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公开(公告)号：US5535507A
公开(公告)日：1996-07-16
申请号：US169911
申请日：1993-12-20
申请人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Raymond R. Ruckel , Robert E. Tompkins , Robert P. Westerfield, Jr.
发明人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Raymond R. Ruckel , Robert E. Tompkins , Robert P. Westerfield, Jr.
IPC分类号： B23Q3/15 , H01L21/00 , H01L21/683 , H02N13/00 , H01R43/00
CPC分类号： H01L21/67109 , H01L21/6831 , H01L21/6833 , Y10T29/49117
摘要： An electrostatic chuck is made by a method in which the component parts are machined, then anodized to provide a hard insulating surface, and then assembled in a fixture, to provide a planar surface for wafer support that retains superior insulating properties; gas may be fed from the rim only, diffusing within interstices between the clamping surface and the wafer and maintaining a desired pressure by flowing radially through an impedance determined by the average spacing between clamping surface and wafer, thereby providing uniform pressure across the clamping surface without the use of elastomeric seals.
摘要翻译： 静电卡盘通过以下方法制成，其中组分部件被加工，然后阳极氧化以提供硬绝缘表面，然后组装在夹具中，以提供保持优异绝缘性能的晶片支撑件的平面表面; 气体可以仅从边缘进料，在夹紧表面和晶片之间的空隙内扩散，并通过径向流过由夹紧表面和晶片之间的平均间隔确定的阻抗来保持期望的压力，由此在夹紧表面上提供均匀的压力而没有 使用弹性密封件。
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公开(公告)号：US5191506A
公开(公告)日：1993-03-02
申请号：US694699
申请日：1991-05-02
IPC分类号： B23Q3/15 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , H01L21/6831 , Y10S269/903 , Y10T279/23
摘要： An electrostatic chuck 8 assembly includes, from top to bottom: a top multilayer ceramic insulating layer 10; an electrostatic pattern layer 12 having a conductive electrostatic pattern 16 disposed on a multilayer ceramic substrate; a multilayer ceramic support layer 20; and, a heat sink base 30 having a backside cooling channels machined therein. Layers 12, 12 and 20 are bonded together using multilayer ceramic techniques and the heatsink base 30 is brazed to the bottom of the multilayer ceramic support layer 20.
摘要翻译： 静电吸盘8组件包括顶部至底部：顶部多层陶瓷绝缘层10; 具有设置在多层陶瓷基板上的导电静电图案16的静电图案层12; 多层陶瓷支撑层20; 以及在其中加工有后侧冷却通道的散热器基座30。 层12,12和20使用多层陶瓷技术结合在一起，散热器基座30钎焊到多层陶瓷支撑层20的底部。
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公开(公告)号：US5155652A
公开(公告)日：1992-10-13
申请号：US694698
申请日：1991-05-02
IPC分类号： B23Q3/15 , B23Q11/14 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6831 , H01L21/6833 , H02N13/00 , Y10T279/23
摘要： An electrostatic chuck 40 assembly includes, from top to bottom: a top isolation layer 42; an electrostatic pattern layer 44 comprised of an electrically conductive electrostatic pattern 46 disposed on a substrate 45; a heating layer 50 comprised of an electrically conductive heating pattern 54 disposed on a substrate 52; a support 60; and, a heat sink base 70 having backside cooling and insulating channels 78, 80 provided therein.
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公开(公告)号：US5099571A
公开(公告)日：1992-03-31
申请号：US695465
申请日：1991-05-03
IPC分类号： H01L21/683 , H02N13/00
CPC分类号： H02N13/00 , H01L21/6831 , H01L21/6833 , Y10T29/49117 , Y10T29/49126 , Y10T29/49208 , Y10T29/49224
摘要： An electrostatic chuck is provided with an electrode split into two sections. The separate sections are joined through a tapered joint and bonded using epoxy. An insulator electrically separates the two sections and covers the top of the joined sections to form a clamping surface. The geometry of the electrode forms three annular regions, dividing the clamping surface into two equal areas distributed symmetrically. Moreover, the split-ring electrostatic chuck just described is fabricated by forming the two, separate electrodes; coating the separate electrodes with an insulator; joining the electrodes; machining the joint, top surface of the electrodes to form a single, co-planar, flat, smooth surface; and applying an insulator to that top surface.
