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公开(公告)号:US20060246821A1
公开(公告)日:2006-11-02
申请号:US11456674
申请日:2006-07-11
申请人: Lidia Vereen , Peter Skarpelos , Brian Downum , Patrick Williams , Terry Ko , Christopher Lee , Kenneth Reynolds , John Hearne , Daniel Hachnochi
发明人: Lidia Vereen , Peter Skarpelos , Brian Downum , Patrick Williams , Terry Ko , Christopher Lee , Kenneth Reynolds , John Hearne , Daniel Hachnochi
摘要: A method for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, a method for delivering a polishing fluid to a polishing surface of a chemical mechanical polisher includes flowing polishing fluid to a first portion of the polishing surface through a first outlet while a second portion of the polishing surface adjacent a second outlet receives no flow of polishing fluid, and flowing polishing fluid through the second outlet to the second portion of the polishing surface.
摘要翻译: 提供了一种将抛光液输送到化学机械抛光表面的方法。 在一个实施例中,用于将抛光流体输送到化学机械抛光机的抛光表面的方法包括将抛光流体通过第一出口流动到抛光表面的第一部分,而与第二出口相邻的抛光表面的第二部分不接收 抛光流体的流动,以及将抛光流体流过第二出口到抛光表面的第二部分。
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公开(公告)号:US07086933B2
公开(公告)日:2006-08-08
申请号:US10131638
申请日:2002-04-22
申请人: Lidia Vereen , Peter N. Skarpelos , Brian J. Downum , Patrick Williams , Terry Kin-Ting Ko , Christopher Heung-Gyun Lee , Kenneth Reese Reynolds , John Hearne , Daniel Hachnochi
发明人: Lidia Vereen , Peter N. Skarpelos , Brian J. Downum , Patrick Williams , Terry Kin-Ting Ko , Christopher Heung-Gyun Lee , Kenneth Reese Reynolds , John Hearne , Daniel Hachnochi
IPC分类号: B24B1/00
摘要: A method and apparatus for delivering a polishing fluid to a chemical mechanical polishing surface is provided. In one embodiment, an apparatus for delivering a polishing fluid to a chemical mechanical polishing surface includes an arm having a plurality of holes formed in the arm for retaining a plurality of polishing fluid delivery tubes. Each of the tubes are disposed through one of the holes and coupled to the arm. The number of holes exceeds the number of tubes, thereby allowing the distribution of polishing fluid to a polishing surface and correspondingly the local polishing rates across a diameter of a substrate being polished to be controlled.
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公开(公告)号:US20130210211A1
公开(公告)日:2013-08-15
申请号:US13586094
申请日:2012-08-15
申请人: Lidia Vereen , Bruce Bateman , David Eggleston , Louis Parrillo
发明人: Lidia Vereen , Bruce Bateman , David Eggleston , Louis Parrillo
IPC分类号: H01L45/00
CPC分类号: H01L27/249 , H01L23/528 , H01L27/2454 , H01L45/08 , H01L45/1226 , H01L45/1233 , H01L45/146 , H01L45/147 , H01L45/1608 , H01L45/1616
摘要: A method of manufacturing a memory structure includes forming a plurality of vertically-stacked horizontal line layers, interleaving a plurality of electrically conductive vertical lines with the electrically conductive horizontal lines, and forming a memory film at and between intersections of the electrically conductive vertical lines and the horizontal lines. In one embodiment of the invention, the electrically conductive vertical lines are interleaved with the horizontal lines such that a row of vertical lines is positioned between each horizontally-adjacent pair of horizontal lines in each horizontal line layer. By configuring the electrically conductive vertical lines and electrically conductive horizontal lines so that a row of vertical lines is positioned between each horizontally-adjacent pair of horizontal lines, a unit memory cell footprint of just 2F2 may be realized.
