公开(公告)号：US11740548B2

公开(公告)日：2023-08-29

申请号：US18074082

申请日：2022-12-02

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. Lima ,  Takahiro Ueda

IPC: G03F1/22 ,  G03F1/64 ,  G03F7/20 ,  G03F7/00

CPC classification number: G03F1/22 ,  G03F1/64 ,  G03F7/70983

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

公开(公告)号：US11549205B2

公开(公告)日：2023-01-10

申请号：US16926301

申请日：2020-07-10

Applicant: Lintec of America, Inc.

Inventor： Marcio D. Lima

IPC: D04H1/74 ,  D04H1/593 ,  D04H1/587 ,  D04H1/64 ,  H05K9/00 ,  C01B32/158 ,  D04H1/4242

Abstract: A fabric of nanofibers that includes an adhesive is described. The nanofibers can be twisted or both twisted and coiled prior to formation into a fabric. The adhesive can be selectively applied to or infiltrated within portions of the nanofibers comprising the nanofiber fabric. The adhesive enables connection of the nanofiber fabric to an underlying substrate, even in cases in which the underlying substrate has a three-dimensional topography, while the selective location of the adhesive on the fabric limits the contact area between the adhesive and the nanofibers of the nanofiber fabric. This limited contact area can help preserve the beneficial properties of the nanofibers (e.g., thermal conductivity, electrical conductivity, infra-red (IR) radiation transparency) that otherwise might be degraded by the presence of adhesive.

公开(公告)号：US11377537B2

公开(公告)日：2022-07-05

申请号：US15916354

申请日：2018-03-09

Applicant: Lintec of America, Inc.

Inventor： Marcio D. Lima ,  Julia Bykova

IPC: B32B9/00 ,  C08K3/04 ,  B32B5/02 ,  B32B7/12 ,  C09J9/02 ,  C09J7/38 ,  C09J7/22 ,  C08J5/18 ,  C08J7/04 ,  C08J7/043 ,  C08J7/044 ,  B32B5/12 ,  B32B7/06 ,  B32B15/14 ,  C09J201/02 ,  B32B17/10 ,  B32B27/30 ,  C08J5/04 ,  C08L23/08 ,  C08L29/14 ,  C08K3/08 ,  C08K7/06 ,  B82Y30/00 ,  B82Y40/00 ,  B32B9/04

Abstract: Techniques are disclosed for producing multilayered composites of adhesive nanofiber composites. Specifically, one or more sheets of highly aligned nanofibers are partially embedded in an adhesive such that at least a portion of the nanofiber sheet is free from adhesive and is available to conduct current with adjacent electrical features. In some example embodiments, the adhesive nanofiber composites are metallized with a conductive metal and in these and other embodiments, the adhesive nanofiber composites may also be stretchable.

公开(公告)号：US11161329B2

公开(公告)日：2021-11-02

申请号：US15950284

申请日：2018-04-11

Applicant: Lintec of America, Inc.

Inventor： Marcio D. Lima ,  Julia Bykova

IPC: B32B27/12 ,  B32B5/26 ,  B32B27/32 ,  B29C61/02 ,  B32B27/08 ,  B32B27/30 ,  B32B1/08 ,  B29C63/06 ,  B29C63/40 ,  C23C14/30 ,  C23C14/18 ,  B29L23/00 ,  B29K27/06 ,  B29K627/06 ,  B29L9/00

Abstract: A multilayer composite is disclosed comprising a heat shrinkable polymer layer and a nanofiber layer. Methods of forming the composite and uses thereof are also described.

公开(公告)号：US10724163B2

公开(公告)日：2020-07-28

申请号：US16364933

申请日：2019-03-26

Applicant: Lintec of America, Inc.

Inventor： Marcio D. Lima

IPC: B32B7/02 ,  D04H1/74 ,  D04H1/593 ,  D04H1/587 ,  D04H1/64 ,  H05K9/00 ,  C01B32/158 ,  D04H1/4242

Abstract: A fabric of nanofibers that includes an adhesive is described. The nanofibers can be twisted or both twisted and coiled prior to formation into a fabric. The adhesive can be selectively applied to or infiltrated within portions of the nanofibers comprising the nanofiber fabric. The adhesive enables connection of the nanofiber fabric to an underlying substrate, even in cases in which the underlying substrate has a three-dimensional topography, while the selective location of the adhesive on the fabric limits the contact area between the adhesive and the nanofibers of the nanofiber fabric. This limited contact area can help preserve the beneficial properties of the nanofibers (e.g., thermal conductivity, electrical conductivity, infra-red (IR) radiation transparency) that otherwise might be degraded by the presence of adhesive.