摘要翻译： 静电卡盘具有分成两部分的电极。 分离的部分通过锥形接头连接并使用环氧树脂粘合。 绝缘体电气地分离两个部分并覆盖连接部分的顶部以形成夹紧表面。 电极的几何形状形成三个环形区域，将夹紧表面分成对称分布的两个相等的区域。 此外，刚刚描述的开环静电卡盘通过形成两个分开的电极来制造; 用绝缘体涂覆单独的电极; 连接电极; 加工接头，电极顶表面形成一个单一的共面平面光滑表面; 并将绝缘体施加到该顶表面。
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公开(公告)号：US5055964A
公开(公告)日：1991-10-08
申请号：US579439
申请日：1990-09-07
IPC分类号： B23Q3/15 , H01L21/265 , H01L21/302 , H01L21/3065 , H01L21/683 , H02N13/00
CPC分类号： H02N13/00 , H01L21/6831 , H01L21/6833 , Y10T279/23 , Y10T29/49124
摘要： An electrostatic chuck is provided with an electrode split into two sections. The separate sections are joined through a tapered joint and bonded using epoxy. An insulator electrically separates the two sections and covers the top of the joined sections to form a clamping surface. The geometry of the electrode forms three annular regions, dividing the clamping surface into two equal areas distributed symmetrically. Moreover, the split-ring electrostatic chuck just described is fabricated by forming the two, separate electrodes; coating the separate electrodes with an insulator; joining the electrodes; machining the joint, top surface of the electrodes to form a single, co-planar, flat, smooth surface; and applying an insulator to that top surface.
摘要翻译： 静电卡盘具有分成两部分的电极。 分离的部分通过锥形接头连接并使用环氧树脂粘合。 绝缘体电气地分离两个部分并覆盖连接部分的顶部以形成夹紧表面。 电极的几何形状形成三个环形区域，将夹紧表面分成对称分布的两个相等的区域。 此外，刚刚描述的开环静电卡盘通过形成两个分开的电极来制造; 用绝缘体涂覆单独的电极; 连接电极; 加工接头，电极顶表面形成一个单一的共面平面光滑表面; 并将绝缘体施加到该顶表面。
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6.发明授权Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization 失效静电卡盘具有相对较厚和较薄的区域，以及用于在卡盘阳极氧化期间均匀冷却所述厚薄区域的装置
公开(公告)号：US5521790A
公开(公告)日：1996-05-28
申请号：US241527
申请日：1994-05-12
IPC分类号： B23Q3/15 , H01L21/027 , H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , H01L21/6831 , H02N13/00 , Y10T279/23
摘要： An aluminum electrostatic chuck for holding semiconductor wafers during wafer processing. The chuck is characterized by a closely determined magnitude of electrostatic holding force due to an anodization step for creating a finely uniform thickness of dielectric material on the chuck surface facing the wafer which, in turn, determines the holding force. The chuck cross section comprises two different thickness areas with fluid cooling being applied to the thinner thickness area during chuck anodization to assure thickness uniformity of the anodized material across the face of the chuck.
摘要翻译： 一种用于在晶片加工期间保持半导体晶片的铝静电卡盘。 卡盘的特征在于由于阳极氧化步骤的紧密确定的静电保持力的大小，用于在面向晶片的卡盘表面上形成精细均匀的电介质材料厚度，这又决定了保持力。 卡盘横截面包括两个不同的厚度区域，在卡盘阳极氧化期间，流体冷却被施加到较薄的厚度区域，以确保阳极氧化材料穿过卡盘的表面的厚度均匀性。
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公开(公告)号：US5154333A
公开(公告)日：1992-10-13
申请号：US784702
申请日：1991-10-30
IPC分类号： H01L21/301 , B28D5/00 , H01L21/304 , H01S5/02 , H01S5/028
CPC分类号： B28D5/0011 , B28D5/0017 , H01S5/0202 , H01S5/028 , Y10T225/10 , Y10T225/12 , Y10T225/325 , Y10T225/357
摘要： An apparatus and method for cleaving GaAs laser bars from a cell utilizes a first jaw applied to one end of a laser bar to propagate a cleavage and a second jaw applied to an opposite end which provides a biasing force that assures separation of the bar from the cell along the same crystallographic plane. The apparatus may be used in an ultra-high vacuum environment and allows handling of the bars without contacting the vital areas of the top surfaces or facet faces. The apparatus precisely locates bars after cleavage so that they may be further processed.
