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1.发明授权Integrated optical imaging systems including an interior space between opposing substrates and associated methods 有权集成光学成像系统，包括相对基板之间的内部空间和相关方法公开(公告)号：US08153957B2
公开(公告)日：2012-04-10
申请号：US11928060
申请日：2007-10-30
IPC分类号： H01J40/14
CPC分类号： H01L27/14632 , H01L25/167 , H01L27/14618 , H01L27/14625 , H01L31/02325 , H01L31/02327 , H01L2924/0002 , H01L2924/00
摘要： An integrated optical imaging system includes a first substrate having first and second opposing surfaces, a second substrate having third and fourth opposing surfaces, a spacer between a substantially planar portion of the third surface of the second substrate and a substantially planar portion of the second surface of the first substrate, at least two of the spacer, the first substrate and the second substrate sealing an interior space between the third surface of the second substrate and the second surface of the first substrate, and an optical imaging system having n surfaces, where n is greater than or equal to two, at least two of the n surfaces of the optical imaging system are on respective ones of the first, second, third and fourth surfaces.
摘要翻译： 集成光学成像系统包括具有第一和第二相对表面的第一衬底，具有第三和第四相对表面的第二衬底，在第二衬底的第三表面的基本上平面部分与第二表面的基本上平面部分之间的间隔物 所述第一基板中的至少两个，所述隔离物，所述第一基板和所述第二基板中的至少两个密封所述第二基板的第三表面和所述第一基板的第二表面之间的内部空间，以及具有n个表面的光学成像系统， n大于或等于2，光学成像系统的n个表面中的至少两个表面在第一，第二，第三和第四表面中的相应的一个上。
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公开(公告)号：US20080111058A1
公开(公告)日：2008-05-15
申请号：US11928060
申请日：2007-10-30
IPC分类号： H01L27/144 , H01L21/98
CPC分类号： H01L27/14632 , H01L25/167 , H01L27/14618 , H01L27/14625 , H01L31/02325 , H01L31/02327 , H01L2924/0002 , H01L2924/00
摘要： An integrated optical imaging system includes a first substrate having first and second opposing surfaces, a second substrate having third and fourth opposing surfaces, a spacer between a substantially planar portion of the third surface of the second substrate and a substantially planar portion of the second surface of the first substrate, at least two of the spacer, the first substrate and the second substrate sealing an interior space between the third surface of the second substrate and the second surface of the first substrate, and an optical imaging system having n surfaces, where n is greater than or equal to two, at least two of the n surfaces of the optical imaging system are on respective ones of the first, second, third and fourth surfaces.
摘要翻译： 集成光学成像系统包括具有第一和第二相对表面的第一衬底，具有第三和第四相对表面的第二衬底，在第二衬底的第三表面的基本上平面部分与第二表面的基本上平面部分之间的间隔物 所述第一基板中的至少两个，所述隔离物，所述第一基板和所述第二基板中的至少两个密封所述第二基板的第三表面和所述第一基板的第二表面之间的内部空间，以及具有n个表面的光学成像系统， n大于或等于2，光学成像系统的n个表面中的至少两个表面在第一，第二，第三和第四表面中的相应的一个上。
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公开(公告)号：US6128134A
公开(公告)日：2000-10-03
申请号：US917865
申请日：1997-08-27
IPC分类号： G02B6/42 , G02B27/09 , G11B7/135 , H01S3/00 , H01S3/02 , H01S5/00 , H01S5/022 , G02B6/12 , G02B27/30
CPC分类号： G02B19/0009 , G02B19/0052 , G02B27/09 , G02B27/095 , G02B6/4206 , G11B7/1353 , G11B7/1362 , G11B7/1381 , G11B7/1398 , G02B6/4214 , G02B6/4224 , G02B6/4232 , H01S5/02248 , H01S5/02292
摘要： A substrate having an optical element on an input surface thereof receives a light beam not having a desired beam shape and shapes the light beam into a predetermined intensity distribution. The substrate may further include a second optical element for providing a predetermined phase pattern to the light beam provided by the first optical element. The first optical element may, for example, circularize an elliptical light beam using a soft aperture for differential power attenuation or by altering the divergence of the light beam along the different axes of the light beam. When the divergence angles are altered and the collimating optical element is provided on the output surface, the thickness of the transparent substrate is determined in accordance with a resultant difference in the divergence and/or with the initial difference in beam size along each axis and with a required circularity. A light source is mounted close to the first optical element in order to minimize the amount of differing divergence present along the different axes of the light beam. The optical elements may be diffractive, refractive, or hybrids thereof and are preferably prepared photolithographically on the substrate itself. The light source may be mounted using fiducial marks and the photolithographic processes for forming the optical elements may also use fiducial marks. All elements of the integrated beam shaper may be formed on a planar, wafer level.
