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1.发明授权Ultrasonic processing device and electronic parts fabrication method using the same 有权超声波处理装置及使用其的电子部件制造方法公开(公告)号：US06619301B2
公开(公告)日：2003-09-16
申请号：US09738851
申请日：2000-12-15
申请人： Kazuki Kobayashi , Hitoshi Ono , Yasunobu Tagusa , Tomomi Hikida , Yuichi Maida
发明人： Kazuki Kobayashi , Hitoshi Ono , Yasunobu Tagusa , Tomomi Hikida , Yuichi Maida
IPC分类号： B08B310
CPC分类号： H01L21/67051 , B08B3/123 , G03F7/428 , H05K3/0085 , H05K3/26 , Y10S134/902
摘要： To provide an ultrasonic processing device that is capable of effectively carrying out a cleaning operation, a resist-stripping operation, etc. by projecting ultrasonic uniformly over an entirety of the ultrasonic processing target region by means of ultrasonic oscillation elements each having a width smaller than an ultrasonic processing target region of a processing object, as well as to provide an electronic parts fabrication method using the foregoing device, a plurality of ultrasonic oscillation elements are arranged so as to planarly extend in a glass substrate transport direction and in a glass substrate width direction, and projected figures obtained by projecting said ultrasonic oscillation elements to a plane perpendicular to the glass substrate transport direction form a single belt-like region of a width exceeding a width of the ultrasonic processing target region. The foregoing arrangement causes ultrasonic-projected regions of the ultrasonic oscillation elements to partly overlap each other on a surface of the glass substrate when the glass substrate is transported by transport rollers in the transport direction, thereby enabling ultrasonic projection over the complete entirety of the ultrasonic processing target region.
摘要翻译： 为了提供能够通过超声波振荡元件均匀地超声波超声波处理对象区域的超声波均匀化而进行清洗动作，抗蚀剂剥离动作等的超声波处理装置。 处理对象的超声波处理对象区域，以及提供使用上述装置的电子部件制造方法，多个超声波振荡元件被布置成在玻璃基板输送方向和玻璃基板宽度上平面地延伸 通过将所述超声波振动元件投射到与玻璃基板输送方向垂直的平面而获得的方向和投影图形形成宽度超过超声波处理对象区域的宽度的单个带状区域。 当玻璃基板由输送辊沿输送方向输送时，上述布置使得超声波振荡元件的超声波投影区域在玻璃基板的表面上部分地彼此重叠，从而能够超过整个超声波的超声波投影 加工目标区域。
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公开(公告)号：US06810548B2
公开(公告)日：2004-11-02
申请号：US09800800
申请日：2001-03-07
申请人： Hiroto Yoshioka , Takeshi Hara , Kazuki Kobayashi , Hitoshi Ono , Takashi Kimura
发明人： Hiroto Yoshioka , Takeshi Hara , Kazuki Kobayashi , Hitoshi Ono , Takashi Kimura
IPC分类号： A46B1302
CPC分类号： H01L21/67051 , B08B1/02 , B08B3/123 , B08B2240/02 , H01L21/67046
摘要： A cleaning apparatus of the present invention includes a roll brush for scrubbing the surface of the substrate, and an ultrasonic nozzle for blowing an aqueous cleaning solution against the surface of the substrate and generating an ultrasonic wave, wherein the roll brush and the ultrasonic nozzle are provided so as to oppose one another so that the substrate can be set in between. With the synergetic effects of brush scrubbing cleaning, ultrasonic cleaning and shower-cleaning, the precision cleaning of the upper surface of the substrate can be performed at a sufficient level of cleanliness. Moreover, in a state where the substrate to be cleaned is set, the roll brush can be cleaned automatically by the ultrasonic nozzle, and it is therefore possible to maintain the roll brush at high level of cleanliness without requiring maintenance operations. Furthermore, by integrating the roll brush and the ultrasonic wave nozzle in one part, the size of the apparatus can be reduced in the transport direction of the substrate, thereby reducing an overall footprint area.
