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公开(公告)号:US5767453A
公开(公告)日:1998-06-16
申请号:US633813
申请日:1996-04-16
IPC分类号: G01G19/393 , G01G13/00 , B67D5/08
CPC分类号: G01G19/393
摘要: This invention provides a combined metering apparatus in which the convey efficiency of a target metering object from an upper-stage hopper to a lower-stage hopper is improved. For this purpose, the direction in which a bottom plate 33 of a pool hopper 25 is moved to open the lower open surface of a cylindrical body 26 and the direction in which a bottom plate 43 of a lower-stage metering hopper 35 is moved to close the lower open surface of a cylindrical body 36 are set the same. Also, the direction in which the bottom plate 43 of the metering hopper 35 is moved to open the lower open surface of the cylindrical body 36 and the direction in which a bottom plate 59 of a lower-stage timing hopper 50 is moved to open the lower open surface of a cylindrical body 51 are set the same. Hence, when the bottom plate of the lower-stage hopper is moved in the closing direction, the bottom plate of the upper-stage hopper is moved in the opening direction almost simultaneously, so that the target metering object in the upper-stage hopper can be transferred to the lower-stage hopper efficiently.
摘要翻译: PCT No.PCT / JP95 / 01663 Sec。 371日期1996年04月16日 102(e)日期1996年4月16日PCT提交1995年8月23日PCT公布。 出版物WO96 / 07083 日期1996年3月7日本发明提供了一种组合计量装置,其中目标计量物体从上级料斗到下级料斗的输送效率提高。 为此目的,使池底斗25的底板33移动以打开圆筒体26的下开口表面的方向和下级计量料斗35的底板43移动到 关闭圆筒体36的下开口表面设置相同。 此外,计量料斗35的底板43移动以打开圆筒体36的下开口表面的方向以及下级正时料斗50的底板59移动以打开的方向 圆筒体51的下开口面被设定为相同。 因此,当下层料斗的底板沿关闭方向移动时,上段料斗的底板几乎同时沿打开方向移动,使上级料斗中的目标计量物品 有效地转移到下级料斗。
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公开(公告)号:US06471740B2
公开(公告)日:2002-10-29
申请号:US09736647
申请日:2000-12-13
IPC分类号: B01D4600
CPC分类号: B01D46/0001 , B01D39/10 , B01D39/1623 , B01D39/2017 , B01D46/06 , B01D46/10 , B01D2239/04 , B01D2239/0428 , B01D2239/0457 , B01D2239/0464 , B01D2239/0492 , B01D2239/0618 , B01D2239/086 , B01D2239/10 , B01D2271/02 , B01D2279/51 , D04H1/4218 , D06M13/02 , D06M13/11 , D06M13/148 , D06M13/224 , D06M15/227 , D06M15/507 , F24F3/161 , F24F13/28
摘要: A material not releasing gaseous organic substances during use is used as a filter medium and a sealing material for tightly sealing between the medium and a frame. Specifically, a synthetic paraffin not containing an aliphatic hydrocarbon having not more than 19 carbon atoms or less is used as a non-silicone type water repellent contained in a treatment agent for forming fibers into a cloth-like filter medium. A carboxylic acid ester having 400 or more molecular weight is used as a plasticizer and a phenolic compound having 300 or more molecular weight is used as an antioxidant to be added to the treatment agent and the sealing material. This enables that the gaseous organic substances are not present in a clean room, a semiconductor production apparatus or the like. Further, if the filter medium and the sealing material are formed of a material not releasing organic phosphorus compounds and boron compounds in the air, a clean room and a local facility particularly suitable for use in the production of semiconductors are provided.
