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1.发明申请Method for Reducing Defects in Buried Oxide Layers of Silicon on Insulator Substrates 审中-公开减少硅绝缘体衬底氧化层缺陷的方法公开(公告)号：US20080048259A1
公开(公告)日：2008-02-28
申请号：US11466480
申请日：2006-08-23
IPC分类号： H01L27/12
CPC分类号： H01L29/78603 , H01L29/66772 , H01L29/78609
摘要： A method and a structure for reducing defects in buried oxide layers of a silicon-on-insulator substrate. The method includes: generating a beam of infrared radiation of a selected wavelength; exposing a silicon-on-insulator substrate to the beam of infrared radiation, the substrate comprising a buried silicon dioxide layer between a lower layer of silicon and an upper layer of silicon; and wherein silicon has a transmittance of at least 95% at the selected wavelength and silicon dioxide has a transmittance of less than 80% at the selected wavelength.
摘要翻译： 一种减少绝缘体上硅衬底的掩埋氧化物层缺陷的方法和结构。 该方法包括：产生所选波长的红外辐射束; 将绝缘体上硅衬底暴露于所述红外辐射束，所述衬底包括在下层硅和硅上层之间的掩埋二氧化硅层; 并且其中硅在所选波长处具有至少95％的透射率，并且二氧化硅在所选择的波长处具有小于80％的透射率。
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2.发明授权Structures incorporating semiconductor device structures with reduced junction capacitance and drain induced barrier lowering 有权结合了具有减小的结电容和漏极引起的屏障降低的半导体器件结构公开(公告)号：US07984408B2
公开(公告)日：2011-07-19
申请号：US11875013
申请日：2007-10-19
CPC分类号： H01L29/78603 , G11C29/54 , H01L29/51 , H01L29/513 , H01L29/66545 , H01L29/66636 , H01L29/66772
摘要： Design structure embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes semiconductor device structures characterized by reduced junction capacitance and drain induced barrier lowering. The semiconductor device structure of the design structure includes a semiconductor layer and a dielectric layer disposed between the semiconductor layer and the substrate. The dielectric layer includes a first dielectric region with a first dielectric constant and a second dielectric region with a second dielectric constant that is greater than the first dielectric constant.
摘要翻译： 用于设计，制造或测试设计的机器可读介质中体现的设计结构。 该设计结构包括半导体器件结构，其特征在于结电容减小和漏极引起的栅极降低。 设计结构的半导体器件结构包括设置在半导体层和衬底之间的半导体层和介电层。 电介质层包括具有第一介电常数的第一电介质区域和具有大于第一介电常数的第二介电常数的第二电介质区域。
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公开(公告)号：US20090007036A1
公开(公告)日：2009-01-01
申请号：US11925387
申请日：2007-10-26
IPC分类号： G06F9/45
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/41791 , H01L29/66795 , H01L29/785 , H01L2029/7858
摘要： Embodiments of the invention generally relate to methods, systems and design structures for semiconductor devices, and more specifically to interconnecting semiconductor devices. A silicide layer may be formed on selective areas of a fin structure connecting one or more semiconductor devices or semiconductor device components. By providing silicided fin structures to locally interconnect semiconductor devices, the use of metal contacts and metal layers may be obviated, thereby allowing formation of smaller, less complex circuits.
摘要翻译： 本发明的实施例一般涉及半导体器件的方法，系统和设计结构，更具体地涉及互连半导体器件。 可以在连接一个或多个半导体器件或半导体器件部件的翅片结构的选择性区域上形成硅化物层。 通过提供硅化物翅片结构来局部互连半导体器件，可以避免使用金属触点和金属层，从而形成较小的，较不复杂的电路。
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4.发明申请Hybrid Field Effect Transistor and Bipolar Junction Transistor Structures and Methods for Fabricating Such Structures 审中-公开混合场效应晶体管和双极结晶体管结构和制造这种结构的方法公开(公告)号：US20080001234A1
公开(公告)日：2008-01-03
申请号：US11427962
申请日：2006-06-30
IPC分类号： H01L29/76
CPC分类号： H01L29/732 , H01L21/8249 , H01L21/84 , H01L27/0623 , H01L27/12 , H01L29/66265 , H01L29/785
摘要： Semiconductor device structures that integrate field effect transistors and bipolar junction transistors on a single substrate, such as a semiconductor-on-insulator substrate, and methods for fabricating such hybrid semiconductor device structures. The field effect and bipolar junction transistors are fabricated using adjacent electrically-isolated semiconductor bodies. During fabrication of the device structures, certain fabrication stages strategically rely on block masks for process isolation. Other fabrication stages are shared during the fabrication process for seamless integration that reduces process complexity.