摘要翻译： 在其输入表面上具有光学元件的基板接收不具有期望光束形状的光束并将光束形成为预定的强度分布。 基板还可以包括用于向由第一光学元件提供的光束提供预定相位图案的第二光学元件。 例如，第一光学元件可以使用用于差分功率衰减的软孔径或通过改变沿着光束的不同轴的光束的发散来使椭圆形光束圆化。 当发散角被改变并且准直光学元件设置在输出表面上时，透明衬底的厚度根据所得到的发散差异和/或沿着每个轴的光束尺寸的初始差异以及与 要求的圆形度。 光源安装在靠近第一光学元件的位置，以便沿着光束的不同轴线最小化存在的不同发散量。 光学元件可以是衍射，折射或混合，并且优选光刻地制备在衬底本身上。 光源可以使用基准标记安装，并且用于形成光学元件的光刻工艺也可以使用基准标记。 集成光束整形器的所有元件可以形成在平面晶片级上。
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公开(公告)号：US06522618B1
公开(公告)日：2003-02-18
申请号：US09637364
申请日：2000-08-15
IPC分类号： G11B700
CPC分类号： G11B7/1353 , G02B6/4214 , G02B6/4224 , G02B6/4231 , G02B6/4232 , G02B6/4238 , G02B6/4239 , G02B6/43 , G02B2006/12102 , G02B2006/12107 , G11B7/123 , G11B7/1372 , G11B7/1374 , G11B7/22 , H01S5/005
摘要： An integrated optical apparatus includes an optically transparent substrate with a light source and a detector mounted adjacent thereto. The substrate includes an optical element in a transmit path from the light source to a remote target. The optical element splits the light into more than one beam. A detector receives beams reflected by the target. All optical elements needed to create the more then one beam, direct the more than one beam onto the target and direct the more than one beam from the target to the detector are on the substrate and/or any structure bonded to the substrate. Preferably, the optical element provides sufficient separation between the more than one beam such that each beam is delivered to a unique respective light detecting element of the detector. The return path from the remote target to the detector may include an optical element for each beam or no optical elements. An additional substrate may be included and bonded to the substrate. The active elements may be bonded to a bottom surface of the substrate, either directly or via spacer blocks, or may be provided on a support substrate, which is then bonded, either directly or via spacer blocks, to the substrate.
摘要翻译： 集成光学装置包括具有光源的光学透明基板和与其相邻安装的检测器。 衬底包括从光源到远程目标的发射路径中的光学元件。 光学元件将光分成多于一个的光束。 检测器接收由目标物体反射的光束。 所需的所有光学元件需要产生多于一个的光束，将不止一个光束引导到目标物上，并引导来自目标的多于一个光束到检测器处于衬底和/或结合到衬底的任何结构上。 优选地，光学元件在多于一个光束之间提供足够的间隔，使得每个光束被传送到检测器的独特的相应的光检测元件。 从远程目标到检测器的返回路径可以包括用于每个光束的光学元件或者不包括光学元件。 可以包括另外的衬底并结合到衬底。 有源元件可以直接地或通过间隔块结合到衬底的底表面，或者可以设置在支撑衬底上，然后将其直接或经由间隔块结合到衬底上。
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公开(公告)号：US6104690A
公开(公告)日：2000-08-15
申请号：US274310
申请日：1999-03-23
IPC分类号： G02B5/18 , G02B6/12 , G02B6/42 , G02B6/43 , G11B7/12 , G11B7/135 , G11B7/22 , H01L31/12 , H01S5/00 , G11B7/00
CPC分类号： G11B7/1353 , G02B6/4231 , G02B6/4232 , G11B7/123 , G11B7/1372 , G11B7/1374 , G11B7/22 , G02B2006/12102 , G02B2006/12107 , G02B6/4214 , G02B6/4224 , G02B6/4238 , G02B6/4239 , G02B6/43 , H01S5/005
摘要： An integrated optical apparatus includes an optically transparent substrate with a light source and a detector mounted adjacent thereto. The substrate includes an optical element in a transmit path from the light source to a remote target. The optical element splits the light into more than one beam. A detector receives beams reflected by the target. All optical elements needed to create the more then one beam, direct the more than one beam onto the target and direct the more than one beam from the target to the detector are on the substrate and/or any structure bonded to the substrate. Preferably, the optical element provides sufficient separation between the more than one beam such that each beam is delivered to a unique respective light detecting element of the detector. The return path from the remote target to the detector may include an optical element for each beam or no optical elements. An additional substrate may be included and bonded to the substrate. The active elements may be bonded to a bottom surface of the substrate, either directly or via spacer blocks, or may be provided on a support substrate, which is then bonded, either directly or via spacer blocks, to the substrate.
