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    Methods for preparing alkali cellulose and cellulose ether
    3.
    发明授权
    Methods for preparing alkali cellulose and cellulose ether 有权

    公开(公告)号：US09617350B2

    公开(公告)日：2017-04-11

    申请号：US11614587

    申请日：2006-12-21

    申请人： Mitsuo Narita ,  Masaki Tabata ,  Atsushi Yoshida ,  Hiroshi Umezawa

    发明人： Mitsuo Narita ,  Masaki Tabata ,  Atsushi Yoshida ,  Hiroshi Umezawa

    IPC分类号： C07H1/00 ,  C08B11/00 ,  C08B1/08 ,  C08B1/10 ,  C08B11/16 ,  C08B11/193

    CPC分类号： C08B1/08 ,  C08B1/10 ,  C08B11/00 ,  C08B11/16 ,  C08B11/193

    摘要： The invention is a method for efficiently preparing alkali cellulose having a uniform alkali distribution therein. More specifically, the invention is a method for preparing alkali cellulose comprising steps of bringing pulp into continuous contact with an alkali metal hydroxide solution in a bucket conveyor type contactor to generate a contact mixture, and draining the contact mixture; a method for preparing a cellulose ether comprising use of the alkali cellulose thus prepared; and an apparatus for preparing alkali cellulose comprising a bucket conveyor contactor comprising at least one inlet port for introducing pulp and an alkali metal hydroxide solution at one end and at least one outlet port for discharging a contact mixture wherein the pulp and the alkali metal hydroxide solution can be moved from one end to the other end while bringing them into contact with each other to generate the contact mixture; and a drainer for separating a cake from the contact mixture discharged from the outlet port.

    Large-sized glass substrate
    4.
    发明授权
    Large-sized glass substrate 有权
    大尺寸玻璃基板

    公开(公告)号：US07745071B2

    公开(公告)日：2010-06-29

    申请号：US11674049

    申请日：2007-02-12

    申请人： Yukio Shibano ,  Satoru Miharada ,  Shuhei Ueda ,  Atsushi Watabe ,  Masaki Tabata

    发明人： Yukio Shibano ,  Satoru Miharada ,  Shuhei Ueda ,  Atsushi Watabe ,  Masaki Tabata

    IPC分类号： G03F1/00

    CPC分类号： G03F1/60 ,  B24B7/00 ,  B24C1/00 ,  C03C19/00 ,  G02F2001/133302 ,  Y10T428/315

    摘要： A large-sized substrate having a diagonal length of not less than 500 mm and a ratio of flatness/diagonal length of not more than 6×10−6 is disclosed. By use of the large-sized substrate for exposure of the present invention, the exposure accuracy, particularly the register accuracy and resolution are enhanced, so that it is possible to achieve high-precision exposure of a large-sized panel. With the processing method according to the present invention, it is possible to stably obtain a large-sized photomask substrate with a high flatness, and since the CD accuracy (dimensional accuracy) at the time of exposure of the panel is enhanced, it is possible to perform exposure of a fine pattern, leading to a higher yield of the panel. Furthermore, by applying the processing method according to the present invention, it is also possible to create an arbitrary surface shape.

    摘要翻译： 公开了具有对角线长度不小于500mm，平坦度/对角线长度不大于6×10-6的大尺寸基板。 通过使用本发明的大尺寸基板，能够提高曝光精度，特别是记录精度和分辨率，能够实现大尺寸面板的高精度曝光。 利用根据本发明的处理方法，可以稳定地获得具有高平坦度的大尺寸光掩模基板，并且由于提高了面板曝光时的CD精度（尺寸精度），所以可能 以进行精细图案的曝光，导致面板的更高的产量。 此外，通过应用根据本发明的处理方法，还可以产生任意的表面形状。

    Segmented Grating Alignment Device
    5.
    发明申请
    Segmented Grating Alignment Device 审中-公开
    分段光栅对准装置

