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    Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications
    1.
    发明授权
    Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications 失效
    通过离子注入为微光电机械系统（MOEMS）应用定义了牺牲区域

    公开(公告)号：US06620712B2

    公开(公告)日：2003-09-16

    申请号：US10011350

    申请日：2001-11-12

    申请人： Liji Huang ,  Naiqian Han ,  Yahong Yao ,  Gaofeng Wang

    发明人： Liji Huang ,  Naiqian Han ,  Yahong Yao ,  Gaofeng Wang

    IPC分类号： H01L2100

    CPC分类号： B81C1/00047 ,  B81B2201/047 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00571 ,  B81C2201/0109 ,  B81C2201/0136

    摘要： The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes a sacrificial layer disposed on the substrate having a chamber-wall region surrounding and defining an optical chamber. The electro-optical device further includes a membrane layer disposed on top of the sacrificial layer having a chamber-removal opening surrounding and defining an electric tunable membrane for transmitting an optical signal therethrough. The electrically tunable membrane disposed on top of the optical chamber surrounded by the chamber wall regions. The chamber-wall region is doped with ion-dopants for maintaining the chamber-wall region for removal-resistance under a chamber-forming process performed through the chamber-removal opening. In a preferred embodiment, the chamber-wall region is a doped silicon dioxide region with carbon or nitrogen. In another preferred embodiment, the chamber-wall region is a nitrogen ion-doped SiNxOy region. In another preferred embodiment, the optical chamber is an etched chamber formed by etching through the chamber removal opening for etching off an etch-enhanced region surrounded by an etch-resistant region constituting the chamber wall.

    摘要翻译： 本发明公开了一种在基片上的电光装置支架。 电光装置包括设置在基板上的牺牲层，其具有围绕并限定光学室的室壁区域。 电光装置还包括设置在牺牲层顶部的膜层，其具有围绕并限定用于透射光信号的电可调膜的室去除开口。 设置在由室壁区域围绕的光学室的顶部上的电可调膜。 室壁区域掺杂有离子掺杂剂，用于在通过室去除开口进行的室形成过程中维持室壁区域以用于去除电阻。 在优选实施例中，室壁区域是具有碳或氮的掺杂二氧化硅区域。 在另一个优选的实施方案中，室壁区域是氮离子掺杂的SiN x O y区域。 在另一个优选实施例中，光学室是通过蚀刻通过室去除开口形成的蚀刻室，用于蚀刻由构成室壁的耐蚀刻区域围绕的蚀刻增强区域。

    Dynamic gain equalization system design with adaptive spectrum decomposition methodology
    3.
    发明授权
    Dynamic gain equalization system design with adaptive spectrum decomposition methodology 失效
    具有自适应频谱分解方法的动态增益均衡系统设计

    公开(公告)号：US06775429B2

    公开(公告)日：2004-08-10

    申请号：US10177505

    申请日：2002-06-19

    申请人： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

    发明人： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

    IPC分类号： G02B626

    CPC分类号： G02B6/12021 ,  G02B6/12033 ,  G02B6/266 ,  G02B6/293 ,  G02B6/29391 ,  G02B6/29395

    摘要： The present invention discloses an optical gain equalization system for receiving and equalizing a multiple-channel input optical signal. The optical gain equalization system includes a cascaded array of tunable optical filters filtering the multiple-channel input optical signal and generating a plurality of sub-signals and a residual signal and each of the sub-signals transmitted over a mutually exclusive filter-specific spectrum-range while a combination of all the filter-specific spectrums dynamically covering the spectral portions of said multi-channel input optical signal where power equalizations are required, and all said filter-specific spectrums together with the residual signal spectrum substantially covering an entire spectral range of the multi-channel input optical signal. The gain equalization system further includes a corresponding array of variable optical attenuators (VOAs) each connected to one of a corresponding tunable optical filter for attenuating the sub-signal transmitted over the filter-specific spectrum range for generating an equalized sub-signal. And, the gain equalization system further includes a multiplexing means for receiving and multiplexing the equalized sub-signals generated by the array of variable optical attenuators (VOAs) and the residual signal for generating an equalized output optical signal.