公开(公告)号：US20190352819A1

公开(公告)日：2019-11-21

申请号：US16364933

申请日：2019-03-26

Applicant: Lintec of America, Inc.

Inventor： Marcio D. Lima

IPC: D04H1/74 ,  D04H1/593 ,  D04H1/587 ,  D04H1/64 ,  D04H1/4242 ,  H05K9/00 ,  C01B32/158

Abstract: A fabric of nanofibers that includes an adhesive is described. The nanofibers can be twisted or both twisted and coiled prior to formation into a fabric. The adhesive can be selectively applied to or infiltrated within portions of the nanofibers comprising the nanofiber fabric. The adhesive enables connection of the nanofiber fabric to an underlying substrate, even in cases in which the underlying substrate has a three-dimensional topography, while the selective location of the adhesive on the fabric limits the contact area between the adhesive and the nanofibers of the nanofiber fabric. This limited contact area can help preserve the beneficial properties of the nanofibers (e.g., thermal conductivity, electrical conductivity, infra-red (IR) radiation transparency) that otherwise might be degraded by the presence of adhesive.

公开(公告)号：US20180187343A1

公开(公告)日：2018-07-05

申请号：US15830186

申请日：2017-12-04

Applicant: Lintec of America, Inc.

Inventor： Marcio D. Lima ,  Raquel Ovalle-Robles

IPC: D02G3/44 ,  D02G3/16 ,  D02G3/40 ,  D01F9/127 ,  C01B32/16 ,  H01B1/04

CPC classification number: D02G3/441 ,  B65H49/20 ,  B65H51/16 ,  C01B32/158 ,  C01B32/16 ,  D01F9/1275 ,  D02G3/16 ,  D02G3/406 ,  D02G3/443 ,  H01B1/04

Abstract: A dispenser is described for dispensing nanofiber yarns that includes a housing that defines an inlet, an outlet, and a chamber. A spool, around which is wound a length of nanofiber yarn, is disposed within the chamber defined by the housing. The nanofiber yarn is threaded from the chamber through the outlet and can be dispensed in a controlled way that reduces the likelihood of developing knots within the nanofiber yarn, and which facilitates convenient application of the yarn onto an underlying surface. In some cases, the dispenser can be used to concurrently dispense an adhesive or other polymer along with the nanofiber yarn.

公开(公告)号：US12151215B2

公开(公告)日：2024-11-26

申请号：US17770812

申请日：2020-10-23

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. Lima

IPC: B01D71/02 ,  B01D67/00 ,  B23K26/38 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/168 ,  D01F9/127 ,  D04H1/4242 ,  D04H1/732 ,  G03F1/62

Abstract: An apparatus and method for transferring nanofiber structures (e.g., nanofiber films, nanofiber sheets, stacks of nanofiber grids, nanofiber films, nanofiber sheets, and combinations thereof) between various substrates are described. The techniques described use a soluble layer on a substrate that is subsequently dissolved, thus freeing the nanofiber structure from the substrate. This liquid phase techniques preserves the mechanical integrity and the purity of the nanofiber structures.

公开(公告)号：US12129175B2

公开(公告)日：2024-10-29

申请号：US18378531

申请日：2023-10-10

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. Lima

IPC: C01B32/158 ,  B32B5/12 ,  B32B7/022 ,  C01B32/159 ,  B82Y30/00

CPC classification number: C01B32/158 ,  B32B5/12 ,  B32B7/022 ,  C01B32/159 ,  B32B2250/20 ,  B32B2262/106 ,  B32B2307/732 ,  B82Y30/00 ,  C01B2202/02 ,  C01B2202/04 ,  C01B2202/06 ,  C01B2202/08 ,  C01B2202/34 ,  C01B2202/36 ,  C01P2004/03

Abstract: Nanofiber membranes are described that include multiple layers of nanofiber structures, where each structure is a composite composition of multiwall carbon nanotubes and one or both of single wall and/or few walled carbon nanotubes. By selecting the relative proportions of multiwall and one or more of single/few wall carbon nanotubes in a nanofiber film, the membrane can be fabricated to withstand the heating that occurs during operation in an EUV lithography machine, while also having enough mechanical integrity to withstand pressure changes of between 1 atmosphere (atm) and 2 atm between operating cycles of an EUV lithography machine.

公开(公告)号：US12085844B2

公开(公告)日：2024-09-10

申请号：US18231000

申请日：2023-08-07

Applicant: LINTEC OF AMERICA, INC.

Inventor： Marcio D. Lima ,  Takahiro Ueda

IPC: G03F1/22 ,  G03F1/64 ,  G03F7/00

CPC classification number: G03F1/22 ,  G03F1/64 ,  G03F7/70983

Abstract: A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.