摘要翻译: 使用在使用期间不释放气态有机物质的材料用作过滤介质和用于在介质和框架之间紧密密封的密封材料。 具体地说,不含有不超过19个碳原子的脂肪族烃的合成石蜡用作用于将纤维形成布状过滤介质的处理剂中所含的非硅氧烷型防水剂。 使用具有400以上分子量的羧酸酯作为增塑剂,使用具有300以上分子量的酚类化合物作为添加到处理剂和密封材料中的抗氧化剂。 这使得气体有机物质不存在于洁净室,半导体制造装置等中。 此外,如果过滤介质和密封材料由空气中不释放有机磷化合物和硼化合物的材料形成,则提供特别适合用于制造半导体的洁净室和本地设备。
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公开(公告)号:US4995286A
公开(公告)日:1991-02-26
申请号:US196133
申请日:1988-09-19
申请人: Sadao Kobayashi , Hidemi Tomono , Kazunobu Yoshida
发明人: Sadao Kobayashi , Hidemi Tomono , Kazunobu Yoshida
CPC分类号: B29C37/02 , Y10T82/16016 , Y10T82/16081 , Y10T82/16967
摘要: An automatic flash removing apparatus, according to the present invention, comprises a flash removing cutter edge carried by a cutter holder. The cutter holder is movable with carrying the cutter edge relative to a molded product. On the other hand, the molded product is supported on a product support which can drive the product relative to the cutter edge so that the portion of the product having flash to be removed is placed in opposition to the cutter edge. The cutter holder is associated with a pressure regulator means for adjusting pressure to depress the cutter edge toward the product. Regulated depression pressure may avoid fluctuation of smoothness of the product after removing the flash.
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公开(公告)号:US4103907A
公开(公告)日:1978-08-01
申请号:US693314
申请日:1976-06-07
申请人: Hiroshi Inouye , Sadao Kobayashi
发明人: Hiroshi Inouye , Sadao Kobayashi
IPC分类号: F16J15/34
CPC分类号: F16J15/3432 , Y10S277/93
摘要: A mechanical seal comprising:Sealing elements forming a sliding seal surface for sealing action and made of material having a high heat conductivity;Surface deformation-generating grooves provided at the portion close to said sliding seal surface on the sealing elements so that a fluid film can be generated by the wedge action of surface deformations of said sliding seal surface; andGrooves for generating turbulence and increasing heat transfer area which are provided in the marginal portion, separately of the grooves for generating surface deformation, in said sealing elements so that cooling fluid fed to said sliding seal surface can be made turbulent and contact area of the cooling fluid can be increased.
摘要翻译: 一种机械密封,包括:
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公开(公告)号:US4036672A
公开(公告)日:1977-07-19
申请号:US683265
申请日:1976-05-05
申请人: Sadao Kobayashi
发明人: Sadao Kobayashi
IPC分类号: H01L29/80 , H01L21/20 , H01L29/04 , H01L29/808 , H01L21/74
CPC分类号: H01L29/8083 , H01L21/02381 , H01L21/02532 , H01L21/02639 , H01L29/04 , Y10S148/088 , Y10S438/969
摘要: In the manufacture of a vertical structure junction type field effect transistor, the formation of a gate region is followed by an oxidation treatment of the upper surface of the gate region and then by the growth of a semiconductor layer consisting of a monocrystalline region on the channel portion and a polycrystalline region on the oxide film formed on the gate region. The existence of the oxide film on the gate region prevents the out-diffusion of the impurity doped in the gate region, preventing the lowering of the breakdown voltage, and enabling a short channel length and small series resistance of the channel.
摘要翻译: 在垂直结构型场效应晶体管的制造中,栅极区域的形成之后是对栅极区域的上表面进行氧化处理,然后通过在沟道上由单晶区域构成的半导体层的生长 部分和形成在栅极区域上的氧化物膜上的多晶区域。 栅极区域上的氧化膜的存在防止了掺杂在栅极区域中的杂质的扩散,防止了击穿电压的降低,并且能够实现沟道的短沟道长度和小的串联电阻。
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6.
公开(公告)号:US06903264B2
公开(公告)日:2005-06-07
申请号:US10478641
申请日:2002-05-23
申请人: Kiyoshi Watanabe , Hiroyuki Ito , Misako Saito , Teruyuki Hayashi , Naoya Hirayama , Sadao Kobayashi , Yoshihide Wakayama
发明人: Kiyoshi Watanabe , Hiroyuki Ito , Misako Saito , Teruyuki Hayashi , Naoya Hirayama , Sadao Kobayashi , Yoshihide Wakayama
摘要: An electric wire with coating of polyvinyl chloride family resin composition is characterized by having a coating layer including polyvinyl chloride family composition obtained from adding more than one of any calcium soap, zinc soap and hydrotalcite to resin including polyvinyl chloride resin as a main constituent, and further adding thereto plasticizer so as to obtain a heat-stable vinyl chloride composition, and further adding thereto as stabilization auxiliaries high-melting-point β-diketone compound having a melting point more than 100° C. out of β-diketone compounds expressed by a general formula of R.CO.CH2.CO.R′.
