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公开(公告)号：US5765800A
公开(公告)日：1998-06-16
申请号：US724829
申请日：1996-10-02
IPC分类号： F16F15/023 , F16M13/00
CPC分类号： F16F15/0232
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.
摘要翻译： 减震装置具有用于放置要与振动隔离的物体的隔振台，安装在安装地板上的空气弹簧和支撑用于衰减来自安装地板的振动的防振台，空气压力控制器 用于控制所述空气弹簧的空气压力的位移传感器，用于检测所述防振台和所述安装地板之间的相对位移并将指示所述检测到的相对位移的信号提供给所述空气压力控制器的位移传感器;以及弹簧元件， 隔振台和用于水平定位防振台的安装地板。 电磁铁设置在防振台和安装地板之间，用于主动衰减隔振台的振动。 振动阻尼装置的作用是通过弹簧元件将隔振台水平放置，并通过空气弹簧垂直地定位。
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公开(公告)号：US5793598A
公开(公告)日：1998-08-11
申请号：US695850
申请日：1996-08-09
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
摘要： A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.
摘要翻译： 一种磁悬浮减振装置，包括具有磁性材料的平板的工作台，用于向平板施加磁性吸引力以浮动工作台的电磁致动器，用于检测平板与电磁致动器之间的相对位移的位移传感器 ，用于检测工作台的绝对加速度的加速度传感器，以及用于根据用于控制平板之间的间隙的第一控制规则，根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统 以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则，第二控制规则包括对工作台的相对位移的稳定性控制。
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3.发明授权Control system for a linear actuator including magnetic bearings for levitating a robot arm 失效用于线性致动器的控制系统，包括用于悬浮机器人臂的磁性轴承
公开(公告)号：US5720010A
公开(公告)日：1998-02-17
申请号：US699342
申请日：1996-08-19
IPC分类号： B25J13/00 , B25J9/18 , B25J18/02 , B25J19/00 , F16C32/04 , F16C39/06 , G05B19/19 , H02P25/06 , G05B15/00 , G05B19/00
CPC分类号： F16C32/0444 , G05B19/19 , F16C2300/62 , G05B2219/45083 , G05B2219/49271
摘要： A control system for controlling a linear actuator including magnetic bearings for levitating a robot arm and a pulse motor for linearly driving the arm in a non-contact manner is disclosed, which comprises a displacement detection unit including displacement sensors, first and second calculation units, moving amount detection unit and adding circuit. The displacement detection unit detects displacement values of the arm from a reference posture, the first calculation unit calculates guiding (y), levitation (z), roll (p), pitching (q), and yaw (r) control current values in response to the displacement values and provides guiding, levitation, roll, pitching, and yaw control current signals (, , , , ). The moving amount detecting circuit detects a moving amount (X.sub.0) of the arm from a reference position in response to an operation of the pulse motor, and provides a compensation current value (.DELTA.Iq") proportional to the moving amount, and the adding circuit adds the compensation current value (.DELTA.Iq") to the pitching control current signal (). The second calculation unit, in response to the guiding, levitation, roll and yaw control current signals (, , , ) and the added pitching control current signal (+.DELTA.Iq"), calculates drive current control values to compensate drive current flowing through the magnetic bearings.
摘要翻译： 公开了一种用于控制线性致动器的控制系统，包括用于悬浮机器人臂的磁轴承和用于以非接触方式线性驱动臂的脉冲电机，其包括位移检测单元，其包括位移传感器，第一和第二计算单元， 移动量检测单元和加法电路。 位移检测单元从参考姿势检测臂的位移值，第一计算单元计算响应中的引导（y），悬浮（z），滚动（p），俯仰（q）和偏航（r）控制电流值 提供位移值，并提供引导，悬挂，滚动，俯仰和偏航控制电流信号（+ Z，+ Z，+ Z，+ Z，+ Z）。 移动量检测电路响应于脉冲电动机的操作从参考位置检测臂的移动量（X0），并且提供与移动量成比例的补偿电流值（DELTA Iq“），并且添加 电路将补偿电流值（DELTA Iq“）添加到俯仰控制电流信号（+ Z）。 第二计算单元响应于引导，悬挂，转向和偏转控制电流信号（+ Z，+ Z，+ Z，+ Z）和增加的俯仰控制电流信号（+ Z + DELTA Iq“），计算 驱动电流控制值来补偿流经磁轴承的驱动电流。
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公开(公告)号：US5397212A
公开(公告)日：1995-03-14
申请号：US19678
申请日：1993-02-19
CPC分类号： H01L21/67766 , B25J9/041 , B25J9/123 , B25J9/126 , F16C32/0465 , H01L21/67742
摘要： A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
摘要翻译： 没有机械接触部件的机器人适用于特殊环境，如半导体制造过程，其中灰尘和润滑是重要关注的问题。 机器人具有由磁性轴承构成的线性致动器和用于在不机械接触的情况下线性地移动机器人手臂的线性电动机，以及由磁性轴承和用于使支撑线性致动器的主体旋转的旋转电动机，围绕旋转致动器 无机械接触。
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公开(公告)号：US5814814A
公开(公告)日：1998-09-29
申请号：US607613
申请日：1996-02-27
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J2237/0216 , H01J2237/15 , H01J2237/248
摘要： An electron microscope has an electron gun for emitting an electron beam, a specimen holder for holding a specimen thereon, and a deflection coil for applying the electron beam from the electron gun to the specimen on the specimen holder. A controller produces a differential signal representing the difference between a signal from a vibration sensor which detects vibrations of the electron gun and a signal from another vibration sensor which detects vibrations of the specimen holder. The differential signal is added to a deflection signal for the deflection coil for thereby effecting feedforward control of the electron beam to cause the electron beam to reach the specimen on the specimen holder, irrespective of the vibrations of the electron gun and the specimen holder.
