公开(公告)号：US06909772B2

公开(公告)日：2005-06-21

申请号：US10744413

申请日：2003-12-23

申请人： Krzysztof J. Kozaczek ,  David S. Kurtz ,  Paul R. Moran ,  Roger I. Martin ,  Patrick W. Dehaven ,  Kenneth P. Rodbell ,  Sandra G. Malhotra

发明人： Krzysztof J. Kozaczek ,  David S. Kurtz ,  Paul R. Moran ,  Roger I. Martin ,  Patrick W. Dehaven ,  Kenneth P. Rodbell ,  Sandra G. Malhotra

IPC分类号： G01B15/02 ,  G01N23/20

CPC分类号： G01N23/20 ,  G01B15/02

摘要： An apparatus and method for mapping film thickness of textured polycrystalline thin films. Multiple sample films of known thicknesses are provided, and each is irradiated by x-ray at a measurement point to generate a diffraction image that captures a plurality of diffraction arcs. Texture information (i.e., pole densities) of each sample film is calculated based on multiple incomplete pole figures collected from the diffraction image and used to correct the x-ray diffraction intensities obtained from such sample film. Corrected and integrated diffraction intensities of the sample films are then correlated to respective known film thicknesses of such films, and the correlation so determined can be used to map the film thickness of a textured polycrystalline thin film of unknown thickness, based on the corrected and integrated diffraction intensity calculated for such thin film.

摘要翻译： 用于绘制纹理多晶薄膜的膜厚度的装置和方法。 提供了已知厚度的多个样品膜，并且在测量点将X射线照射，以产生捕获多个衍射弧的衍射图像。 基于从衍射图像收集的多个不完全极数来计算每个样品膜的纹理信息（即极点密度），并用于校正从这种样品膜获得的x射线衍射强度。 然后将样品膜的校正和积分的衍射强度与这些膜的各自已知的膜厚度相关联，并且所确定的相关性可用于基于校正和积分的图形来绘制未知厚度的纹理多晶薄膜的膜厚度 为这种薄膜计算的衍射强度。

公开(公告)号：US06792075B2

公开(公告)日：2004-09-14

申请号：US10225534

申请日：2002-08-21

申请人： Krzysztof J. Kozaczek ,  David S. Kurtz ,  Paul R. Moran ,  Roger I. Martin ,  Patrick W. Dehaven ,  Kenneth P. Rodbell ,  Sandra G. Malhotra

发明人： Krzysztof J. Kozaczek ,  David S. Kurtz ,  Paul R. Moran ,  Roger I. Martin ,  Patrick W. Dehaven ,  Kenneth P. Rodbell ,  Sandra G. Malhotra

IPC分类号： G01N2320

CPC分类号： G01N23/20 ,  G01B15/02

摘要： An apparatus and method for mapping film thickness of one or more textured polycrystalline thin films. Multiple sample films of known thickness are provided. Each sample film is irradiated by x-ray at a measurement point to generate a diffraction image that captures a plurality of diffraction arcs. Texture information (i.e., pole densities) of the sample film, is calculated based on incomplete pole figures collected on the diffraction image and used to correct the x-ray diffraction intensities from such sample. The corrected diffraction intensities are integrated for each sample film, and then used for constructing a calibration curve that correlates diffraction intensities with respective known film thickness of the sample films. The film thickness of a textured polycrystalline thin film of unknown thickness can therefore be mapped on such calibration curve, using a corrected and integrated diffraction intensity obtained for such thin film of unknown thickness.

摘要翻译： 一种用于映射一个或多个纹理多晶薄膜的膜厚度的装置和方法。 提供了已知厚度的多个样品膜。 每个样品膜在测量点用X射线照射，以产生捕获多个衍射弧的衍射图像。 基于在衍射图像上收集的不完全的极数计算样品膜的纹理信息（即极点密度），并用于校正这些样品的X射线衍射强度。 对每个样品膜整合校正的衍射强度，然后用于构建将衍射强度与样品膜的已知膜厚度相关联的校准曲线。 因此，可以使用未知厚度的薄膜获得的校正和积分的衍射强度，将这种具有未知厚度的纹理多晶薄膜的膜厚度映射到这种校准曲线上。

公开(公告)号：US06678347B1

公开(公告)日：2004-01-13

申请号：US10205717

申请日：2002-07-26

申请人： Krzysztof J. Kozaczek ,  David S. Kurtz ,  Paul R. Moran ,  Roger I. Martin

发明人： Krzysztof J. Kozaczek ,  David S. Kurtz ,  Paul R. Moran ,  Roger I. Martin

IPC分类号： G01N23207

CPC分类号： G01N23/207

摘要： A method for quantitatively determining the phase composition of a sample mixture that comprises two or more textured polycrystalline materials, based on corrected and integrated x-ray diffraction intensities. The effect of texture has been analytically eliminated from such corrected and integrated x-ray diffraction intensities, based on the texture information obtained from the sample mixture.