摘要翻译： 本发明的清洗装置包括：用于擦洗基材表面的辊刷和用于将水性清洗液吹向基材表面的超声波喷嘴，产生超声波，其中，所述辊刷和所述超声波喷嘴为 被设置为彼此相对，使得可以将基板设置在其间。 通过刷洗清洗，超声波清洗和淋浴清洗的协同效果，可以以足够的清洁度进行基板上表面的精密清洁。 此外，在设置被清洗基板的状态下，能够通过超声波喷嘴自动清洗辊刷，因此能够在不需要维护的情况下将辊刷保持在高清洁度。 此外，通过将辊刷和超声波喷嘴集成在一个部分中，可以在基板的输送方向上减小装置的尺寸，从而减小总的占用面积。
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公开(公告)号：US09126523B2
公开(公告)日：2015-09-08
申请号：US13566317
申请日：2012-08-03
申请人： Noriyuki Ogita , Kazunari Sakurai , Ryou Maeda , Kazuki Kobayashi , Koshu Yamashita , Akihiko Go , Toshihiko Nishio , Yoshio Masuda
发明人： Noriyuki Ogita , Kazunari Sakurai , Ryou Maeda , Kazuki Kobayashi , Koshu Yamashita , Akihiko Go , Toshihiko Nishio , Yoshio Masuda
CPC分类号： B60P1/6472 , B60P1/5428 , B66D3/08
摘要： Provided is a vehicle that elevates a working beam installed between a pair of booms with a working beam elevating unit and can ensure the area of a load receiving surface where a load is loaded. The working beam elevating unit is received in a working beam and one end of a chain is fixed to a boom. Therefore, the working beam is moved up/down by loosening and retracting the chain. Therefore, as the working beam elevating unit is installed at the working beam, it is not necessary to ensure a space for installing the working beam on a vehicle body. Therefore, it is correspondingly possible to enlarge the space (area of the load receiving surface) on the vehicle for loading a load.
摘要翻译： 提供一种车辆，其将安装在一对起重臂与作业梁提升单元之间的作业梁提升，并且可以确保负载接收表面的负载的面积。 工作梁提升单元被接收在工作梁中，链的一端固定在吊杆上。 因此，通过松开和缩回链条，工作梁上/下移动。 因此，由于工作梁提升单元安装在工作梁上，因此不需要确保用于将工作梁安装在车体上的空间。 因此，可以相应地扩大用于装载负载的车辆上的空间（承载面的面积）。
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公开(公告)号：US08980121B2
公开(公告)日：2015-03-17
申请号：US13575767
申请日：2011-01-28
申请人： Tomoyuki Adaniya , Satoshi Okabe , Toshiyuki Gotou , Taketo Maruyama , Kazuki Kobayashi , Keiichi Tanaka , Wataru Nakamura , Kenichi Kitoh , Tetsunori Tanaka
发明人： Tomoyuki Adaniya , Satoshi Okabe , Toshiyuki Gotou , Taketo Maruyama , Kazuki Kobayashi , Keiichi Tanaka , Wataru Nakamura , Kenichi Kitoh , Tetsunori Tanaka
IPC分类号： B44C1/22 , C23F1/00 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461 , C09K13/00 , C09K13/08 , H01L21/3213 , C23F1/18 , C23F1/26 , C23F1/44 , H05K3/06 , H01L23/532
CPC分类号： H01L21/32134 , C23F1/18 , C23F1/26 , C23F1/44 , H01L23/53238 , H01L2924/0002 , H05K3/067 , H01L2924/00
摘要： The present invention provides an etching liquid for a multilayer thin film containing a copper layer and a titanium layer, and a method of using it for etching a multilayer thin film containing a copper layer and a titanium layer, that is, an etching liquid for a multilayer thin film containing a copper layer and a titanium layer, which comprises (A) hydrogen peroxide, (B) nitric acid, (C) a fluoride ion source, (D) an azole, (E) a quaternary ammonium hydroxide and (F) a hydrogen peroxide stabilizer and has a pH of from 1.5 to 2.5, and a etching method of using it.
摘要翻译： 本发明提供了一种用于含有铜层和钛层的多层薄膜的蚀刻液及其用于蚀刻含有铜层和钛层的多层薄膜的方法，即，用于 含有（A）过氧化氢，（B）硝酸，（C）氟化物离子源，（D）唑，（E）季铵氢氧化物和（F））的含有铜层和钛层的多层薄膜 ）过氧化氢稳定剂，pH为1.5〜2.5，使用其蚀刻方法。
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公开(公告)号：US20120148012A1
公开(公告)日：2012-06-14
申请号：US12019103
申请日：2008-01-24
IPC分类号： G21C7/06
摘要： A control rod includes a tie-rod, a handle mounted to an upper end portion of the tie-rod, either a connector plate or a fall velocity limiter mounted to a lower end portion of the tie-rod, sheaths having a U-shaped cross-section, welded intermittently to the tie-rod at a plurality of locations in the axial direction of the tie-rod, and having an upper end welded to the handle and a lower end welded to either the connector plate or the fall velocity limiter, and a neutron absorbing member disposed inside each of the sheaths. An upper end of a weld portion located at uppermost position in an axial direction of the tie-rod among a plurality of weld portions between the tie-rod and the sheath is disposed at a position within a range between 0.8 and 13% of total axial length Ls of the sheath below an upper end of the sheath.
