公开(公告)号：US20090145358A1

公开(公告)日：2009-06-11

申请号：US12329577

申请日：2008-12-06

申请人： Kyoo Hwan Lee ,  Dong Kwon Choi ,  Chul Hwan Kim ,  Suk Ju Park ,  Hyung Sup Lee

发明人： Kyoo Hwan Lee ,  Dong Kwon Choi ,  Chul Hwan Kim ,  Suk Ju Park ,  Hyung Sup Lee

IPC分类号： C23C16/00 ,  B05B7/00 ,  C23C14/00

CPC分类号： C23C14/12 ,  C23C14/243

摘要： A deposition material supplying module includes a canister configured to define a storage space in which a deposition material is stored, a material flow controller provided with at least one groove receiving the deposition material supplied from the canister and adapted to rotate, and a carrier gas supplying unit configured to supply carrier gas to the material flow controller. The deposition material is filled in the groove and a fixed amount of the deposition material is supplied into the process chamber using the deposition material flow controller. Therefore, it is easy to control an amount of the deposition material supplied to the process chamber and the reliability on the fixed-quantity supply can be improved.

摘要翻译： 沉积材料供给模块包括：罐，其构造成限定存储沉积材料的存储空间;材料流控制器，设置有至少一个容纳从罐提供并适于旋转的沉积材料的槽，以及载气供给 单元，被配置为向物料流量控制器提供载气。 沉积材料填充在凹槽中，并且使用沉积材料流量控制器将一定量的沉积材料供应到处理室中。 因此，容易地控制供给到处理室的沉积材料的量，并且可以提高固定量供给的可靠性。

公开(公告)号：US08062834B2

公开(公告)日：2011-11-22

申请号：US12344488

申请日：2008-12-27

申请人： Hyung Sup Lee ,  Kyoo Hwan Lee ,  Young Ho Kwon

发明人： Hyung Sup Lee ,  Kyoo Hwan Lee ,  Young Ho Kwon

IPC分类号： G03F7/00 ,  G03F7/20

CPC分类号： H01L51/0021 ,  H01L51/0023 ,  H01L51/5203

摘要： Provided are a method for manufacturing a transparent electrode pattern and a method for manufacturing an electro-optic device having the transparent electrode pattern. The method for manufacturing the transparent electrode pattern includes forming a transparent electrode on a light-transmissive substrate, patterning the transparent electrode by removing a portion of the transparent electrode, and forming an insulating protective layer in an edge region of the patterned transparent electrode through a printing process. In accordance with the method, the insulating protective layer is formed in the edge region of the patterned transparent electrode through the printing process so that an apparatus and method for manufacturing the insulating protective layer can be simplified, resulting in a decrease in manufacturing cost.

摘要翻译： 提供一种制造透明电极图案的方法和用于制造具有透明电极图案的电光器件的方法。 透明电极图案的制造方法包括在透光性基板上形成透明电极，通过除去透明电极的一部分来对透明电极进行图案化，并且在图案化透明电极的边缘区域中形成绝缘保护层，通过 打印过程。 根据该方法，通过印刷工艺在图案化的透明电极的边缘区域中形成绝缘保护层，从而可以简化制造绝缘保护层的装置和方法，导致制造成本的降低。

公开(公告)号：US20090165718A1

公开(公告)日：2009-07-02

申请号：US12344489

申请日：2008-12-27

申请人： Hyung Sup Lee ,  Sung Tae Nam Goong ,  Kyoo Hwan Lee ,  Young Ho Kwon ,  Chang Jae Lee

发明人： Hyung Sup Lee ,  Sung Tae Nam Goong ,  Kyoo Hwan Lee ,  Young Ho Kwon ,  Chang Jae Lee

IPC分类号： C23C16/00

CPC分类号： C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/26

摘要： Provided are a gas injector and a film deposition apparatus having the same. The gas injector includes a body, a supply hole, an injection hole, and a distribution plate. The body is configured to provide an inner space therein. The supply hole is formed in an upper surface of the body to communicate with the inner space and receive a raw material. The injection hole is formed in a lower surface of the body to communicate with the inner space and inject the raw material. The distribution plate is disposed in the inner space of the body. A through hole is formed in the distribution plate. The distribution plate is disposed to be inclined at a predetermined angle with respect to a horizontal plane. The gas injector can uniformly inject the raw material and improve vaporization efficiency of the raw material having a powder form.