摘要翻译: 一种具有聚氯乙烯树脂组合物涂层的电线的特征在于具有包含聚氯乙烯家族组合物的涂层,所述组合物通过将包含聚氯乙烯树脂作为主要成分的树脂中添加多种任何钙皂,锌皂和水滑石而获得,以及 进一步添加增塑剂以获得热稳定性氯乙烯组合物,并进一步添加作为稳定助剂的熔点高于100℃的高熔点β-二酮化合物,由β-二酮化合物表示,由 R.CO.CH2.CO.R'的通式。
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7.
公开(公告)号:US06799539B2
公开(公告)日:2004-10-05
申请号:US10468362
申请日:2003-08-19
申请人: Osamu Suenaga , Sadao Kobayashi
发明人: Osamu Suenaga , Sadao Kobayashi
IPC分类号: F22D102
CPC分类号: H01L21/67109 , F28D7/16 , Y02P80/156 , Y10S165/909
摘要: An amount of energy consumption in a semiconductor fabrication facility can be reduced by using cooling water drained from a semiconductor fabrication apparatus as a heat source of another semiconductor fabrication apparatus. Cooling water of 80° C. drained from a heating furnace of a heat processing apparatus (10) is supplied to a deionized water heating apparatus (32) of a cleaning apparatus (30). The deionized water heating apparatus (32) raises a temperature of deionized water of a room temperature to 60° C. through heat exchange with the cooling water of 80° C. The cooling water, whose temperature falls to 30° C. after the heat exchange, is reutilized for cooling of the heating furnace (12).
摘要翻译: 通过使用从半导体制造装置排出的冷却水作为另一半导体制造装置的热源,可以减少半导体制造设备中的能量消耗。 将从加热处理装置(10)的加热炉排出的80℃的冷却水供给到清洗装置(30)的去离子水加热装置(32)。 去离子水加热装置(32)通过与80℃的冷却水进行热交换,将室温下去离子水的温度升高到60℃。加热后的温度降至30℃的冷却水 再次利用加热炉(12)的冷却。
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公开(公告)号:US06569696B2
公开(公告)日:2003-05-27
申请号:US10148664
申请日:2002-06-04
申请人: Osamu Suenaga , Makoto Yamamoto , Naoki Mori , Hiromu Ito , Sadao Kobayashi
发明人: Osamu Suenaga , Makoto Yamamoto , Naoki Mori , Hiromu Ito , Sadao Kobayashi
IPC分类号: G01R3126
CPC分类号: H01L21/67248 , F24F3/161 , F24F5/0007 , H01L21/67017 , H01L21/6715
摘要: A heat exchange section (72) is provided in the middle of a circulation water path (58, 59) connecting between a temperature-controlled water tank (71) and a semiconductor manufacturing apparatus body (4) so as to perform a heat exchange with air of a clean room (3). The heat exchange section (72) is installed near an exit of an air circulation path (32) above a fan-filter unit (34) of the clean room as a temperature stabilized area off an atmosphere of the clean room (3). Additionally, as another method, a temperature of a chemical fluid from a chemical fluid tank (6) is controlled to be a temperature of the air in the clean room by a heat exchange section (61) provided in a location the same as above without using the temperature-controlled water so as to supply the chemical fluid to the semiconductor manufacturing apparatus body (4).
