公开(公告)号：US11777276B2

公开(公告)日：2023-10-03

申请号：US17749893

申请日：2022-05-20

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Takahiro Sugiyama ,  Yuu Takiguchi ,  Yoshitaka Kurosaka ,  Kazuyoshi Hirose ,  Yoshiro Nomoto ,  Soh Uenoyama

IPC分类号： H01S5/11 ,  H01S5/042 ,  H01S5/12 ,  H01S5/42 ,  H01S5/026 ,  H01S5/343 ,  H01S5/183

CPC分类号： H01S5/11 ,  H01S5/04256 ,  H01S5/42 ,  H01S5/026 ,  H01S5/0425 ,  H01S5/04254 ,  H01S5/1835 ,  H01S5/34313 ,  H01S5/34353 ,  H01S5/423 ,  H01S2301/16 ,  H01S2301/18 ,  H01S2301/20

摘要： The present embodiment relates to a single semiconductor light-emitting element including a plurality of light-emitting portions each of which is capable of generating light of a desired beam projection pattern and a method for manufacturing the semiconductor light-emitting element. In the semiconductor light-emitting element, an active layer and a phase modulation layer are formed on a common substrate layer, and the phase modulation layer includes at least a plurality of phase modulation regions arranged along the common substrate layer. The plurality of phase modulation regions are obtained by separating the phase modulation layer into a plurality of places after manufacturing the phase modulation layer, and as a result, the semiconductor light-emitting element provided with a plurality of light-emitting portions that have been accurately aligned can be obtained through a simple manufacturing process as compared with the related art.

公开(公告)号：US09711946B2

公开(公告)日：2017-07-18

申请号：US14576837

申请日：2014-12-19

申请人： Seiko Epson Corporation

发明人： Tsuyoshi Kaneko ,  Tetsuo Nishida ,  Yuji Kurachi

IPC分类号： H01S3/08 ,  H01S5/183 ,  G04F5/14 ,  H01S5/042 ,  H01S5/32

CPC分类号： H01S5/183 ,  G04F5/145 ,  H01S5/0425 ,  H01S5/18311 ,  H01S5/18347 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/18372 ,  H01S5/3201 ,  H01S2301/176

摘要： A vertical cavity surface emitting laser includes: a substrate; a laminated body which is provided over the substrate; and a resin layer which is provided on at least a side surface of the laminated body, wherein the laminated body at least includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, a length of the laminated body in a first direction is greater than a length of the laminated body in a second direction orthogonal to the first direction, and in the plan view, a length of the resin layer in the first direction is greater than a length of the resin layer in the second direction.

公开(公告)号：US09444222B2

公开(公告)日：2016-09-13

申请号：US14149368

申请日：2014-01-07

申请人： ROHM CO., LTD.

发明人： Takui Sakaguchi ,  Seita Iwahashi ,  Eiji Miyai ,  Wataru Kunishi ,  Dai Onishi ,  Yoshikatsu Miura

IPC分类号： H01S5/10 ,  H01S5/183 ,  H01S5/42

CPC分类号： H01S5/105 ,  H01S5/18319 ,  H01S5/1835 ,  H01S5/423 ,  H01S2301/18

摘要： The 2D-PC surface emitting laser includes: a PC layer; and a lattice point for forming resonant-state arranged in the photonic crystal layer, and configured so that a light wave in a band edge in photonic band structure in the PC layer is diffracted in a plane of the PC layer, and is diffracted in a surface vertical direction of the PC layer. The perturbation for diffracting the light wave in the surface vertical direction of the PC layer is applied to the lattice point for forming resonant-state. The term “perturbation” means that modulation is periodically applied to the lattice point for forming resonant-state. For example, the periodic modulation may be refractive index modulation, hole-diameter modulation, or hole-depth modulation.