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6.发明授权Integrated optical apparatus providing separated beams on a detector and associated methods 失效在检测器上提供分离光束的集成光学装置及相关方法
公开(公告)号：US5912872A
公开(公告)日：1999-06-15
申请号：US18891
申请日：1998-02-05
IPC分类号： G02B5/18 , G02B6/12 , G02B6/42 , G02B6/43 , G11B7/12 , G11B7/135 , G11B7/22 , H01L31/12 , H01S5/00 , G11B7/00
CPC分类号： G11B7/1353 , G02B6/4231 , G02B6/4232 , G11B7/123 , G11B7/1372 , G11B7/1374 , G11B7/22 , G02B2006/12102 , G02B2006/12107 , G02B6/4214 , G02B6/4224 , G02B6/4238 , G02B6/4239 , G02B6/43 , H01S5/005
摘要： An integrated optical apparatus includes an optically transparent substrate with a light source and a detector mounted adjacent thereto. The substrate includes an optical element in a transmit path from the light source to a remote target. The optical element splits the light into more than one beam. A detector receives beams reflected by the target. All optical elements needed to create the more then one beam, direct the more than one beam onto the target and direct the more than one beam from the target to the detector are on the substrate and/or any structure bonded to the substrate. Preferably, the optical element provides sufficient separation between the more than one beam such that each beam is delivered to a unique respective light detecting element of the detector. The return path from the remote target to the detector may include an optical element for each beam or no optical elements. An additional substrate may be included and bonded to the substrate. The active elements may be bonded to a bottom surface of the substrate, either directly or via spacer blocks, or may be provided on a support substrate, which is then bonded, either directly or via spacer blocks, to the substrate.
摘要翻译： 集成光学装置包括具有光源的光学透明基板和与其相邻安装的检测器。 衬底包括从光源到远程目标的发射路径中的光学元件。 光学元件将光分成多于一个的光束。 检测器接收由目标物体反射的光束。 所需的所有光学元件需要产生多于一个的光束，将不止一个光束引导到目标物上，并引导来自目标的多于一个光束到检测器处于衬底和/或结合到衬底的任何结构上。 优选地，光学元件在多于一个光束之间提供足够的间隔，使得每个光束被传送到检测器的独特的相应的光检测元件。 从远程目标到检测器的返回路径可以包括用于每个光束的光学元件或者不包括光学元件。 可以包括另外的衬底并结合到衬底。 有源元件可以直接地或通过间隔块结合到衬底的底表面，或者可以设置在支撑衬底上，然后将其直接或经由间隔块结合到衬底上。
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公开(公告)号：US6008941A
公开(公告)日：1999-12-28
申请号：US833220
申请日：1997-04-14
CPC分类号： G02B5/1842 , G02B27/20 , G02B27/58 , G02B5/1871 , G02B5/32 , Y10S359/90
摘要： A soft aperture allows gradual attenuation of a light beam dependent upon its location away from the center of a diffractive optical element. Such an optical element may be provided by decreasing a number of phase levels, increasing a number of phase levels, increasing a density of metal patches or diffractive gratings, or decreasing a blaze height and/or duty cycle, all radially from the center. Alternatively, the soft aperture may be defined by a photolithographic process. Such a soft aperture is particularly useful in aiding circularizing of an elliptical light beam. The soft aperture may be used alone or integrated with other optical elements.
摘要翻译： 软孔径允许光束的逐渐衰减取决于其远离衍射光学元件的中心的位置。 这样的光学元件可以通过减少多个相位级别，增加相位级数，增加金属片或衍射光栅的密度，或者从中心径向减小火焰高度和/或占空比来提供。 或者，软孔可以通过光刻工艺来限定。 这样的软孔径对于辅助椭圆光束的圆化是特别有用的。 软孔可以单独使用或与其它光学元件集成。
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公开(公告)号：US20120229908A1
公开(公告)日：2012-09-13
申请号：US13481329
申请日：2012-05-25
申请人： Gregory J. Kintz , Michael R. Feldman , James E. Morris , Paul Elliott , David Keller , W. Hudson Welch , David Ovrutsky , Jeremy Huddleston , Mark Hiatt
发明人： Gregory J. Kintz , Michael R. Feldman , James E. Morris , Paul Elliott , David Keller , W. Hudson Welch , David Ovrutsky , Jeremy Huddleston , Mark Hiatt
IPC分类号： G02B27/12
CPC分类号： B29D11/00365 , B29D11/00413 , G02B3/0031 , G02B3/0062
摘要： An optics block includes a substrate having first and second opposing surfaces, the substrate being a first material, a plurality of through holes extending in the substrate between the first and second opposing surface, a second material, different than the first material, filling a portion of the through holes and extending on a portion of the first surface of the substrate outside the through holes, and a first lens structure in the second material and corresponding to each of the through holes.