摘要翻译： 在诸如绝缘体上半导体衬底的单个衬底上集成场效应晶体管和双极结型晶体管的半导体器件结构以及用于制造这种混合半导体器件结构的方法。 使用相邻的电隔离半导体器件制造场效应和双极结晶体管。 在器件结构的制造过程中，某些制造阶段有策略地依靠块掩模来进行过程隔离。 其他制造阶段在无缝集成的制造过程中共享，从而降低了工艺复杂性。
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5.发明授权Semiconductor device structures with reduced junction capacitance and drain induced barrier lowering and methods for fabricating such device structures and for fabricating a semiconductor-on-insulator substrate 失效具有减小的结电容和漏极引起的屏障降低的半导体器件结构以及用于制造这种器件结构和用于制造绝缘体上半导体衬底的方法公开(公告)号：US07659178B2
公开(公告)日：2010-02-09
申请号：US11379655
申请日：2006-04-21
IPC分类号： H01L21/311 , H01L21/3115
CPC分类号： H01L29/66545 , H01L29/51 , H01L29/513 , H01L29/66636 , H01L29/66772 , H01L29/78603 , Y10S438/96
摘要： Semiconductor device structures with reduced junction capacitance and drain induced barrier lowering, methods for fabricating such device structures, and methods for forming a semiconductor-on-insulator substrate. The semiconductor structure comprises a semiconductor layer and a dielectric layer disposed between the semiconductor layer and the substrate. The dielectric layer includes a first dielectric region with a first dielectric constant and a second dielectric region with a second dielectric constant that is greater than the first dielectric constant. In one embodiment, the dielectric constant of the first dielectric region may be less than about 3.9 and the dielectric constant of the second dielectric region may be greater than about ten (10). The semiconductor-on-insulator substrate comprises a semiconductor layer separated from a bulk layer by an insulator layer of a high-dielectric constant material. The fabrication methods comprise modifying a region of the dielectric layer to have a lower dielectric constant.
摘要翻译： 具有减小的结电容和漏极引发的屏障降低的半导体器件结构，用于制造这种器件结构的方法以及用于形成绝缘体上半导体衬底的方法。 半导体结构包括半导体层和设置在半导体层和衬底之间的电介质层。 电介质层包括具有第一介电常数的第一电介质区域和具有大于第一介电常数的第二介电常数的第二电介质区域。 在一个实施例中，第一电介质区域的介电常数可以小于约3.9，并且第二电介质区域的介电常数可以大于约十（10）。 绝缘体上半导体衬底包括通过高介电常数材料的绝缘体层与本体层分离的半导体层。 制造方法包括修改介电层的区域以具有较低的介电常数。
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公开(公告)号：US08518767B2
公开(公告)日：2013-08-27
申请号：US11680221
申请日：2007-02-28
IPC分类号： H01L21/336
CPC分类号： H01L29/785 , H01L29/045 , H01L29/66818
摘要： Embodiments of the invention provide a relatively uniform width fin in a Fin Field Effect Transistors (FinFETs) and apparatus and methods for forming the same. A fin structure may be formed such that the surface of a sidewall portion of the fin structure is normal to a first crystallographic direction. Tapered regions at the end of the fin structure may be normal to a second crystal direction. A crystallographic dependent etch may be performed on the fin structure. The crystallographic dependent etch may remove material from portions of the fin normal to the second crystal direction relatively faster, thereby resulting in a relatively uniform width fin structure.
摘要翻译： 本发明的实施例提供了Fin场效应晶体管（FinFET）中的相对均匀的宽度鳍片及其形成方法。 翅片结构可以形成为使翅片结构的侧壁部分的表面垂直于第一结晶方向。 翅片结构端部的锥形区域可以垂直于第二晶体方向。 可以对翅片结构进行晶体依赖蚀刻。 晶体依赖蚀刻可以相对较快地从第二晶体方向垂直于翅片的部分去除材料，从而形成相对均匀的宽度鳍片结构。
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公开(公告)号：US20120146112A1
公开(公告)日：2012-06-14
申请号：US13396291
申请日：2012-02-14
IPC分类号： H01L29/772
CPC分类号： H01L29/785 , H01L29/045 , H01L29/66818
摘要： Embodiments of the invention provide a relatively uniform width fin in a Fin Field Effect Transistors (FinFETs) and apparatus and methods for forming the same. A fin structure may be formed such that the surface of a sidewall portion of the fin structure is normal to a first crystallographic direction. Tapered regions at the end of the fin structure may be normal to a second crystal direction. A crystallographic dependent etch may be performed on the fin structure. The crystallographic dependent etch may remove material from portions of the fin normal to the second crystal direction relatively faster, thereby resulting in a relatively uniform width fin structure.
