Self-aligned method of micro-machining field emission display microtips
    1.
    发明授权
    Self-aligned method of micro-machining field emission display microtips 失效
    自动对准微加工场放电显示微型方法

    公开(公告)号:US5836799A

    公开(公告)日:1998-11-17

    申请号:US761587

    申请日:1996-12-06

    IPC分类号: H01J9/02

    CPC分类号: H01J9/025

    摘要: A method of fabricating electron emission structures 28 having enhanced emission characteristics. The method comprises the steps of providing a substrate 10 having electron emission structures 5 thereon and having a layer 5" over the electron emission structures. The layer 5" having apertures 30 in alignment with said electron emission structures 5. Then modifying the electron emission structures 5 through the apertures 30 with a directional ion milling beam; thereby creating modified electron emission structures 17,29 with enhanced emission efficiency.

    摘要翻译: 一种制造具有增强的发射特性的电子发射结构28的方法。 该方法包括以下步骤:在其上提供具有电子发射结构5的衬底10,并在电子发射结构上方具有层5“。 层5“具有与所述电子发射结构5对准的孔30.然后用定向离子铣削梁通过孔30修改电子发射结构5; 从而产生具有增强的发射效率的改进的电子发射结构17,29。

    Field emission device with over-etched gate dielectric
    2.
    发明授权
    Field emission device with over-etched gate dielectric 失效
    具有过蚀刻栅极电介质的场致发射器件

    公开(公告)号:US5621272A

    公开(公告)日:1997-04-15

    申请号:US453593

    申请日:1995-05-30

    摘要: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by an insulating spacer (125) from a cathode electrode including a conductive mesh (18). Arrays of microtips (14) are located in mesh spacings (16), within apertures (26) formed in extraction electrode (22) and subcavities (141) formed through apertures (26) in insulating spacer (125). Subcavities (141a) are open to row-adjacent and column-adjacent subcavities (141b, 141c) to form larger main cavities (144). Posts (143) of insulating spacer (125) separate diagonally-adjacent cavities (141d). Subcavities (141) are formed by over-etching a layer of insulating spacer material (25) through apertures (26) before or after forming microtips (14) through the same apertures (26). Over-etching reduces the dielectric constant factor of gate-to-cathode capacitance in the finished structure.

    摘要翻译: 用于FED图像显示器的电子发射极板(110)具有从包括导电网(18)的阴极电极与绝缘间隔物(125)间隔开的提取(栅极)电极(22)。 小尖头(14)的阵列位于形成在引出电极(22)的孔(26)中的网格间隔(16)中,以及通过绝缘间隔物(125)中的孔(26)形成的子部分(141)。 子腔(141a)对行相邻和列相邻的子区(141b,141c)开放以形成较大的主腔(144)。 绝缘间隔物(125)的柱(143)分离对角相邻的空腔(141d)。 在通过相同的孔(26)形成微尖端(14)之前或之后,通过孔(26)过度蚀刻绝缘隔离材料层(25)形成子腔(141)。 过蚀刻降低了成品结构中栅极至阴极电容的介电常数因子。

    Method for fabricating a field emission device having black matrix SOG
as an interlevel dielectric
    3.
    发明授权
    Method for fabricating a field emission device having black matrix SOG as an interlevel dielectric 失效
    制造具有黑矩阵SOG作为层间电介质的场致发射器件的方法

    公开(公告)号:US5577943A

    公开(公告)日:1996-11-26

    申请号:US450610

    申请日:1995-05-25

    摘要: A method of fabricating an anode plate 80 for use in a field emission device. The method comprises the steps of providing a substantially transparent substrate 88 having spaced-apart, electrically conductive regions 50 on a surface thereof, then coating the anode plate with a substantially opaque material 86. The opaque material 86 is removed from the surface of the conductive regions 50 in the active area 58, and from selected areas 60 of the interconnect portion of the conductive regions 50. A first bus 52 is provided for electrically connecting a first series 50.sub.R of the conductive regions 50, a second bus 54 is provided for electrically connecting a second series 50.sub.G of the conductive regions 50, and a third bus 56 is provided for electrically connecting a third series 50.sub.B of the conductive regions 50. Luminescent material of a first color 84.sub.R is applied to the first series of conductive regions 50.sub.R, luminescent material of a second color 84.sub.G is applied to the second series of conductive regions 50.sub.G, and luminescent material of a third color 84.sub.B is applied to the third series of conductive regions 50.sub.B.

