公开(公告)号：US4980339A

公开(公告)日：1990-12-25

申请号：US223658

申请日：1988-07-25

申请人： Kentaro Setsune ,  Takeshi Kamada ,  Hideaki Adachi ,  Kiyotaka Wasa ,  Takashi Hirao ,  Osamu Yamazaki ,  Hidetaka Higashino

发明人： Kentaro Setsune ,  Takeshi Kamada ,  Hideaki Adachi ,  Kiyotaka Wasa ,  Takashi Hirao ,  Osamu Yamazaki ,  Hidetaka Higashino

IPC分类号： H01L39/24

CPC分类号： H01L39/2461 ,  Y10S428/93 ,  Y10S505/701 ,  Y10S505/702 ,  Y10S505/703 ,  Y10S505/704

摘要： A superconductor structure of very high performance is realized by forming a crystalline coating on a substrate of semiconductor, etc. and epitaxially depositing a crystalline superconductor film of good quality on this crystalline coating. Especially, CaF.sub.2 crystal and ZrO.sub.2 crystal of CaF.sub.2 crystal structure have latice constants which match well with the substrate such as Si, GaAs, etc. and the superconductor. The crystalline coating may be a perovskite material such as BaTiO.sub.3 when the superconductor is a perovskite material.

公开(公告)号：US5047390A

公开(公告)日：1991-09-10

申请号：US413174

申请日：1989-09-27

申请人： Hidetaka Higashino ,  Koichi Mizuno ,  Hideaki Adachi ,  Kentaro Setsune ,  Akira Enokihara ,  Shinichiro Hatta ,  Kiyotaka Wasa ,  Shigemi Kohiki ,  Tomoaki Matsushima

发明人： Hidetaka Higashino ,  Koichi Mizuno ,  Hideaki Adachi ,  Kentaro Setsune ,  Akira Enokihara ,  Shinichiro Hatta ,  Kiyotaka Wasa ,  Shigemi Kohiki ,  Tomoaki Matsushima

IPC分类号： H01L39/24

CPC分类号： H01L39/2496 ,  Y10S505/702 ,  Y10S505/873 ,  Y10S505/874

摘要： A Josephson device, comprising a junction formed by forming the first layer-shaped oxide superconductor thin film including a plurality of Cu-O layers on a substrate, a barrier layer thereon and the second layer-shaped oxide superconductor thin film on the barrier layer. The Josephson device according to the present invention is manufactured by forming the first layer-shaped oxide superconductor thin film on a substrate, forming a barrier layer in the same vacuum chamber, defining patterns to said barrier layer and said first layer-shaped oxide superconductor thin film, forming an interlayer insulating film on said barrier layer, removing said interlayer insulating film in a region serving as a junction, effecting exposure to oxygen plasma, forming the second layer-shaped oxide superconductor thin film in contact with a part of the surface of said barrier layer and defining patterns to said second layer-shaped oxide superconductor thin film.

公开(公告)号：US4715680A

公开(公告)日：1987-12-29

申请号：US667480

申请日：1984-10-05

申请人： Takao Kawaguchi ,  Hideaki Adachi ,  Kentaro Setsune ,  Kenzo Ohji ,  Kiyotaka Wasa

发明人： Takao Kawaguchi ,  Hideaki Adachi ,  Kentaro Setsune ,  Kenzo Ohji ,  Kiyotaka Wasa

IPC分类号： G02F1/055 ,  G02F1/313 ,  G02B6/00

CPC分类号： G02F1/3137 ,  G02F1/0553

摘要： An optical switch usable for an optical circuit adapted to be operated by utilizing the electro-optical effect inherent therein. A pair of electrodes are arranged in spaced relation on an optical wave guide which is branched to branch optical wave guides and transmission of light beams is controlled by applying a certain voltage to the electrodes. Both the optical wave guide and the branch optical wave guides are made of electro-optical material. Specifically, the optical wave guides are constituted by a layer of PLZT ((Pb, La) (Zr, Ti) O.sub.3) based thin film which is formed by epitaxial growth on a base plate located on the C-plane of sapphire (.alpha.-alumina). The switch is effective for controlling the transmission of light beams.

