Light-emitting device control circuit
    5.
    发明授权
    Light-emitting device control circuit 有权
    发光装置控制电路

    公开(公告)号:US09125265B2

    公开(公告)日:2015-09-01

    申请号:US13569945

    申请日:2012-08-08

    IPC分类号: H05B33/08 H05B37/02

    CPC分类号: H05B33/0818 H05B33/0851

    摘要: In a control circuit for a light-emitting device, a reference voltage generation circuit detects a full-wave rectified voltage and generates a first voltage as well as generating a second voltage by converting the rectified voltage into a DC voltage. A voltage corresponding to a difference between the first voltage and the second voltage or a voltage corresponding to a ratio of the first voltage to the second voltage is generated as a reference voltage by a subtraction circuit or by a division circuit, respectively. As a result, a change in amplitude of the reference voltage can be suppressed when amplitude of the rectified voltage is varied due to a variation in an AC input voltage supplied from an AC power supply.

    摘要翻译: 在发光装置的控制电路中,参考电压产生电路检测全波整流电压,并通过将整流电压转换成直流电压来产生第一电压以及产生第二电压。 相应于第一电压和第二电压之间的差的电压或对应于第一电压与第二电压的比率的电压分别由减法电路或分频电路产生作为参考电压。 结果,由于由交流电源供给的交流输入电压的变化,整流电压的振幅变化,可以抑制基准电压的振幅的变化。

    Focus detection apparatus for projection lithography system
    6.
    发明授权
    Focus detection apparatus for projection lithography system 失效
    投影光刻系统的焦点检测装置

    公开(公告)号:US08760626B2

    公开(公告)日:2014-06-24

    申请号:US13464321

    申请日:2012-05-04

    IPC分类号: G03B27/52 G03B27/70 G03F9/00

    CPC分类号: G03F9/7026 G03F9/7061

    摘要: Disclosed is a focus detection apparatus for a projection lithography system. The apparatus includes: a laser; a focus optical unit configured to focusing the emitted laser beam; a force detection unit configured to reflect the focused laser beam at the backside; a position detection unit configured to detect variations in position of a light spot formed by the reflected laser beam, and output a strength signal indicating the strength of the interaction force between the force detection unit and the object; a differential amplifier configured to output a Z-direction differential signal based on the strength signal and a reference signal; a Z-direction feedback control unit configured to perform feedback control; and a scan signal generator configured to output a signal for controlling the movement of the stage in the XY plane. The focus detection apparatus has high precision, efficiency and process applicability.

    摘要翻译: 公开了一种用于投影光刻系统的焦点检测装置。 该装置包括:激光器; 被配置为聚焦所发射的激光束的聚焦光学单元; 力检测单元,被配置为将聚焦的激光束反射到背面; 位置检测单元,被配置为检测由所述反射的激光束形成的光点的位置的变化,并且输出表示所述力检测单元与所述物体之间的相互作用力的强度的强度信号; 差分放大器,被配置为基于强度信号和参考信号输出Z​​方向差分信号; 配置为执行反馈控制的Z方向反馈控制单元; 以及扫描信号发生器,被配置为输出用于控制所述载物台在XY平面中的运动的信号。 焦点检测装置具有高精度,高效率和工艺适用性。

    Method of processing an image and corresponding device
    8.
    发明授权
    Method of processing an image and corresponding device 有权
    处理图像和相应设备的方法

    公开(公告)号:US08724899B2

    公开(公告)日:2014-05-13

    申请号:US13578003

    申请日:2010-02-11

    IPC分类号: G06K9/34

    摘要: A method for processing an image divided into blocks of pixels is disclosed. The method comprises the steps of: detecting, for each block, a largest sub-block whose pixels have an equal luminance value; identifying, for each block, if the detected largest sub-block is or is not a natural texture; determining, for each block, a block blockiness level on the basis of the number of pixels within the detected largest sub-block and on the basis of the identification step; and processing the image on the basis of the block blockiness levels.

    摘要翻译: 公开了一种用于处理被划分成像素块的图像的方法。 该方法包括以下步骤:针对每个块检测其像素具有相等亮度值的最大子块; 识别每个块,如果检测到的最大子块是或不是自然纹理; 基于所检测的最大子块内的像素数量,并基于所述识别步骤,为每个块确定块块级别; 并且基于块阻塞级别处理图像。