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公开(公告)号：US08409510B2
公开(公告)日：2013-04-02
申请号：US11542453
申请日：2006-10-02
申请人： Robert Andrew McGill , Michael Martin , Mark Crain , Kevin Walsh , Eric Houser , Stanley Vincent Stepnowski , Viet Nguyen
发明人： Robert Andrew McGill , Michael Martin , Mark Crain , Kevin Walsh , Eric Houser , Stanley Vincent Stepnowski , Viet Nguyen
CPC分类号： B01L7/00 , B01L3/502753 , B01L2200/10 , B01L2300/069 , B01L2300/1827 , B82Y30/00 , G01N1/02 , G01N1/2214 , G01N1/2273 , G01N1/40 , G01N1/405 , G01N30/08 , G01N33/0011 , G01N2001/022 , G01N2030/062 , G01N2030/121 , Y10T436/25 , Y10T436/255
摘要： In the invention, a collection device includes a flow through micro scale plate arranged to collect analyte. The plate includes holes, and sorbent coating on contact surfaces of the plate. The holes pass analyte fluid flow, for example analyte vapor so that fluid flow for collection may be generally perpendicular to the sorbent plate. Preferred embodiment plates include an integrated heater trace. In preferred embodiments, a high substantially perpendicular flow is used for collection and concentration, and during desorption and delivery a low substantially parallel flow is used. The low flow is selected to meet constraints of a detector system.
摘要翻译： 在本发明中，收集装置包括布置成收集分析物的流过微尺度板。 该板包括孔和在板的接触表面上的吸附剂涂层。 这些孔通过分析物流体流动，例如分析物蒸汽，使得用于收集的流体流可以大致垂直于吸附剂板。 优选的实施例板包括集成加热器迹线。 在优选实施例中，高的基本上垂直的流被用于收集和浓缩，并且在解吸和输送期间使用低的基本上平行的流动。 选择低流量以满足检测器系统的约束。
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公开(公告)号：US20100120167A1
公开(公告)日：2010-05-13
申请号：US11542453
申请日：2006-10-02
申请人： Robert Andrew McGill , Michael Martin , Mark Crain , Kevin Walsh , Eric Houser , Stanley Vincent Stepnowski
发明人： Robert Andrew McGill , Michael Martin , Mark Crain , Kevin Walsh , Eric Houser , Stanley Vincent Stepnowski
CPC分类号： B01L7/00 , B01L3/502753 , B01L2200/10 , B01L2300/069 , B01L2300/1827 , B82Y30/00 , G01N1/02 , G01N1/2214 , G01N1/2273 , G01N1/40 , G01N1/405 , G01N30/08 , G01N33/0011 , G01N2001/022 , G01N2030/062 , G01N2030/121 , Y10T436/25 , Y10T436/255
摘要： In the invention, a collection device includes a flow through micro scale plate arranged to collect analyte. The plate includes holes, and sorbent coating on contact surfaces of the plate. The holes pass analyte fluid flow, for example analyte vapor so that fluid flow for collection may be generally perpendicular to the sorbent plate. Preferred embodiment plates include an integrated heater trace. In preferred embodiments, a high substantially perpendicular flow is used for collection and concentration, and during desorption and delivery a low substantially parallel flow is used. The low flow is selected to meet constraints of a detector system.
摘要翻译： 在本发明中，收集装置包括布置成收集分析物的流过微尺度板。 该板包括孔和在板的接触表面上的吸附剂涂层。 这些孔通过分析物流体流动，例如分析物蒸汽，使得用于收集的流体流可以大致垂直于吸附剂板。 优选的实施例板包括集成加热器迹线。 在优选实施例中，高的基本上垂直的流被用于收集和浓缩，并且在解吸和输送期间使用低的基本上平行的流动。 选择低流量以满足检测器系统的约束。
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公开(公告)号：US20050095722A1
公开(公告)日：2005-05-05
申请号：US10865685
申请日：2004-06-10
申请人： Robert McGill , Michael Martin , Mark Crain , Kevin Walsh , Eric Houser , Viet Nguyen
发明人： Robert McGill , Michael Martin , Mark Crain , Kevin Walsh , Eric Houser , Viet Nguyen
IPC分类号： B01L3/00 , G01N1/02 , G01N1/22 , G01N1/40 , G01N30/06 , G01N30/08 , G01N30/12 , G01N33/00 , G01N1/00
CPC分类号： B01L7/00 , B01L3/502753 , B01L2200/10 , B01L2300/069 , B01L2300/1827 , B82Y30/00 , G01N1/02 , G01N1/2214 , G01N1/2273 , G01N1/40 , G01N1/405 , G01N30/08 , G01N33/0011 , G01N2001/022 , G01N2030/062 , G01N2030/121 , Y10T436/25 , Y10T436/255
摘要： In the invention, a collection device includes a flow through micro scale plate arranged to collect analyte. The plate includes holes, and sorbent coating on contact surfaces of the plate. The holes pass analyte fluid flow, for example analyte vapor so that fluid flow for collection may be generally perpendicular to the sorbent plate. Preferred embodiment plates include an integrated heater trace. In preferred embodiments, a high substantially perpendicular flow is used for collection and concentration, and during desorption and delivery a low substantially parallel flow is used. The low flow is selected to meet constraints of a detector system.