    摘要翻译： 本发明公开了一种用于接收和均衡多通道输入光信号的光增益均衡系统。 光学增益均衡系统包括可调谐滤光器的级联阵列，其对多通道输入光信号进行滤波，并产生多个子信号和残留信号，并且每个子信号通过互斥滤波器特定频谱 - 范围，同时所有滤波器特定频谱的组合动态地覆盖需要功率均衡的所述多信道输入光信号的频谱部分，并且所有所述滤波器特定频谱与残留信号频谱一起基本上覆盖整个频谱范围 多通道输入光信号。 增益均衡系统还包括相应的可变光衰减器阵列（VOA），每个可变光衰减器连接到相应的可调光滤波器之一，用于衰减通过滤波器专用频谱范围传输的子信号，用于产生均衡的子信号。 并且，增益均衡系统还包括多路复用装置，用于接收和复用由可变光衰减器阵列产生的均衡的子信号和用于产生均衡的输出光信号的残余信号。

    Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods
    5.
    发明申请
    Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods 有权
    微加工热质量流量传感器和插入式流量计及其制造方法

    公开(公告)号：US20070017285A1

    公开(公告)日：2007-01-25

    申请号：US11157604

    申请日：2005-06-21

    申请人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    发明人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6845

    摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane. This mass flow sensor is operated with two sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates and a second circuit for measuring a flow rate in a second range of flow rates, to significantly increase range of flow rate measurements, while maintains a high degree of measurement accuracy.

    摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。 质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。 对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成 直到底部介电薄膜层暴露。 在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。 该质量流量传感器用两组电路操作，第一电路用于测量第一流量范围内的流量，以及用于测量在第二流量范围内的流量的第二电路，以显着增加流量范围 速率测量，同时保持高度的测量精度。

    Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane
    6.
    发明授权
    Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane 有权
    具有双面钝化聚酰亚胺膜的坚固的微加工热质量流量传感器

    公开(公告)号：US08132455B2

    公开(公告)日：2012-03-13

    申请号：US12538337

    申请日：2009-08-10

    申请人： Chih-Chang Chen ,  Gaofeng Wang ,  Liji Huang ,  Yahong Yao

    发明人： Chih-Chang Chen ,  Gaofeng Wang ,  Liji Huang ,  Yahong Yao

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6845 ,  G01F1/692

    摘要： A micromachined thermal mass flow sensor comprises a high mechanical strength polyimide film as a supporting layer of suspending membrane. The polyimide film provides superior thermal insulating properties to reduce the power consumption of device. Due to the tendency of humidity absorption, the polyimide suspending membrane is double side passivated on both top and bottom surfaces to sustain its long term stability from rush and humid working environment. A thin layer of silicon dioxide deposited by plasma enhanced chemical vapor deposition is overlaid between the silicon nitride and polyimide film to enhance the adhesion property of passivation layers to polyimide surface. With such embodiments, a sturdy and robust micromachined thermal mass flow sensor with high measurement accuracy could be formed.

    摘要翻译： 微加工热质量流量传感器包括作为悬浮膜的支撑层的高机械强度聚酰亚胺膜。 聚酰亚胺薄膜提供优异的隔热性能，以降低设备的功耗。 由于吸湿的趋势，聚酰亚胺悬浮膜在顶面和底面都被双面钝化，以保持其在潮湿和潮湿的工作环境下的长期稳定性。 通过等离子体增强化学气相沉积沉积的薄的二氧化硅层覆盖在氮化硅和聚酰亚胺膜之间，以增强钝化层与聚酰亚胺表面的粘合性能。 通过这样的实施例，可以形成具有高测量精度的坚固且可靠的微加工热质量流量传感器。

    Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices
    7.
    发明授权
    Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices 失效
    用于微机电系统（MEMS）光子器件的稳健的多层薄膜膜

    公开(公告)号：US06724516B2

    公开(公告)日：2004-04-20

    申请号：US10062774

    申请日：2002-02-01

    申请人： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

    发明人： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

    IPC分类号： G02B2600

    CPC分类号： G02B26/0833 ,  G02B6/122 ,  G02B26/001 ,  G02B2006/12104

    摘要： This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . , etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.

    摘要翻译： 本发明公开了薄膜的结构。 该薄膜是独立的，可移动的，并且由多层不同的材料制成，例如氮化硅，多晶硅或这两者的组合。 该薄膜可以通过诸如静电力的外部控制力来致动。 该薄膜膜由奇数层组成，例如1层，3层，5层。 。 。 此外，该膜的层轮廓是对称的，例如，最底层与最顶层相同，下一个最下层被制成与下一个最上层相同，等等。

    Integrated micromachined thermal mass flow sensor and methods of making the same
    8.
    发明授权
    Integrated micromachined thermal mass flow sensor and methods of making the same 有权
    集成微加工热质量流量传感器及其制造方法

    公开(公告)号：US07908096B2

    公开(公告)日：2011-03-15

    申请号：US11864804

    申请日：2007-09-28

    申请人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    发明人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    IPC分类号： G01F1/00

    CPC分类号： G01F1/6845 ,  G01F1/692 ,  G01F1/6965 ,  G01F1/698

    摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises an upstream thin-film heater, an downstream thin-film heater, and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heaters and the sensors out of contact with the substrate base. This mass flow sensor is operated with three sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates, a second circuit for measuring a flow rate in a second range of flow rates, and a third circuit in a differential configuration for measuring a flow rate in said first range of flow rates or said second range of flow rates, to significantly increase range of flow rate measurements and provide an optional for concentration measurement, while maintains a high degree of measurement accuracy.

    摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括上游薄膜加热器，下游薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器和传感器的热隔离膜与基底不接触。 该质量流量传感器用三组电路操作，第一电路用于测量第一流量范围内的流量，第二电路用于测量在第二流量范围内的流量，以及第三电路 用于测量所述第一流量范围或所述第二流量范围内的流量的差分配置，以显着增加流量测量的范围，并提供可选的浓度测量，同时保持高度的测量精度。

    Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same
    9.
    发明授权
    Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same 有权
    具有自清洁能力的微加工热质量流量传感器及其制造方法

    公开(公告)号：US07878056B2

    公开(公告)日：2011-02-01

    申请号：US11960261

    申请日：2007-12-19

    申请人： Liji Huang ,  Chih-Chang Chen ,  Yahong Yao ,  Gaofeng Wang

    发明人： Liji Huang ,  Chih-Chang Chen ,  Yahong Yao ,  Gaofeng Wang

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6845 ,  G01F1/6888 ,  G01F15/006

    摘要： The current invention generally relates to Micro Electro Mechanical Systems (MEMS) thermal mass flow sensors for measuring the flow rate of a flowing fluid (gas/liquid) and the methods of manufacturing on single crystal silicon wafers. The said mass flow sensors have self-cleaning capability that is achieved via the modulation of the cavity of which the sensing elements locate on the top of the cavity that is made of a silicon nitride film; alternatively the sensing elements are fabricated on top of a binary silicon nitride/conductive polycrystalline silicon film under which is a porous silicon layer selective formed in a silicon substrate. Using polycrystalline silicon or the sensing elements as electrodes, an acoustic wave can be generated across the porous silicon layer which is also used for the thermal isolation of the sensing elements. The vibration or acoustic energy is effective to remove foreign materials deposited on top surface of the sensing elements that ensure the accuracy and enhance repeatability of the thermal mass flow sensing.

    摘要翻译： 本发明通常涉及用于测量流动流体（气体/液体）的流量的微机电系统（MEMS）热质量流量传感器以及在单晶硅晶片上的制造方法。 所述质量流量传感器具有自清洁能力，其通过其感测元件位于由氮化硅膜制成的空腔顶部上的空腔的调制而实现; 或者，感测元件制造在二元氮化硅/导电多晶硅膜的顶部，在二元氮化硅/导电多晶硅膜的下方是选择性地形成在硅衬底中的多孔硅层。 使用多晶硅或感测元件作为电极，可以跨多孔硅层产生声波，其也用于感测元件的热隔离。 振动或声能有效地去除沉积在感测元件的顶表面上的异物，以确保精确度并增强热质量流量感测的重复性。

    INTEGRATED MICROMACHINED THERMAL MASS FLOW SENSOR AND METHODS OF MAKING THE SAME
    10.
    发明申请
    INTEGRATED MICROMACHINED THERMAL MASS FLOW SENSOR AND METHODS OF MAKING THE SAME 有权
    一体化微孔热流量传感器及其制造方法

    公开(公告)号：US20090164163A1

    公开(公告)日：2009-06-25

    申请号：US11864804

    申请日：2007-09-28

    申请人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    发明人： Gaofeng Wang ,  Chih-Chang Chen ,  Yahong Yao ,  Liji Huang

    IPC分类号： G01F25/00 ,  G01F1/69

    CPC分类号： G01F1/6845 ,  G01F1/692 ,  G01F1/6965 ,  G01F1/698

    摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises an upstream thin-film heater, an downstream thin-film heater, and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heaters and the sensors out of contact with the substrate base. This mass flow sensor is operated with three sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates, a second circuit for measuring a flow rate in a second range of flow rates, and a third circuit in a differential configuration for measuring a flow rate in said first range of flow rates or said second range of flow rates, to significantly increase range of flow rate measurements and provide an optional for concentration measurement, while maintains a high degree of measurement accuracy.

    摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括上游薄膜加热器，下游薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器和传感器的热隔离膜与基底不接触。 该质量流量传感器用三组电路操作，第一电路用于测量第一流量范围内的流量，第二电路用于测量在第二流量范围内的流量，以及第三电路 用于测量所述第一流量范围或所述第二流量范围内的流量的差分配置，以显着增加流量测量的范围，并提供可选的浓度测量，同时保持高度的测量精度。