摘要翻译： 基于校正和积分的x射线衍射强度，定量测定包含两种或多种纹理多晶材料的样品混合物的相组成的方法。 基于从样品混合物获得的纹理信息，已经从这种校正和积分的x射线衍射强度中分析地消除了纹理的影响。

公开(公告)号：US06301330B1

公开(公告)日：2001-10-09

申请号：US09365063

申请日：1999-07-30

申请人： David S. Kurtz ,  Krzysztof J. Kozaczek ,  Paul R. Moran

发明人： David S. Kurtz ,  Krzysztof J. Kozaczek ,  Paul R. Moran

IPC分类号： G01N23223

CPC分类号： G01N23/20 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： An apparatus and method for performing rapid, high-resolution polycrystalline crystallographic texture analysis, by calculating an Orientation Distribution Function (ODF) from partial pole figures obtained from x-ray diffraction measurements on large samples, e.g., 200 millimeter diameter wafers. The measurement apparatus includes a 2-D area x-ray detector and a collimated x-ray source arranged in a specific, fixed spatial relationship dependant on the properties of the sample to be measured, and also includes a particular wafer motion assembly. The wafer motion assembly includes three mutually orthogonal rectilinear translation stages, and a &phgr; rotation stage mounted thereon, as an uppermost motion stage, with its range restricted to 180° of rotation. &thgr;-2&thgr; and &khgr; motions are eliminated, and the close deployment of the x-ray source and area detector to the measuring spot on the wafer is such that the detector covers a sufficient range of 2&thgr; and &khgr; to capture multiple diffraction arcs in each frame. The invention employs a new and advantageous texture analysis protocol to determine ODF from the severely truncated pole figures thus obtained, through comparison of experimental ODF figures with calculated ones. The resulting system is fast, accurate, amenable to automation, and does not require highly skilled personnel to operate.

摘要翻译： 通过从大样品（例如200毫米直径的晶片）上的x射线衍射测量获得的部分极数计算定向分布函数（ODF）来执行快速，高分辨率多晶结构织构分析的装置和方法。 该测量装置包括二维区域X射线检测器和准直的X射线源，其以取决于要测量的样品的性质的特定固定的空间关系排列，并且还包括特定的晶片运动组件。 晶片运动组件包括三个相互正交的直线平移平台和安装在其上的旋转平台作为最上面的运动台，其范围限制在180°的旋转角度。 theta-2theta和＆khgr; 消除了运动，并且将x射线源和面积检测器紧密地部署到晶片上的测量点，使得检测器覆盖了足够的2θ和khgr范围; 以捕获每个帧中的多个衍射弧。 本发明采用新的和有利的纹理分析协议，通过将实验ODF数据与计算出的ODF值进行比较来确定由此获得的严重截断极数的ODF。 所产生的系统快速，准确，适合于自动化，并且不需要高技能人员操作。

公开(公告)号：US06882739B2

公开(公告)日：2005-04-19

申请号：US09884791

申请日：2001-06-19

申请人： David S. Kurtz ,  Kryzsztof J. Kozaczek ,  Paul R. Moran

发明人： David S. Kurtz ,  Kryzsztof J. Kozaczek ,  Paul R. Moran

IPC分类号： G01N23/20 ,  G06K9/00

CPC分类号： G01N23/20

摘要： An apparatus and method for performing rapid grain size analysis on a textured polycrystalline material, by generating average grain size and grain size distribution data from x-ray diffraction data of such material. Raw diffraction data is obtained by capturing a plurality of diffraction arcs within a single data capture frame. The raw diffraction data is digitally registered; (3) and the registered diffraction data is filtered to remove background noise, exclude diffraction overlaps or truncations, and compensate for biased data obtained from regions of highly preferred orientations. Average grain size and grain size distribution data are then correlated with the filtered diffraction data. The apparatus for acquiring raw diffraction data includes a collimated x-ray source having means for adjusting beam size and divergence of the x-ray generated, a 2-dimensional area detector for registering diffracted x-ray, and a sample motion assembly for moving the sample in the sample plane. The resulting system is fast, accurate, amenable to automation, and does not require highly skilled personnel to operate.