摘要翻译： 控制杆包括拉杆，安装到拉杆的上端部分的手柄，安装到拉杆的下端部分的连接板或下落速度限制器，具有U形的护套 横截面，在连杆的轴向方向上的多个位置处间断地焊接到拉杆，并且具有焊接到手柄的上端，以及焊接到连接器板或下落速度限制器的下端 以及设置在每个护套内的中子吸收构件。 位于拉杆和护套之间的多个焊接部分中的位于拉杆的轴向方向上的最上位置处的焊接部分的上端设置在总轴向的0.8和13％之间的范围内的位置 在鞘的上端下方的鞘的长度Ls。
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公开(公告)号：US06563174B2
公开(公告)日：2003-05-13
申请号：US10224879
申请日：2002-08-21
申请人： Masashi Kawasaki , Hideo Ohno , Kazuki Kobayashi , Ikuo Sakono
发明人： Masashi Kawasaki , Hideo Ohno , Kazuki Kobayashi , Ikuo Sakono
IPC分类号： H01L2701
CPC分类号： H01L29/7869 , H01L27/1214 , H01L27/1225 , H01L29/4908 , H01L29/66969 , H01L29/78603
摘要： In a thin film transistor, a gate insulating film having a first insulating film and a second insulating film is formed on a gate electrode, and a semiconductor layer including ZnO etc. is formed on the second insulating film. The first insulating film is formed by using SiNx having a high insulating characteristic, and the second insulating film is formed by using an oxide (for example, SiO2). This structure improves a crystalline characteristic of the semiconductor layer that constitutes an interface in combination with the second insulating film, and decreases a defective level of the interface between the semiconductor layer and the second insulating film. Further, the second insulating film is constituted of the oxide, so that it is possible to restrain a material for the second insulating film from depriving oxygen of the semiconductor layer. This keeps a crystalline characteristic of the semiconductor layer under a preferable condition in the vicinity of the interface between the second insulating film and the semiconductor layer. As a result, it is possible to realize a thin film transistor such that: a leak current level at an OFF area is low, and the mobility is high, and a switching characteristic is preferable. Thus, in the thin film transistor having a transparent semiconductor film, a TFT characteristic is improved.
摘要翻译： 在薄膜晶体管中，在栅电极上形成具有第一绝缘膜和第二绝缘膜的栅极绝缘膜，并且在第二绝缘膜上形成包括ZnO等的半导体层。 第一绝缘膜通过使用具有高绝缘特性的SiNx形成，并且第二绝缘膜通过使用氧化物（例如，SiO 2）形成。 该结构改善了构成与第二绝缘膜结合的界面的半导体层的结晶特性，并降低了半导体层与第二绝缘膜之间的界面的缺陷水平。 此外，第二绝缘膜由氧化物构成，使得可以抑制第二绝缘膜的材料剥夺半导体层的氧。 这在第二绝缘膜和半导体层之间的界面附近的优选条件下保持半导体层的结晶特性。 结果，可以实现薄膜晶体管，使得在OFF区域的漏电流水平低，并且迁移率高，并且切换特性是优选的。 因此，在具有透明半导体膜的薄膜晶体管中，提高了TFT特性。
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公开(公告)号：US06497240B1
公开(公告)日：2002-12-24
申请号：US09557052
申请日：2000-04-21
IPC分类号： B08B310
CPC分类号： H01L21/67051 , B08B3/022 , B08B2203/0288 , Y10S134/902
摘要： To provide an ultrasonic cleaning device (1) that ensures stable operation of a vibrating element for generating ultrasonic without a complex structure and distribution of a great quantity of a cleaning liquid and (2) that is capable of cleaning upper and lower surfaces of a cleaning target easily, an ultrasonic cleaning section of the device is provided with an upper cleaning-liquid-supply nozzle and a lower cleaning-liquid-supply nozzle for projection of ultrasonic. The upper cleaning-liquid-supply nozzle supplies an upper surface cleaning liquid to an upper surface of a glass substrate. The lower cleaning-liquid-supply nozzle supplies the lower surface cleaning liquid to a lower surface of the substrate in a form of shower to which ultrasonic has been projected. A vibrating element for generating ultrasonic to be projected to the lower surface cleaning liquid is provided in a cleaning liquid distribution path that extends from an upstream side to a downstream side in a direction in a range of a horizontal direction to an upward direction.