摘要翻译： PCT No.PCT / JP84 / 00039 Sec。 371日期1984年10月5日 102（e）日期1984年10月5日PCT提交1984年2月10日PCT公布。 出版物WO84 / 03155 日期1984年8月16日。一种可用于适于通过利用其中固有的电光效应来操作的光学电路的光学开关。 一对电极以分支的方式布置在光波导上，分支到分支光波导，并且通过向电极施加一定电压来控制光束的透射。 光波导和分支光波导均由电光材料制成。 具体地说，光波导由PLZT（（Pb，La）（Zr，Ti）O 3）基薄膜构成，该薄膜是通过在位于蓝宝石的C面（α - 氧化铝）。 该开关对于控制光束的传输是有效的。

公开(公告)号：US5856204A

公开(公告)日：1999-01-05

申请号：US721976

申请日：1996-09-27

申请人： Masahiro Sakai ,  Hidetaka Higashino ,  Hideaki Adachi ,  Kentaro Setsune

发明人： Masahiro Sakai ,  Hidetaka Higashino ,  Hideaki Adachi ,  Kentaro Setsune

IPC分类号： H01L39/22 ,  H01L21/00

CPC分类号： H01L39/225

摘要： A plurality of single crystal grains made of Bi.sub.2 Sr.sub.2 Ca.sub.1 Cu.sub.2 O.sub.8 which are heat treated at a temperature that is equal to or higher than the crystallization temperature of an oxide high-temperature superconductor made of Bi.sub.2 Sr.sub.2 Ca.sub.1 Cu.sub.2 O.sub.8 and are surrounded by a grain boundary are formed on a substrate made of a MgO single crystal. A convex portion having a sectional area of 400 .mu.m.sup.2 or less and a height which is equal to or less than ten times as much as a space between block layers of Bi.sub.2 Sr.sub.2 Ca.sub.1 Cu.sub.2 O.sub.8 is formed on the upper face portion of the single crystal grain. A first electrode made of Au is formed on the upper face of the convex portion of the single crystal grain, and a second electrode is formed in a region other than the convex portion in the single crystal grain. The first electrode is insulated from the second electrode by an insulating film made of CaF.sub.2.

摘要翻译： 由Bi2Sr2Ca1Cu2O8制成的多个由Bi2Sr2Ca1Cu2O8构成的氧化物高温超导体的晶化温度以上的温度进行热处理并被晶界包围的单晶粒子形成在由 MgO单晶。 在单晶粒的上表面上形成有截面积为400μm或更小的凸部，其高度等于或小于Bi2Sr2Ca1Cu2O8的阻挡层之间的间隔的十倍。 在单晶粒的凸部的上表面上形成由Au构成的第一电极，在单晶粒的凸部以外的区域形成第二电极。 第一电极通过由CaF 2制成的绝缘膜与第二电极绝缘。

公开(公告)号：US4731172A

公开(公告)日：1988-03-15

申请号：US856783

申请日：1986-04-17

申请人： Hideaki Adachi ,  Hidetaka Higashino ,  Tsuneo Mitsuyu ,  Osamu Yamazaki

发明人： Hideaki Adachi ,  Hidetaka Higashino ,  Tsuneo Mitsuyu ,  Osamu Yamazaki

IPC分类号： C23C14/02 ,  C23C14/08 ,  C23C14/22 ,  C23C14/35 ,  H01L21/314 ,  H01L21/316 ,  C23C14/34

CPC分类号： C23C14/225 ,  C23C14/024 ,  C23C14/088 ,  C23C14/352 ,  H01L21/02197 ,  H01L21/02266 ,  H01L21/31691

摘要： A underlying layer of multi-component material of a first formula is deposited on a substrate by controlling the amounts of sputtering materials evaporated respectively from a plurality of sputtering sources. A transition layer of multi-component material is subsequently formed on the underlying layer by controlling the amounts of the sputtering materials so that the transition layer is given a second, variable formula varying in a range from the first formula at the boundary between the underlying layer and the transition layer to a third formula. An overlying layer of multi-component material of the third formula is subsequently formed on the transition layer by controlling the amounts of the sputtering materials. Specifically, the first formula is [Pb.sub.1-(x/100) La.sub.x/100 ][Zr.sub.y/100 Ti.sub.z/100 ].sub.w O.sub.3, in which 10.ltoreq.x.ltoreq.40, y.ltoreq.5, w=1-(x/400) and y+z=100, and the third formula is [Pb.sub.1-(X/100) La.sub.X/100 ] [Zr.sub.Y/100 Ti.sub.Z/100 ].sub.W O.sub.3, in which X.ltoreq.20, 40.ltoreq.Y.ltoreq.90, W=1-(X/400) and Y+Z=100.