摘要翻译： 2D-PC表面发射激光器包括：PC层; 以及用于形成布置在光子晶体层中的共振态的晶格点，并且被配置为使得PC层中的光子带结构中的带边缘中的光波在PC层的平面中衍射，并且在 PC层的垂直方向。 将用于将PC层的垂直方向上的光波衍射的扰动施加到用于形成共振态的晶格点。 术语“扰动”意味着调制被周期地施加到用于形成谐振状态的晶格点。 例如，周期性调制可以是折射率调制，空穴直径调制或空穴深度调制。

公开(公告)号：US20160226221A1

公开(公告)日：2016-08-04

申请号：US15093990

申请日：2016-04-08

申请人： Seiko Epson Corporation

发明人： Tsuyoshi KANEKO ,  Tetsuo NISHIDA ,  Yuji KURACHI

IPC分类号： H01S5/183 ,  H01S5/187 ,  H03L7/26 ,  H01S5/343

CPC分类号： H01S5/18333 ,  G04F5/145 ,  H01S5/0425 ,  H01S5/18311 ,  H01S5/18313 ,  H01S5/18344 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18361 ,  H01S5/187 ,  H01S5/2213 ,  H01S5/34313 ,  H03L7/26

摘要： A vertical cavity surface emitting laser includes: a substrate; a first mirror layer; an active layer; a second mirror layer; a current constriction layer; a first area connected to the first mirror layer and including a plurality of oxide layers; and a second area connected to the second mirror layer and including a plurality of oxide layers. The first mirror layer, the active layer, the second mirror layer, the current constriction layer, the first area, and the second area configure a laminated body. The laminated body includes a first portion, a second portion, and a third portion between the first portion and the second portion. When a width of the oxide area is W1 and a width of an upper surface of the first portion is W2, W2/W1≦3.3.

摘要翻译： 垂直腔表面发射激光器包括：衬底; 第一镜层; 活性层 第二镜层; 电流收缩层; 连接到所述第一镜面层并且包括多个氧化物层的第一区域; 以及连接到第二镜层并且包括多个氧化物层的第二区域。 第一镜层，有源层，第二镜层，电流收缩层，第一区域和第二区域构成层叠体。 层压体包括第一部分，第二部分和第一部分和第二部分之间的第三部分。 当氧化物面积的宽度为W1，第一部分的上表面的宽度为W2时，W2 /W1≤3.3。

公开(公告)号：US09397478B2

公开(公告)日：2016-07-19

申请号：US14576675

申请日：2014-12-19

申请人： Seiko Epson Corporation

发明人： Satoshi Takenaka ,  Yuji Kurachi

IPC分类号： H01S5/00 ,  H01S5/183 ,  H01S5/042 ,  G04F5/14 ,  H01S5/32 ,  H01S5/022 ,  H01S5/0687 ,  H01S5/062

CPC分类号： H01S5/183 ,  G04F5/145 ,  H01S5/02276 ,  H01S5/0425 ,  H01S5/0623 ,  H01S5/0687 ,  H01S5/18311 ,  H01S5/18338 ,  H01S5/18347 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/18372 ,  H01S5/3201 ,  H01S2301/176

摘要： A vertical cavity surface emitting laser includes: a substrate; a laminated body which is provided over the substrate; an electrode of which at least a portion is provided over the laminated body; and a pad which is connected to the electrode, wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the active layer, and in the plan view, the pad is provided in a position that is not overlapped with at least one of the first distortion imparting portion and the second distortion imparting portion.