    公开(公告)号：US20080123105A1

    公开(公告)日：2008-05-29

    申请号：US11791695

    申请日：2005-01-17

    申请人： Kouji Seki ,  Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

    发明人： Kouji Seki ,  Jiro Suzuki ,  Yoshihito Hirano ,  Yutaka Ezaki ,  Yasushi Horiuchi ,  Masaki Tabata ,  Kouji Namura ,  Izumi Mikami

    IPC分类号： G01B9/02

    CPC分类号： G02B27/4233 ,  G02B27/62 ,  G02F2201/305

    摘要： A grating alignment device performs alignment of two or more plane gratings so as to eliminate an angular misalignment and a phase misalignment which are caused between respective diffracted light beams generated when incident light is diffracted by the plane gratings. Specifically, alignment is performed by appropriately adjusting an angle A, an angle B, an angle C, a coordinate Z, and a coordinate X of the second plane grating so as to eliminate at least one of the angular misalignment and the phase misalignment which are caused between the respective diffracted light beams generated when incident light is diffracted by the first plane grating and the second plane grating.

    摘要翻译： 光栅对准装置执行两个或更多个平面光栅的对准，以消除当入射光被平面光栅衍射时产生的各衍射光束之间产生的角度偏移和相位未对准。 具体而言，通过适当地调整第二平面光栅的角度A，角度B，角度C，坐标Z和坐标X来进行对准，以消除角度偏移和相位未对准中的至少一个 当入射光被第一平面光栅和第二平面光栅衍射时产生的各衍射光束之间产生。

    LARGE-SIZED SUBSTRATE AND METHOD OF PRODUCING THE SAME
    6.
    发明申请
    LARGE-SIZED SUBSTRATE AND METHOD OF PRODUCING THE SAME 有权
    大尺寸基板及其制造方法

    公开(公告)号：US20070132068A1

    公开(公告)日：2007-06-14

    申请号：US11674049

    申请日：2007-02-12

    申请人： Yukio Shibano ,  Satoru Miharada ,  Shuhei Ueda ,  Atsushi Watabe ,  Masaki Tabata

    发明人： Yukio Shibano ,  Satoru Miharada ,  Shuhei Ueda ,  Atsushi Watabe ,  Masaki Tabata

    IPC分类号： H01L23/58

    CPC分类号： G03F1/60 ,  B24B7/00 ,  B24C1/00 ,  C03C19/00 ,  G02F2001/133302 ,  Y10T428/315

    摘要： A large-sized substrate having a diagonal length of not less than 500 mm and a ratio of flatness/diagonal length of not more than 6×10−6 is disclosed. By use of the large-sized substrate for exposure of the present invention, the exposure accuracy, particularly the register accuracy and resolution are enhanced, so that it is possible to achieve high-precision exposure of a large-sized panel. With the processing method according to the present invention, it is possible to stably obtain a large-sized photomask substrate with a high flatness, and since the CD accuracy (dimensional accuracy) at the time of exposure of the panel is enhanced, it is possible to perform exposure of a fine pattern, leading to a higher yield of the panel. Furthermore, by applying the processing method according to the present invention, it is also possible to create an arbitrary surface shape.

    摘要翻译： 公开了具有不小于500mm的对角线长度和不大于6×10 -6的平坦度/对角线长度的比例的大尺寸基板。 通过使用本发明的大尺寸基板，能够提高曝光精度，特别是记录精度和分辨率，能够实现大尺寸面板的高精度曝光。 利用根据本发明的处理方法，可以稳定地获得具有高平坦度的大尺寸光掩模基板，并且由于提高了面板曝光时的CD精度（尺寸精度），所以可能 以进行精细图案的曝光，导致面板的更高的产量。 此外，通过应用根据本发明的处理方法，还可以产生任意的表面形状。

