摘要:
A surface-coated cutting tool has a hard coating layer and a tool body, which is coated with a lower layer including a TiCN layer having at least an NaCl type face-centered cubic crystal structure and an upper layer formed of a TiAlCN layer having a single phase crystal structure of NaCl type face-centered cubic crystals or a mixed phase crystal structure of NaCl type face-centered cubic crystals and hexagonal crystals. The tool body is further coated with an outermost surface layer including an Al2O3 layer, when the layer of a complex nitride or complex carbonitride of Ti and Al is expressed by the composition formula: (Ti1-xAlx)(CyN1-y), the average amount Xave of Al in Ti and Al and the average amount Yave of C in C and N (both Xave and Yave are atomic ratios) respectively satisfy 0.60≦Xave≦0.95 and 0≦Yave≦0.005.
摘要:
A chemical vapor deposition apparatus includes: a reaction chamber in which deposition materials are housed a gas supply tube provided in the reaction chamber and a rotary drive device that rotates the gas supply tube about a rotation axis. A an inside of the gas supply tube is divided into a first gas flowing section and a second gas flowing section both of which extend along the rotation axis. A first gas ejection port ejects a first gas flowing in the first gas flowing section into the reaction chamber, and a second gas ejection port ejects a second gas flowing in the second gas flowing section into the reaction chamber. The first port and the second port form an ejection port pair in a plane perpendicular to the rotation axis.
摘要:
A chemical vapor deposition apparatus includes a reaction chamber in which a deposition material is accommodated, a gas supply tube provided in the reaction chamber, and a rotary drive device that rotates the gas supply tube around a rotation axis in the reaction chamber, in which an inside of the gas supply tube is partitioned into the first and second gas flowing sections extending along the rotation axis, a set of gas ejection ports including at least three or more the gas ejection ports disposed, lying next to each other in the circumferential direction is installed on the tube wall, and the set of gas ejection ports includes at least one of a first gas ejection port ejecting the first gas flowing through the first gas flowing section, and at least one of the second gas ejection port ejecting a second gas flowing through the second gas flowing section.
摘要:
In a surface-coated cutting tool, a hard coating layer composed of a lower layer and an upper layer is deposited on a surface of a tool body made of a WC-based cemented carbide or a TiCN-based cermet. The lower layer has at least one Ti compound layer made of a TiCN layer and the upper layer is made of an α-type Al2O3 layer. In a case where, regarding Al2O3 crystal grains of the entire upper layer, a constituent atom-sharing lattice point distribution is measured, a highest peak is present in Σ3, and a distribution ratio of Σ3 is 70% or more. A ratio of a Σ3-coincidence grain boundary continuing from an interface between the lower layer and the upper layer to an outermost surface of the upper layer is 60% or more of a Σ3-coincidence grain boundary of the upper layer.
摘要:
The hard coating layer includes at least a complex nitride or complex carbonitride layer expressed by the composition formula (Ti1-xAlx)(CyN1-y). The average Al content ratio xavg the average C content ratio yavg satisfy 0.60≦xavg≦0.95 and 0≦yavg≦0.005, respectively, each of the xavg and yavg is in atomic ratio. The crystal grains constituting the complex nitride or complex carbonitride layer include a crystal grain having the NaCl face-centered cubic structure. A predetermined average crystal grain misorientation exists in the crystal grains having the NaCl face-centered cubic structure.
摘要:
A surface-coated cutting tool includes a tool body made of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet and a hard coating layer that includes a lower layer and an upper layer and formed on the tool body. The lower layer is composed of a Ti compound layer including at least a TiCN layer. The upper layer includes an Al2O3 layer having an α-type crystal structure. In the Al2O3 crystal grains of the upper layer, when a coincidence grain boundary distribution graph is measured, sulfur is segregated in a grain boundary of Σ31 or more and a grain boundary length thereof is 20% to 50% relative to the whole grain boundary length in the constituent atom sharing lattice point form of Σ3 or more. Absolute values of residual stress of a flank face and a rake face are 100 MPa or less.
摘要:
The hard coating layer of the cutting tool includes a complex nitride or complex carbonitride layer expressed by the composition formula: (Ti1-xAlx)(CyN1-y). xavg and yavg satisfy 0.60≤xavg≤0.95 and 0≤yavg≤0.005. xavg is an average content ratio of Al in a total amount of Ti and Al, and yavg is an average content ratio of C in a total amount of C and N. Some crystal grains composing the complex nitride or complex carbonitride layer have a cubic structure. In crystal grains having the cubic structure, the average crystal grain misorientaion is 1 degree or more; or 2 degrees or more, based on analysis of the polished surface perpendicular to a surface of the layer. A peak exists in 1-2 degrees of the average crystal grain misorientation in the frequency distribution of the average crystal grain misorientation and the area ratio.
摘要:
A coated tool has a hard coating layer including a layer of a complex nitride or complex carbonitride expressed by (Ti1-xAlx)(CyN1-y). A periodic concentration variation is present in crystal grains of a complex nitride or complex carbonitride having a NaCl type face-centered cubic structure in the layer. The periodic concentration variation direction includes a direction at 30 degrees or less with respect to a surface of a tool body. An area percentage of a periodic concentration variation of Ti and Al is 40% or more. The concentration variation period is 1 to 10 nm. A difference between an average of local maximums and an average of local minimums of a periodically varying amount x of Al is 0.01 to 0.1. Fine crystal grains having a hexagonal structure with an average grain size of 0.01 to 0.3 μm are present at grain boundaries in 5% or less of the area.
摘要:
A surface-coated cutting tool with a hard coating layer is provided. The hard coating layer includes at least a complex nitride or carbonitride layer (2) expressed by a composition formula: (Ti1-x-yAlxMey)(CzN1-z), Me being an element selected from Si, Zr, B, V, and Cr. The average content ratio Xavg, the average content ratio Yavg, and the average content ratio Zavg satisfy 0.60≦Xavg, 0.005≦Yavg≦0.10, 0≦Zavg≦0.005, and 0.605≦xavg+yavg≦0.95. There are crystal grains having a cubic structure in the crystal grains constituting the complex nitride or carbonitride layer (2). A predetermined periodic content ratio change of Ti, Al and Me exists in the crystal grains having the cubic structure.
摘要:
Provided is a coated tool in which a hard coating layer has excellent hardness and toughness and exhibits chipping resistance and defect resistance during long-term use. The hard coating layer includes at least a layer of a complex nitride or complex carbonitride expressed by the composition formula: (Ti1-x-yAlxMey) (CzN1-x) (here, Me is one element selected from among Si, Zr, B, V, and Cr), an average amount Xavg of Al, an average amount Yavg of Me, and an average amount Zavg of C satisfy 0.60≦Xavg, 0.005≦Yavg≦0.10, 0≦Zavg≦0.005, and 0.605≦Xavg+Yavg≦0.95, crystal grains having a cubic structure are present in crystal grains constituting the layer of a complex nitride or complex carbonitride, and in the crystal grains having a cubic structure, a predetermined periodic concentration variation of Ti, Al, and Me is present, whereby the problems are solved.