摘要翻译： 提供了一种气体注入器和具有该气体注入器的成膜装置。 气体喷射器包括主体，供给孔，喷射孔和分配板。 身体构造成在其中提供内部空间。 供应孔形成在主体的上表面中以与内部空间连通并且接收原料。 注入孔形成在主体的下表面中，与内部空间连通并注入原料。 分配板设置在主体的内部空间中。 在分配板上形成通孔。 分配板相对于水平面倾斜预定角度。 气体喷射器可以均匀地注入原料并提高具有粉末形式的原料的蒸发效率。

公开(公告)号：US08628621B2

公开(公告)日：2014-01-14

申请号：US12344489

申请日：2008-12-27

申请人： Hyung Sup Lee ,  Sung Tae Nam Goong ,  Kyoo Hwan Lee ,  Young Ho Kwon ,  Chang Jae Lee

发明人： Hyung Sup Lee ,  Sung Tae Nam Goong ,  Kyoo Hwan Lee ,  Young Ho Kwon ,  Chang Jae Lee

IPC分类号： C23C16/00 ,  B05B1/24 ,  B05B1/00

CPC分类号： C23C14/12 ,  C23C14/243 ,  C23C14/246 ,  C23C14/26

摘要： Provided are a gas injector and a film deposition apparatus having the same. The gas injector includes a body, a supply hole, an injection hole, and a distribution plate. The body is configured to provide an inner space therein. The supply hole is formed in an upper surface of the body to communicate with the inner space and receive a raw material. The injection hole is formed in a lower surface of the body to communicate with the inner space and inject the raw material. The distribution plate is disposed in the inner space of the body. A through hole is formed in the distribution plate. The distribution plate is disposed to be inclined at a predetermined angle with respect to a horizontal plane. The gas injector can uniformly inject the raw material and improve vaporization efficiency of the raw material having a powder form.

摘要翻译： 提供了一种气体注入器和具有该气体注入器的成膜装置。 气体喷射器包括主体，供给孔，喷射孔和分配板。 身体构造成在其中提供内部空间。 供应孔形成在主体的上表面中以与内部空间连通并且接收原料。 注入孔形成在主体的下表面中，与内部空间连通并注入原料。 分配板设置在主体的内部空间中。 在分配板上形成通孔。 分配板相对于水平面倾斜预定角度。 气体喷射器可以均匀地注入原料并提高具有粉末形式的原料的蒸发效率。

公开(公告)号：US08440018B2

公开(公告)日：2013-05-14

申请号：US12467217

申请日：2009-05-15

申请人： Kyoo Hwan Lee ,  Hyung Sup Lee

发明人： Kyoo Hwan Lee ,  Hyung Sup Lee

IPC分类号： C23C16/00

CPC分类号： C23C14/12 ,  C23C14/246 ,  C23C16/4481

摘要： The present invention provides an apparatus for supplying a source and an apparatus for depositing a thin film having the same. The apparatus for supplying a source includes a horizontal channel extending in one direction; pumping and transfer ports extending to pass through the horizontal channel, the pumping and transfer ports being spaced apart from each other; a transfer shaft inserted into the horizontal channel to reciprocate therein; and a storage room connected to one side of the pumping port, the storage room storing and supplying a powder source, wherein the transfer shaft comprises at least one transfer hole for allowing the powder source supplied through the pumping port to be filled therein and to be transferred to an external apparatus through the transfer port. As described above, according to the present invention, a powder source filled in a transfer hole is supplied to an external apparatus by reciprocating a transfer shaft, so that the amount of the powder source supplied to the external apparatus can be quantitatively controlled as much as a fixed quantity corresponding to the internal volume of the transfer hole.

摘要翻译： 本发明提供一种用于提供源的装置和用于沉积具有该源的薄膜的装置。 用于供应源的设备包括沿一个方向延伸的水平通道; 泵送和传送端口延伸穿过水平通道，泵送和传送端口彼此间隔开; 插入水平通道中的传送轴在其中往复运动; 以及连接到所述抽吸口的一侧的储藏室，所述储存室存储和供应粉末源，其中所述传送轴包括至少一个传送孔，用于允许通过所述泵送口供应的粉末源被填充在其中，并且为 通过传输端口传输到外部设备。 如上所述，根据本发明，通过使传送轴往复运动而将填充在传送孔中的粉末源供给到外部设备，从而可以将供给到外部设备的粉末源的量定量控制为 对应于传送孔的内部容积的固定量。