摘要翻译： 提供一种超声波清洗装置（1），其确保用于产生超声波的振动元件的稳定运行，而没有复杂的结构和大量的清洗液体的分布，以及（2）能够清洁清洁的上下表面的超声波清洗装置 所述装置的超声波清洗部设置有用于超声波投影的上部清洗液供给喷嘴和下部清洗液供给喷嘴。 上清洗液供给喷嘴将上表面清洗液供给到玻璃基板的上表面。 下部清洗液供给喷嘴将下表面清洗液以投射了超声波的喷淋形式向基板的下表面供给。 用于产生超声波的振动元件设置在从水平方向向上方的范围内的上游侧向下游侧延伸的清洗液分配路径中。
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公开(公告)号：US09085259B2
公开(公告)日：2015-07-21
申请号：US13566496
申请日：2012-08-03
申请人： Noriyuki Ogita , Kazunari Sakurai , Ryou Maeda , Kazuki Kobayashi , Koshu Yamashita , Akihiko Go , Toshihiko Nishio , Yoshio Masuda
发明人： Noriyuki Ogita , Kazunari Sakurai , Ryou Maeda , Kazuki Kobayashi , Koshu Yamashita , Akihiko Go , Toshihiko Nishio , Yoshio Masuda
CPC分类号： B60P1/6472
摘要： There is provided a vehicle which can stably load or unload a long heavy load and lower a height of a working space necessary for loading or unloading the weight body. The loading/unloading apparatus suspends and maintains a load in a working beam installed between a pair of booms and rotates the pair of booms toward the left or right direction of a vehicle body, such that the load is unloaded from the vehicle body in a construction field or loaded from the construction field onto the vehicle body. Thus, the height of the working space necessary when the load is loaded or unloaded can be reduced as compared with a crane structure for loading and unloading the load by the fluctuation of a boom.
摘要翻译： 提供一种可以稳定地加载或卸载长重载荷并降低加载或卸载重量体所需的工作空间的高度的车辆。 装载/卸载装置在安装在一对起重臂之间的工作梁中悬挂并保持负载，并且使一对起重臂朝向车体的左右方向旋转，使得负载在车体中以构造 或从建筑领域装载到车身上。 因此，与用于通过起重臂的波动装载和卸载负载的起重机结构相比，可以减小负载被加载或卸载时所需的工作空间的高度。
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公开(公告)号：US08612049B2
公开(公告)日：2013-12-17
申请号：US13566307
申请日：2012-08-03
IPC分类号： G06F7/00
CPC分类号： B60P1/6472
摘要： When the load factor of a loading/unloading apparatus reaches a second reference value that is smaller in load factor than the first reference value, the operation speed of the loading/unloading apparatus becomes a reduction state. It is possible to make load vibration difficult to be generated in a load. Further, fine adjustment of the manipulation becomes easy, such that it is possible to prevent the load factor from reaching the first reference value due to careless manipulation of the operator. Even if the load factor reaches the first reference value, the operation speed of the loading/unloading apparatus has been reduced, such that it is possible to prevent load vibration of the load W when stopping.
摘要翻译： 当加载/卸载装置的负载系数达到比第一参考值小的负载因子的第二参考值时，装载/卸载装置的操作速度变为降低状态。 可能使负载振动难以在负载中产生。 此外，操作的精细调整变得容易，使得可以防止由于操作者的粗心操作而导致的负载因素达到第一参考值。 即使负载因子达到第一参考值，装载/卸载装置的操作速度也降低，从而可以防止在停止时负载W的负载振动。
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公开(公告)号：US20130115385A1
公开(公告)日：2013-05-09
申请号：US13809649
申请日：2011-04-13
IPC分类号： B05D5/06
CPC分类号： B05D5/06 , G02B5/201 , G02F1/133514 , G02F1/133516
摘要： The present invention provides a method for manufacturing a color filter substrate, in which the occurrence of color mixing between adjacent sub-pixels is prevented even when an inkjet method is used. A color filter substrate having color filters of a plurality of colors arranged in a matrix with a bank therebetween is manufactured using this method. The method has: a first inkjet step in which an ink is jetted to at least one region among a plurality of regions partitioned by the bank, and the ink is not jetted to any of regions adjacent to the one region in the horizontal direction and the vertical direction; and a second inkjet step in which the ink is jetted to at least one region to which the ink has not been jetted in the first inkjet step, the aforementioned at least one region being among the plurality of regions partitioned by the bank.
摘要翻译： 本发明提供了一种制造滤色器基板的方法，其中即使在使用喷墨方法时也防止了相邻子像素之间的颜色混合的出现。 使用该方法制造具有排列成矩阵中的多个颜色的具有多个颜色的滤色器的滤色器基板。 该方法具有：第一喷墨步骤，其中将油墨喷射到由堤分隔开的多个区域中的至少一个区域上，并且油墨不被喷射到在水平方向上与该区域相邻的区域中的任一个区域，并且 垂直方向 以及第二喷墨步骤，其中在所述第一喷墨步骤中将所述油墨喷射到至少一个未喷墨的区域，所述至少一个区域在由所述堤分隔开的所述多个区域中。
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