摘要翻译： 在本发明中，收集装置包括布置成收集分析物的流过微尺度板。 该板包括孔和在板的接触表面上的吸附剂涂层。 这些孔通过分析物流体流动，例如分析物蒸汽，使得用于收集的流体流可以大致垂直于吸附剂板。 优选的实施例板包括集成加热器迹线。 在优选实施例中，高的基本上垂直的流被用于收集和浓缩，并且在解吸和输送期间使用低的基本上平行的流动。 选择低流量以满足检测器系统的约束。
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公开(公告)号：US20090188325A1
公开(公告)日：2009-07-30
申请号：US12393294
申请日：2009-02-26
申请人： Julia W. Aebersold , Kevin Walsh , Mark Crain , Michael Voor
发明人： Julia W. Aebersold , Kevin Walsh , Mark Crain , Michael Voor
IPC分类号： G01L1/14
CPC分类号： G01L1/148
摘要： A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.
摘要翻译： 描述了三维微电子机械系统（MEMS）电容弯曲和轴向应变传感器电容器。 两个独立的梳形结构，并入悬浮的多晶硅叉指，同时被制造在基板上，该基板可以在连接到经历弯曲或轴向变形的基板上时彼此独立地移位。 交叉指状物之间的间距变化将输出传感器的电容变化，并且是器件的主要操作模式。 在每个梳结构的底部和末端，玻璃垫连接到梳状结构以允许足够的表面积将传感器固定到基底上。 在制造过程中，系绳用于连接每个梳状结构，以在连接到基底之前在指状物之间保持相等的间隔。 连接后，系绳被破坏以允许每个梳结构的独立移动。
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5.发明申请公开(公告)号：US20060070451A1
公开(公告)日：2006-04-06
申请号：US10949723
申请日：2004-09-24
申请人： Kevin Walsh , Mark Crain , William Hnat , Douglas Jackson , Ji-Tzuoh Lin , John Naber
发明人： Kevin Walsh , Mark Crain , William Hnat , Douglas Jackson , Ji-Tzuoh Lin , John Naber
IPC分类号： G01B7/16
CPC分类号： A61B5/103 , A61B5/076 , A61B2562/0261 , A61B2562/028 , G01B7/22
摘要： An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.
摘要翻译： 本发明的实施例提供了一种MEMS悬臂应变传感器。 本发明的MEMS装置中的电容器板在悬置状态下由微尺度间隙隔开的悬臂相对的微尺度载板上承载。 至少一个微尺度板可以附接到基底或形成基底，其可以是被监测系统的一部分。 当负载施加到基板时，相对的悬臂微型刻度板的远端进一步分离，导致电容的变化。 电容的变化与负载成比例，因此是应变的指示。 例如，电极可以集成到应变传感器中以提供到测量电路的连接。 本发明的传感器还提供使用射频（RF）能量的遥测通信，并且可以在没有向传感器供电的情况下被询问。
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公开(公告)号：US20070256502A1
公开(公告)日：2007-11-08
申请号：US11552547
申请日：2006-10-25
申请人： Julia Aebersold , Kevin Walsh , Mark Crain , Michael Voor
发明人： Julia Aebersold , Kevin Walsh , Mark Crain , Michael Voor
IPC分类号： G01N3/00
CPC分类号： G01L1/148
摘要： A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.
摘要翻译： 描述了三维微电子机械系统（MEMS）电容弯曲和轴向应变传感器电容器。 两个独立的梳形结构，并入悬浮的多晶硅叉指，同时被制造在基板上，该基板可以在连接到经历弯曲或轴向变形的基板上时彼此独立地移位。 交叉指状物之间的间距变化将输出传感器的电容变化，并且是器件的主要操作模式。 在每个梳结构的底部和末端，玻璃垫连接到梳状结构以允许足够的表面积将传感器固定到基底上。 在制造过程中，系绳用于连接每个梳状结构，以在连接到基底之前在指状物之间保持相等的间隔。 连接后，系绳被破坏以允许每个梳结构的独立移动。
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7.发明授权公开(公告)号：US07302858B2
公开(公告)日：2007-12-04
申请号：US10949723
申请日：2004-09-24
申请人： Kevin Walsh , Mark Crain , William Hnat , Douglas Jackson , Ji-Tzuoh Lin , John Naber
发明人： Kevin Walsh , Mark Crain , William Hnat , Douglas Jackson , Ji-Tzuoh Lin , John Naber
IPC分类号： G01B7/16
CPC分类号： A61B5/103 , A61B5/076 , A61B2562/0261 , A61B2562/028 , G01B7/22
摘要： An embodiment of the invention provides a MEMS cantilever strain sensor. Capacitor plates in a MEMS device of the invention are carried on cantilevered opposing micro-scale plates separated by a micro-scale gap under an unstrained condition. At least one of the micro-scale plates may be attached to a substrate or forms a substrate, which may be part of a monitored system. When a load is applied to the substrate, distal ends of the opposing cantilevered micro-scale plates become further separated, resulting in a change of capacitance. The change of capacitance is proportional to a load and therefore is an indication of the strain. Electrodes may be integrated into the strain sensor to provide a connection to measurement circuitry, for example. Sensors of the invention also provide for telemetric communication using radio frequency (RF) energy and can be interrogated without a power supply to the sensor.