公开(公告)号：US20090170036A1

公开(公告)日：2009-07-02

申请号：US12344488

申请日：2008-12-27

申请人： Hyung Sup Lee ,  Kyoo Hwan Lee ,  Young Ho Kwon

发明人： Hyung Sup Lee ,  Kyoo Hwan Lee ,  Young Ho Kwon

IPC分类号： G03F7/20 ,  B29C67/00

CPC分类号： H01L51/0021 ,  H01L51/0023 ,  H01L51/5203

摘要： Provided are a method for manufacturing a transparent electrode pattern and a method for manufacturing an electro-optic device having the transparent electrode pattern. The method for manufacturing the transparent electrode pattern includes forming a transparent electrode on a light-transmissive substrate, patterning the transparent electrode by removing a portion of the transparent electrode, and forming an insulating protective layer in an edge region of the patterned transparent electrode through a printing process. In accordance with the method, the insulating protective layer is formed in the edge region of the patterned transparent electrode through the printing process so that an apparatus and method for manufacturing the insulating protective layer can be simplified, resulting in a decrease in manufacturing cost.

摘要翻译： 提供一种制造透明电极图案的方法和用于制造具有透明电极图案的电光器件的方法。 透明电极图案的制造方法包括在透光性基板上形成透明电极，通过除去透明电极的一部分来对透明电极进行图案化，并且在图案化透明电极的边缘区域中形成绝缘保护层，通过 打印过程。 根据该方法，通过印刷工艺在图案化的透明电极的边缘区域中形成绝缘保护层，从而可以简化制造绝缘保护层的装置和方法，导致制造成本的降低。

公开(公告)号：US20090288600A1

公开(公告)日：2009-11-26

申请号：US12467217

申请日：2009-05-15

申请人： Kyoo Hwan Lee ,  Hyung Sup Lee

发明人： Kyoo Hwan Lee ,  Hyung Sup Lee

IPC分类号： C23C16/44

CPC分类号： C23C14/12 ,  C23C14/246 ,  C23C16/4481

摘要： The present invention provides an apparatus for supplying a source and an apparatus for depositing a thin film having the same. The apparatus for supplying a source includes a horizontal channel extending in one direction; pumping and transfer ports extending to pass through the horizontal channel, the pumping and transfer ports being spaced apart from each other; a transfer shaft inserted into the horizontal channel to reciprocate therein; and a storage room connected to one side of the pumping port, the storage room storing and supplying a powder source, wherein the transfer shaft comprises at least one transfer hole for allowing the powder source supplied through the pumping port to be filled therein and to be transferred to an external apparatus through the transfer port. As described above, according to the present invention, a powder source filled in a transfer hole is supplied to an external apparatus by reciprocating a transfer shaft, so that the amount of the powder source supplied to the external apparatus can be quantitatively controlled as much as a fixed quantity corresponding to the internal volume of the transfer hole.

摘要翻译： 本发明提供一种用于提供源的装置和用于沉积具有该源的薄膜的装置。 用于供应源的设备包括沿一个方向延伸的水平通道; 泵送和传送端口延伸穿过水平通道，泵送和传送端口彼此间隔开; 插入水平通道中的传送轴在其中往复运动; 以及连接到所述抽吸口的一侧的储藏室，所述储存室存储和供应粉末源，其中所述传送轴包括至少一个传送孔，用于允许通过所述泵送口供应的粉末源被填充在其中，并且为 通过传输端口传输到外部设备。 如上所述，根据本发明，通过使传送轴往复运动而将填充在传送孔中的粉末源供给到外部设备，从而可以将供给到外部设备的粉末源的量定量控制为 对应于传送孔的内部容积的固定量。

公开(公告)号：US08399276B2

公开(公告)日：2013-03-19

申请号：US12832786

申请日：2010-07-08

申请人： Hyung Sup Lee ,  Chi Wook Yu ,  Sung Hui Lee

发明人： Hyung Sup Lee ,  Chi Wook Yu ,  Sung Hui Lee

IPC分类号： H01L21/00

CPC分类号： H01L51/52 ,  H01L27/3281 ,  H01L51/5221 ,  H01L51/56

摘要： Provided are an electro-optic device and a method for manufacturing the same. The method includes forming a bottom electrode on a substrate, forming a first insulation film to cross over the bottom electrode forming an organic film on the substrate where the bottom electrode and the first insulation film are formed, forming a top electrode film on the organic film, and forming a top electrode to cross the bottom electrode by removing a portion of the top electrode film through a laser-scribing process. Herein, in the forming of the top electrode through the laser-scribing process, an edge region of a bottom surface of the top electrode may be positioned corresponding to an upper side of the first insulation film. Therefore, it is possible to reduce the number of processing apparatuses and steps required for separately forming the plurality of top electrodes, thereby simplifying manufacturing processes and saving manufacturing cost. Furthermore, since an insulation film is formed under an edge region of a top electrode, it is possible to prevent the generation of leakage current and the malfunction of a device caused by the deformation of the top electrode even though the edge region of the top electrode is damaged during a laser-scribing process. Thus, the reliability of electro-optic devices can be improved.