    摘要翻译: 一种制造用于场发射装置的阳极板80的方法。 该方法包括以下步骤:提供在其表面上具有间隔开的导电区域50的基本上透明的基底88,然后用基本上不透明的材料86涂覆阳极板。不透明材料86从导电的表面去除 有源区域58中的区域50以及导电区域50的互连部分的选定区域60.第一总线52用于电连接导电区域50的第一系列50R,第二总线54设置用于电气 连接导电区域50的第二系列50G和第三总线56,用于电连接导电区域50的第三系列50B。将第一颜色84R的发光材料施加到第一系列导电区域50R,发光 将第二颜色84G的材料施加到第二系列导电区域50G,并将第三颜色84B的发光材料施加到 第三系列的导电区域50B。

    Field emission device with close-packed microtip array
    4.
    发明授权
    Field emission device with close-packed microtip array 失效
    具有紧密堆积微尖头阵列的场发射装置

    公开(公告)号:US5759078A

    公开(公告)日:1998-06-02

    申请号:US686427

    申请日:1996-07-26

    IPC分类号: H01J3/02 H01J9/02 H01J29/70

    摘要: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by an insulating layer (125) from a cathode electrode including a conductive mesh (18). Hexagonal close-packed arrays (12) of microtips (14) are located in mesh spacings (16), within apertures (26) formed in extraction electrode (22). Microtips (14) are formed on a conductive plate (17) laterally spaced from mesh structure (18) by a resistive layer (15). Insulating layer (125) is etched to connect apertures (26) and place microtips (14) in a common cavity within each mesh spacing (16).

    摘要翻译: 用于FED图像显示器的电子发射极板(110)具有从包括导电网(18)的阴极电极与绝缘层(125)间隔开的提取(栅极)电极(22)。 微尖头(14)的六角紧密堆叠阵列(12)位于形成在引出电极(22)中的孔(26)内的网孔(16)中。 微电极(14)形成在通过电阻层(15)与网状结构(18)横向隔开的导电板(17)上。 绝缘层(125)被蚀刻以连接孔(26)并将微尖端(14)放置在每个网格间隔(16)内的公共空腔中。

    Black matrix sog as an interlevel dielectric in a field emission device
    5.
    发明授权
    Black matrix sog as an interlevel dielectric in a field emission device 失效
    黑色矩阵浸泡在场发射器件中的层间电介质

    公开(公告)号:US5608285A

    公开(公告)日:1997-03-04

    申请号:US450051

    申请日:1995-05-25

    摘要: An mode plate 80 for use in a field emission flat panel display device comprises a transparent planar substrate 88 having a plurality of electrically conductive, parallel stripes 50 comprising the anode electrode of the device, which are covered by phosphors 84.sub.R, 84.sub.G and 84.sub.B. The conductors 50 which are covered by the same color phosphors are electrically interconnected by buses 52, 54, and 56. A substantially opaque, electrically insulating material 86 is affixed to substrate 88 in the spaces between conductors 50, acting as a barrier to the passage of ambient light into and out of the device. In addition, the same substantially opaque, electrically insulating material 86 is formed between the conductors 50 and the buses 52, 54, and 56, thereby providing electrical isolation between the two layers. Opaque material 86 preferably comprises glass having impurities dispersed therein, wherein the impurities may include one or more organic dyes, selected to provide relatively uniform opacity over the visible range of the electromagnetic spectrum. Alternatively, the impurities may include the black oxide of a transition metal such as cobalt.