摘要翻译： 本发明的实施例提供了一种MEMS悬臂应变传感器。 本发明的MEMS装置中的电容器板在悬置状态下由微尺度间隙隔开的悬臂相对的微尺度载板上承载。 至少一个微尺度板可以附接到基底或形成基底，其可以是被监测系统的一部分。 当负载施加到基板时，相对的悬臂微型刻度板的远端进一步分离，导致电容的变化。 电容的变化与负载成比例，因此是应变的指示。 例如，电极可以集成到应变传感器中以提供到测量电路的连接。 本发明的传感器还提供使用射频（RF）能量的遥测通信，并且可以在没有向传感器供电的情况下被询问。
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公开(公告)号：US07854174B2
公开(公告)日：2010-12-21
申请号：US12393294
申请日：2009-02-26
申请人： Julia W. Aebersold , Kevin Walsh , Mark Crain , Michael Voor
发明人： Julia W. Aebersold , Kevin Walsh , Mark Crain , Michael Voor
IPC分类号： G01L1/14
CPC分类号： G01L1/148
摘要： A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.
摘要翻译： 描述了三维微电子机械系统（MEMS）电容弯曲和轴向应变传感器电容器。 两个独立的梳形结构，并入悬浮的多晶硅叉指，同时被制造在基板上，该基板可以在连接到经历弯曲或轴向变形的基板上时彼此独立地移位。 交叉指状物之间的间距变化将输出传感器的电容变化，并且是器件的主要操作模式。 在每个梳结构的底部和末端，玻璃垫连接到梳状结构以允许足够的表面积将传感器固定到基底上。 在制造过程中，系绳用于连接每个梳状结构，以在连接到基底之前在指状物之间保持相等的间隔。 连接后，系绳被破坏以允许每个梳结构的独立移动。
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公开(公告)号：US07509870B2
公开(公告)日：2009-03-31
申请号：US11552547
申请日：2006-10-25
申请人： Julia W. Aebersold , Kevin Walsh , Mark Crain , Michael Voor
发明人： Julia W. Aebersold , Kevin Walsh , Mark Crain , Michael Voor
IPC分类号： G01L1/14
CPC分类号： G01L1/148
摘要： A three-dimensional micro-electro-mechanical-systems (MEMS) capacitive bending and axial strain sensor capacitor is described. Two independent comb structures, incorporating suspended polysilicon interdigitated fingers, are fabricated simultaneously on a substrate that can displace independently of each other while attached to a substrate undergoing bending or axial deformation. A change in spacing between the interdigitated fingers will output a change in capacitance of the sensor and is the primary mode of operation of the device. On the bottom and to the end of each comb structure, a glass pad is attached to the comb structure to allow for ample surface area for affixing the sensor to a substrate. During fabrication, tethers are used to connect each comb structure to maintain equal spacing between the fingers before attachment to the substrate. After attachment, the tethers are broken to allow independent movement of each comb structure.
摘要翻译： 描述了三维微电子机械系统（MEMS）电容弯曲和轴向应变传感器电容器。 两个独立的梳形结构，并入悬浮的多晶硅叉指，同时被制造在基板上，该基板可以在连接到经历弯曲或轴向变形的基板上时彼此独立地移位。 交叉指状物之间的间距变化将输出传感器的电容变化，并且是器件的主要操作模式。 在每个梳结构的底部和末端，玻璃垫连接到梳状结构以允许足够的表面积将传感器固定到基底上。 在制造过程中，系绳用于连接每个梳状结构，以在连接到基底之前在指状物之间保持相等的间隔。 连接后，系绳被破坏以允许每个梳结构的独立移动。
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公开(公告)号：US08448532B2
公开(公告)日：2013-05-28
申请号：US12406756
申请日：2009-03-18
IPC分类号： G01N1/22
CPC分类号： G01N1/405 , G01N2001/022
摘要： An analyte collection system device includes an active area that includes a plurality of perforations extending therethrough. The plurality of perforations are arranged to permit passage of an analyte fluid flow through the microscale plate. A heating element is provided for heating the active area, and a thermal distribution layer is disposed over at least a portion of the active area. For cooling the active area at or below an ambient temperature, an active cooler is provided.
摘要翻译： 分析物收集系统装置包括有效区域，其包括穿过其中延伸的多个穿孔。 多个穿孔布置成允许分析物流体流通过微尺度板。 提供加热元件以加热有源区域，并且热分布层设置在有源区域的至少一部分上。 为了在环境温度或低于环境温度下冷却有源区域，提供有源冷却器。
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