摘要翻译： 垂直腔表面发射激光器包括：衬底; 设置在基板上的层叠体; 在层叠体上设置有至少一部分的电极; 以及连接到所述电极的焊盘，其中所述层叠体包括设置在所述基板上的第一反射镜层，设置在所述第一镜面层上的有源层，以及设置在所述有源层上的第二镜像层， 层叠体包括第一变形赋予部，第二变形赋予部以及设置在第一变形赋予部和第二变形赋予部之间的谐振部，并且谐振在有源层中产生的光，在俯视图中， 衬垫设置在与第一变形赋予部和第二变形赋予部中的至少一个不重叠的位置。

公开(公告)号：US09360845B2

公开(公告)日：2016-06-07

申请号：US14573293

申请日：2014-12-17

申请人： Seiko Epson Corporation

发明人： Tsuyoshi Kaneko ,  Tetsuo Nishida ,  Yuji Kurachi

IPC分类号： H01S5/00 ,  G04F5/14 ,  H01S5/183 ,  H03L7/26 ,  H01S5/042

CPC分类号： H01S5/187 ,  G04F5/145 ,  H01S5/0421 ,  H01S5/0425 ,  H01S5/18313 ,  H01S5/18333 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/3432 ,  H03L7/26

摘要： A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, the laminated body includes a first portion having a first width, a second portion having a second width, and a third portion which is provided between the first portion and the second portion and has a third width wider than the first width or the second width, and a resin layer which covers at least one portion of the first portion is provided.

摘要翻译： 垂直腔表面发射激光器包括：衬底; 以及设置在所述基板上的层叠体，其中，所述层叠体包括设置在所述基板上的第一反射镜层，设置在所述第一反射镜层上的有源层，以及设置在所述有源层上的第二反射镜层， 层压体包括具有第一宽度的第一部分，具有第二宽度的第二部分和设置在第一部分和第二部分之间的第三部分，并且具有比第一宽度或第二宽度宽的第三宽度 并且设置覆盖第一部分的至少一部分的树脂层。

公开(公告)号：US09257816B2

公开(公告)日：2016-02-09

申请号：US14574932

申请日：2014-12-18

申请人： Seiko Epson Corporation

发明人： Tetsuo Nishida

IPC分类号： H01S5/183 ,  H01S5/42

CPC分类号： H01S5/423 ,  G04F5/145 ,  H01S5/02276 ,  H01S5/0425 ,  H01S5/18311 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/3201 ,  H01S5/34313 ,  H01S2301/176

摘要： A vertical cavity surface emitting laser includes: a substrate; a first mirror layer; an active layer; a second mirror layer; a first electrode which is electrically connected to the first mirror layer; a second electrode which is electrically connected to the second mirror layer; and a pad which is electrically connected to the second electrode, in which the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion, an insulation layer is provided on a side surface of the laminated body, in a plan view, the insulation layer has a shape line-symmetrical with respect to a virtual straight line passing through a center of the resonance portion, the pad is provided over the insulation layer, and in the plan view, the pad is only provided on one side of the virtual straight line.

摘要翻译： 垂直腔表面发射激光器包括：衬底; 第一镜层; 活性层 第二镜层; 电连接到第一镜层的第一电极; 电连接到第二镜层的第二电极; 以及与第二电极电连接的垫，其中第一镜层，有源层和第二镜层构成层叠体，层叠体包括共振部，绝缘层设置在侧面 在平面图中，绝缘层相对于穿过谐振部分的中心的虚拟直线具有对称的形状，该衬垫设置在绝缘层上方，并且在平面图中， 该垫仅设置在虚拟直线的一侧。

公开(公告)号：US20150180214A1

公开(公告)日：2015-06-25

申请号：US14574932

申请日：2014-12-18

申请人： Seiko Epson Corporation

发明人： Tetsuo NISHIDA

IPC分类号： H01S5/42

CPC分类号： H01S5/423 ,  G04F5/145 ,  H01S5/02276 ,  H01S5/0425 ,  H01S5/18311 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/3201 ,  H01S5/34313 ,  H01S2301/176

摘要： A vertical cavity surface emitting laser includes: a substrate; a first mirror layer; an active layer; a second mirror layer; a first electrode which is electrically connected to the first mirror layer; a second electrode which is electrically connected to the second mirror layer; and a pad which is electrically connected to the second electrode, in which the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion, an insulation layer is provided on a side surface of the laminated body, in a plan view, the insulation layer has a shape line-symmetrical with respect to a virtual straight line passing through a center of the resonance portion, the pad is provided over the insulation layer, and in the plan view, the pad is only provided on one side of the virtual straight line.