    摘要翻译: 用于场致发射平板显示装置的模板80包括透明平面基板88,透明平面基板88具有多个导电的平行条带50,其包括由荧光体84R,84G和84B覆盖的该装置的阳极电极。 由相同颜色的荧光体覆盖的导体50通过总线52,54和56电互连。基本上不透明的电绝缘材料86固定到导体50之间的空间中的衬底88上,用作通道的屏障 的环境光进出设备。 此外,在导体50和总线52,54和56之间形成相同的基本不透明的电绝缘材料86,从而在两层之间提供电隔离。 不透明材料86优选包括其中分散有杂质的玻璃,其中杂质可以包括一种或多种有机染料,其被选择以在电磁光谱的可见范围内提供相对均匀的不透明度。 或者,杂质可以包括过渡金属如钴的黑色氧化物。

    Field emission device with over-etched gate dielectric
    6.
    发明授权
    Field emission device with over-etched gate dielectric 失效
    具有过蚀刻栅极电介质的场致发射器件

    公开(公告)号:US5902165A

    公开(公告)日:1999-05-11

    申请号:US677694

    申请日:1996-07-10

    摘要: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by an insulating spacer (125) from a cathode electrode including a conductive mesh (18). Arrays of microtips (14) are located in mesh spacings (16), within apertures (26) formed in extraction electrode (22) and subcavities (141) formed through apertures (26) in insulating spacer (125). Subcavities (141a) are open to row-adjacent and column-adjacent subcavities (141b, 141c) to form larger main cavities (144). Posts (143) of insulating spacer (125) separate diagonally-adjacent cavities (141d). Subcavities (141) are formed by over-etching a layer of insulating spacer material (25) through apertures (26) before or after forming microtips (14) through the same apertures (26). Over-etching reduces the dielectric constant factor of gate-to-cathode capacitance in the finished structure.

    摘要翻译: 用于FED图像显示器的电子发射极板(110)具有从包括导电网(18)的阴极电极与绝缘间隔物(125)间隔开的提取(栅极)电极(22)。 小尖头(14)的阵列位于形成在引出电极(22)的孔(26)中的网格间隔(16)中,以及通过绝缘间隔物(125)中的孔(26)形成的子部分(141)。 子腔(141a)对行相邻和列相邻的子区(141b,141c)开放以形成较大的主腔(144)。 绝缘间隔物(125)的柱(143)分离对角相邻的空腔(141d)。 在通过相同的孔(26)形成微尖端(14)之前或之后,通过孔(26)过度蚀刻绝缘隔离材料层(25)形成子腔(141)。 过蚀刻降低了成品结构中栅极至阴极电容的介电常数因子。

    Method of making an anode plate for use in a field emission device
    8.
    发明授权
    Method of making an anode plate for use in a field emission device 失效
    制造用于场致发射装置的阳极板的方法

    公开(公告)号:US5643033A

    公开(公告)日:1997-07-01

    申请号:US475123

    申请日:1995-06-07

    摘要: An anode plate 50 for use in a field emission flat panel display device comprises a transparent planar substrate 58 having a plurality of electrically conductive, parallel stripes 52 comprising the anode electrode of the device, which are covered by phosphors 54.sub.R, 54.sub.G and 54.sub.B. A substantially opaque, electrically insulating material 56 is affixed to substrate 58 in the spaces between conductors 52, acting as a barrier to the passage of ambient light into and out of the device. The electrical insulating quality of opaque material 56 increases the electrical isolation of conductive stripes 52 from one another, reducing the risk of breakdown due to increased leakage current. Opaque material 56 preferably comprises glass having impurities dispersed therein, wherein the impurities may include one or more organic dyes, selected to provide relatively uniform opacity over the visible range of the electromagnetic spectrum. Alternatively, the impurities may include the black oxide of a transition metal such as cobalt. Opaque material 56 is formed by mixing a TEOS solution with a dye or a source of metallic ions, spinning or spreading the mixture on glass substrate 58, and curing the mixture to drive out the organics and solvents. Two methods of fabricating anode plate 50 are disclosed.

