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    Apparatus for fabricating coating and method of fabricating the coating
    1.
    发明授权
    Apparatus for fabricating coating and method of fabricating the coating 失效
    用于制造涂层的装置和制造涂层的方法

    公开(公告)号：US06835523B1

    公开(公告)日：2004-12-28

    申请号：US09396381

    申请日：1999-09-15

    申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    IPC分类号： G11B724

    CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

    摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic r cording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

    摘要翻译： 在用于制造碳涂层的装置中，诸如磁性介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

    Apparatus for fabricating coating and method of fabricating the coating
    3.
    发明授权
    Apparatus for fabricating coating and method of fabricating the coating 失效
    用于制造涂层的装置和制造涂层的方法

    公开(公告)号：US07700164B2

    公开(公告)日：2010-04-20

    申请号：US10978461

    申请日：2004-11-02

    申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    IPC分类号： B05D1/08 ,  H05H1/26 ,  H05H1/02 ,  C23C16/00 ,  C23C16/26

    CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

    摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

    摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

    Apparatus for fabricating coating and method of fabricating the coating
    4.
    发明授权
    Apparatus for fabricating coating and method of fabricating the coating 有权

    公开(公告)号：US06299957B1

    公开(公告)日：2001-10-09

    申请号：US09396382

    申请日：1999-09-15

    申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    IPC分类号： B32B302

    摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

    Process for treating a substrate with a plasma
    6.
    发明授权
    Process for treating a substrate with a plasma 失效
    用等离子体处理衬底的方法

    公开(公告)号：US07264850B1

    公开(公告)日：2007-09-04

    申请号：US09412510

    申请日：1999-10-05

    申请人： Kenji Itoh ,  Shigenori Hayashi

    发明人： Kenji Itoh ,  Shigenori Hayashi

    IPC分类号： B05D5/08 ,  B05D5/00 ,  B05D1/36 ,  C23C16/26 ,  C23C16/50 ,  H05H1/24 ,  H05H1/02 ,  C23C16/27 ,  C23C16/105 ,  H05H1/46

    CPC分类号： G11B5/8408 ,  C23C16/26 ,  C23C16/513 ,  C23C16/545 ,  G11B5/85

    摘要： A process for depositing a diamond-like carbon film, which comprises providing a means for generating a sheet-like beam-type plasma region inside a vacuum vessel for depositing the diamond-like carbon film, and depositing the film on a substrate being moved through said plasma region. Also claimed is an apparatus for fabricating a magnetic recording medium by sequentially and continuously forming a magnetic layer and a diamond-like carbon film on a polymer substrate material, which comprises at least a first vacuum vessel for forming the magnetic layer of the magnetic recording medium and a second vacuum vessel for forming the diamond-like carbon film, provided that the pressure difference between the operation pressures for the first vessel and the second vessel is set in the range of from 10−2 to 10−5 Torr.

    摘要翻译： 一种用于沉积类金刚石碳膜的方法，其包括提供用于在真空容器内产生片状束型等离子体区域的装置，用于沉积类金刚石碳膜，并将膜沉积在基底上移动 所述等离子体区。 还要求保护的是一种用于通过在聚合物基底材料上依次且连续地形成磁性层和类金刚石碳膜来制造磁记录介质的装置，其至少包括用于形成磁记录介质的磁性层的第一真空容器 以及用于形成类金刚石碳膜的第二真空容器，只要第一容器和第二容器的操作压力之间的压力差设定在10 -2至10的范围内 -5乇。

    Method of fabricating the coating
    8.
    发明授权
    Method of fabricating the coating 失效
    制造涂层的方法

    公开(公告)号：US06183816B2

    公开(公告)日：2001-02-06

    申请号：US08998008

    申请日：1997-08-13

    申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    IPC分类号： C23C1650

    CPC分类号： C23C16/26 ,  C23C16/5096 ,  C23C16/545 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S427/104 ,  Y10S428/90 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/12729 ,  Y10T428/21

    摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

    摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

    Hard carbon coating for magnetic recording medium
    9.
    发明授权
    Hard carbon coating for magnetic recording medium 失效
    用于磁记录介质的硬碳涂层

    公开(公告)号：US06171674B2

    公开(公告)日：2001-01-09

    申请号：US08910352

    申请日：1997-08-13

    申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

    IPC分类号： G11B560

    CPC分类号： C23C16/26 ,  C23C16/5096 ,  C23C16/545 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S427/104 ,  Y10S428/90 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/12729 ,  Y10T428/21

    摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

    摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

    Photochemical vapor reaction apparatus
    10.
    发明授权
    Photochemical vapor reaction apparatus 失效
    光化学蒸气反应装置

    公开(公告)号：US4974542A

    公开(公告)日：1990-12-04

    申请号：US190355

    申请日：1988-05-05

    申请人： Shigenori Hayashi ,  Kenji Itoh

    发明人： Shigenori Hayashi ,  Kenji Itoh

    IPC分类号： C23C16/48

    CPC分类号： C23C16/482

    摘要： A photochemical vapor reaction apparatus wherein a silicon film is deposited by photo-CVD. The photo-CVD is implemented by irradiating a reactive gas with ultraviolet rays which are emitted from a mercury lamp. The emission of the mercury lamp becomes continuous when the frequency of input power is 20 KHz or higher. By virtue of such a continuous light, the deposition is implemented uniformly and a close-packed and hard film can be formed.

    摘要翻译： 光化学蒸汽反应装置，其中通过光CVD沉积硅膜。 通过用从汞灯发出的紫外线照射反应性气体来实现光CVD。 当输入功率的频率为20KHz或更高时，汞灯的发射变得连续。 通过这样的连续光，可以均匀地进行沉积，并且可以形成紧密堆积的硬膜。