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公开(公告)号:US6155922A
公开(公告)日:2000-12-05
申请号:US90199
申请日:1998-06-04
CPC分类号: C09K3/1009 , C09K3/10 , C09K3/1021 , C09K2200/0405 , C09K2200/0411 , C09K2200/0441 , C09K2200/0447 , C09K2200/0635 , C09K2200/0687
摘要: Materials not releasing gaseous organic materials during use are used as a dry-type sealing material such as a gasket disposed upon mounting an air filter to an opening of a ceiling or the like, a wet-type sealing material filled and used in a gap for connecting wall materials or partitionings, a vinyl chloride sheet or a vinyl chloride cloth as a facing material for walls and floors. Specifically, a carboxylic acid ester having a molecular weight of not less than 400 is used as a plasticizer, a phenolic compound having a molecular weight of not less 300 is used as an antioxidant, an aliphatic hydrocarbon having not less than 19 carbon atoms (for example, microcrystalline wax) is used as a lubricant, and an alkylamine ethylene oxide adduct having a molecular weight of not less than 350 is used as an antistatic agent.
摘要翻译: 在使用期间不释放气态有机材料的材料被用作干式密封材料,例如在将空气过滤器安装到天花板等的开口上时设置的垫圈,填充并用于间隙中的湿式密封材料 连接壁材料或隔板,氯乙烯片或氯乙烯布作为墙壁和地板的面材。 具体地说,使用分子量不小于400的羧酸酯作为增塑剂,使用分子量不低于300的酚类化合物作为抗氧化剂,不少于19个碳原子的脂族烃(对于 例如微晶蜡)用作润滑剂,并且使用分子量不小于350的烷基胺环氧乙烷加合物作为抗静电剂。
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公开(公告)号:US5997598A
公开(公告)日:1999-12-07
申请号:US817007
申请日:1997-03-27
IPC分类号: B01D39/08 , B01D39/14 , B01D46/06 , B01D46/10 , D04H1/42 , D06M13/02 , D06M13/11 , D06M13/148 , D06M13/224 , D06M15/227 , D06M15/507 , F24F3/16 , F24F13/28 , B01D46/00
CPC分类号: B01D46/0001 , B01D39/10 , B01D39/1623 , B01D39/2017 , B01D46/06 , B01D46/10 , D04H1/4218 , D06M13/02 , D06M13/11 , D06M13/148 , D06M13/224 , D06M15/227 , D06M15/507 , F24F13/28 , F24F3/161 , B01D2239/04 , B01D2239/0428 , B01D2239/0457 , B01D2239/0464 , B01D2239/0492 , B01D2239/0618 , B01D2239/086 , B01D2239/10 , B01D2271/02 , B01D2279/51
摘要: A material not releasing gaseous organic substances during use is used as a filter medium and a sealing material for tightly sealing between the medium and a frame. Specifically, a synthetic paraffin not containing an aliphatic hydrocarbon having not more than 19 carbon atoms or less is used as a non-silicone type water repellent contained in a treatment agent for forming fibers into a cloth-like filter medium. A carboxylic acid ester having 400 or more molecular weight is used as a plasticizer and a phenolic compound having 300 or more molecular weight is used as an antioxidant to be added to the treatment agent and the sealing material. This enables that the gaseous organic substances are not present in a clean room, a semiconductor production apparatus or the like. Further, if the filter medium and the sealing material are formed of a material not releasing organic phosphorus compounds and boron compounds in the air, a clean room and a local facility particularly suitable for use in the production of semiconductors are provided.
摘要翻译: PCT No.PCT / JP96 / 02076 Sec。 371日期1997年3月27日 102(e)1997年3月27日PCT PCT 1996年7月25日PCT公布。 公开号WO97 / 04851 日期1997年2月13日使用中不释放气态有机物质的材料用作过滤介质和用于在介质和框架之间紧密密封的密封材料。 具体地说,不含有不超过19个碳原子的脂肪族烃的合成石蜡用作用于将纤维形成布状过滤介质的处理剂中所含的非硅氧烷型防水剂。 使用具有400以上分子量的羧酸酯作为增塑剂,使用具有300以上分子量的酚类化合物作为添加到处理剂和密封材料中的抗氧化剂。 这使得气体有机物质不存在于洁净室,半导体制造装置等中。 此外,如果过滤介质和密封材料由空气中不释放有机磷化合物和硼化合物的材料形成,则提供特别适合用于制造半导体的洁净室和本地设备。
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