摘要翻译： 垂直腔表面发射激光器包括：衬底; 第一镜层; 活性层 第二镜层; 电连接到第一镜层的第一电极; 电连接到第二镜层的第二电极; 以及与第二电极电连接的垫，其中第一镜层，有源层和第二镜层构成层叠体，层叠体包括共振部，绝缘层设置在侧面 在平面图中，绝缘层相对于穿过谐振部分的中心的虚拟直线具有对称的形状，该衬垫设置在绝缘层上方，并且在平面图中， 该垫仅设置在虚拟直线的一侧。

公开(公告)号：US20150180211A1

公开(公告)日：2015-06-25

申请号：US14575071

申请日：2014-12-18

申请人： Seiko Epson Corporation

发明人： Yasutaka IMAI

IPC分类号： H01S5/42

CPC分类号： H01S5/42 ,  H01S5/0425 ,  H01S5/18311 ,  H01S5/18313 ,  H01S5/18327 ,  H01S5/18338 ,  H01S5/18341 ,  H01S5/18347 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/3201 ,  H01S2301/176

摘要： A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer, an active layer, and a second mirror layer, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated by the active layer, and an angle formed by a side surface of the first distortion imparting portion and an upper surface of the substrate, and an angle formed by a side surface of the second distortion imparting portion and the upper surface of the substrate are greater than an angle formed by a side surface of the resonance portion and the upper surface of the substrate.

摘要翻译： 垂直腔表面发射激光器包括：衬底; 以及设置在所述基板上的层叠体，其中，所述层叠体包括第一镜面层，有源层和第二镜面层，在俯视图中，所述层叠体包括第一变形赋予部，第二变形赋予 所述谐振部分设置在所述第一变形赋予部分和所述第二变形赋予部分之间并且谐振由所述有源层产生的光，并且由所述第一变形赋予部分的侧表面和所述第一变形赋予部分的上表面形成的角度 基板，并且由第二变形赋予部分的侧表面和基板的上表面形成的角度大于由共振部分的侧表面和基板的上表面形成的角度。

公开(公告)号：US20150180207A1

公开(公告)日：2015-06-25

申请号：US14576837

申请日：2014-12-19

申请人： Seiko Epson Corporation

发明人： Tsuyoshi KANEKO ,  Tetsuo NISHIDA ,  Yuji KURACHI

IPC分类号： H01S5/183

CPC分类号： H01S5/183 ,  G04F5/145 ,  H01S5/0425 ,  H01S5/18311 ,  H01S5/18347 ,  H01S5/1835 ,  H01S5/18352 ,  H01S5/18355 ,  H01S5/18372 ,  H01S5/3201 ,  H01S2301/176

摘要： A vertical cavity surface emitting laser includes: a substrate; a laminated body which is provided over the substrate; and a resin layer which is provided on at least a side surface of the laminated body, wherein the laminated body at least includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, a length of the laminated body in a first direction is greater than a length of the laminated body in a second direction orthogonal to the first direction, and in the plan view, a length of the resin layer in the first direction is greater than a length of the resin layer in the second direction.

摘要翻译： 垂直腔表面发射激光器包括：衬底; 设置在基板上的层叠体; 以及设置在所述层叠体的至少侧面的树脂层，其中，所述层叠体至少包括设置在所述基板上的第一镜面层，设置在所述第一镜面层上的有源层，以及设置在所述第二镜面层上的第二镜面层 在有源层上，在平面图中，层叠体在第一方向上的长度大于在与第一方向正交的第二方向上的层叠体的长度，在平面图中，树脂的长度 第一方向的层比第二方向上的树脂层的长度大。