摘要:
A semiconductor processing apparatus comprises a main body having an air passage, a plurality of filter units connected in series with the air passage in the main body, each filter unit having an air intake port, an air otlet port and an air blower, the air intake port of each filter unit communicating with the air outlet ports of the filter units disposed upstream side of the air passage, and a mechanism for arranging articles to be processed close to the air outlet port of each filter unit such that air is supplied to the articles to be processed after the air has passed through the corresponding filter units.
摘要:
A clean air apparatus includes a housing having an opening through which a carrier housing semiconductor wafers is supplied into the housing and an I/O port for supporting the carrier and a furnace for treating the wafer, provided in the upper portion of the housing. The carriers are at the same time supported by a first carrier stage provided in the upper portion of the housing and supported by a second carrier stage provided in the lower portion of the housing. The carrier or carriers are selectively moved between the I/O port and the first stage, between the I/O port and the second stage, and between the first stage and the second stage. A clean air is applied to the wafers in the carriers supported by the I/O port, the first stage and the second stage.
摘要:
A clean air apparatus comprises a body in which clean air is supplied, an I/O port having an opening for carrying a carrier housing objects to be treated in/out of the body, a door which opens/closes the opening, and dust preventing device for preventing dusts from entering the body from the outside through the opening, when the door is opened.
摘要:
Disclosed is a method for easily producing a long porous thermosetting resin sheet which has no resin coating film on the surface. Also disclosed are a porous thermosetting resin sheet produced by the method, and a composite semipermeable membrane having excellent chemical resistance and practical water permeability and salt-blocking property. The porous thermosetting resin sheet can be produced by forming a cylindrical or columnar resin block which is composed of a cured product of a thermosetting resin composition containing a thermosetting resin, a curing agent and a porogen; then forming a long thermosetting resin sheet by cutting the surface of the resin block at a certain thickness; and then removing the porogen from the thermosetting resin sheet.
摘要:
A membrane element sealing material holding member comprising a central opening for insertion of a center tube of spiral membrane element, peripheral orifice for flowing of a raw liquid into a membrane end portion of membrane element and outer circumferential part for holding of circular sealing material, wherein the central opening has inner circumferential surface of cylindrical form with a diameter larger than the outer diameter of the inserted center tube, and wherein at three or more positions on the inner circumferential surface, there is provided projection that has sloping face on its side of center tube insertion and is deformable at the time of insertion of center tube with an outer diameter larger than that of incircle.
摘要:
A processing unit for a substrate has a vertical thermal processing furnace 4 having a bottom and an opening provided at the bottom. A boat holding substrates in vertical multistairs can be placed on a first lid, and the first lid can open and close the opening of the vertical thermal processing furnace with the boat placed thereon. The processing unit also has a boat-placing portion on which the boat and another boat can be placed and a boat conveying mechanism for conveying the two boats alternatively between the boat-placing portion and the first lid. A second lid hermetically closes the opening of the vertical thermal processing furnace when the first lid opens the opening but no boat passes through the opening. The processing unit can effectively reduce the undesirable influence from the opening when the first lid is taken off from the opening and the boat is conveyed out, and can also reduce the wasted energy by preventing the fall of the temperature in the interior of the thermal processing furnace.
摘要:
A disc player includes: a plurality of pickup devices for reading information from a disc and a plurality of guide devices arranged radiately from a center of the disc, each for radially transferring one of the pickup devices. The guide devices are arranged so that each alternate pickup device is raised or lowered toward the inner circumferential portion of the disc.
摘要:
A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn from the container and a sub-opening through which a wafer counter approaches the wafers. A plurality of slots are formed in the container to hold the wafers one by one at intervals. Each slot includes a pair of grooves which are formed in inner surfaces of both the side walls, have a V-shaped cross-section, and which divergently open toward a central portion of the container. One surface of each groove serves as a supporting surface on which a wafer is disposed substantially horizontal when the container is positioned such that the reference plane is horizontal. The supporting surfaces of the pair of grooves have a pair of converging portions which converge toward the second opening. A filling body, having an inner surface which is brought into contact with an edge portion of a wafer, is provided in each converging portion near the sub-opening. The inner surface of the filling body is determined so as to restrict a position of the wafer, such that the wafer can be positioned at the same height of the supporting surfaces of the pair of grooves.
摘要:
A horizontal/vertical conversion transporting apparatus, wherein a mechanism for variably changing a distance between upper and lower boat hands for clamping an article therebetween is mounted on a conversion arm, the conversion arm is vertically movable along a support arm, and at the same time, the conversion arm is rotatable within the plane of vertical movement.