摘要翻译： 用于从电池中切割GaAs激光棒的装置和方法利用施加到激光棒的一端的第一钳口来传播切割，并将第二钳口施加到相对端，该钳口提供偏置力，以确保杆与 细胞沿同一晶体平面。 该设备可以在超高真空环境中使用，并且可以处理杆而不接触顶表面或小面的重要区域。 该装置在切割后精确地定位棒，使得它们可以进一步加工。
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8.发明授权
公开(公告)号：US4869876A
公开(公告)日：1989-09-26
申请号：US605433
申请日：1984-04-30
申请人： Kenneth D. Arfman , Theodore J. Pillera, II , Raymond R. Ruckel , Allan C. Turits , John Q. Walker
发明人： Kenneth D. Arfman , Theodore J. Pillera, II , Raymond R. Ruckel , Allan C. Turits , John Q. Walker
CPC分类号： G01N30/30 , G01N2030/3038 , G01N2030/3046 , G01N2030/3084 , G01N2030/8804 , G01N30/461 , G01N30/466
摘要： A gas chromatography (GC) system includes a primary complete, independently-operable, self-contained GC system and a secondary, dependently-operable GC system. The primary and secondary systems have two independently controlled GC ovens. Injectors and detectors are supported by heater blocks or ovens mounted on the respective GC ovens and are connected to the electrical and pneumatic controls of the primary GC system. The injectors and detectors of the secondary GC system share operation of the primary GC system. GC columns can be mounted in each oven and operated completely independently or dependently in different ways. A separate power supply for the secondary oven is connectable to a separate circuit or power line in the user environment.
摘要翻译： 气相色谱（GC）系统包括主要完整的，可独立操作的独立GC系统和辅助可靠操作的GC系统。 主要和次要系统有两个独立控制的GC烤箱。 注射器和检测器由安装在相应GC炉上的加热器块或烤箱支撑，并连接到主GC系统的电气和气动控制。 二次GC系统的注射器和检测器共享主GC系统的操作。 GC色谱柱可以安装在每个烤箱中，完全独立或依赖于不同的方式进行操作。 用于二次烤箱的独立电源可连接到用户环境中的单独电路或电源线。
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公开(公告)号：US4476734A
公开(公告)日：1984-10-16
申请号：US472900
申请日：1983-03-07
CPC分类号： G01N30/24 , G01N35/1095
摘要： The flushing of the syringe with a side port is performed by introducing a liquid solvent through the side port while the plunger is retracted from the barrel. At the completion of the flushing operation the plunger is fully inserted into the barrel expelling all the solvent except that in the needle. The needle is then inserted into the sample and the plunger is raised to withdraw the sample. With this arrangement, it is possible to take a 0.1 L sample and dispense it because of the solvent reserve in the barrel. Furthermore, the solvent reserved in the barrel provides a buffer so that sampled material does not contact the plunger or get into the annular space around the retracted plunger.
摘要翻译： 注射器侧面端口的冲洗是通过在柱塞从筒体缩回的同时引入液体溶剂通过侧端口进行的。 在冲洗操作完成时，柱塞完全插入桶中，除去针中的所有溶剂。 然后将针插入样品中，并将柱塞升起以抽出样品。 通过这种布置，可以取0.1L样品并由于桶中的溶剂储备而分配。 此外，保留在桶中的溶剂提供缓冲液，使得取样的材料不接触柱塞或进入回缩柱塞周围的环形空间。
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