摘要翻译： 通过从这种材料的x射线衍射数据产生平均晶粒尺寸和晶粒尺寸分布数据，对纹理多晶材料进行快速晶粒尺寸分析的装置和方法。 通过在单个数据捕获帧内捕获多个衍射弧来获得原始衍射数据。 原始衍射数据进行数字注册; （3）并且对已登记的衍射数据进行滤波以去除背景噪声，排除衍射重叠或截断，并且补偿从高度优选的取向区域获得的有偏差的数据。 然后将平均晶粒尺寸和晶粒尺寸分布数据与滤波的衍射数据相关。 用于获取原始衍射数据的装置包括准直X射线源，其具有用于调节所产生的x射线的光束尺寸和发散度的装置，用于记录衍射X射线的2维区域检测器和用于移动 样品平面中的样品。 所产生的系统快速，准确，适合于自动化，并且不需要高技能人员操作。

公开(公告)号：US4516075A

公开(公告)日：1985-05-07

申请号：US455596

申请日：1983-01-04

申请人： Paul R. Moran

发明人： Paul R. Moran

IPC分类号： A61B10/00 ,  A61B5/055 ,  G01F1/716 ,  G01R33/20 ,  G01R33/44 ,  G01R33/48 ,  G01R33/563 ,  G01R33/08

CPC分类号： G01R33/56308 ,  A61B5/055 ,  A61B5/7257 ,  G01R33/56316

摘要： An NMR zeugmatographic scanner is modified to produce flow images. A motion sensitizing gradient field is applied to the gyromagnetic nuclei after transverse excitation and prior to emission measurement. The motion sensitized free induction signal which results is processed using an inverse Fourier transformation to produce a number of useful images.

摘要翻译： 改进了一种NMR色谱扫描仪，以产生流动图像。 运动敏感梯度场在横向激发之后和发射测量之前应用于陀螺磁核。 运动敏感的自由感应信号，其结果使用逆傅立叶变换处理以产生许多有用的图像。

公开(公告)号：USRE32701E

公开(公告)日：1988-06-21

申请号：US36103

申请日：1987-04-08

申请人： Paul R. Moran

发明人： Paul R. Moran

IPC分类号： G01R33/563

CPC分类号： G01R33/56308 ,  G01R33/56316

摘要： An NMR zeugmatographic scanner is modified to produce flow images. A motion sensitizing gradient field is applied to the gyromagnetic nuclei after transverse excitation and prior to emission measurement. The motion sensitized free induction signal which results is processed using an inverse Fourier transformation to produce a number of useful images.

公开(公告)号：US4654591A

公开(公告)日：1987-03-31

申请号：US760354

申请日：1985-07-29

申请人： Paul R. Moran

发明人： Paul R. Moran

IPC分类号： G01R33/563 ,  G01R33/20

CPC分类号： G01R33/563

摘要： An NMR zeugmatographic scanner is modified to provide flow images. A motion sensitizing, bi-phasic excitation field gradient is applied during each measurement cycle to produce transverse magnetization in paramagnetic nuclei which are moving in the direction of the gradient. The resulting free induction signal is processed using an inverse Fourier transformation to produce images of flowing paramagnetic nuclei.

摘要翻译： NMR图谱扫描仪被修改以提供流动图像。 在每个测量周期期间施加运动敏化，双相激励场梯度，以在沿着梯度方向移动的顺磁核中产生横向磁化。 使用傅立叶逆变换处理所得到的自由感应信号，以产生流动顺磁核的图像。

公开(公告)号：US4697149A

公开(公告)日：1987-09-29

申请号：US794652

申请日：1985-11-04

申请人： Paul R. Moran

发明人： Paul R. Moran

IPC分类号： A61B10/00 ,  A61B5/055 ,  G01R33/48 ,  G01R33/563 ,  G01R33/20

CPC分类号： G01R33/563

摘要： An NMR zeugmatographic scanner is modified to provide motion images, During each measurement cycle the paramagnetic nuclei are subjected to a pair of transverse excitation field pulses which are separated by the application of a bi-polar magnetic field gradient which sensitizes the resulting FID signal to motion. The resulting FID signal is processed using an inverse Fourier transformation to produce images of flowing paramagnetic nuclei.

摘要翻译： 修改NMR色谱扫描仪以提供运动图像。在每个测量周期期间，顺磁核经受一对横向激励场脉冲，其通过施加双极磁场梯度而分离，使得所得FID信号对运动敏感 。 使用傅立叶逆变换处理所得的FID信号以产生流动的顺磁核的图像。

公开(公告)号：US4697147A

公开(公告)日：1987-09-29

申请号：US799848

申请日：1985-11-14

申请人： Paul R. Moran ,  Richard E. Halbach

发明人： Paul R. Moran ,  Richard E. Halbach

IPC分类号： G01R33/563 ,  G01R33/20 ,  G01N24/08

CPC分类号： G01R33/563

摘要： An NMR blood flowmeter applies a continuous transverse excitation signal and a constant, homogeneous polarizing magnetic field to blood flowing through an active region. The polarizing magnetic field is contoured at opposite boundaries of this active region, and by switching these contours and collecting the resulting NMR signals, data is obtained from which the various components of blood flow may be calculated.

摘要翻译： NMR血液流量计对流过有源区域的血液施加连续的横向激发信号和恒定的均质极化磁场。 偏振磁场在该有源区域的相对边界处成轮廓，并且通过切换这些轮廓并收集所得到的NMR信号，获得可以从其计算血流的各种分量的数据。