摘要翻译： 本发明的实施例提供了Fin场效应晶体管（FinFET）中的相对均匀的宽度鳍片及其形成方法。 翅片结构可以形成为使翅片结构的侧壁部分的表面垂直于第一结晶方向。 翅片结构端部的锥形区域可以垂直于第二晶体方向。 可以对翅片结构进行晶体依赖蚀刻。 晶体依赖蚀刻可以相对较快地从第二晶体方向垂直于翅片的部分去除材料，从而形成相对均匀的宽度鳍片结构。
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8.发明授权公开(公告)号：US07737530B2
公开(公告)日：2010-06-15
申请号：US12130176
申请日：2008-05-30
IPC分类号： H01L29/732
CPC分类号： H01L29/732 , H01L29/66265
摘要： Semiconductor device structures for use with bipolar junction transistors and methods of fabricating such semiconductor device structures. The semiconductor device structure includes a semiconductor body having a top surface and sidewalls extending from the top surface to an insulating layer, a first region including a first semiconductor material with a first conductivity type, and a second region including a second semiconductor material with a second conductivity type. The first and second regions each extend across the top surface and the sidewalls of the semiconductor body. The device structure further includes a junction defined between the first and second regions and extending across the top surface and the sidewalls of the semiconductor body.
摘要翻译： 用于双极结晶体管的半导体器件结构和制造这种半导体器件结构的方法。 半导体器件结构包括具有顶表面和从顶表面延伸到绝缘层的侧壁的半导体本体，包括具有第一导电类型的第一半导体材料的第一区域和包括具有第二导电类型的第二半导体材料的第二区域 导电类型。 第一和第二区域各自延伸穿过半导体本体的顶表面和侧壁。 器件结构还包括限定在第一和第二区域之间并且跨越半导体本体的顶表面和侧壁延伸的结。
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9.发明授权公开(公告)号：US07618872B2
公开(公告)日：2009-11-17
申请号：US12125342
申请日：2008-05-22
IPC分类号： H01L21/331
CPC分类号： H01L29/732 , H01L29/66265
摘要： Semiconductor device structures for use with bipolar junction transistors and methods of fabricating such semiconductor device structures. The semiconductor device structure comprises a semiconductor body having a top surface and sidewalls extending from the top surface to an insulating layer, a first region including a first semiconductor material with a first conductivity type, and a second region including a second semiconductor material with a second conductivity type. The first and second regions each extend across the top surface and the sidewalls of the semiconductor body. The device structure further comprises a junction defined between the first and second regions and extending across the top surface and the sidewalls of the semiconductor body.
摘要翻译： 用于双极结晶体管的半导体器件结构和制造这种半导体器件结构的方法。 半导体器件结构包括具有顶表面和从顶表面延伸到绝缘层的侧壁的半导体本体，包括具有第一导电类型的第一半导体材料的第一区域和包括具有第二导电类型的第二半导体材料的第二区域 导电类型。 第一和第二区域各自延伸穿过半导体本体的顶表面和侧壁。 器件结构还包括限定在第一和第二区域之间并且跨越半导体本体的顶表面和侧壁延伸的接合部。
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10.发明授权Body-contacted semiconductor structures and methods of fabricating such body-contacted semiconductor structures 失效体接触半导体结构和制造这种体接触半导体结构的方法公开(公告)号：US07608506B2
公开(公告)日：2009-10-27
申请号：US11925352
申请日：2007-10-26
IPC分类号： H01L21/4763
CPC分类号： H01L21/84 , H01L27/0218 , H01L27/10841 , H01L27/1203 , H01L29/66545
摘要： A semiconductor structure for a dynamic random access memory (DRAM) cell array that includes a plurality of vertical memory cells built on a semiconductor-on-insulator (SOI) wafer and a body contact in the buried dielectric layer of the SOI wafer. The body contact electrically couples a semiconductor body with a channel region of the access device of one vertical memory cell and a semiconductor substrate of the SOI wafer. The body contact provides a current leakage path that reduces the impact of floating body effects upon the vertical memory cell. The body contact may be formed by an ion implantation process that modifies the stoichiometry of a region of the buried dielectric layer so that the modified region becomes electrically conductive with a relatively high resistance.
摘要翻译： 一种用于动态随机存取存储器（DRAM）单元阵列的半导体结构，其包括建立在绝缘体上半导体（SOI）晶片上的多个垂直存储单元和SOI晶片的埋入介质层中的体接触。 体接触将半导体本体与一个垂直存储单元的存取器件的沟道区和SOI晶片的半导体衬底电耦合。 身体接触提供了一种电流泄漏路径，可减少浮体对垂直记忆体的影响。 体接触可以通过离子注入工艺形成，该方法改变掩埋介电层的区域的化学计量，使得改性区域以相对较高的电阻变为导电性。
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