摘要翻译： 提供一种电光装置及其制造方法。 所述方法包括在基板上形成底电极，形成第一绝缘膜，以在形成底电极和第一绝缘膜的基板上形成有机膜的底电极交叉，在有机膜上形成顶电极膜 并且通过激光划线工艺去除顶部电极膜的一部分，形成顶部电极以穿过底部电极。 这里，在通过激光划线工艺形成顶部电极时，顶部电极的底表面的边缘区域可以相应于第一绝缘膜的上侧定位。 因此，可以减少单独形成多个顶电极所需的处理装置和步骤的数量，从而简化制造工艺并节省制造成本。 此外，由于在顶部电极的边缘区域形成绝缘膜，因此即使顶部电极的边缘区域也能够防止由顶部电极的变形引起的漏电流的产生和器件的故障 在激光划线过程中损坏。 因此，可以提高电光装置的可靠性。

公开(公告)号：US20110136303A1

公开(公告)日：2011-06-09

申请号：US13056970

申请日：2009-08-03

申请人： Hyung Sup Lee

发明人： Hyung Sup Lee

IPC分类号： H01L21/336 ,  B23K26/00

CPC分类号： H01L27/124 ,  H01L27/1288 ,  H01L29/66765

摘要： A method and apparatus of fabricating a thin film transistor is disclosed, which patterns an ohmic contact layer by a laser patterning process so that it is capable of preventing a semiconductor layer from being damaged, and reducing fabrication time, wherein the method comprises forming a gate electrode pattern on a substrate; forming a gate insulating layer on the gate electrode pattern; sequentially forming a semiconductor layer pattern and an ohmic contact layer pattern on the gate insulating layer; forming source and drain electrode patterns on the ohmic contact layer pattern, wherein the source and drain electrode patterns are provided at a fixed interval therebetween; and removing the ohmic contact layer pattern exposed between the source and drain electrode patterns through the use of laser.

摘要翻译： 公开了一种制造薄膜晶体管的方法和装置，其通过激光图案化工艺对欧姆接触层进行图案化，使得其能够防止半导体层受损，并减少制造时间，其中该方法包括形成栅极 电极图案; 在栅电极图案上形成栅极绝缘层; 在栅极绝缘层上依次形成半导体层图案和欧姆接触层图案; 在所述欧姆接触层图案上形成源极和漏极电极图案，其中所述源极和漏极电极图案之间以固定的间隔设置; 以及通过使用激光去除在源极和漏极电极图案之间暴露的欧姆接触层图案。

公开(公告)号：US20110042702A1

公开(公告)日：2011-02-24

申请号：US12854089

申请日：2010-08-10

申请人： Hyuk LIM ,  Hyung Sup Lee ,  Young Sam Yu

发明人： Hyuk LIM ,  Hyung Sup Lee ,  Young Sam Yu

IPC分类号： H01L33/52 ,  H01L33/00

CPC分类号： H01L51/5253 ,  H01L51/5262

摘要： Provided are an organic light emitting device and a method for manufacturing the same. The organic light emitting device includes: a substrate; an organic light emitting device layer on the substrate; an encapsulation layer on the organic light emitting device, the encapsulation layer comprising at least one first layer and at least one second layer on the first layer, the first layer having a different refractive index from the second layer; and a moisture transmission layer on the encapsulation layer, the moisture transmission layer being configured to prevent moisture from permeating the encapsulation layer. The encapsulation layer is formed by stacking material layers having different refractive indexes to protect the organic light emitting device layer. Thus, light emitted to lateral surfaces of the organic light emitting device which is a surface emitting device can be directed toward a front surface to improve optical radiation efficiency.

摘要翻译： 提供一种有机发光器件及其制造方法。 有机发光器件包括：衬底; 基板上的有机发光器件层; 所述有机发光器件上的封装层，所述封装层包括至少一个第一层和所述第一层上的至少一个第二层，所述第一层具有与所述第二层不同的折射率; 以及在所述封装层上的湿气透过层，所述透湿层被配置为防止水分渗入所述封装层。 通过堆叠具有不同折射率的材料层来形成封装层以保护有机发光器件层。 因此，发射到作为表面发射装置的有机发光器件的侧表面的光可以被引向前表面以提高光辐射效率。