    METHODS FOR PREPARING ALKALI CELLULOSE AND CELLULOSE ETHER
    8.
    发明申请
    METHODS FOR PREPARING ALKALI CELLULOSE AND CELLULOSE ETHER 有权
    制备碱性纤维素和纤维素醚的方法

    公开(公告)号：US20070149772A1

    公开(公告)日：2007-06-28

    申请号：US11615355

    申请日：2006-12-22

    申请人： Mitsuo Narita ,  Masaki Tabata ,  Atsushi Yoshida ,  Hiroshi Umezawa

    发明人： Mitsuo Narita ,  Masaki Tabata ,  Atsushi Yoshida ,  Hiroshi Umezawa

    IPC分类号： C08B11/00 ,  C08B15/05

    CPC分类号： C08B1/08 ,  C08B1/10 ,  C08B11/00 ,  C08B11/193

    摘要： The invention is a method for efficiently preparing alkali cellulose having a uniform alkali distribution therein. More specifically, the invention is a method for preparing alkali cellulose comprising steps of bringing pulp into continuous contact with an alkali metal hydroxide solution in a pipe type contactor to generate a contact mixture and draining the contact mixture; a method for preparing cellulose ether comprising use of the alkali cellulose; and an apparatus for preparing alkali cellulose, comprising a pipe type contactor having at least one inlet port at one end thereof for introducing pulp and an alkali metal hydroxide solution, and an outlet port at the other end for discharging a contact mixture, wherein the pulp and the alkali metal hydroxide solution are moved from one end to the other end while bringing them into contact with each other, and a drainer for separating a cake from the contact mixture discharged from the contactor.

    摘要翻译： 本发明是一种有效制备碱分布均匀的碱纤维素的方法。 更具体地，本发明是一种制备碱纤维素的方法，包括使纸浆与管式接触器中的碱金属氢氧化物溶液连续接触以产生接触混合物并排出接触混合物的步骤; 一种制备纤维素醚的方法，包括使用碱纤维素; 以及一种用于制备碱纤维素的设备，包括管式接触器，其在其一端具有用于引入纸浆和碱金属氢氧化物溶液的至少一个入口端口和另一端的出口，用于排出接触混合物，其中纸浆 并且碱金属氢氧化物溶液在使它们彼此接触的同时从一端移动到另一端，以及用于从接触器排出的接触混合物中分离滤饼的排水器。

    Methods for preparing alkali cellulose and cellulose ether
    10.
    发明授权
    Methods for preparing alkali cellulose and cellulose ether 有权
    制备碱纤维素和纤维素醚的方法

    公开(公告)号：US09534061B2

    公开(公告)日：2017-01-03

    申请号：US11615437

    申请日：2006-12-22

    申请人： Mitsuo Narita ,  Masaki Tabata ,  Atsushi Yoshida ,  Hiroshi Umezawa

    发明人： Mitsuo Narita ,  Masaki Tabata ,  Atsushi Yoshida ,  Hiroshi Umezawa

    IPC分类号： C08B1/08 ,  C08B1/10 ,  C08B11/00 ,  C08B11/193

    CPC分类号： C08B1/08 ,  C08B1/10 ,  C08B11/193

    摘要： The invention is an efficient method for preparing alkali cellulose having the low water content and a uniform alkali distribution therein. More specifically, the invention is a method for continuously preparing alkali cellulose comprising steps of bringing pulp into continuous contact with an alkali metal hydroxide solution to generate a contact mixture and then draining the contact mixture by a centrifugal separator. The invention also includes a method for preparing cellulose ether comprising a step of etherifying the alkali cellulose.

    摘要翻译： 本发明是制备具有低含水率和均匀的碱分布的碱纤维素的有效方法。 更具体地说，本发明是一种连续制备碱纤维素的方法，包括使纸浆与碱金属氢氧化物溶液连续接触以产生接触混合物，然后通过离心分离器排出接触混合物的步骤。 本发明还包括一种制备纤维素醚的方法，其包括使碱性纤维素醚化的步骤。