Method of forming grating microstructures by anodic oxidation
    4.
    发明授权
    Method of forming grating microstructures by anodic oxidation 失效
    通过阳极氧化形成光栅微结构的方法

    公开(公告)号:US06930053B2

    公开(公告)日:2005-08-16

    申请号:US10394033

    申请日:2003-03-24

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微结构的元件的方法包括以下步骤:在衬底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Element having microstructure and manufacturing method thereof
    5.
    发明申请
    Element having microstructure and manufacturing method thereof 失效
    具有微结构的元件及其制造方法

    公开(公告)号:US20070029567A1

    公开(公告)日:2007-02-08

    申请号:US11544615

    申请日:2006-10-10

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微细结构的元件的方法包括以下步骤:在基底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Method of forming grating microstrutures by anodic oxidation
    6.
    发明授权
    Method of forming grating microstrutures by anodic oxidation 失效
    通过阳极氧化形成光栅微尺寸的方法

    公开(公告)号:US07129183B2

    公开(公告)日:2006-10-31

    申请号:US11155480

    申请日:2005-06-20

    IPC分类号: H01L21/302 H01L21/461

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微结构的元件的方法包括以下步骤:在衬底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Element having microstructure and manufacturing method thereof
    7.
    发明授权
    Element having microstructure and manufacturing method thereof 失效
    具有微结构的元件及其制造方法

    公开(公告)号:US07348650B2

    公开(公告)日:2008-03-25

    申请号:US11544615

    申请日:2006-10-10

    IPC分类号: H01L31/0232

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微结构的元件的方法包括以下步骤:在衬底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。

    Element having microstructure and manufacturing method thereof
    8.
    发明申请
    Element having microstructure and manufacturing method thereof 失效
    具有微结构的元件及其制造方法

    公开(公告)号:US20050245090A1

    公开(公告)日:2005-11-03

    申请号:US11155480

    申请日:2005-06-20

    CPC分类号: G02B5/1809 G02B5/1857

    摘要: A method of manufacturing an element having a microstructure of an excellent grating groove pattern or the like is obtained. This method of manufacturing an element having a microstructure comprises steps of forming a metal layer on a substrate, forming a dot column of concave portions on the surface of the metal layer and anodically oxidizing the surface of the metal layer formed with the dot column of concave portions while opposing this surface to a cathode surface thereby forming a metal oxide film having a grating groove pattern. When the interval between the concave portions of the dot column is reduced, therefore, a linear grating groove pattern having a large depth with a uniform groove width along the depth direction is easily formed in a self-organized manner.

    摘要翻译: 可以得到具有优良的光栅槽图案等的微结构的元件的制造方法。 这种制造具有微结构的元件的方法包括以下步骤:在衬底上形成金属层,在金属层的表面上形成凹点的点列,并且阳极氧化形成有凹点的点列的金属层的表面 同时将该表面与阴极表面相对,从而形成具有格栅槽图案的金属氧化物膜。 当点列的凹部之间的间隔减小时,容易以自组织的方式形成具有沿深度方向具有均匀凹槽宽度的大深度的线性格栅槽图案。