Apparatus for and method of vacuum vapor deposition and organic electroluminescent device
    1.
    发明授权
    Apparatus for and method of vacuum vapor deposition and organic electroluminescent device 有权
    真空气相沉积的设备和方法以及有机电致发光器件

    公开(公告)号:US06696096B2

    公开(公告)日:2004-02-24

    申请号:US09885406

    申请日:2001-06-21

    IPC分类号: B05D306

    摘要: A vacuum vapor deposition apparatus includes a vacuum chamber having a plurality of vapor sources and a heater for heating the vapor sources to achieve vacuum vapor deposition on a surface of at least one substrate within the vacuum chamber. At least one of the vapor sources utilizes an organic material. A hot wall, which encloses the vapor sources and a space in which the vapor sources and the substrate confront each other, is heated to a temperature at which the organic material is neither deposited nor decomposed. The organic material is vapor deposited on the surface of the substrate by heating the vapor sources while the vapor sources and the substrate are moved relative to each other.

    摘要翻译: 真空蒸镀装置具备:具有多个蒸气源的真空室和加热蒸气源的加热器,以在真空室内的至少一个基板的表面上实现真空蒸镀。 蒸气源中的至少一个使用有机材料。 封闭蒸气源的热壁和蒸气源和基板彼此面对的空间被加热到有机材料既不沉积也不分解的温度。 有机材料通过在蒸气源和基板相对于彼此移动的同时加热蒸气源而蒸镀在基板的表面上。