    摘要翻译: 用于场发射平板显示装置的阳极板50包括透明平面基板58,透明平面基板58具有多个导电的平行条52,该平行条52包括被荧光体54R,54G和54B覆盖的该装置的阳极。 基本上不透明的电绝缘材料56被固定到导体52之间的空间中的基底58上,作为环境光通入和流出设备的障碍。 不透明材料56的电绝缘质量增加了导电条52彼此的电隔离,从而降低了由于增加的漏电流而导致的击穿风险。 不透明材料56优选地包括其中分散有杂质的玻璃,其中杂质可以包括一种或多种有机染料,其被选择以在电磁光谱的可见范围内提供相对均匀的不透明度。 或者,杂质可以包括过渡金属如钴的黑色氧化物。 通过将TEOS溶液与染料或金属离子源混合,将混合物旋转或铺展在玻璃基底58上并固化混合物以驱出有机物和溶剂而形成不透明材料56。 公开了制造阳极板50的两种方法。

    Low density, high porosity material as gate dielectric for field
emission device

    公开(公告)号:US5569058A

    公开(公告)日:1996-10-29

    申请号:US461230

    申请日:1995-06-05

    IPC分类号: H01J1/304 H01J1/30 H01J9/18

    摘要: A porous dielectric material such as silica-based aerogel is used as the dielectric layer 48 between the gate and the cathode on the emitter plate 12 of a field emission device. Aerogel, which can have a relative dielectric constant as low as 1.03, is deposited over the resistive layer 44 of the emitter plate 12. Metal layer 49, functioning as the gate electrode, is subsequently deposited over the aerogel layer 48. The use of aerogel as a gate dielectric reduces power consumption. In a disclosed embodiment, aerogel layer 48 is comprised of sublayers 48a, 48b, and 48c of aerogels of differing densities, thereby providing better adhesion of the aerogel gate dielectric to both the resistive layer 44 and metal layer 49. Methods of fabricating the aerogel gate dielectric are disclosed.

    Spacer for flat panel display
    10.
    发明授权
    Spacer for flat panel display 失效
    隔板用于平板显示

    公开(公告)号:US5562517A

    公开(公告)日:1996-10-08

    申请号:US481982

    申请日:1995-06-07

    摘要: A spacer 40 for use in a field emission device comprises a comb-like structure having a plurality of elongated filaments 42 joined to a support member 44. The filaments 42, which may be glass, are positioned longitudinally in a single layer between the facing surfaces of the anode structure 10 and the electron emitting structure 12. Support member 44 is positioned entirely outside the active regions of anode structure 10 and emitting structure 12. Spacer 40 provides voltage isolation between the anode structure 10 and the cathode structure 12, and also provides standoff of the mechanical forces of vacuum within the assembly. In a second embodiment, spacer 50 comprises elongated filaments 52 joined at each end to a support member 54a and 54b, the additional support facilitating handling, fabrication and assembly. In an additional embodiment, a filament 70 of nonuniform diameter contacts planar surfaces 74 and 76 only at the high spots 72 of filament 70, thereby reducing the shadowing of the beam on the display surface.

    摘要翻译: 用于场发射装置的间隔件40包括梳状结构,其具有连接到支撑构件44的多个细长丝42.可以是玻璃的细丝42纵向定位在相对表面之间的单层中 阳极结构10和电子发射结构12.支撑构件44完全位于阳极结构10和发射结构12的有源区域的外部。间隔物40提供阳极结构10和阴极结构12之间的电压隔离,并且还提供 组件内的真空机械力的间隔。 在第二实施例中,间隔件50包括在每个端部处连接到支撑构件54a和54b的细长丝52,附加支撑件便于操作,制造和组装。 在另外的实施例中,不均匀直径的细丝70仅在细丝70的高点72处接触平面74和76,从而减少了在显示表面上的光束的阴影。