公开(公告)号：US11740548B2

公开(公告)日：2023-08-29

申请号：US18074082

申请日：2022-12-02

申请人： LINTEC OF AMERICA, INC.

发明人： Marcio D. Lima ,  Takahiro Ueda

IPC分类号： G03F1/22 ,  G03F1/64 ,  G03F7/20 ,  G03F7/00

CPC分类号： G03F1/22 ,  G03F1/64 ,  G03F7/70983

摘要： A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

公开(公告)号：US10995195B2

公开(公告)日：2021-05-04

申请号：US15916802

申请日：2018-03-09

申请人： Lintec of America, Inc.

发明人： Marcio D. Lima ,  Julia Bykova ,  Takahiro Ueda

IPC分类号： C09J7/38 ,  C08K3/04 ,  B32B3/28 ,  B32B5/02 ,  B32B5/12 ,  B32B7/12 ,  B32B9/00 ,  B32B15/14 ,  C09J9/02 ,  C09J7/22 ,  C08J5/18 ,  C08J7/04 ,  C08J7/043 ,  C08J7/044 ,  B32B7/06 ,  C09J201/02 ,  B32B17/10 ,  B32B27/30 ,  C08J5/04 ,  C08L23/08 ,  C08L29/14 ,  C08K3/08 ,  C08K7/06 ,  B82Y40/00 ,  B32B9/04

摘要： Examples described include composite nanofibers sheets that have been “infiltrated” with a polymer (i.e., the polymer has flowed past a surface of the nanofiber sheet and into at least some of spaces within the sheet defined by the nanofibers). An adhesive nanofiber tape is formed when the infiltrating polymer is an adhesive and the adhesive infiltrates the nanofiber sheet from a one major surface of the nanofiber sheet. In other described examples, some portions of nanofibers in the sheet have been conformally coated with at least one metal layer.

公开(公告)号：US12085844B2

公开(公告)日：2024-09-10

申请号：US18231000

申请日：2023-08-07

申请人： LINTEC OF AMERICA, INC.

发明人： Marcio D. Lima ,  Takahiro Ueda

IPC分类号： G03F1/22 ,  G03F1/64 ,  G03F7/00

CPC分类号： G03F1/22 ,  G03F1/64 ,  G03F7/70983

摘要： A filtration formed nanostructure pellicle film is disclosed. The filtration formed nanostructure pellicle film includes a plurality of carbon nanofibers that are intersected randomly to form an interconnected network structure in a planar orientation. The interconnected structure allows for a high minimum EUV transmission rate of at least 92%, with a thickness ranging from a lower limit of 3 nm to an upper limit of 100 nm, to allow for effective EUV lithography processing.

公开(公告)号：US10774243B2

公开(公告)日：2020-09-15

申请号：US16096610

申请日：2017-04-28

申请人： LINTEC CORPORATION ,  LINTEC OF AMERICA, INC.

发明人： Takahiro Ueda ,  Masaharu Ito ,  Kanzan Inoue

IPC分类号： C09J7/00 ,  C09J9/00 ,  C01B32/00 ,  C09J201/00 ,  C09J7/29 ,  C01B32/168 ,  C09J7/20 ,  C09J7/38 ,  C09J9/02

摘要： L1 is a maximum distance across a non-contacting section between intersection points of a straight line crossing the non-contacting section in parallel with an alignment direction of a carbon nanotubes in a plan view of a mounting section with a border between the non-contacting section and a contacting section. L2 is a maximum distance across the non-contacting section between intersection points of a straight line crossing the non-contacting section and intersecting the alignment direction of the carbon nanotubes in the plan view of the mounting section with the border between the non-contacting section and the contacting section. When L1 is larger than L2, at least L2 is more than 0 mm and less than 10 mm. When smaller, at least L1 is more than 0 mm and less than 10 mm. When equal, L1 and L2 are each more than 0 mm and less than 10 mm.

公开(公告)号：US20180194102A1

公开(公告)日：2018-07-12

申请号：US15916802

申请日：2018-03-09

申请人： Lintec of America, Inc.

发明人： Marcio D. Lima ,  Julia Bykova ,  Takahiro Ueda

IPC分类号： B32B5/12 ,  B32B7/06 ,  B32B7/12 ,  B32B15/14 ,  C09J9/02 ,  C09J201/02

CPC分类号： C08K3/041 ,  B32B5/02 ,  B32B5/12 ,  B32B7/06 ,  B32B7/12 ,  B32B9/007 ,  B32B9/043 ,  B32B15/14 ,  B32B17/10788 ,  B32B17/10889 ,  B32B27/30 ,  B32B2260/021 ,  B32B2260/046 ,  B32B2307/202 ,  B32B2307/732 ,  B32B2307/748 ,  B32B2311/18 ,  B82Y40/00 ,  C08J5/042 ,  C08J5/18 ,  C08J7/047 ,  C08J2383/04 ,  C08J2483/04 ,  C08K3/04 ,  C08K3/042 ,  C08K3/045 ,  C08K3/08 ,  C08K7/06 ,  C08K2003/0831 ,  C08K2003/0881 ,  C08K2201/011 ,  C08L23/0853 ,  C08L29/14 ,  C09J7/22 ,  C09J7/38 ,  C09J9/02 ,  C09J201/02 ,  C09J2201/16 ,  C09J2201/602 ,  C09J2201/606 ,  C09J2205/10 ,  C09J2205/102

摘要： Examples described include composite nanofibers sheets that have been “infiltrated” with a polymer (i.e., the polymer has flowed past a surface of the nanofiber sheet and into at least some of spaces within the sheet defined by the nanofibers). An adhesive nanofiber tape is formed when the infiltrating polymer is an adhesive and the adhesive infiltrates the nanofiber sheet from a one major surface of the nanofiber sheet. In other described examples, some portions of nanofibers in the sheet have been conformally coated with at least one metal layer.

公开(公告)号：US20180306741A1

公开(公告)日：2018-10-25

申请号：US15927325

申请日：2018-03-21

申请人： Lintec of America, Inc.

发明人： Takahiro Ueda ,  Marcio D. Lima

IPC分类号： G01N27/12 ,  D02G3/36 ,  D01H7/92 ,  A61B5/145 ,  A61B5/1477

CPC分类号： G01N27/127 ,  A61B5/14517 ,  A61B5/1477 ,  D01H7/92 ,  D02G3/36 ,  G01N27/126

摘要： Nanofiber based sensors are described that can be used to detect analytes in biological or non-biological contexts. Each sensor includes at least two nanofiber yarns that are spaced apart from one another so as to avoid electrical (or physical) contact. Each nanofiber yarn of the nanofiber sensor includes a sensing region that is in electrical contact with the rest of the corresponding nanofiber yarn. The sensing regions of the at least two nanofibers are treated with complementary sensing agents so that when the sensing regions (and the corresponding sensing agents) are exposed to the analyte to be detected, an electrical response is detected. This response is then communicated through one or more of the nanofiber yarns for interpretation by a processor.