摘要翻译： 电子显微镜具有用于发射电子束的电子枪，用于在其上保持试样的试样保持器和用于将来自电子枪的电子束施加到试样保持器上的试样的偏转线圈。 控制器产生表示来自检测电子枪的振动的振动传感器的信号与检测试样保持器的振动的另一振动传感器的信号之间的差的差分信号。 差分信号被加到偏转线圈的偏转信号上，从而进行电子束的前馈控制，使电子束到达试样架上的试样，而与电子枪和试样架的振动无关。
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公开(公告)号：US5449985A
公开(公告)日：1995-09-12
申请号：US111412
申请日：1993-08-25
CPC分类号： F16F15/03
摘要： There is provided a vibration eliminating apparatus utilizing a magnetic suspending system which achieves zero power control. The vibration eliminating apparatus includes a table on which equipment to be installed, magnetic yokes fixed on the table, control magnets for suspending the magnetic yokes from an installation floor, displacement sensors for measuring gaps between the control magnets and the magnetic yokes, power amplifiers for supplying exciting currents to the control magnets, and compensation circuits for controlling the exciting currents of the control magnets by supplying outputs from the displacement sensors to the power amplifiers. Each control magnet includes a permanent magnet for generating a bias magnetic flux and an electromagnet for generating a control magnetic flux to form a magnetic circuit. An integrated value of the exciting current fed to the electromagnet is fed back to the power amplifier.
摘要翻译： 提供一种利用实现零功率控制的磁悬浮系统的振动消除装置。 振动消除装置包括：安装设备的桌子，固定在桌子上的磁轭，用于将磁轭悬挂在安装地板上的控制磁铁，用于测量控制磁铁与磁轭之间的间隙的位移传感器，用于 向控制磁体提供激励电流，以及补偿电路，用于通过将位移传感器的输出提供给功率放大器来控制控制磁体的励磁电流。 每个控制磁体包括用于产生偏磁通的永磁体和用于产生控制磁通以形成磁路的电磁体。 馈送到电磁体的励磁电流的积分值被反馈给功率放大器。
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公开(公告)号：US5471802A
公开(公告)日：1995-12-05
申请号：US111438
申请日：1993-08-25
CPC分类号： F16F15/03
摘要： An electromagnetically suspended floating floor apparatus in which a floating floor on which machines are set up is suspended from an installation floor with electromagnetic actuators so that the floating floor is spatially separated from the installation floor whereby no vibration is transmitted to equipment on the floating floor. The floating floor apparatus comprises the floating floor suspended from the installation floor at a plurality of supporting points by electromagnetic actuators, a light emitting member, fixed to a beam or a pillar, which emits a horizontal light beam, and a photosensor fixed to the installation floor which outputs a position signal representing a position of incidence of the horizontal light beam to the electromagnetic actuators. On the basis of the position signal, the electromagnetic actuators control a vertical position of the floating floor.
