Acoustoelectric conversion device
    4.
    发明授权
    Acoustoelectric conversion device 失效
    声电转换装置

    公开(公告)号:US07293463B2

    公开(公告)日:2007-11-13

    申请号:US11116273

    申请日:2005-04-28

    IPC分类号: G01H9/00 G01B11/16

    CPC分类号: G01N29/2418 G01H9/00

    摘要: In an acoustoelectric converter element, a light wave from a light source is introduced into a first optical waveguide of a vibration substrate, and diffracted by a diffraction grating disposed on the first optical waveguide. The diffracted light is directed to and detected by a photo detector. Here, the vibration substrate is so supported as to vibrate with respect to an acoustic wave. Therefore, the diffracted light detected by the photo detector is modulated by the acoustic wave, and a signal is output from the detector in accordance with the acoustic wave.

    摘要翻译: 在声电转换元件中,来自光源的光波被引入到振动基板的第一光波导中,并且被设置在第一光波导上的衍射光栅衍射。 衍射光被光检测器导向并检测。 这里,振动基板被支撑为相对于声波振动。 因此,由光检测器检测的衍射光被声波调制,并且根据声波从检测器输出信号。

    Acoustoelectric conversion device
    5.
    发明申请
    Acoustoelectric conversion device 失效
    声电转换装置

    公开(公告)号:US20050241398A1

    公开(公告)日:2005-11-03

    申请号:US11116273

    申请日:2005-04-28

    CPC分类号: G01N29/2418 G01H9/00

    摘要: In an acoustoelectric converter element, a light wave from a light source is introduced into a first optical waveguide of a vibration substrate, and diffracted by a diffraction grating disposed on the first optical waveguide. The diffracted light is directed to and detected by a photo detector. Here, the vibration substrate is so supported as to vibrate with respect to an acoustic wave. Therefore, the diffracted light detected by the photo detector is modulated by the acoustic wave, and a signal is output from the detector in accordance with the acoustic wave.

    摘要翻译: 在声电转换元件中,来自光源的光波被引入到振动基板的第一光波导中,并且被设置在第一光波导上的衍射光栅衍射。 衍射光被光检测器导向并检测。 这里,振动基板被支撑为相对于声波振动。 因此,由光检测器检测的衍射光被声波调制,并且根据声波从检测器输出信号。

    Infrared imaging device and method of manufacturing the same
    8.
    发明授权
    Infrared imaging device and method of manufacturing the same 有权
    红外成像装置及其制造方法

    公开(公告)号:US08304848B2

    公开(公告)日:2012-11-06

    申请号:US12883732

    申请日:2010-09-16

    IPC分类号: H01L31/00 H01L31/04

    摘要: Certain embodiments provide an infrared imaging device including: an SOI structure that is placed at a distance from a substrate, and includes: heat-sensitive diodes that detect infrared rays and convert the infrared rays into heat; and STI regions that separate the heat-sensitive diodes from one another; an interlayer insulating film that is stacked on the SOI structure; and supporting legs that are connected to the heat-sensitive diodes and vertical signal lines provided in outer peripheral regions of the heat-sensitive diodes. Each of the supporting legs includes: an interconnect unit that transmit signals to the vertical signal lines; and interlayer insulating layers that sandwich the interconnect unit, each bottom side of the interlayer insulating layers being located in a higher position than the SOI structure.

    摘要翻译: 某些实施例提供了一种红外成像装置,包括:SOI结构,其被放置在离基板一定距离处,并且包括:热敏二极管,其检测红外线并将红外线转换成热; 以及将热敏二极管彼此分离的STI区域; 堆叠在SOI结构上的层间绝缘膜; 以及连接到热敏二极管的支撑腿和设置在热敏二极管的外周区域中的垂直信号线。 每个支撑腿包括:将信号传输到垂直信号线的互连单元; 以及层叠绝缘层,夹着所述互连单元,所述层间绝缘层的每个底侧位于比所述SOI结构更高的位置。

    INFRARED IMAGING DEVICE AND METHOD OF MANUFACTURING THE SAME
    10.
    发明申请
    INFRARED IMAGING DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    红外成像装置及其制造方法

    公开(公告)号:US20120007205A1

    公开(公告)日:2012-01-12

    申请号:US12883732

    申请日:2010-09-16

    IPC分类号: H01L31/101 H01L31/18

    摘要: Certain embodiments provide an infrared imaging device including: an SOI structure that is placed at a distance from a substrate, and includes: heat-sensitive diodes that detect infrared rays and convert the infrared rays into heat; and STI regions that separate the heat-sensitive diodes from one another; an interlayer insulating film that is stacked on the SOI structure; and supporting legs that are connected to the heat-sensitive diodes and vertical signal lines provided in outer peripheral regions of the heat-sensitive diodes. Each of the supporting legs includes: an interconnect unit that transmit signals to the vertical signal lines; and interlayer insulating layers that sandwich the interconnect unit, each bottom side of the interlayer insulating layers being located in a higher position than the SOI structure.

    摘要翻译: 某些实施例提供了一种红外成像装置,包括:SOI结构,其被放置在离基板一定距离处,并且包括:热敏二极管,其检测红外线并将红外线转换成热; 以及将热敏二极管彼此分离的STI区域; 堆叠在SOI结构上的层间绝缘膜; 以及连接到热敏二极管的支撑腿和设置在热敏二极管的外周区域中的垂直信号线。 每个支撑腿包括:将信号传输到垂直信号线的互连单元; 以及层叠绝缘层,夹着所述互连单元,所述层间绝缘层的每个底侧位于比所述SOI结构更高的位置。