摘要:
A semiconductor sensor having a thin-film structure body, in which thin-film structure is prevented from bending due to the internal stress distribution in the thickness direction, is disclosed. A silicon-oxide film is formed as a sacrificial layer on a silicon substrate, and a polycrystalline-silicon thin film is formed on the silicon-oxide film. Thereafter, phosphorus (P) is ion-implanted in the surface of the polycrystalline-silicon thin film, and thereby the surface state of the polycrystalline-silicon thin film is modified. A portion of distribution of stress existing in the thickness direction of the polycrystalline-silicon thin film is changed by this modification, and stress distribution is adjusted. By removal of the silicon-oxide film, a movable member of the polycrystalline-silicon thin film is disposed above the silicon substrate with a gap interposed therebetween.
摘要:
A semiconductor acceleration sensor according to the present invention performs acceleration detection by means of detecting increase or decrease in electrical current flowing between fixed electrodes formed on a semiconductor substrate taking a movable section in a movable state supported on the semiconductor substrate as a gate electrode. Two transistor structures are utilized in this detection. Current between fixed electrodes in one transistor structure increases when the movable section is subjected to acceleration and is displaced. At that time, current between fixed electrodes in the other transistor structure decreases. These two transistor structures are disposed proximately. By means of this proximate disposition, fluctuations in characteristics of both transistors are reduced, and by means of acceleration detection by differential type, temperature characteristics of the two transistors can be canceled favorably.
摘要:
A counter-stream-mode oscillating-flow heat transport apparatus accommodates a change in volume of a liquid while preventing reduction in heat transport capability. A flow path and a buffer tank are placed in communication with each other via a throttle such as a capillary tube. This prevents a channel connecting the flow path and the buffer tank from having an excessively reduced channel resistance (flow path resistance). This prevents the fluid in a heat transport device assembly (the flow path) from only going back and forth between the heat transport device assembly and the buffer tank without experiencing liquid (pressure) oscillations in the heat transport device assembly. Accordingly, the liquid in the heat transport device assembly is prevented from being reduced in amplitude of oscillation, thereby preventing degradation in heat transport capability of the counter-stream-mode oscillating-flow heat transport apparatus.
摘要:
A fluid brake device has a case defining a fluid chamber. Magneto-rheological fluid is contained in the fluid chamber. A brake member is rotatably supported on the case and receives a braking torque according to the viscosity of the magneto-rheological fluid. The device has a movable member driven by a thermo-sensitive wax so that a volume of the fluid chamber is increased as the temperature in the fluid chamber is increased. The movable member is driven to maintain a pressure in the fluid chamber within an allowable range when the temperature in the fluid chamber is changed.
摘要:
A counter-stream-mode oscillating-flow heat transport apparatus improves heat transport capability by imparting oscillatory displacement to a fluid located near a heat-generating element such that the fluid is directed toward the heat-generating element. Turning portions of serpentine flow paths are disposed to face the heat-generating element. The flow paths are stacked in multiple layers in the direction from the heat-generating element to the flow paths, and a plurality of flow paths are disposed adjacent to the heat-generating element in the direction of fluid oscillation.
摘要:
The central position of each heating body 1 in the fluid flow direction is referred to as a heating body central position, the central position of a heat radiating section 33a located between the neighboring heating bodies 1 in the fluid flow direction is referred to as a heat radiating section central position, the end of a heat radiating section 33b connected to a pump 6 on the opposite side of a heat absorbing section is referred to as a heat radiating section front, the distances along the fluid flow from the heating body central position to the heat radiating section central position are referred to as heat transport distances and the distances from the heating body central position to the heat radiating section front are referred to as heat transport distances. S>=the maximum heat transport distance Lmax holds. Lmax is the longest of the heat transport distances.
摘要:
A display case is provided with a compartment which stores merchandise for display and is divided into at least two chambers by a partition plate to enable storing different types of merchandise, each of which types is to be held under a predetermined temperature. These chambers communicate with one another through a communication gap which is defined between the partition plate and the window of the case and the opening and closing of the gap is controlled by a sealing mechanism to vary the temperature conditions within each chamber. The sealing mechanism includes a sealing element which is movably engaged with the partition plate and a retaining element is fastened on the partition plate to hold the selected position of the sealing element. Thus, the opening and closing control of the gap is easily operated without interfering with the visibility of the merchandise.
摘要:
A fluid brake device has a case defining a fluid chamber. Magneto-rheological fluid is contained in the fluid chamber. A brake member is rotatably supported on the case and receives a braking torque according to the viscosity of the magneto-rheological fluid. The device has a movable member driven by a thermo-sensitive wax so that a volume of the fluid chamber is increased as the temperature in the fluid chamber is increased. The movable member is driven to maintain a pressure in the fluid chamber within an allowable range when the temperature in the fluid chamber is changed.
摘要:
A valve timing controller has a case which defines a fluid chamber therein. A magnetic viscosity fluid is enclosed in the fluid chamber. The magnetic viscosity fluid including magnetic particles and its viscosity varies according to a magnetic field applied thereto. A coil and a control circuit applies magnetic field to the magnetic viscosity fluid to variably control a viscosity thereof. A brake rotor is rotatably accommodated in the fluid chamber and receives a brake torque from the magnetic viscosity fluid according to the viscosity thereof. A phase adjusting mechanism is connected to the brake rotor for adjusting a relative rotational phase between the crankshaft and the camshaft according to the brake torque. When it is estimated that the engine will be started, the coil is energized to generated heat in the magnetic viscosity fluid.
摘要:
A counter-stream-mode oscillating-flow heat transport apparatus improves heat transport capability by imparting oscillatory displacement to a fluid located near a heat-generating element such that the fluid is directed toward the heat-generating element. Turning portions of serpentine flow paths are disposed to face the heat-generating element. The flow paths are stacked in multiple layers in the direction from the heat-generating element to the flow paths, and a plurality of flow paths are disposed adjacent to the heat-generating element in the direction of fluid oscillation.