摘要翻译： 通过控制分别从多个溅射源蒸发的溅射材料的量，将第一配方的多组分材料的下层沉积在基板上。 随后通过控制溅射材料的量，在底层上形成多组分材料的过渡层，使得过渡层被赋予第二个可变公式，其变化范围从第一公式在下层 和过渡层到第三个公式。 随后通过控制溅射材料的量在过渡层上形成第三配方的多组分材料的上覆层。 具体地说，第一公式为[Pb1-（x / 100）Lax / 100] [Zry / 100Tiz / 100] wO3，其中10≤x≤40，y = 5，w = 1-（ x / 400）和y + z = 100，第三式为[Pb1-（X / 100）LaX / 100] [ZrY / 100TiZ / 100] WO3，其中X = 20,40 <

公开(公告)号：US5885937A

公开(公告)日：1999-03-23

申请号：US888657

申请日：1997-07-07

申请人： Hideaki Adachi ,  Masahiro Sakai ,  Akihiro Odagawa ,  Kentaro Setsune

发明人： Hideaki Adachi ,  Masahiro Sakai ,  Akihiro Odagawa ,  Kentaro Setsune

IPC分类号： H01L39/22

CPC分类号： H01L39/225

摘要： This invention provides a superconducting tunnel junction element showing satisfactory Josephson effect. The element includes a Bi-based layered compound such as Bi.sub.2 Sr.sub.2 (Ca.sub.0.6 Y.sub.0.4)Cu.sub.2 O.sub.8, Bi.sub.2 Sr.sub.2 Cu.sub.2 O.sub.6 and Bi.sub.2 Sr.sub.2 CaCu.sub.2 O.sub.8 as the barrier layer between the superconducting oxide electrodes. The structural matching of the superconducting oxide with the Bi-based compound is supposed to be good. Some kinds of Cu-based superconducting oxides such as YSr.sub.2 Cu.sub.2.7 Re.sub.0.3 O.sub.7, Sr.sub.2 CaCu.sub.2 O.sub.6 and (La.sub.0.9 Sr.sub.0.1).sub.2 CuO.sub.4 are used for the electrodes to obtain a Josephson element which can work at a high temperature. When using the superconducting oxides including Ba such as YBa.sub.2 Cu.sub.3 O.sub.7 for the electrode, forming a thin film between the electrode and the barrier is better to prevent Ba from reacting with Bi in the barrier layer. The superconducting device comprising the element has various uses such as magnetic detecting use, communicating use and computing use.

摘要翻译： 本发明提供了一种显示令人满意的约瑟夫逊效应的超导隧道结元件。 元素包括Bi基层状化合物如Bi2Sr2（Ca0.6Y0.4）Cu2O8，Bi2Sr2Cu2O6和Bi2Sr2CaCu2O8作为超导氧化物电极之间的阻挡层。 超导氧化物与Bi基化合物的结构匹配应该是好的。 使用一些种类的Cu基超导氧化物如YSr2Cu2.7Re0.3O7，Sr2CaCu2O6和（La0.9Sr0.1）2CuO4用于电极以获得可在高温下工作的约瑟夫逊元素。 当将包括诸如YBa2Cu3O7的Ba的超导氧化物用于电极时，在电极和势垒之间形成薄膜更好地防止Ba与阻挡层中的Bi反应。 包括该元件的超导装置具有各种用途，例如磁检测使用，通信使用和计算使用。

公开(公告)号：US5757250A

公开(公告)日：1998-05-26

申请号：US795485

申请日：1997-02-11

申请人： Yo Ichikawa ,  Hideaki Adachi ,  Kentaro Setsune ,  Syunichiro Kawashima

发明人： Yo Ichikawa ,  Hideaki Adachi ,  Kentaro Setsune ,  Syunichiro Kawashima

IPC分类号： H03H3/08 ,  H03H3/10 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/25

CPC分类号： H03H9/1071 ,  H03H3/10 ,  H03H9/02574 ,  H03H9/02921 ,  H03H9/25 ,  Y10T29/42

摘要： A surface acoustic module is stable, and its operation frequencies can be varied with high precision. A method of manufacturing the surface acoustic module prevents the module's electrodes from being broken during separation of a sheet of modules into individual components. The surface acoustic module includes electrodes for transmitting and receiving a surface acoustic wave, a surface acoustic wave transmitting substrate, a high resistance thin film, and a thin film for differentiating the transmission velocity of a surface acoustic wave at the high resistance thin film from that at the substrate. The method includes the steps of forming a metallic film on a sheet of the surface acoustic wave transmitting substrate, of forming the electrodes on the metallic film, and of irradiating light or the like to the metallic film so as to increase the film's resistivity.