摘要翻译： 光学块包括具有第一和第二相对表面的基板，所述基板是第一材料，在所述基板中在所述第一和第二相对表面之间延伸的多个通孔，与所述第一材料不同的第二材料， 的通孔，并且在通孔的外部的基板的第一表面的一部分上延伸，以及在第二材料中的第一透镜结构，并且对应于每个通孔。
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公开(公告)号：US08189277B2
公开(公告)日：2012-05-29
申请号：US13050354
申请日：2011-03-17
申请人： Gregory J. Kintz , Michael R. Feldman , James E. Morris , Paul Elliott , David Keller , W. Hudson Welch , David Ovrutsky , Jeremy Huddleston , Mark Hiatt
发明人： Gregory J. Kintz , Michael R. Feldman , James E. Morris , Paul Elliott , David Keller , W. Hudson Welch , David Ovrutsky , Jeremy Huddleston , Mark Hiatt
IPC分类号： G02B27/00
CPC分类号： B29D11/00365 , B29D11/00413 , G02B3/0031 , G02B3/0062
摘要： An optics block includes a substrate having first and second opposing surfaces, the substrate being a first material, a plurality of through holes extending in the substrate between the first and second opposing surface, a second material, different than the first material, filling a portion of the through holes and extending on a portion of the first surface of the substrate outside the through holes, and a first lens structure in the second material and corresponding to each of the through holes.
摘要翻译： 光学块包括具有第一和第二相对表面的基板，所述基板是第一材料，在所述基板中在所述第一和第二相对表面之间延伸的多个通孔，与所述第一材料不同的第二材料， 的通孔，并且在通孔的外部的基板的第一表面的一部分上延伸，以及在第二材料中的第一透镜结构，并且对应于每个通孔。
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公开(公告)号：US5202775A
公开(公告)日：1993-04-13
申请号：US787075
申请日：1991-11-04
摘要： A radially symmetric iterative discrete on-axis hologram has a high diffraction efficiency for a correspondingly small f-number. The radially symmetric hologram has a plurality of concentric constant radial phase fringes. Each fringe has a predetermined plurality of radial phase rings and each fringe corresponds to a predetermined plurality of radial phase transition points and a radial phase value between the radial phase transition points. The radially symmetric iterative discrete on-axis hologram also has radial phase fringes with a predetermined number of phase levels, at least two adjacent fringes have a phase level difference which is greater than one and less than the predetermined number minus one. The radially symmetric iterative discrete on-axis hologram is fabricated by determining a plurality of concentric fringes of constant phase with a plurality of radial phase transition points and radial phase values between the radial phase transition points for each concentric fringe. The plurality of radial phase transition points and radial phase values are repeatedly optimized to obtain optimized radial phase transition points and optimized radial phase values which maximize the diffraction efficiency. A radially symmetric hologram with concentric fringes of constant radial phase corresponding to the optimized radial phase transition points and the optimized radial phase values is then fabricated using known fabrication techniques.
摘要翻译： 径向对称迭代离散的轴上全息图对于相应小的f数具有高的衍射效率。 径向对称全息图具有多个同心恒定的径向相位条纹。 每个条纹具有预定的多个径向相位环，并且每个条纹对应于预定的多个径向相变点和径向相变点之间的径向相位值。 径向对称的迭代离散轴上全息图还具有预定数量的相位电平的径向相位条纹，至少两个相邻边缘具有大于1且小于预定数量减去1的相位电平差。 径向对称的迭代离散的全轴全息图是通过确定多个恒定相位的同心条纹与多个径向相变点和每个同心条纹的径向相变点之间的径向相位值来制造的。 多个径向相变点和径向相位值被重复优化以获得最大化的衍射效率的优化的径向相变点和优化的径向相位值。 然后使用已知的制造技术制造具有对应于优化的径向相变点和优化的径向相位值的恒定径向相位的同心条纹的径向对称全息图。
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