摘要翻译： 一种电磁悬浮浮动地板装置，其中设置有机器的浮动地板从电磁致动器从安装地板悬挂，使得浮动地板在空间上与安装地板分离，从而没有振动传递到浮动地板上的设备。 浮动地板装置包括通过电磁致动器在多个支撑点处从安装地板悬吊的浮动地板，固定到发射水平光束的梁或柱的发光构件，以及固定到该装置的光电传感器 输出表示水平光束入射到电磁致动器的位置的位置信号。 基于位置信号，电磁致动器控制浮动地板的垂直位置。
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公开(公告)号：US5322369A
公开(公告)日：1994-06-21
申请号：US050727
申请日：1993-04-21
申请人： Tadashi Kataoka , Shunsuke Mimura , Yoichi Kanemitsu , Yoshiyuki Maruta , Tatsuo Hinata , Mamoru Suzuki , Manabu Toshimitsu , Shunichi Aiyoshizawa
发明人： Tadashi Kataoka , Shunsuke Mimura , Yoichi Kanemitsu , Yoshiyuki Maruta , Tatsuo Hinata , Mamoru Suzuki , Manabu Toshimitsu , Shunichi Aiyoshizawa
CPC分类号： F16C17/10 , F16C32/06 , F16C32/0611 , F16C39/00
摘要： A dynamic pressure bearing is provided with a moving side bearing member and a fixed side bearing member so as to support a rotor for rotation by generating a fluid dynamic pressure between the moving side bearing member and the fixed side bearing member. The dynamic pressure bearing includes a high-frequency exciting device for applying a high-frequency vibration to the fixed side bearing member at the time of at least one of start-up and shutdown of the rotor. In this way, both bearing members are kept almost free from contact with each other and a frictional resistance at start-up and/or shutdown is minimized.
摘要翻译： 动压轴承具有移动侧支承构件和固定侧支承构件，以便通过在移动侧支承构件和固定侧支承构件之间产生流体动压力来支撑转子来转动。 动压轴承包括在转子的起动和停止中的至少一个时对固定侧支承构件施加高频振动的高频励磁装置。 以这种方式，两个轴承构件保持几乎没有彼此接触，并且启动和/或停机时的摩擦阻力最小化。
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9.发明授权Thin-film forming apparatus with magnetic bearings and a non-contact seal and drive 失效具有磁性轴承和非接触式密封和驱动的薄膜成型设备
公开(公告)号：US5630881A
公开(公告)日：1997-05-20
申请号：US289215
申请日：1994-08-12
申请人： Naoaki Ogure , Yoichi Kanemitsu
发明人： Naoaki Ogure , Yoichi Kanemitsu
IPC分类号： H01L21/205 , C23C16/458 , H01L21/31 , H01L21/683 , H01L21/687 , C23C16/00
CPC分类号： H01L21/68792 , C23C16/4584 , H01L21/6831
摘要： A thin-film forming device including a reaction chamber having an atmosphere different from that in the outside world, a susceptor rotatably disposed in the reaction chamber for mounting a substrate thereon to form a thin film thereon, and a nozzle disposed within the reaction chamber facing the susceptor for supplying a thin-film forming material on the substrate, the thin-film forming device comprises: a levitating means including magnetic bearings for non-contact support of the susceptor; and a driving means for rotating the susceptor at high speed, to thereby increase the rotational speed of the susceptor and the thin-film forming rate.
摘要翻译： 一种薄膜形成装置，包括具有与外界不同的气氛的反应室，可旋转地设置在反应室中的基座，用于在其上安装基板以在其上形成薄膜，以及设置在反应室内的喷嘴， 用于在基板上供给薄膜形成材料的基座，所述薄膜形成装置包括：悬浮装置，包括用于所述基座的非接触支撑的磁性轴承; 以及用于高速旋转基座的驱动装置，从而提高基座的旋转速度和薄膜形成速度。
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公开(公告)号：US5223758A
公开(公告)日：1993-06-29
申请号：US665213
申请日：1991-03-05
申请人： Takashi Kataoka , Yuji Shirao , Daisuke Konno , Yoshio Sato , Yoichi Kanemitsu , Hideo Tsuboi , Shunichi Aiyoshizawa , Kazuyuki Kasahara
发明人： Takashi Kataoka , Yuji Shirao , Daisuke Konno , Yoshio Sato , Yoichi Kanemitsu , Hideo Tsuboi , Shunichi Aiyoshizawa , Kazuyuki Kasahara
CPC分类号： F16C32/044 , F16C17/02 , F16C17/107 , F16C25/045 , F16C32/0402 , F16C33/107 , H02K5/165 , H02K7/09
摘要： A spindle motor has a rotor supported by a stator through a thrust bearing and a radial bearing. At least the thrust bearing is a hydrodynamic bearing. The spindle motor is provided with a device for adjusting the thrust laod that is applied to the thrust bearing. The load adjusting device has an electromagnet that is provided on the stator and a permanent magnet that is provided on the rotor in opposing relation to the electromagnet. Either the repelling force or the attraction force, which acts between the electromagnet and the permanent magnet, is controlled by changing the current supplied to the electromagnet.
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