摘要翻译： 表面声学模块是稳定的，其操作频率可以高精度地变化。 制造表面声学模块的方法防止模块的电极在将模块片分离成单个部件期间被破坏。 表面声学模块包括用于发送和接收表面声波的电极，表面声波传输基板，高电阻薄膜和用于区分高电阻薄膜处的表面声波的透射速度的薄膜 在基板上。 该方法包括以下步骤：在表面声波透过基板的片材上形成金属膜，在金属膜上形成电极，以及向金属膜照射光等以提高膜的电阻率。

公开(公告)号：US6160266A

公开(公告)日：2000-12-12

申请号：US803940

申请日：1997-02-20

申请人： Akihiro Odagawa ,  Hideaki Adachi ,  Kentaro Setsune

发明人： Akihiro Odagawa ,  Hideaki Adachi ,  Kentaro Setsune

IPC分类号： H01L39/22 ,  H01L29/06

CPC分类号： H01L39/225

摘要： This invention provides a superconducting device with good characteristics that can be reproduced at an arbitrary place on a substrate and a method of manufacturing the same. A convex region (a processed, linearly shaped platinum thin film) of oriented metal is provided on a substrate as a gate electrode. Then, an oxide insulating film (SrTiO.sub.3 thin film) is deposited on the convex region, and further a YBa.sub.2 Cu.sub.3 O.sub.7 oxide superconducting thin film is deposited on the oxide insulating film. Accordingly, a grain boundary part is formed on the convex region. A drain electrode and a source electrode are formed facing each other with the grain boundary part between.

摘要翻译： 本发明提供一种能够在基板上的任意位置再现的具有良好特性的超导装置及其制造方法。 在作为栅电极的基板上设置有取向金属的凸区域（处理后的线状的铂薄膜）。 然后，在凸区域上沉积氧化物绝缘膜（SrTiO 3薄膜），再在氧化物绝缘膜上沉积YBa2Cu3O7氧化物超导薄膜。 因此，在凸部形成有晶界部。 漏电极和源极电极彼此面对地形成，晶界部分在其间。

公开(公告)号：US5996199A

公开(公告)日：1999-12-07

申请号：US120756

申请日：1998-07-22

申请人： Yo Ichikawa ,  Hideaki Adachi ,  Kentaro Setsune ,  Syunichiro Kawashima

发明人： Yo Ichikawa ,  Hideaki Adachi ,  Kentaro Setsune ,  Syunichiro Kawashima

IPC分类号： H03H3/08 ,  H03H3/10 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/25 ,  H01L41/22

CPC分类号： H03H9/1071 ,  H03H3/10 ,  H03H9/02574 ,  H03H9/02921 ,  H03H9/25 ,  Y10T29/42

摘要： A surface acoustic module is stable, and its operation frequencies can be varied with high precision. A method of manufacturing the surface acoustic module prevents the module's electrodes from being broken during separation of a sheet of modules into individual components. The surface acoustic module includes electrodes for transmitting and receiving a surface acoustic wave, a surface acoustic wave transmitting substrate, a high resistance thin film, and a thin film for differentiating the transmission velocity of a surface acoustic wave at the high resistance thin film from that at the substrate. The method includes the steps of forming a metallic film on a sheet of the surface acoustic wave transmitting substrate, of forming the electrodes on the metallic film, and of irradiating light or the like to the metallic film so as to increase the film's resistivity.

摘要翻译： 表面声学模块是稳定的，其操作频率可以高精度地变化。 制造表面声学模块的方法防止模块的电极在将模块片分离成单个部件期间被破坏。 表面声学模块包括用于发送和接收表面声波的电极，表面声波传输基板，高电阻薄膜和用于区分高电阻薄膜处的表面声波的透射速度的薄膜 在基板上。 该方法包括以下步骤：在表面声波透过基板的片材上形成金属膜，在金属膜上形成电极，以及向金属膜照射光等以提高膜的电阻率。

公开(公告)号：US06147360A

公开(公告)日：2000-11-14

申请号：US82761

申请日：1998-05-21

申请人： Akihiro Odagawa ,  Hideaki Adachi ,  Kentaro Setsune

发明人： Akihiro Odagawa ,  Hideaki Adachi ,  Kentaro Setsune

IPC分类号： H01L39/22 ,  H01L29/06

CPC分类号： H01L39/225

摘要： This invention provides a superconducting device with good characteristics that can be reproduced at an arbitrary place on a substrate and a method of manufacturing the same. A convex region (a processed, linearly-shaped platinum thin film) of oriented metal is provided on a substrate as a gate electrode. Then, an oxide insulating film (SrTiO.sub.3 thin film) is deposited on the convex region, and further a YBa.sub.2 Cu.sub.3 O.sub.7 oxide superconducting thin film is deposited on the oxide insulating film. Accordingly, a grain boundary part is formed on the convex region. A drain electrode and a source electrode are formed facing each other with the grain boundary part in between.

摘要翻译： 本发明提供一种能够在基板上的任意位置再现的具有良好特性的超导装置及其制造方法。 在作为栅电极的基板上设置有取向金属的凸区域（经处理的线状的铂薄膜）。 然后，在凸区域上沉积氧化物绝缘膜（SrTiO 3薄膜），再在氧化物绝缘膜上沉积YBa2Cu3O7氧化物超导薄膜。 因此，在凸部形成有晶界部。 漏极电极和源极电极彼此面对地形成，晶界部分在其间。