摘要翻译: 一种制造存储器结构的方法包括:形成多个垂直层叠的水平线层,将多个导电垂直线与导电水平线交错,并在导电垂直线和 水平线。 在本发明的一个实施例中,导电垂直线与水平线交错,使得一排垂直线位于每个水平线层中每个水平相邻的一对水平线之间。 通过配置导电垂直线和导电水平线,使得一行垂直线位于每个水平相邻的水平线对之间,可以实现仅2F2的单位存储单元覆盖区。
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公开(公告)号:US20130207066A1
公开(公告)日:2013-08-15
申请号:US13586580
申请日:2012-08-15
IPC分类号: H01L45/00
CPC分类号: H01L45/145 , H01L27/2481 , H01L45/08 , H01L45/12 , H01L45/1226 , H01L45/1233 , H01L45/146 , H01L45/16 , H01L45/1666 , H01L45/1683
摘要: In an example, a single damascene structure is formed by, for example, providing a dielectric layer, forming a void in the dielectric layer, and forming a portion of a first two-terminal resistive memory cell and a portion of a second two-terminal resistive memory cell within the void. The portions of the two-terminal resistive memory cells may be vertically stacked within the void.
摘要翻译: 在一个示例中,通过例如提供电介质层,在电介质层中形成空隙,以及形成第一两端电阻存储单元的一部分和第二两端的一部分,形成单个镶嵌结构 电阻记忆体在空隙内。 两端电阻式存储单元的部分可以垂直地堆叠在空隙内。
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公开(公告)号:US09419217B2
公开(公告)日:2016-08-16
申请号:US13586094
申请日:2012-08-15
申请人: Lidia Vereen , Bruce Bateman , David Eggleston , Louis Parrillo
发明人: Lidia Vereen , Bruce Bateman , David Eggleston , Louis Parrillo
CPC分类号: H01L27/249 , H01L23/528 , H01L27/2454 , H01L45/08 , H01L45/1226 , H01L45/1233 , H01L45/146 , H01L45/147 , H01L45/1608 , H01L45/1616
摘要: A method of manufacturing a memory structure includes forming a plurality of vertically-stacked horizontal line layers, interleaving a plurality of electrically conductive vertical lines with the electrically conductive horizontal lines, and forming a memory film at and between intersections of the electrically conductive vertical lines and the horizontal lines. In one embodiment of the invention, the electrically conductive vertical lines are interleaved with the horizontal lines such that a row of vertical lines is positioned between each horizontally-adjacent pair of horizontal lines in each horizontal line layer. By configuring the electrically conductive vertical lines and electrically conductive horizontal lines so that a row of vertical lines is positioned between each horizontally-adjacent pair of horizontal lines, a unit memory cell footprint of just 2F2 may be realized.
摘要翻译: 一种制造存储器结构的方法包括:形成多个垂直层叠的水平线层,将多个导电垂直线与导电水平线交错,并在导电垂直线和 水平线。 在本发明的一个实施例中,导电垂直线与水平线交错,使得一排垂直线位于每个水平线层中每个水平相邻的水平线对之间。 通过配置导电垂直线和导电水平线,使得一行垂直线位于每个水平相邻的水平线对之间,可以实现仅2F2的单位存储单元覆盖区。
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公开(公告)号:US08610099B2
公开(公告)日:2013-12-17
申请号:US13586580
申请日:2012-08-15
IPC分类号: H01L21/306 , H01L29/86
CPC分类号: H01L45/145 , H01L27/2481 , H01L45/08 , H01L45/12 , H01L45/1226 , H01L45/1233 , H01L45/146 , H01L45/16 , H01L45/1666 , H01L45/1683
摘要: In an example, a single damascene structure is formed by, for example, providing a dielectric layer, forming a void in the dielectric layer, and forming a portion of a first two-terminal resistive memory cell and a portion of a second two-terminal resistive memory cell within the void. The portions of the two-terminal resistive memory cells may be vertically stacked within the void.
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