9.发明授权Charge-trapping memory device and methods for operating and manufacturing the cell 有权电荷捕获存储器件以及用于操作和制造电池的方法公开(公告)号：US07402490B2
公开(公告)日：2008-07-22
申请号：US11253939
申请日：2005-10-19
申请人： Thomas Mikolajick , Hans Reisinger , Josef Willer , Corvin Liaw
发明人： Thomas Mikolajick , Hans Reisinger , Josef Willer , Corvin Liaw
IPC分类号： H01L21/336
CPC分类号： H01L27/11568 , G11C16/0466 , G11C16/0491 , H01L21/28282 , H01L27/115 , H01L29/7923
摘要： To manufacture a memory device, a gate dielectric layer is formed over a semiconductor body and a gate electrode layer is formed over the gate dielectric layer. The gate electrode layer is structured to form a gate electrode with sidewalls. An etching process is performed to remove parts of the gate dielectric layer from beneath the gate electrode on opposite sides of the gate electrode. Boundary layers, e.g., oxide layers, are formed on an upper surface of the semiconductor body and a lower surface of the gate electrode adjacent where the gate dielectric has been removed thereby leaving spaces. Charge-trapping layer material can then be deposited to fill the spaces. Source and drain regions are then formed in the semiconductor body adjacent the gate electrode.
摘要翻译： 为了制造存储器件，在半导体本体上形成栅极电介质层，并且在栅极介电层上形成栅极电极层。 栅电极层被构造成形成具有侧壁的栅电极。 执行蚀刻处理以从栅极电极的相对侧上的栅电极下方去除栅极电介质层的部分。 边界层，例如氧化物层，形成在半导体本体的上表面上，栅电极的下表面邻近已经去除了栅极电介质，从而留下空间。 然后可以沉积电荷捕获层材料以填充空间。 然后在与栅电极相邻的半导体本体中形成源区和漏区。
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10.发明授权Semiconductor memory having charge trapping memory cells and fabrication method thereof 有权具有电荷捕获存储单元的半导体存储器及其制造方法公开(公告)号：US07365382B2
公开(公告)日：2008-04-29
申请号：US11067983
申请日：2005-02-28
IPC分类号： H01L29/76
CPC分类号： H01L27/11568 , H01L27/115 , H01L29/42336 , H01L29/7923
摘要： A semiconductor memory having charge trapping memory cells, where the direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.
摘要翻译： 一种具有电荷捕获存储单元的半导体存储器，其中存储晶体管的每个沟道区域的电流方向相对于相关字线横向延伸，位线被布置在字线的顶侧，并且以某种方式 存在与源极 - 漏极区电气绝缘的导电局部互连件，其在字线之间的间隔中以部分布置并以与后者的电绝缘方式并且连接到位线的方式布置，其中栅极电极 布置在至少部分地形成在存储器基板中的沟槽中。
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