公开(公告)号：US20200279713A1

公开(公告)日：2020-09-03

申请号：US16106272

申请日：2018-08-21

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Katerina Ioakeimidi ,  Rudy Garcia ,  Zefram Marks ,  Gary V. Lopez Lopez ,  Frances A. Hill ,  Michael E. Romero

IPC: H01J37/073 ,  H01J37/22 ,  G01N23/20058

Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.

公开(公告)号：US20200217804A1

公开(公告)日：2020-07-09

申请号：US16413740

申请日：2019-05-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Shannon B. Hill ,  Zefram Marks

IPC: G01N21/95 ,  G03F7/16 ,  H01L31/0216 ,  H01L27/146

Abstract: Disclosed herein are optical elements and methods for making the same. Such optical elements may comprise a first layer disposed on a substrate, a second layer disposed on the first layer, a terminal layer disposed on the second layer, and a cap layer disposed on the terminal layer. The cap layer may comprise boron, boron nitride, or boron carbide. Such optical elements may be made using a method comprising depositing a first layer using vapor deposition such that the first layer is disposed on a substrate, depositing a second layer using vapor deposition such that the second layer is disposed on the first layer, depositing a terminal layer using vapor deposition such that the terminal layer is disposed on the second layer, and depositing a cap layer comprising boron, boron nitride, or boron carbide using vapor deposition such that the cap layer is disposed on the terminal layer.

公开(公告)号：US20190362927A1

公开(公告)日：2019-11-28

申请号：US16419184

申请日：2019-05-22

Applicant: KLA-TENCOR CORPORATION

Inventor： Frances Hill ,  Gildardo R. Delgado ,  Rudy F. Garcia ,  Gary V. Lopez Lopez ,  Michael E. Romero ,  Katerina Ioakeimidi ,  Zefram Marks

IPC: H01J1/304 ,  H01J37/073

Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.

公开(公告)号：US11268911B2

公开(公告)日：2022-03-08

申请号：US16413740

申请日：2019-05-16

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R Delgado ,  Shannon B Hill ,  Zefram Marks

IPC: H01L27/146 ,  G01N21/95 ,  G03F7/16 ,  H01L31/0216

Abstract: Disclosed herein are optical elements and methods for making the same. Such optical elements may comprise a first layer disposed on a substrate, a second layer disposed on the first layer, a terminal layer disposed on the second layer, and a cap layer disposed on the terminal layer. The cap layer may comprise boron, boron nitride, or boron carbide. Such optical elements may be made using a method comprising depositing a first layer using vapor deposition such that the first layer is disposed on a substrate, depositing a second layer using vapor deposition such that the second layer is disposed on the first layer, depositing a terminal layer using vapor deposition such that the terminal layer is disposed on the second layer, and depositing a cap layer comprising boron, boron nitride, or boron carbide using vapor deposition such that the cap layer is disposed on the terminal layer.

公开(公告)号：US10741354B1

公开(公告)日：2020-08-11

申请号：US16106272

申请日：2018-08-21

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Katerina Ioakeimidi ,  Rudy Garcia ,  Zefram Marks ,  Gary V. Lopez Lopez ,  Frances A. Hill ,  Michael E. Romero

IPC: H01J37/00 ,  H01J37/073 ,  H01J37/22 ,  G01N23/20058 ,  G02B5/18 ,  G02B3/00 ,  H01J37/28

Abstract: The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.

公开(公告)号：US10714294B2

公开(公告)日：2020-07-14

申请号：US16419184

申请日：2019-05-22

Applicant: KLA-TENCOR CORPORATION

Inventor： Frances Hill ,  Gildardo R. Delgado ,  Rudy F. Garcia ,  Gary V. Lopez Lopez ,  Michael E. Romero ,  Katerina Ioakeimidi ,  Zefram Marks

IPC: H01J1/16 ,  H01J1/304 ,  H01J37/073

Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.

公开(公告)号：US20190295804A1

公开(公告)日：2019-09-26

申请号：US16249069

申请日：2019-01-16

Applicant: KLA-Tencor Corporation

Inventor： Gildardo Delgado ,  Katerina Ioakeimidi ,  Frances A. Hill ,  Rudy F. Garcia ,  Mike Romero ,  Zefram Marks ,  Gary V. Lopez

IPC: H01J37/073 ,  H01J37/285 ,  H01J37/29 ,  H01J37/244

Abstract: A high-brightness electron beam source is disclosed. The electron beam source may include a broadband illumination source configured to generate broadband illumination. A tunable spectral filter may be configured to filter the broadband illumination to provide filtered illumination having an excitation spectrum. The electron beam source may further include a photocathode configured to emit one or more electron beams in response to the filtered illumination, wherein emission from the photocathode is adjustable based on the excitation spectrum of the filtered illumination from the tunable spectral filter.